{"id":"https://openalex.org/W4231343630","doi":"https://doi.org/10.1109/tvlsi.2017.2761850","title":"Provably Good Max\u2013Min- $m$ -Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication","display_name":"Provably Good Max\u2013Min- $m$ -Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication","publication_year":2017,"publication_date":"2017-10-31","ids":{"openalex":"https://openalex.org/W4231343630","doi":"https://doi.org/10.1109/tvlsi.2017.2761850"},"language":"en","primary_location":{"id":"doi:10.1109/tvlsi.2017.2761850","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tvlsi.2017.2761850","pdf_url":null,"source":{"id":"https://openalex.org/S37538908","display_name":"IEEE Transactions on Very Large Scale Integration (VLSI) Systems","issn_l":"1063-8210","issn":["1063-8210","1557-9999"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Very Large Scale Integration (VLSI) Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100748024","display_name":"Yao-Wen Chang","orcid":"https://orcid.org/0000-0001-8838-2653"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Zhi-Wen Lin","raw_affiliation_strings":["Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0001-8838-2653","affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065439030","display_name":"Shao\u2010Yun Fang","orcid":"https://orcid.org/0000-0001-6675-2676"},"institutions":[{"id":"https://openalex.org/I154864474","display_name":"National Taiwan University of Science and Technology","ror":"https://ror.org/00q09pe49","country_code":"TW","type":"education","lineage":["https://openalex.org/I154864474"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Shao-Yun Fang","raw_affiliation_strings":["Department of Electrical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0001-6675-2676","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I154864474"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018371636","display_name":"Yao\u2010Wen Chang","orcid":"https://orcid.org/0000-0002-0564-5719"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]},{"id":"https://openalex.org/I4210086894","display_name":"Research Center for Information Technology Innovation, Academia Sinica","ror":"https://ror.org/000zgvm20","country_code":"TW","type":"facility","lineage":["https://openalex.org/I4210086894","https://openalex.org/I84653119"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yao-Wen Chang","raw_affiliation_strings":["Department of Electrical Engineering, Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","Research Center for Information Technology Innovation, Academia Sinica, Taipei, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"Research Center for Information Technology Innovation, Academia Sinica, Taipei, Taiwan","institution_ids":["https://openalex.org/I4210086894"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020049483","display_name":"Wei-Cheng Rao","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Wei-Cheng Rao","raw_affiliation_strings":["Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029656275","display_name":"Chieh-Hsiung Kuan","orcid":"https://orcid.org/0000-0002-4438-5243"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chieh-Hsiung Kuan","raw_affiliation_strings":["Department of Electrical Engineering, Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":0.5385,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.77025911,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":"26","issue":"2","first_page":"378","last_page":"391"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9890999794006348,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9890999794006348,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9350000023841858,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.5033735632896423},{"id":"https://openalex.org/keywords/travelling-salesman-problem","display_name":"Travelling salesman problem","score":0.43237560987472534},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.42892611026763916},{"id":"https://openalex.org/keywords/notation","display_name":"Notation","score":0.42704692482948303},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4188171625137329},{"id":"https://openalex.org/keywords/combinatorics","display_name":"Combinatorics","score":0.4119430184364319},{"id":"https://openalex.org/keywords/discrete-mathematics","display_name":"Discrete mathematics","score":0.36208388209342957},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.34606117010116577},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.22555851936340332},{"id":"https://openalex.org/keywords/arithmetic","display_name":"Arithmetic","score":0.1569702923297882}],"concepts":[{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.5033735632896423},{"id":"https://openalex.org/C175859090","wikidata":"https://www.wikidata.org/wiki/Q322212","display_name":"Travelling salesman problem","level":2,"score":0.43237560987472534},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.42892611026763916},{"id":"https://openalex.org/C45357846","wikidata":"https://www.wikidata.org/wiki/Q2001982","display_name":"Notation","level":2,"score":0.42704692482948303},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4188171625137329},{"id":"https://openalex.org/C114614502","wikidata":"https://www.wikidata.org/wiki/Q76592","display_name":"Combinatorics","level":1,"score":0.4119430184364319},{"id":"https://openalex.org/C118615104","wikidata":"https://www.wikidata.org/wiki/Q121416","display_name":"Discrete mathematics","level":1,"score":0.36208388209342957},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.34606117010116577},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.22555851936340332},{"id":"https://openalex.org/C94375191","wikidata":"https://www.wikidata.org/wiki/Q11205","display_name":"Arithmetic","level":1,"score":0.1569702923297882}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tvlsi.2017.2761850","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tvlsi.2017.2761850","pdf_url":null,"source":{"id":"https://openalex.org/S37538908","display_name":"IEEE Transactions on Very Large Scale Integration (VLSI) Systems","issn_l":"1063-8210","issn":["1063-8210","1557-9999"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Very Large Scale Integration (VLSI) Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Quality Education","id":"https://metadata.un.org/sdg/4","score":0.75}],"awards":[{"id":"https://openalex.org/G1308879075","display_name":"Lithography-Aware Physical Design for Sub-20nm Technologies","funder_award_id":"NSC102-2923-E002-006-MY3","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"},{"id":"https://openalex.org/G3075389640","display_name":"Physical Design for Sub-10nm Process Technologies: Scalability, Manufacturability, and Reliability","funder_award_id":"MOST103-2221-E002-259-MY3","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"},{"id":"https://openalex.org/G8025620321","display_name":null,"funder_award_id":"NTU-ERP-104R8951","funder_id":"https://openalex.org/F4320323900","funder_display_name":"National Taiwan University"},{"id":"https://openalex.org/G8715552149","display_name":"Manufacturability-Aware Physical Design for Sub-14nm Technologies","funder_award_id":"NSC102-2221-E002-235-MY3","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"}],"funders":[{"id":"https://openalex.org/F4320321041","display_name":"Academia Sinica","ror":"https://ror.org/05bxb3784"},{"id":"https://openalex.org/F4320322410","display_name":"MediaTek","ror":"https://ror.org/05g9jck81"},{"id":"https://openalex.org/F4320322589","display_name":"Taiwan Semiconductor Manufacturing Company","ror":"https://ror.org/02wx79d08"},{"id":"https://openalex.org/F4320322795","display_name":"Ministry of Science and Technology, Taiwan","ror":"https://ror.org/02kv4zf79"},{"id":"https://openalex.org/F4320323900","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W311339890","https://openalex.org/W1990317181","https://openalex.org/W1995848682","https://openalex.org/W2003193714","https://openalex.org/W2073745769","https://openalex.org/W2087543316","https://openalex.org/W2089491104","https://openalex.org/W2093529248","https://openalex.org/W2117685296","https://openalex.org/W2168155808","https://openalex.org/W2177140748","https://openalex.org/W4238221258"],"related_works":["https://openalex.org/W1525389557","https://openalex.org/W2361554335","https://openalex.org/W2359992618","https://openalex.org/W2164188042","https://openalex.org/W4306878646","https://openalex.org/W2054495636","https://openalex.org/W2046552997","https://openalex.org/W4376138746","https://openalex.org/W3157689847","https://openalex.org/W3012185404"],"abstract_inverted_index":{"Electron":[0],"beam":[1],"lithography":[2],"(EBL)":[3],"has":[4],"been":[5],"used":[6],"for":[7],"high-resolution":[8],"photomask":[9],"fabrication;":[10],"its":[11],"successive":[12,133,168],"heating":[13,46,152],"process":[14],"in":[15,37,85,158,164],"a":[16,27,33,61,70,89,95,109,119,146],"certain":[17],"region,":[18],"however,":[19],"may":[20],"cause":[21],"critical":[22],"dimension":[23],"(CD)":[24],"distortion.":[25,51],"As":[26],"result,":[28],"subfield":[29,62],"scheduling,":[30],"which":[31,82],"reorders":[32],"sequence":[34],"of":[35,106,140,156],"subfields":[36,134,169],"the":[38,45,80,130,137,151,159,165,171],"writing":[39,142,147],"process,":[40],"is":[41,83],"desirable":[42],"to":[43,94,135,144],"avoid":[44],"problem":[47,64,75],"and":[48,115,162],"thus":[49],"CD":[50],"To":[52,78],"consider":[53],"longer":[54],"range":[55],"heat":[56],"dissipation,":[57],"this":[58],"paper":[59],"models":[60],"scheduling":[63,121],"with":[65,98,108],"blocked":[66],"region":[67],"consideration":[68],"as":[69],"constrained":[71],"max\u2013min$m$-neighbor":[72],"traveling":[73],"salesman":[74],"(called":[76],"constrained$m$-nTSP).":[77],"solve":[79,104],"constrained$m$-nTSP":[81,90],"NP-complete":[84],"general,":[86],"we":[87],"decompose":[88],"into":[91,118],"subproblems":[92],"conforming":[93],"special":[96],"case":[97],"points":[99],"on":[100],"two":[101],"parallel":[102],"lines,":[103],"each":[105],"them":[107,117],"provably":[110],"good":[111],"linear-time":[112],"approximation":[113],"algorithm,":[114],"merge":[116],"complete":[120],"solution.":[122],"In":[123],"particular,":[124],"our":[125],"algorithm":[126],"can":[127,174],"also":[128],"minimize":[129],"distances":[131,166],"between":[132,167],"alleviate":[136],"throughput":[138],"degradation":[139],"EBL":[141],"due":[143],"moving":[145],"head,":[148],"while":[149],"minimizing":[150],"problem.":[153],"Average":[154],"reductions":[155],"10%":[157],"maximum":[160],"temperature":[161],"14%":[163],"over":[170],"state-of-the-art":[172],"work":[173],"be":[175],"achieved.":[176]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2026-08-21T09:56:20.448147","created_date":"2025-10-10T00:00:00"}