{"id":"https://openalex.org/W4230190493","doi":"https://doi.org/10.1109/vlsic.2015.7231383","title":"Design and demonstration of reliability-aware Ge gate stacks with 0.5 nm EOT","display_name":"Design and demonstration of reliability-aware Ge gate stacks with 0.5 nm EOT","publication_year":2015,"publication_date":"2015-06-01","ids":{"openalex":"https://openalex.org/W4230190493","doi":"https://doi.org/10.1109/vlsic.2015.7231383"},"language":"en","primary_location":{"id":"doi:10.1109/vlsic.2015.7231383","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsic.2015.7231383","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 Symposium on VLSI Circuits (VLSI Circuits)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5043408108","display_name":"C. Lu","orcid":null},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"C. Lu","raw_affiliation_strings":["Department of Materials Engineering, The University, Tokyo","JST-CREST, Hongo, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Engineering, The University, Tokyo","institution_ids":[]},{"raw_affiliation_string":"JST-CREST, Hongo, Tokyo, Japan","institution_ids":["https://openalex.org/I4210086780"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032396276","display_name":"C. H. Lee","orcid":null},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"C. H. Lee","raw_affiliation_strings":["Department of Materials Engineering, The University, Tokyo","JST-CREST, Hongo, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Engineering, The University, Tokyo","institution_ids":[]},{"raw_affiliation_string":"JST-CREST, Hongo, Tokyo, Japan","institution_ids":["https://openalex.org/I4210086780"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021720680","display_name":"Tomonori Nishimura","orcid":"https://orcid.org/0000-0002-8000-5164"},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Nishimura","raw_affiliation_strings":["Department of Materials Engineering, The University, Tokyo","JST-CREST, Hongo, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Engineering, The University, Tokyo","institution_ids":[]},{"raw_affiliation_string":"JST-CREST, Hongo, Tokyo, Japan","institution_ids":["https://openalex.org/I4210086780"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5033762025","display_name":"Akira Toriumi","orcid":null},"institutions":[{"id":"https://openalex.org/I4210086780","display_name":"Japan Science and Technology Agency","ror":"https://ror.org/00097mb19","country_code":"JP","type":"government","lineage":["https://openalex.org/I1319490839","https://openalex.org/I4210086780"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"A. Toriumi","raw_affiliation_strings":["Department of Materials Engineering, The University, Tokyo","JST-CREST, Hongo, Tokyo, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Engineering, The University, Tokyo","institution_ids":[]},{"raw_affiliation_string":"JST-CREST, Hongo, Tokyo, Japan","institution_ids":["https://openalex.org/I4210086780"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210086780"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":"40","issue":null,"first_page":"T18","last_page":"T19"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.7265008687973022},{"id":"https://openalex.org/keywords/stack","display_name":"Stack (abstract data type)","score":0.6795835494995117},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.43709760904312134},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.35514652729034424},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.18856477737426758},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.06045505404472351}],"concepts":[{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.7265008687973022},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.6795835494995117},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.43709760904312134},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.35514652729034424},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18856477737426758},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.06045505404472351},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsic.2015.7231383","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsic.2015.7231383","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2015 Symposium on VLSI Circuits (VLSI Circuits)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2020563893"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W2380576232","https://openalex.org/W4390401159","https://openalex.org/W2744391499","https://openalex.org/W2800070131"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"a":[3],"novel":[4],"material/process-based":[5],"design":[6],"for":[7,12],"reliability-aware":[8],"Ge":[9,20,58],"gate":[10,21,59],"stack":[11,60],"the":[13,27,33,39,50],"first":[14],"time.":[15],"Initially":[16],"good":[17],"characteristics":[18],"of":[19,41,52],"stacks":[22],"do":[23],"not":[24],"necessarily":[25],"guarantee":[26],"long-term":[28],"device":[29],"reliability.":[30],"To":[31],"overcome":[32],"big":[34],"hurdle,":[35],"we":[36],"have":[37],"investigated":[38],"stability":[40],"GeO":[42],"<sub":[43,70],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[44,71],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[45],"network":[46],"as":[47,49],"well":[48],"formation":[51],"new":[53],"high-k.":[54],"The":[55],"very":[56],"robust":[57],"with":[61],"both":[62],"0.5":[63],"nm":[64],"EOT":[65],"and":[66],"sufficiently":[67],"low":[68],"D":[69],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">it</sub>":[72],"is":[73],"demonstrated.":[74]},"counts_by_year":[{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}