{"id":"https://openalex.org/W2185796675","doi":"https://doi.org/10.1109/tro.2015.2498301","title":"Accuracy Quantification and Improvement of Serial Micropositioning Robots for In-Plane Motions","display_name":"Accuracy Quantification and Improvement of Serial Micropositioning Robots for In-Plane Motions","publication_year":2015,"publication_date":"2015-12-01","ids":{"openalex":"https://openalex.org/W2185796675","doi":"https://doi.org/10.1109/tro.2015.2498301","mag":"2185796675"},"language":"en","primary_location":{"id":"doi:10.1109/tro.2015.2498301","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tro.2015.2498301","pdf_url":null,"source":{"id":"https://openalex.org/S144620930","display_name":"IEEE Transactions on Robotics","issn_l":"1552-3098","issn":["1552-3098","1546-1904","1941-0468"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Robotics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100741008","display_name":"Ning Tan","orcid":"https://orcid.org/0000-0003-0710-6409"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Ning Tan","raw_affiliation_strings":["FEMTO-ST Institute, AS2M Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, AS2M Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I53262699"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083374059","display_name":"C\u00e9dric Cl\u00e9vy","orcid":"https://orcid.org/0000-0002-7881-4245"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Cedric Clevy","raw_affiliation_strings":["FEMTO-ST Institute, AS2M Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, AS2M Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I53262699"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086574604","display_name":"Guillaume J. Laurent","orcid":"https://orcid.org/0000-0003-3586-4696"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Guillaume J. Laurent","raw_affiliation_strings":["FEMTO-ST Institute, AS2M Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, AS2M Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I53262699"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077543853","display_name":"Patrick Sandoz","orcid":"https://orcid.org/0000-0003-3570-6196"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Patrick Sandoz","raw_affiliation_strings":["FEMTO-ST Institute, Applied Mechanics Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, Applied Mechanics Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I53262699"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5104753316","display_name":"Nicolas Chaillet","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Nicolas Chaillet","raw_affiliation_strings":["FEMTO-ST Institute, AS2M Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO-ST Institute, AS2M Department, Univ. Bourgogne Franche-Comt\u00e9, Univ. de Franche-Comt\u00e9/CNRS/ENSMM, Besan\u00e7on, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I53262699"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.5704,"has_fulltext":false,"cited_by_count":31,"citation_normalized_percentile":{"value":0.91981949,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"31","issue":"6","first_page":"1497","last_page":"1507"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10868","display_name":"Soft Robotics and Applications","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.6871703267097473},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.6613214015960693},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.6130177974700928},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.6097055077552795},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.5917640328407288},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5639429688453674},{"id":"https://openalex.org/keywords/serial-manipulator","display_name":"Serial manipulator","score":0.5244336724281311},{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.5116662979125977},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.49345722794532776},{"id":"https://openalex.org/keywords/measure","display_name":"Measure (data warehouse)","score":0.43108946084976196},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.3434251844882965},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.32975754141807556},{"id":"https://openalex.org/keywords/data-mining","display_name":"Data mining","score":0.27562373876571655},{"id":"https://openalex.org/keywords/parallel-manipulator","display_name":"Parallel manipulator","score":0.12374481558799744}],"concepts":[{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.6871703267097473},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.6613214015960693},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6130177974700928},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.6097055077552795},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.5917640328407288},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5639429688453674},{"id":"https://openalex.org/C120910303","wikidata":"https://www.wikidata.org/wiki/Q7454692","display_name":"Serial manipulator","level":4,"score":0.5244336724281311},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.5116662979125977},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.49345722794532776},{"id":"https://openalex.org/C2780009758","wikidata":"https://www.wikidata.org/wiki/Q6804172","display_name":"Measure (data warehouse)","level":2,"score":0.43108946084976196},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3434251844882965},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.32975754141807556},{"id":"https://openalex.org/C124101348","wikidata":"https://www.wikidata.org/wiki/Q172491","display_name":"Data mining","level":1,"score":0.27562373876571655},{"id":"https://openalex.org/C138094506","wikidata":"https://www.wikidata.org/wiki/Q12065277","display_name":"Parallel manipulator","level":3,"score":0.12374481558799744},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tro.2015.2498301","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tro.2015.2498301","pdf_url":null,"source":{"id":"https://openalex.org/S144620930","display_name":"IEEE Transactions on Robotics","issn_l":"1552-3098","issn":["1552-3098","1546-1904","1941-0468"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Robotics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/16","score":0.8199999928474426,"display_name":"Peace, Justice and strong institutions"}],"awards":[{"id":"https://openalex.org/G1653488868","display_name":"Syst\u00e8mes intelligents int\u00e9gr\u00e9s au c\u0153ur de la mati\u00e8re","funder_award_id":"ANR-11-LABX-0001","funder_id":"https://openalex.org/F4320320883","funder_display_name":"Agence Nationale de la Recherche"}],"funders":[{"id":"https://openalex.org/F4320320883","display_name":"Agence Nationale de la Recherche","ror":"https://ror.org/00rbzpz17"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":42,"referenced_works":["https://openalex.org/W1551371275","https://openalex.org/W1569985019","https://openalex.org/W1633529096","https://openalex.org/W1754386378","https://openalex.org/W1967288363","https://openalex.org/W1969140852","https://openalex.org/W1972380656","https://openalex.org/W1975501109","https://openalex.org/W1979504223","https://openalex.org/W1982927287","https://openalex.org/W1987601706","https://openalex.org/W1999053377","https://openalex.org/W2006208862","https://openalex.org/W2017867625","https://openalex.org/W2021083426","https://openalex.org/W2026046865","https://openalex.org/W2032894041","https://openalex.org/W2036931499","https://openalex.org/W2043218014","https://openalex.org/W2058428974","https://openalex.org/W2058447477","https://openalex.org/W2059521238","https://openalex.org/W2062801829","https://openalex.org/W2071356645","https://openalex.org/W2078302520","https://openalex.org/W2108040552","https://openalex.org/W2109285300","https://openalex.org/W2110767843","https://openalex.org/W2113040397","https://openalex.org/W2114866967","https://openalex.org/W2119139471","https://openalex.org/W2128963970","https://openalex.org/W2131944527","https://openalex.org/W2136315998","https://openalex.org/W2151329898","https://openalex.org/W2266380092","https://openalex.org/W2495136684","https://openalex.org/W2621138527","https://openalex.org/W2989690613","https://openalex.org/W4246841765","https://openalex.org/W6677451673","https://openalex.org/W6738824336"],"related_works":["https://openalex.org/W2525438122","https://openalex.org/W2159914521","https://openalex.org/W2092499874","https://openalex.org/W4235443019","https://openalex.org/W4255837520","https://openalex.org/W3134654743","https://openalex.org/W2387011115","https://openalex.org/W2169632573","https://openalex.org/W2091891354","https://openalex.org/W2379084545"],"abstract_inverted_index":{"High":[0],"positioning":[1,48,89,141,175,202,210],"accuracy":[2,49,90,142,203,211],"with":[3,72,126,223],"micropositioning":[4],"robots":[5],"(MPRs)":[6],"is":[7,41,85,107,132,157,186],"required":[8],"to":[9,68,86,95,138,167,197,227],"successfully":[10],"perform":[11],"many":[12],"complex":[13],"tasks,":[14],"such":[15],"as":[16,109,134],"microassembly,":[17],"manipulation,":[18],"and":[19,24,28,37,54,76,94,123,177,235],"characterization":[20],"of":[21,34,82,91,143,164,173,180,204],"biological":[22],"tissues":[23],"minimally":[25],"invasive":[26],"inspection":[27],"surgery.":[29],"Despite":[30],"the":[31,46,56,88,97,140,162,171,174,178,181,201,239],"widespread":[32],"use":[33,163],"high-resolution":[35],"micro-":[36],"nanopositioning":[38],"robots,":[39],"there":[40],"very":[42,62],"little":[43],"knowledge":[44],"about":[45],"real":[47],"that":[50,120,209],"can":[51,212],"be":[52,213],"obtained":[53],"what":[55],"main":[57,80,98],"influential":[58,99,169],"factors":[59,100,199],"are.":[60],"Indeed,":[61],"few":[63],"notable":[64],"methods":[65],"are":[66],"available":[67],"measure":[69],"multi-degree-of-freedom":[70],"motions":[71],"adapted":[73],"range,":[74],"resolution,":[75],"dynamic":[77],"capabilities.":[78],"The":[79,206],"objective":[81],"this":[83,115],"paper":[84],"quantify":[87,139],"serial":[92,105],"MPRs":[93,144],"identify":[96,168],"(a":[101],"typical":[102],"XY":[103],"\u0398":[104],"robot":[106],"chosen":[108,158],"a":[110,117,135],"case":[111],"study).":[112],"To":[113],"reach":[114],"goal,":[116],"measuring":[118],"system":[119],"combines":[121],"vision":[122],"pseudoperiodic":[124],"patterns":[125],"an":[127,149],"extremely":[128],"large":[129],"range-to-resolution":[130],"ratio":[131],"introduced":[133],"new":[136],"way":[137],"for":[145,159,232],"in-plane":[146],"motions.":[147],"Then,":[148],"open-loop":[150],"control":[151],"approach":[152],"based":[153],"on":[154],"MPR":[155,240],"calibration":[156,193,241],"several":[160],"reasons:":[161],"different":[165,192],"models":[166,194],"factors,":[170],"quantification":[172],"accuracy,":[176],"necessity":[179],"method":[182],"when":[183],"sensor":[184],"integration":[185],"too":[187],"complex.":[188],"Experiments":[189],"using":[190],"five":[191],"were":[195],"conducted":[196],"classify":[198],"influencing":[200],"MPRs.":[205],"results":[207],"show":[208],"improved":[214],"by":[215,230],"more":[216],"than":[217],"35":[218],"times":[219],"from":[220],"96":[221],"\u03bc":[222,229],"no":[224],"imperfection":[225],"compensation":[226],"2.5":[228],"compensating":[231],"geometric,":[233],"position-dependent,":[234],"angle-dependent":[236],"errors":[237],"through":[238],"approach.":[242]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":5},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":5},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":6},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":4}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}