{"id":"https://openalex.org/W2767280824","doi":"https://doi.org/10.1109/tsmc.2017.2669212","title":"An Operation-Group Based Soft Scheduling Approach for Uncertain Semiconductor Wafer Fabrication System","display_name":"An Operation-Group Based Soft Scheduling Approach for Uncertain Semiconductor Wafer Fabrication System","publication_year":2017,"publication_date":"2017-11-07","ids":{"openalex":"https://openalex.org/W2767280824","doi":"https://doi.org/10.1109/tsmc.2017.2669212","mag":"2767280824"},"language":"en","primary_location":{"id":"doi:10.1109/tsmc.2017.2669212","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tsmc.2017.2669212","pdf_url":null,"source":{"id":"https://openalex.org/S4210209078","display_name":"IEEE Transactions on Systems Man and Cybernetics Systems","issn_l":"2168-2216","issn":["2168-2216","2168-2232"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Systems, Man, and Cybernetics: Systems","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5061734694","display_name":"Huaxing Zhong","orcid":"https://orcid.org/0000-0002-3209-1416"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huaxing Zhong","raw_affiliation_strings":["Department of Automation, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-3209-1416","affiliations":[{"raw_affiliation_string":"Department of Automation, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100343911","display_name":"Min Liu","orcid":"https://orcid.org/0000-0002-7273-0518"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Min Liu","raw_affiliation_strings":["Tsinghua National Laboratory for Information Science and Technology, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology, Beijing, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049376421","display_name":"Jinghua Hao","orcid":"https://orcid.org/0009-0002-3577-018X"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinghua Hao","raw_affiliation_strings":["Department of Automation, Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Automation, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5004750308","display_name":"Sheng-Long Jiang","orcid":"https://orcid.org/0000-0002-2392-8835"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shenglong Jiang","raw_affiliation_strings":["Department of Automation, Tsinghua University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Automation, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.9228,"has_fulltext":false,"cited_by_count":11,"citation_normalized_percentile":{"value":0.80475303,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"48","issue":"8","first_page":"1332","last_page":"1347"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10551","display_name":"Scheduling and Optimization Algorithms","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11159","display_name":"Manufacturing Process and Optimization","score":0.996399998664856,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10791","display_name":"Advanced Control Systems Optimization","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.7122821807861328},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.6702078580856323},{"id":"https://openalex.org/keywords/schedule","display_name":"Schedule","score":0.5719267725944519},{"id":"https://openalex.org/keywords/wafer-fabrication","display_name":"Wafer fabrication","score":0.5668405890464783},{"id":"https://openalex.org/keywords/dynamic-priority-scheduling","display_name":"Dynamic priority scheduling","score":0.5503942370414734},{"id":"https://openalex.org/keywords/fair-share-scheduling","display_name":"Fair-share scheduling","score":0.5161534547805786},{"id":"https://openalex.org/keywords/two-level-scheduling","display_name":"Two-level scheduling","score":0.472342848777771},{"id":"https://openalex.org/keywords/job-shop-scheduling","display_name":"Job shop scheduling","score":0.45861247181892395},{"id":"https://openalex.org/keywords/distributed-computing","display_name":"Distributed computing","score":0.4410063922405243},{"id":"https://openalex.org/keywords/mathematical-optimization","display_name":"Mathematical optimization","score":0.3773755431175232},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.3593630790710449},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.2902730703353882},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22223380208015442},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.08815792202949524}],"concepts":[{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.7122821807861328},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.6702078580856323},{"id":"https://openalex.org/C68387754","wikidata":"https://www.wikidata.org/wiki/Q7271585","display_name":"Schedule","level":2,"score":0.5719267725944519},{"id":"https://openalex.org/C35750839","wikidata":"https://www.wikidata.org/wiki/Q7959421","display_name":"Wafer fabrication","level":3,"score":0.5668405890464783},{"id":"https://openalex.org/C107568181","wikidata":"https://www.wikidata.org/wiki/Q5319000","display_name":"Dynamic priority scheduling","level":3,"score":0.5503942370414734},{"id":"https://openalex.org/C31689143","wikidata":"https://www.wikidata.org/wiki/Q733809","display_name":"Fair-share scheduling","level":3,"score":0.5161534547805786},{"id":"https://openalex.org/C119948110","wikidata":"https://www.wikidata.org/wiki/Q7858726","display_name":"Two-level scheduling","level":4,"score":0.472342848777771},{"id":"https://openalex.org/C55416958","wikidata":"https://www.wikidata.org/wiki/Q6206757","display_name":"Job shop scheduling","level":3,"score":0.45861247181892395},{"id":"https://openalex.org/C120314980","wikidata":"https://www.wikidata.org/wiki/Q180634","display_name":"Distributed computing","level":1,"score":0.4410063922405243},{"id":"https://openalex.org/C126255220","wikidata":"https://www.wikidata.org/wiki/Q141495","display_name":"Mathematical optimization","level":1,"score":0.3773755431175232},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.3593630790710449},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.2902730703353882},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22223380208015442},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.08815792202949524},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tsmc.2017.2669212","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tsmc.2017.2669212","pdf_url":null,"source":{"id":"https://openalex.org/S4210209078","display_name":"IEEE Transactions on Systems Man and Cybernetics Systems","issn_l":"2168-2216","issn":["2168-2216","2168-2232"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Systems, Man, and Cybernetics: Systems","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G213297304","display_name":"\u4e00\u7c7b\u534a\u5bfc\u4f53\u751f\u4ea7\u7ebf\u8c03\u5ea6\u95ee\u9898\u57fa\u4e8e\u6570\u636e\u7684\u7b80\u5316\u8c03\u5ea6\u6a21\u578b\u4e0e\u9ad8\u6548\u8c03\u5ea6\u7b97\u6cd5\u7814\u7a76","funder_award_id":"61104172","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2597643892","display_name":null,"funder_award_id":"61025018","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5291517420","display_name":"\u590d\u6742\u82af\u7247\u5236\u9020\u8fc7\u7a0b\u5b9e\u65f6\u8c03\u5ea6\u4e0e\u4f18\u5316\u63a7\u5236\u7406\u8bba\u548c\u7b97\u6cd5\u7814\u7a76\u53ca\u5e94\u7528","funder_award_id":"60834004","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6217304460","display_name":null,"funder_award_id":"60721003","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":49,"referenced_works":["https://openalex.org/W1507539267","https://openalex.org/W1535363804","https://openalex.org/W1577668191","https://openalex.org/W1637517007","https://openalex.org/W1814515812","https://openalex.org/W1969597348","https://openalex.org/W1983148631","https://openalex.org/W1989570164","https://openalex.org/W1995550603","https://openalex.org/W1996515188","https://openalex.org/W1998355772","https://openalex.org/W2003746847","https://openalex.org/W2014965742","https://openalex.org/W2020568391","https://openalex.org/W2023002456","https://openalex.org/W2023426991","https://openalex.org/W2029152973","https://openalex.org/W2029838689","https://openalex.org/W2031240623","https://openalex.org/W2045502230","https://openalex.org/W2050570216","https://openalex.org/W2062015046","https://openalex.org/W2067360406","https://openalex.org/W2078068513","https://openalex.org/W2078533235","https://openalex.org/W2078993160","https://openalex.org/W2086414784","https://openalex.org/W2087418240","https://openalex.org/W2088304441","https://openalex.org/W2094549502","https://openalex.org/W2099880607","https://openalex.org/W2115252758","https://openalex.org/W2119034535","https://openalex.org/W2122967269","https://openalex.org/W2127614495","https://openalex.org/W2138415723","https://openalex.org/W2150109156","https://openalex.org/W2152195021","https://openalex.org/W2165299997","https://openalex.org/W2336821893","https://openalex.org/W2342897103","https://openalex.org/W2543580944","https://openalex.org/W4229930620","https://openalex.org/W4237709413","https://openalex.org/W4255654664","https://openalex.org/W4285719527","https://openalex.org/W6632278520","https://openalex.org/W6679103496","https://openalex.org/W6703026058"],"related_works":["https://openalex.org/W2184166483","https://openalex.org/W2106332846","https://openalex.org/W2372008037","https://openalex.org/W2397293317","https://openalex.org/W2978148977","https://openalex.org/W3036719625","https://openalex.org/W2545511463","https://openalex.org/W1545991362","https://openalex.org/W4386128920","https://openalex.org/W2225350526"],"abstract_inverted_index":{"This":[0],"paper":[1],"tackles":[2],"a":[3,40,125,134,138],"large-scale":[4],"and":[5,25,79,115,137,163,177],"uncertain":[6,195],"scheduling":[7,70,77,99,128,140],"problem":[8],"of":[9,16,28,32,43,55,62,75,90,192],"semiconductor":[10],"wafer":[11],"fabrication":[12],"system.":[13],"Two":[14],"kinds":[15],"uncertainties":[17],"are":[18],"considered":[19],"here,":[20],"including":[21],"the":[22,26,34,51,56,73,76,81,88,91,107,121,148,152,159,185,190],"machine":[23],"breakdowns":[24],"fluctuations":[27],"processing":[29],"times.":[30],"Instead":[31],"using":[33],"traditional":[35],"rigid":[36],"schedule,":[37,136],"we":[38],"propose":[39],"novel":[41],"concept":[42,64],"operation-group-based":[44,97],"soft":[45,93,98,135,149,154],"schedule":[46,155],"which":[47,109,175],"is":[48,65,102,130,144,156,168],"used":[49],"as":[50],"new":[52],"decision":[53],"variable":[54],"studied":[57],"problem.":[58],"The":[59,181],"inherent":[60],"idea":[61],"this":[63],"to":[66,84,104,132,146,158,170,179],"make":[67],"some":[68],"critical":[69],"decisions":[71,83],"at":[72],"beginning":[74],"horizon,":[78],"allow":[80],"remaining":[82],"be":[85],"made":[86],"during":[87],"execution":[89],"initial":[92,153],"schedule.":[94,150],"Furthermore,":[95],"an":[96,111,116,164],"approach":[100],"(OGSSA)":[101],"proposed":[103,131],"deal":[105],"with":[106],"uncertainties,":[108],"contains":[110],"offline":[112,122],"optimization":[113,123],"layer":[114],"online":[117,160,165],"dispatching":[118,161],"layer.":[119],"In":[120],"layer,":[124,162],"prediction-based":[126],"decomposition":[127],"method":[129],"generate":[133],"global":[139],"objective":[141],"prediction":[142],"model":[143],"constructed":[145],"evaluate":[147],"Then,":[151],"released":[157],"heuristic":[166],"rule":[167],"designed":[169],"decide":[171],"in":[172],"real":[173],"time,":[174],"operations":[176],"when":[178],"process.":[180],"computational":[182],"results":[183],"on":[184],"practical":[186],"production":[187,196],"data":[188],"demonstrate":[189],"effectiveness":[191],"OGSSA":[193],"under":[194],"environments.":[197]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}