{"id":"https://openalex.org/W3087505320","doi":"https://doi.org/10.1109/vlsisoc.2011.6081639","title":"Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS","display_name":"Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS","publication_year":2011,"publication_date":"2011-10-01","ids":{"openalex":"https://openalex.org/W3087505320","doi":"https://doi.org/10.1109/vlsisoc.2011.6081639","mag":"3087505320"},"language":"en","primary_location":{"id":"doi:10.1109/vlsisoc.2011.6081639","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsisoc.2011.6081639","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip","raw_type":"proceedings-article"},"type":"book-chapter","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045184002","display_name":"Toshiyuki Tsuchiya","orcid":"https://orcid.org/0000-0002-7846-5831"},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Toshiyuki Tsuchiya","raw_affiliation_strings":["Department of Micro Engineering, Kyoto University, Kyoto, Japan","Department of Micro-Engineering, Kyoto University, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]},{"raw_affiliation_string":"Department of Micro-Engineering, Kyoto University, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009842707","display_name":"Hiroyuki Tokusaki","orcid":null},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroyuki Tokusaki","raw_affiliation_strings":["Department of Micro Engineering, Kyoto University, Kyoto, Japan","Department of Micro-Engineering, Kyoto University, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]},{"raw_affiliation_string":"Department of Micro-Engineering, Kyoto University, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081234240","display_name":"Yoshikazu Hirai","orcid":"https://orcid.org/0000-0003-0835-7314"},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshikazu Hirai","raw_affiliation_strings":["Department of Micro Engineering, Kyoto University, Kyoto, Japan","Department of Micro-Engineering, Kyoto University, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]},{"raw_affiliation_string":"Department of Micro-Engineering, Kyoto University, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088979644","display_name":"Koji Sugano","orcid":"https://orcid.org/0000-0002-0780-0110"},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koji Sugano","raw_affiliation_strings":["Department of Micro Engineering, Kyoto University, Kyoto, Japan","Department of Micro-Engineering, Kyoto University, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]},{"raw_affiliation_string":"Department of Micro-Engineering, Kyoto University, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064074469","display_name":"Osamu Tabata","orcid":"https://orcid.org/0000-0002-9192-0544"},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Osamu Tabata","raw_affiliation_strings":["Department of Micro Engineering, Kyoto University, Kyoto, Japan","Department of Micro-Engineering, Kyoto University, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]},{"raw_affiliation_string":"Department of Micro-Engineering, Kyoto University, Japan","institution_ids":["https://openalex.org/I22299242"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5045184002"],"corresponding_institution_ids":["https://openalex.org/I22299242"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.38691608,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"208","last_page":"213"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.992900013923645,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.980400025844574,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/equivalent-circuit","display_name":"Equivalent circuit","score":0.6156024932861328},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.6038326025009155},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.5855768322944641},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5546417236328125},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.507375180721283},{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.4981856346130371},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.47929614782333374},{"id":"https://openalex.org/keywords/transient","display_name":"Transient (computer programming)","score":0.4571346044540405},{"id":"https://openalex.org/keywords/spring","display_name":"Spring (device)","score":0.43134790658950806},{"id":"https://openalex.org/keywords/amplitude","display_name":"Amplitude","score":0.4298100471496582},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3900487422943115},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.37718865275382996},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.35446712374687195},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3190016448497772},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.30136483907699585},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2821052074432373},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.25518596172332764},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.21034592390060425},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.15401220321655273},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.08264410495758057}],"concepts":[{"id":"https://openalex.org/C23572009","wikidata":"https://www.wikidata.org/wiki/Q964981","display_name":"Equivalent circuit","level":3,"score":0.6156024932861328},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.6038326025009155},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.5855768322944641},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5546417236328125},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.507375180721283},{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.4981856346130371},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.47929614782333374},{"id":"https://openalex.org/C2780799671","wikidata":"https://www.wikidata.org/wiki/Q17087362","display_name":"Transient (computer programming)","level":2,"score":0.4571346044540405},{"id":"https://openalex.org/C2778712887","wikidata":"https://www.wikidata.org/wiki/Q102836","display_name":"Spring (device)","level":2,"score":0.43134790658950806},{"id":"https://openalex.org/C180205008","wikidata":"https://www.wikidata.org/wiki/Q159190","display_name":"Amplitude","level":2,"score":0.4298100471496582},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3900487422943115},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.37718865275382996},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.35446712374687195},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3190016448497772},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.30136483907699585},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2821052074432373},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.25518596172332764},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.21034592390060425},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.15401220321655273},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.08264410495758057},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/vlsisoc.2011.6081639","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsisoc.2011.6081639","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip","raw_type":"proceedings-article"},{"id":"mag:3087505320","is_oa":false,"landing_page_url":"https://jglobal.jst.go.jp/en/detail?JGLOBAL_ID=201902213026422356","pdf_url":null,"source":{"id":"https://openalex.org/S4210185096","display_name":"IFIP advances in information and communication technology","issn_l":"1868-422X","issn":["1868-422X","1868-4238"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":"IFIP advances in information and communication technology","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/16","score":0.7200000286102295,"display_name":"Peace, Justice and strong institutions"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2060266606","https://openalex.org/W2091774986","https://openalex.org/W2092911180","https://openalex.org/W2101639159","https://openalex.org/W2140590741","https://openalex.org/W2170452733"],"related_works":["https://openalex.org/W2327326471","https://openalex.org/W3192312468","https://openalex.org/W2083701651","https://openalex.org/W3177489018","https://openalex.org/W377471323","https://openalex.org/W2570717913","https://openalex.org/W3180576458","https://openalex.org/W3010721247","https://openalex.org/W3009926026","https://openalex.org/W2752459073","https://openalex.org/W2746223540","https://openalex.org/W1630163900","https://openalex.org/W2850532082","https://openalex.org/W2735449291","https://openalex.org/W2753083616","https://openalex.org/W2020002563","https://openalex.org/W2378589287","https://openalex.org/W2070688360","https://openalex.org/W2136273327","https://openalex.org/W2756580320"],"abstract_inverted_index":{"The":[0,19],"paper":[1],"presents":[2],"a":[3,25],"new":[4],"equivalent":[5],"circuit":[6,63,72,103],"model":[7,20,38,58,78],"of":[8,15],"electrostatic":[9],"comb":[10,77],"transducers":[11],"for":[12],"large-scale":[13],"integration":[14],"MEMS":[16],"into":[17],"LSI.":[18],"detects":[21],"the":[22,30,34,37,57,86,112],"displacement":[23],"using":[24],"dummy":[26],"spring":[27],"to":[28,81],"express":[29],"current":[31],"induced":[32],"by":[33],"movement,":[35],"and":[36,85,88,91,111],"parameters":[39,50],"can":[40],"be":[41],"derived":[42],"from":[43,48,61],"only":[44],"its":[45],"dimensions":[46],"not":[47],"external":[49],"(acting":[51],"force,":[52],"applied":[53,80],"voltage).":[54],"In":[55],"addition,":[56],"is":[59,67],"composed":[60],"basic":[62,82],"components.":[64],"Therefore":[65],"it":[66],"easily":[68],"utilized":[69],"in":[70,97],"conventional":[71],"simulation":[73],"software.":[74],"In-plane":[75],"two-degree-of-freedom":[76],"was":[79],"SOI":[83],"resonator":[84],"measured":[87],"simulated":[89],"electrical":[90],"mechanical":[92],"properties":[93],"showed":[94,115],"good":[95,116],"agreement":[96,117],"each":[98],"other.":[99],"A":[100],"simple":[101],"oscillating":[102],"with":[104],"constant":[105],"amplitude":[106],"control":[107],"has":[108],"been":[109],"tested":[110],"transient":[113],"responses":[114],"as":[118],"well.":[119]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}