{"id":"https://openalex.org/W4412722371","doi":"https://doi.org/10.1109/tsmc.2025.3579615","title":"A New Scheduling Approach to Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools Concurrently Processing Multivariety Wafers","display_name":"A New Scheduling Approach to Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools Concurrently Processing Multivariety Wafers","publication_year":2025,"publication_date":"2025-07-28","ids":{"openalex":"https://openalex.org/W4412722371","doi":"https://doi.org/10.1109/tsmc.2025.3579615"},"language":"en","primary_location":{"id":"doi:10.1109/tsmc.2025.3579615","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tsmc.2025.3579615","pdf_url":null,"source":{"id":"https://openalex.org/S4210209078","display_name":"IEEE Transactions on Systems Man and Cybernetics Systems","issn_l":"2168-2216","issn":["2168-2216","2168-2232"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Systems, Man, and Cybernetics: Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5053109085","display_name":"Jufeng Wang","orcid":"https://orcid.org/0000-0001-6088-0474"},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jufeng Wang","raw_affiliation_strings":["College of Science, China Jiliang University, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0001-6088-0474","affiliations":[{"raw_affiliation_string":"College of Science, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010066597","display_name":"Tingting Leng","orcid":null},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tingting Leng","raw_affiliation_strings":["College of Science, China Jiliang University, Hangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Science, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100631269","display_name":"Chunfeng Liu","orcid":"https://orcid.org/0000-0003-1792-1714"},"institutions":[{"id":"https://openalex.org/I50760025","display_name":"Hangzhou Dianzi University","ror":"https://ror.org/0576gt767","country_code":"CN","type":"education","lineage":["https://openalex.org/I50760025"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunfeng Liu","raw_affiliation_strings":["School of Management, Hangzhou Dianzi University, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0003-1792-1714","affiliations":[{"raw_affiliation_string":"School of Management, Hangzhou Dianzi University, Hangzhou, China","institution_ids":["https://openalex.org/I50760025"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081318069","display_name":"MengChu Zhou","orcid":"https://orcid.org/0000-0002-5408-8752"},"institutions":[{"id":"https://openalex.org/I75059550","display_name":"Zhejiang Gongshang University","ror":"https://ror.org/0569mkk41","country_code":"CN","type":"education","lineage":["https://openalex.org/I75059550"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"MengChu Zhou","raw_affiliation_strings":["School of Information and Electronic Engineering, Zhejiang Gongshang University, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0002-5408-8752","affiliations":[{"raw_affiliation_string":"School of Information and Electronic Engineering, Zhejiang Gongshang University, Hangzhou, China","institution_ids":["https://openalex.org/I75059550"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111012924","display_name":"Side Zhao","orcid":null},"institutions":[{"id":"https://openalex.org/I4210139090","display_name":"Lam Research (United States)","ror":"https://ror.org/04gecbm52","country_code":"US","type":"company","lineage":["https://openalex.org/I4210139090"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Side Zhao","raw_affiliation_strings":["Lam Research, Fremont, CA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lam Research, Fremont, CA, USA","institution_ids":["https://openalex.org/I4210139090"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.9045,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.78237426,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"55","issue":"10","first_page":"7075","last_page":"7084"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9890000224113464,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.9890000224113464,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":0.9796000123023987,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11522","display_name":"VLSI and FPGA Design Techniques","score":0.9434000253677368,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6706645488739014},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.5472894310951233},{"id":"https://openalex.org/keywords/dual","display_name":"Dual (grammatical number)","score":0.47194045782089233},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4583404064178467},{"id":"https://openalex.org/keywords/embedded-system","display_name":"Embedded system","score":0.3793887197971344},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.37058189511299133},{"id":"https://openalex.org/keywords/operating-system","display_name":"Operating system","score":0.36368685960769653},{"id":"https://openalex.org/keywords/parallel-computing","display_name":"Parallel computing","score":0.34557056427001953},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.25038081407546997},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.24056318402290344},{"id":"https://openalex.org/keywords/operations-management","display_name":"Operations management","score":0.1995079219341278},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.11742493510246277}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6706645488739014},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.5472894310951233},{"id":"https://openalex.org/C2780980858","wikidata":"https://www.wikidata.org/wiki/Q110022","display_name":"Dual (grammatical number)","level":2,"score":0.47194045782089233},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4583404064178467},{"id":"https://openalex.org/C149635348","wikidata":"https://www.wikidata.org/wiki/Q193040","display_name":"Embedded system","level":1,"score":0.3793887197971344},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.37058189511299133},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.36368685960769653},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.34557056427001953},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.25038081407546997},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.24056318402290344},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.1995079219341278},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.11742493510246277},{"id":"https://openalex.org/C142362112","wikidata":"https://www.wikidata.org/wiki/Q735","display_name":"Art","level":0,"score":0.0},{"id":"https://openalex.org/C124952713","wikidata":"https://www.wikidata.org/wiki/Q8242","display_name":"Literature","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tsmc.2025.3579615","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tsmc.2025.3579615","pdf_url":null,"source":{"id":"https://openalex.org/S4210209078","display_name":"IEEE Transactions on Systems Man and Cybernetics Systems","issn_l":"2168-2216","issn":["2168-2216","2168-2232"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Systems, Man, and Cybernetics: Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":36,"referenced_works":["https://openalex.org/W1984672920","https://openalex.org/W2002235729","https://openalex.org/W2014130612","https://openalex.org/W2014660552","https://openalex.org/W2019063470","https://openalex.org/W2020568391","https://openalex.org/W2022919717","https://openalex.org/W2073229720","https://openalex.org/W2078831570","https://openalex.org/W2086414784","https://openalex.org/W2117906302","https://openalex.org/W2511769035","https://openalex.org/W2607187813","https://openalex.org/W2739664263","https://openalex.org/W2893504464","https://openalex.org/W2896759506","https://openalex.org/W2901776478","https://openalex.org/W2915806045","https://openalex.org/W2922346524","https://openalex.org/W2964578842","https://openalex.org/W2981474027","https://openalex.org/W3004600292","https://openalex.org/W3010770769","https://openalex.org/W3022502563","https://openalex.org/W3134776935","https://openalex.org/W4226092206","https://openalex.org/W4285210261","https://openalex.org/W4319068634","https://openalex.org/W4362593695","https://openalex.org/W4385249608","https://openalex.org/W4389169897","https://openalex.org/W4391164313","https://openalex.org/W4399814310","https://openalex.org/W4400487646","https://openalex.org/W4402915302","https://openalex.org/W4403095602"],"related_works":["https://openalex.org/W1998662473","https://openalex.org/W1988252515","https://openalex.org/W2075391483","https://openalex.org/W2742348144","https://openalex.org/W2038820605","https://openalex.org/W1985417357","https://openalex.org/W2115053376","https://openalex.org/W2367528910","https://openalex.org/W1991489478","https://openalex.org/W2121416564"],"abstract_inverted_index":{"In":[0],"the":[1,47,59,73,87,120],"periodic":[2,133],"scheduling":[3],"problems":[4],"of":[5,30,50,70,94,97],"a":[6,28,68,81,112,126],"dual-arm":[7],"wafer-residency-time-constrained":[8],"(W-R-T-C)":[9],"cluster":[10],"tool":[11],"(CT)":[12],"with":[13],"multivariety":[14],"wafers,":[15,56],"it":[16,136],"is":[17,40,52,62,77,137],"important":[18],"to":[19,143],"balance":[20],"workload":[21,61,89],"at":[22,64,90],"each":[23,43,65],"step.":[24],"This":[25],"work":[26,105],"proposes":[27,125],"method":[29,84],"processing":[31,55,92],"module":[32,83],"(PM)":[33],"two-layer":[34,101],"configuration.":[35],"First,":[36],"one":[37],"PM":[38,75,102],"configuration":[39,76],"made":[41],"for":[42,54,67,85,111,129],"wafer":[44],"type,":[45],"i.e.,":[46,79],"suitable":[48],"number":[49],"PMs":[51],"selected":[53],"ensuring":[57],"that":[58],"natural":[60,88],"balanced":[63],"step":[66],"type":[69],"wafers.":[71,98],"Then,":[72],"other":[74],"made,":[78],"adopt":[80],"virtual":[82],"balancing":[86],"bottleneck":[91],"steps":[93],"different":[95],"types":[96],"Based":[99],"on":[100],"configuration,":[103],"this":[104],"derives":[106],"necessary":[107],"and":[108],"sufficient":[109],"conditions":[110],"CT\u2019s":[113],"schedulability,":[114],"which":[115],"are":[116,141],"less":[117],"restrictive":[118],"than":[119],"current":[121],"state-of-the-art":[122],"ones.":[123,150],"It":[124],"polynomial-time":[127],"algorithm":[128],"computing":[130],"its":[131],"minimum":[132],"schedule":[134],"when":[135],"schedulable.":[138],"Several":[139],"examples":[140],"given":[142],"show":[144],"our":[145],"algorithm\u2019s":[146],"superiority":[147],"over":[148],"existing":[149]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}