{"id":"https://openalex.org/W3048505577","doi":"https://doi.org/10.1109/vlsicircuits18222.2020.9162806","title":"A Reconfigurable High-Bandwidth CMOS-MEMS Capacitive Accelerometer Array with High-g Measurement Capability and Low Bias Instability","display_name":"A Reconfigurable High-Bandwidth CMOS-MEMS Capacitive Accelerometer Array with High-g Measurement Capability and Low Bias Instability","publication_year":2020,"publication_date":"2020-06-01","ids":{"openalex":"https://openalex.org/W3048505577","doi":"https://doi.org/10.1109/vlsicircuits18222.2020.9162806","mag":"3048505577"},"language":"en","primary_location":{"id":"doi:10.1109/vlsicircuits18222.2020.9162806","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsicircuits18222.2020.9162806","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE Symposium on VLSI Circuits","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100693572","display_name":"Xiaoliang Li","orcid":"https://orcid.org/0000-0002-2653-652X"},"institutions":[{"id":"https://openalex.org/I74973139","display_name":"Carnegie Mellon University","ror":"https://ror.org/05x2bcf33","country_code":"US","type":"education","lineage":["https://openalex.org/I74973139"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Xiaoliang Li","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA","institution_ids":["https://openalex.org/I74973139"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085447396","display_name":"Vincent P. J. Chung","orcid":"https://orcid.org/0000-0002-2851-2820"},"institutions":[{"id":"https://openalex.org/I74973139","display_name":"Carnegie Mellon University","ror":"https://ror.org/05x2bcf33","country_code":"US","type":"education","lineage":["https://openalex.org/I74973139"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Vincent P. J. Chung","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA, USA","institution_ids":["https://openalex.org/I74973139"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069513044","display_name":"Metin G. Guney","orcid":"https://orcid.org/0000-0002-5433-356X"},"institutions":[{"id":"https://openalex.org/I74973139","display_name":"Carnegie Mellon University","ror":"https://ror.org/05x2bcf33","country_code":"US","type":"education","lineage":["https://openalex.org/I74973139"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Metin G. Guney","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA","institution_ids":["https://openalex.org/I74973139"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085266218","display_name":"Tamal Mukherjee","orcid":"https://orcid.org/0000-0001-5907-036X"},"institutions":[{"id":"https://openalex.org/I74973139","display_name":"Carnegie Mellon University","ror":"https://ror.org/05x2bcf33","country_code":"US","type":"education","lineage":["https://openalex.org/I74973139"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tamal Mukherjee","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA","institution_ids":["https://openalex.org/I74973139"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075256715","display_name":"Gary K. Fedder","orcid":"https://orcid.org/0000-0002-2380-5210"},"institutions":[{"id":"https://openalex.org/I74973139","display_name":"Carnegie Mellon University","ror":"https://ror.org/05x2bcf33","country_code":"US","type":"education","lineage":["https://openalex.org/I74973139"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gary K. Fedder","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA","The Robotics Institute, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA","institution_ids":["https://openalex.org/I74973139"]},{"raw_affiliation_string":"The Robotics Institute, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA","institution_ids":["https://openalex.org/I74973139"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5023349550","display_name":"Jeyanandh Paramesh","orcid":"https://orcid.org/0000-0001-7108-9522"},"institutions":[{"id":"https://openalex.org/I74973139","display_name":"Carnegie Mellon University","ror":"https://ror.org/05x2bcf33","country_code":"US","type":"education","lineage":["https://openalex.org/I74973139"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jeyanandh Paramesh","raw_affiliation_strings":["Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania, USA","institution_ids":["https://openalex.org/I74973139"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5100693572"],"corresponding_institution_ids":["https://openalex.org/I74973139"],"apc_list":null,"apc_paid":null,"fwci":0.3082,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.56683435,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6993622779846191},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.6578450202941895},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6250419020652771},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.5864335298538208},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.5234267711639404},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.5122377276420593},{"id":"https://openalex.org/keywords/dynamic-range","display_name":"Dynamic range","score":0.5076166391372681},{"id":"https://openalex.org/keywords/offset","display_name":"Offset (computer science)","score":0.4911353290081024},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.481398344039917},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.477627694606781},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.458500474691391},{"id":"https://openalex.org/keywords/ranging","display_name":"Ranging","score":0.43689653277397156},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.4242263436317444},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4240248501300812},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4144333600997925},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4112810492515564},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3513602018356323},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.31495440006256104},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22950521111488342},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.15507322549819946}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6993622779846191},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.6578450202941895},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6250419020652771},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.5864335298538208},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.5234267711639404},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.5122377276420593},{"id":"https://openalex.org/C87133666","wikidata":"https://www.wikidata.org/wiki/Q1161699","display_name":"Dynamic range","level":2,"score":0.5076166391372681},{"id":"https://openalex.org/C175291020","wikidata":"https://www.wikidata.org/wiki/Q1156822","display_name":"Offset (computer science)","level":2,"score":0.4911353290081024},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.481398344039917},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.477627694606781},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.458500474691391},{"id":"https://openalex.org/C115051666","wikidata":"https://www.wikidata.org/wiki/Q6522493","display_name":"Ranging","level":2,"score":0.43689653277397156},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.4242263436317444},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4240248501300812},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4144333600997925},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4112810492515564},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3513602018356323},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.31495440006256104},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22950521111488342},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.15507322549819946},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsicircuits18222.2020.9162806","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsicircuits18222.2020.9162806","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2020 IEEE Symposium on VLSI Circuits","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4245472411","https://openalex.org/W2045042928","https://openalex.org/W4379746342","https://openalex.org/W2145387305","https://openalex.org/W2160325238","https://openalex.org/W2922271745","https://openalex.org/W2502505565","https://openalex.org/W2189387457","https://openalex.org/W1995523270","https://openalex.org/W756886103"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,92],"high-bandwidth":[4],"capacitive":[5],"accelerometer":[6,101],"array":[7,26],"that":[8],"is":[9,75],"fully":[10],"integrated":[11],"with":[12,32,42,48,82,112],"reconfigurable":[13],"readout":[14,46],"circuits":[15],"and":[16,51,61,98,118],"on-chip":[17],"distributed":[18],"temperature":[19],"sensors":[20],"for":[21],"environmental":[22],"monitoring.":[23],"A":[24,69],"parallel":[25],"of":[27,38],"338":[28],"transducer":[29,80],"cells,":[30],"each":[31],"low":[33,43,113],"proof":[34],"mass,":[35],"enables":[36,55],"measurement":[37,110],"high":[39],"shock":[40],"events":[41],"noise.":[44],"Reconfigurable":[45],"circuitry":[47],"continuous-time":[49],"low-g":[50],"switched-capacitor":[52],"high-g":[53,67,106],"modes":[54],"wide":[56],"dynamic":[57],"range":[58],"acceleration":[59],"detection":[60],"lowers":[62],"the":[63,79,100],"power":[64],"27.5X":[65],"in":[66,91],"mode.":[68],"coarse-fine":[70],"grain":[71],"offset":[72,81,120],"cancellation":[73],"technique":[74],"proposed":[76],"to":[77],"suppress":[78],"168X":[83],"better":[84],"tuning":[85],"resolution":[86],"than":[87],"conventional":[88],"techniques.":[89],"Implemented":[90],"standard":[93],"180":[94],"nm":[95],"CMOS":[96],"technology":[97],"post-processed,":[99],"achieves":[102],"118":[103],"kHz":[104],"bandwidth,":[105],"(>":[107],"10":[108],"kg)":[109],"capability,":[111],"bias":[114],"instability":[115],"(22":[116],"mg)":[117],"zeptofarad":[119],"suppression.":[121]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":2},{"year":2021,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}