{"id":"https://openalex.org/W2015723387","doi":"https://doi.org/10.1109/tvlsi.2010.2043694","title":"Statistical Modeling and Simulation of Threshold Variation Under Random Dopant Fluctuations and Line-Edge Roughness","display_name":"Statistical Modeling and Simulation of Threshold Variation Under Random Dopant Fluctuations and Line-Edge Roughness","publication_year":2010,"publication_date":"2010-03-30","ids":{"openalex":"https://openalex.org/W2015723387","doi":"https://doi.org/10.1109/tvlsi.2010.2043694","mag":"2015723387"},"language":"en","primary_location":{"id":"doi:10.1109/tvlsi.2010.2043694","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tvlsi.2010.2043694","pdf_url":null,"source":{"id":"https://openalex.org/S37538908","display_name":"IEEE Transactions on Very Large Scale Integration (VLSI) Systems","issn_l":"1063-8210","issn":["1063-8210","1557-9999"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Very Large Scale Integration (VLSI) Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100675699","display_name":"Yun Ye","orcid":"https://orcid.org/0000-0002-8577-7868"},"institutions":[{"id":"https://openalex.org/I55732556","display_name":"Arizona State University","ror":"https://ror.org/03efmqc40","country_code":"US","type":"education","lineage":["https://openalex.org/I55732556"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yun Ye","raw_affiliation_strings":["Department of Electrical Engineering, Arizona State University, Tampe, AZ, USA","Dept. of Electr. Engi neering, Arizona State Univ., Tempe, AZ, USA#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Arizona State University, Tampe, AZ, USA","institution_ids":["https://openalex.org/I55732556"]},{"raw_affiliation_string":"Dept. of Electr. Engi neering, Arizona State Univ., Tempe, AZ, USA#TAB#","institution_ids":["https://openalex.org/I55732556"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006587869","display_name":"Frank Liu","orcid":"https://orcid.org/0000-0001-6615-0739"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210156936","display_name":"IBM Research - Austin","ror":"https://ror.org/05gjbbg60","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210156936"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Frank Liu","raw_affiliation_strings":["IBM Research Laboratory, Austin, TX, USA","IBM Research Lab, Austin, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research Laboratory, Austin, TX, USA","institution_ids":["https://openalex.org/I4210156936"]},{"raw_affiliation_string":"IBM Research Lab, Austin, TX, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100337209","display_name":"Min Chen","orcid":"https://orcid.org/0000-0002-0960-4447"},"institutions":[{"id":"https://openalex.org/I55732556","display_name":"Arizona State University","ror":"https://ror.org/03efmqc40","country_code":"US","type":"education","lineage":["https://openalex.org/I55732556"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Min Chen","raw_affiliation_strings":["Department of Electrical Engineering, Arizona State University, Tampe, AZ, USA","Dept. of Electr. Engi neering, Arizona State Univ., Tempe, AZ, USA#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Arizona State University, Tampe, AZ, USA","institution_ids":["https://openalex.org/I55732556"]},{"raw_affiliation_string":"Dept. of Electr. Engi neering, Arizona State Univ., Tempe, AZ, USA#TAB#","institution_ids":["https://openalex.org/I55732556"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046886936","display_name":"Sani Nassif","orcid":"https://orcid.org/0000-0002-5096-4794"},"institutions":[{"id":"https://openalex.org/I1341412227","display_name":"IBM (United States)","ror":"https://ror.org/05hh8d621","country_code":"US","type":"company","lineage":["https://openalex.org/I1341412227"]},{"id":"https://openalex.org/I4210156936","display_name":"IBM Research - Austin","ror":"https://ror.org/05gjbbg60","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4210156936"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sani Nassif","raw_affiliation_strings":["IBM Research Laboratory, Austin, TX, USA","IBM Research Lab, Austin, TX, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IBM Research Laboratory, Austin, TX, USA","institution_ids":["https://openalex.org/I4210156936"]},{"raw_affiliation_string":"IBM Research Lab, Austin, TX, USA","institution_ids":["https://openalex.org/I1341412227"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100740019","display_name":"Yu Cao","orcid":"https://orcid.org/0000-0001-6968-1180"},"institutions":[{"id":"https://openalex.org/I55732556","display_name":"Arizona State University","ror":"https://ror.org/03efmqc40","country_code":"US","type":"education","lineage":["https://openalex.org/I55732556"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yu Cao","raw_affiliation_strings":["Department of Electrical Engineering, Arizona State University, Tampe, AZ, USA","Dept. of Electr. Engi neering, Arizona State Univ., Tempe, AZ, USA#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Arizona State University, Tampe, AZ, USA","institution_ids":["https://openalex.org/I55732556"]},{"raw_affiliation_string":"Dept. of Electr. Engi neering, Arizona State Univ., Tempe, AZ, USA#TAB#","institution_ids":["https://openalex.org/I55732556"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":6.3745,"has_fulltext":false,"cited_by_count":74,"citation_normalized_percentile":{"value":0.96732421,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"19","issue":"6","first_page":"987","last_page":"996"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.389444500207901},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.34993529319763184}],"concepts":[{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.389444500207901},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.34993529319763184}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tvlsi.2010.2043694","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tvlsi.2010.2043694","pdf_url":null,"source":{"id":"https://openalex.org/S37538908","display_name":"IEEE Transactions on Very Large Scale Integration (VLSI) Systems","issn_l":"1063-8210","issn":["1063-8210","1557-9999"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Very Large Scale Integration (VLSI) Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":49,"referenced_works":["https://openalex.org/W74557774","https://openalex.org/W1483311388","https://openalex.org/W1503492383","https://openalex.org/W1536001327","https://openalex.org/W1604537105","https://openalex.org/W1766933113","https://openalex.org/W1870293527","https://openalex.org/W1945187117","https://openalex.org/W1970462492","https://openalex.org/W1971619329","https://openalex.org/W1978823263","https://openalex.org/W1981022060","https://openalex.org/W1981577823","https://openalex.org/W1987449940","https://openalex.org/W1989891105","https://openalex.org/W2001762759","https://openalex.org/W2004423835","https://openalex.org/W2041600236","https://openalex.org/W2046304309","https://openalex.org/W2050823050","https://openalex.org/W2058622312","https://openalex.org/W2059193309","https://openalex.org/W2069345435","https://openalex.org/W2077426284","https://openalex.org/W2088072859","https://openalex.org/W2095179359","https://openalex.org/W2115073796","https://openalex.org/W2125952738","https://openalex.org/W2128626389","https://openalex.org/W2129999479","https://openalex.org/W2134289172","https://openalex.org/W2140173118","https://openalex.org/W2140823559","https://openalex.org/W2142718365","https://openalex.org/W2143067666","https://openalex.org/W2143582865","https://openalex.org/W2146094464","https://openalex.org/W2146467105","https://openalex.org/W2160840734","https://openalex.org/W2161648718","https://openalex.org/W2162586752","https://openalex.org/W2165112557","https://openalex.org/W2165935276","https://openalex.org/W2186847922","https://openalex.org/W2532574515","https://openalex.org/W4246082690","https://openalex.org/W6648022024","https://openalex.org/W6660964161","https://openalex.org/W6669484758"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2051487156","https://openalex.org/W2073681303","https://openalex.org/W2390279801","https://openalex.org/W2358668433","https://openalex.org/W2376932109","https://openalex.org/W2001405890","https://openalex.org/W2382290278","https://openalex.org/W2478288626","https://openalex.org/W4391913857"],"abstract_inverted_index":{"The":[0,25,191],"threshold":[1,60],"voltage":[2],"(":[3],"<i":[4,115,141,154,232],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[5,8,116,119,142,145,155,158,233,236],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">V</i>":[6,117,143,156,234],"<sub":[7,118,144,157,235],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">th</sub>":[9,120,146,159,237],")":[10],"of":[11,27,65,84,114,126,134,153,170,213,231,249],"a":[12,63,95,150],"nanoscale":[13],"transistor":[14],"is":[15,162,196],"severely":[16],"affected":[17],"by":[18,73],"random":[19],"dopant":[20,66,171],"fluctuations":[21,67,105],"and":[22,53,68,75,167,172,176,185],"line-edge":[23],"roughness.":[24],"analysis":[26],"these":[28],"effects":[29],"usually":[30],"requires":[31],"atomistic":[32,85,199],"simulations":[33],"which":[34],"are":[35],"too":[36],"expensive":[37],"in":[38,100,217],"computation":[39],"for":[40],"statistical":[41,54],"design.":[42,253],"In":[43],"this":[44,207],"work,":[45],"we":[46,226],"develop":[47],"an":[48],"efficient":[49],"SPICE":[50,193],"simulation":[51,194,200],"method":[52,92,195],"variation":[55,61,113,160,212,238],"model":[56,152],"that":[57,161],"accurately":[58],"predict":[59],"as":[62],"function":[64],"gate":[69,97,165,173,183,205],"length":[70,174],"change":[71],"caused":[72],"lithography":[74],"the":[76,81,90,107,112,122,127,132,135,168,179,203,211,223,229,247],"etching":[77],"process.":[78],"By":[79],"understanding":[80],"physical":[82],"principles":[83],"simulations,":[86],"we:":[87],"1)":[88],"identify":[89],"appropriate":[91],"to":[93,102,140],"divide":[94],"nonuniform":[96],"into":[98,106],"slices":[99],"order":[101],"map":[103],"those":[104],"device":[108,214],"model;":[109],"2)":[110],"extract":[111],"from":[121,131],"strong-inversion":[123],"region":[124],"instead":[125],"leakage":[128],"current,":[129],"benefiting":[130],"linearity":[133],"saturation":[136],"current":[137,216],"with":[138,164,181,198],"respect":[139],";":[147],"3)":[148],"propose":[149],"compact":[151],"scalable":[163],"size":[166],"amount":[169,230],"fluctuations;":[175],"4)":[177],"investigate":[178],"interaction":[180],"non-rectangular":[182],"(NRG)":[184],"reverse":[186],"narrow":[187],"width":[188],"effect":[189],"(RNWE).":[190],"proposed":[192],"validated":[197],"results.":[201],"Given":[202],"post-lithography":[204],"geometry,":[206],"approach":[208],"correctly":[209],"models":[210],"output":[215],"all":[218],"operating":[219],"regions.":[220],"Based":[221],"on":[222,246],"new":[224],"results,":[225],"further":[227],"project":[228],"at":[239],"advanced":[240],"technology":[241],"nodes,":[242],"helping":[243],"shed":[244],"light":[245],"challenges":[248],"future":[250],"robust":[251],"circuit":[252]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":5},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":6},{"year":2017,"cited_by_count":7},{"year":2016,"cited_by_count":6},{"year":2015,"cited_by_count":10},{"year":2014,"cited_by_count":9},{"year":2013,"cited_by_count":7},{"year":2012,"cited_by_count":12}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}