{"id":"https://openalex.org/W1974465613","doi":"https://doi.org/10.1109/vlsic.2012.6243771","title":"A 1.2V 8.3nJ energy-efficient CMOS humidity sensor for RFID applications","display_name":"A 1.2V 8.3nJ energy-efficient CMOS humidity sensor for RFID applications","publication_year":2012,"publication_date":"2012-06-01","ids":{"openalex":"https://openalex.org/W1974465613","doi":"https://doi.org/10.1109/vlsic.2012.6243771","mag":"1974465613"},"language":"en","primary_location":{"id":"doi:10.1109/vlsic.2012.6243771","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsic.2012.6243771","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 Symposium on VLSI Circuits (VLSIC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074328280","display_name":"Zhichao Tan","orcid":"https://orcid.org/0000-0002-4097-5123"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Zhichao Tan","raw_affiliation_strings":["Electronic Instrumentation Laboratory, Delft University of Technology, Delft, Netherlands","[Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Instrumentation Laboratory, Delft University of Technology, Delft, Netherlands","institution_ids":["https://openalex.org/I98358874"]},{"raw_affiliation_string":"[Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands]","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088759343","display_name":"Youngcheol Chae","orcid":"https://orcid.org/0000-0002-1618-169X"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Youngcheol Chae","raw_affiliation_strings":["Electronic Instrumentation Laboratory, Delft University of Technology, Delft, Netherlands","[Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Instrumentation Laboratory, Delft University of Technology, Delft, Netherlands","institution_ids":["https://openalex.org/I98358874"]},{"raw_affiliation_string":"[Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands]","institution_ids":["https://openalex.org/I98358874"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044280749","display_name":"R. Daamen","orcid":null},"institutions":[{"id":"https://openalex.org/I109147379","display_name":"NXP (Netherlands)","ror":"https://ror.org/059be4e97","country_code":"NL","type":"company","lineage":["https://openalex.org/I109147379"]},{"id":"https://openalex.org/I4210134434","display_name":"NXP (Belgium)","ror":"https://ror.org/031v4g827","country_code":"BE","type":"company","lineage":["https://openalex.org/I109147379","https://openalex.org/I4210134434"]}],"countries":["BE","NL"],"is_corresponding":false,"raw_author_name":"Roel Daamen","raw_affiliation_strings":["Central Research and Development, NXP Semiconductors, Leuven, Belgium","NXP Semiconductors, Central R&D, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, NXP Semiconductors, Leuven, Belgium","institution_ids":["https://openalex.org/I4210134434"]},{"raw_affiliation_string":"NXP Semiconductors, Central R&D, Leuven, Belgium","institution_ids":["https://openalex.org/I109147379"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036936503","display_name":"A. Humbert","orcid":null},"institutions":[{"id":"https://openalex.org/I109147379","display_name":"NXP (Netherlands)","ror":"https://ror.org/059be4e97","country_code":"NL","type":"company","lineage":["https://openalex.org/I109147379"]},{"id":"https://openalex.org/I4210134434","display_name":"NXP (Belgium)","ror":"https://ror.org/031v4g827","country_code":"BE","type":"company","lineage":["https://openalex.org/I109147379","https://openalex.org/I4210134434"]}],"countries":["BE","NL"],"is_corresponding":false,"raw_author_name":"Aurelie Humbert","raw_affiliation_strings":["Central Research and Development, NXP Semiconductors, Leuven, Belgium","NXP Semiconductors, Central R&D, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, NXP Semiconductors, Leuven, Belgium","institution_ids":["https://openalex.org/I4210134434"]},{"raw_affiliation_string":"NXP Semiconductors, Central R&D, Leuven, Belgium","institution_ids":["https://openalex.org/I109147379"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5104017591","display_name":"Y.V. Ponomarev","orcid":null},"institutions":[{"id":"https://openalex.org/I109147379","display_name":"NXP (Netherlands)","ror":"https://ror.org/059be4e97","country_code":"NL","type":"company","lineage":["https://openalex.org/I109147379"]},{"id":"https://openalex.org/I4210134434","display_name":"NXP (Belgium)","ror":"https://ror.org/031v4g827","country_code":"BE","type":"company","lineage":["https://openalex.org/I109147379","https://openalex.org/I4210134434"]}],"countries":["BE","NL"],"is_corresponding":false,"raw_author_name":"Youri V. Ponomarev","raw_affiliation_strings":["Central Research and Development, NXP Semiconductors, Leuven, Belgium","NXP Semiconductors, Central R&D, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Central Research and Development, NXP Semiconductors, Leuven, Belgium","institution_ids":["https://openalex.org/I4210134434"]},{"raw_affiliation_string":"NXP Semiconductors, Central R&D, Leuven, Belgium","institution_ids":["https://openalex.org/I109147379"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5019433498","display_name":"Michiel A. P. Pertijs","orcid":"https://orcid.org/0000-0002-9891-4374"},"institutions":[{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Michiel A.P. Pertijs","raw_affiliation_strings":["Electronic Instrumentation Laboratory, Delft University of Technology, Delft, Netherlands","[Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Instrumentation Laboratory, Delft University of Technology, Delft, Netherlands","institution_ids":["https://openalex.org/I98358874"]},{"raw_affiliation_string":"[Electronic Instrumentation Laboratory, Delft University of Technology, The Netherlands]","institution_ids":["https://openalex.org/I98358874"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":4.2858,"has_fulltext":false,"cited_by_count":25,"citation_normalized_percentile":{"value":0.9382716,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"24","last_page":"25"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.8081269264221191},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.7133249044418335},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.6464551687240601},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.6297661066055298},{"id":"https://openalex.org/keywords/inverter","display_name":"Inverter","score":0.5677763223648071},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5623469352722168},{"id":"https://openalex.org/keywords/wireless-sensor-network","display_name":"Wireless sensor network","score":0.49381670355796814},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.47398415207862854},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.46283912658691406},{"id":"https://openalex.org/keywords/energy-consumption","display_name":"Energy consumption","score":0.4171689748764038},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3816126585006714},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.30233556032180786},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.28303495049476624},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1492781937122345},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.12832272052764893},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.12488329410552979}],"concepts":[{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.8081269264221191},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.7133249044418335},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.6464551687240601},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.6297661066055298},{"id":"https://openalex.org/C11190779","wikidata":"https://www.wikidata.org/wiki/Q664575","display_name":"Inverter","level":3,"score":0.5677763223648071},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5623469352722168},{"id":"https://openalex.org/C24590314","wikidata":"https://www.wikidata.org/wiki/Q336038","display_name":"Wireless sensor network","level":2,"score":0.49381670355796814},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.47398415207862854},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.46283912658691406},{"id":"https://openalex.org/C2780165032","wikidata":"https://www.wikidata.org/wiki/Q16869822","display_name":"Energy consumption","level":2,"score":0.4171689748764038},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3816126585006714},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.30233556032180786},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.28303495049476624},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1492781937122345},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.12832272052764893},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.12488329410552979},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/vlsic.2012.6243771","is_oa":false,"landing_page_url":"https://doi.org/10.1109/vlsic.2012.6243771","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2012 Symposium on VLSI Circuits (VLSIC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8999999761581421,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W1965112009","https://openalex.org/W2056953745","https://openalex.org/W2065808645","https://openalex.org/W2067183422","https://openalex.org/W2111733621","https://openalex.org/W2134489758","https://openalex.org/W2134904817","https://openalex.org/W2166948256"],"related_works":["https://openalex.org/W3014521742","https://openalex.org/W3212531278","https://openalex.org/W2099626417","https://openalex.org/W2019514496","https://openalex.org/W3129126528","https://openalex.org/W98453623","https://openalex.org/W2354552488","https://openalex.org/W2316410500","https://openalex.org/W2340624421","https://openalex.org/W2069809145"],"abstract_inverted_index":{"A":[0],"CMOS":[1,15],"fully-integrated":[2],"humidity":[3,60],"sensor":[4,8],"for":[5],"a":[6,20,26,43,53,65],"RFID":[7],"platform":[9],"has":[10],"been":[11],"realized":[12],"in":[13,46,70],"0.16\u03bcm":[14],"technology.":[16],"It":[17],"consists":[18],"of":[19,67,73,83],"top-metal":[21],"finger":[22],"capacitor,":[23],"covered":[24],"by":[25],"humidity-sensitive":[27],"polyimide":[28],"layer,":[29],"and":[30],"an":[31,80],"energy-efficient":[32],"inverter-based":[33],"capacitance-to-digital":[34],"converter":[35],"(CDC).":[36],"Measurements":[37],"show":[38],"that":[39],"the":[40,58,71],"CDC":[41],"performs":[42],"12.5-bit":[44],"conversion":[45],"0.8ms":[47],"while":[48],"consuming":[49],"only":[50,84],"8.6\u03bcA":[51],"from":[52],"1.2V":[54],"supply.":[55],"Together":[56],"with":[57],"co-integrated":[59],"sensor,":[61],"this":[62],"translates":[63],"into":[64],"resolution":[66],"0.05%":[68],"RH":[69,75],"range":[72],"30%":[74],"to":[76],"90%":[77],"RH,":[78],"at":[79],"energy":[81],"consumption":[82],"8.3nJ":[85],"per":[86],"measurement.":[87]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":3},{"year":2014,"cited_by_count":8},{"year":2013,"cited_by_count":4},{"year":2012,"cited_by_count":2}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}