{"id":"https://openalex.org/W2169502883","doi":"https://doi.org/10.1109/tro.2010.2082032","title":"Development and Dynamic Modeling of a New Hybrid Thermopiezoelectric Microactuator","display_name":"Development and Dynamic Modeling of a New Hybrid Thermopiezoelectric Microactuator","publication_year":2010,"publication_date":"2010-11-09","ids":{"openalex":"https://openalex.org/W2169502883","doi":"https://doi.org/10.1109/tro.2010.2082032","mag":"2169502883"},"language":"en","primary_location":{"id":"doi:10.1109/tro.2010.2082032","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tro.2010.2082032","pdf_url":null,"source":{"id":"https://openalex.org/S144620930","display_name":"IEEE Transactions on Robotics","issn_l":"1552-3098","issn":["1552-3098","1546-1904","1941-0468"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Robotics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019160451","display_name":"Micky Rakotondrabe","orcid":"https://orcid.org/0000-0002-6413-7271"},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Micky Rakotondrabe","raw_affiliation_strings":["FEMTO ST Institute, UMR CNRS 6174 Universit\u00e9 de Franche Comt\u00e9 Ecole Nationale Sup\u00e9rieure De M\u00e9canique et des Microtechniques, Automatic Control and Micro Mechatronic Systems Department, Universit\u00e9 de Technologie de Belfort Montbeliard, Besancon, France","FEMTO-ST - Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique, Thermique et Optique - Sciences et Technologies (UMR 6174) (32 avenue de l'Observatoire 25044 BESANCON CEDEX - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO ST Institute, UMR CNRS 6174 Universit\u00e9 de Franche Comt\u00e9 Ecole Nationale Sup\u00e9rieure De M\u00e9canique et des Microtechniques, Automatic Control and Micro Mechatronic Systems Department, Universit\u00e9 de Technologie de Belfort Montbeliard, Besancon, France","institution_ids":["https://openalex.org/I53262699","https://openalex.org/I2802759292","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"FEMTO-ST - Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique, Thermique et Optique - Sciences et Technologies (UMR 6174) (32 avenue de l'Observatoire 25044 BESANCON CEDEX - France)","institution_ids":["https://openalex.org/I2802759292"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108108648","display_name":"Ioan Alexandru Ivan","orcid":null},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I2802759292","display_name":"Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique Thermique et Optique - Sciences et Technologies","ror":"https://ror.org/004fmxv66","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I1294671590","https://openalex.org/I2802759292","https://openalex.org/I37553959","https://openalex.org/I4210095849","https://openalex.org/I4405256580","https://openalex.org/I53262699"]},{"id":"https://openalex.org/I53262699","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et des Microtechniques","ror":"https://ror.org/05813w841","country_code":"FR","type":"education","lineage":["https://openalex.org/I53262699"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Ioan Alexandru Ivan","raw_affiliation_strings":["FEMTO ST Institute, UMR CNRS 6174 Universit\u00e9 de Franche Comt\u00e9 Ecole Nationale Sup\u00e9rieure De M\u00e9canique et des Microtechniques, Automatic Control and Micro Mechatronic Systems Department, Universit\u00e9 de Technologie de Belfort Montbeliard, Besancon, France","FEMTO-ST - Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique, Thermique et Optique - Sciences et Technologies (UMR 6174) (32 avenue de l'Observatoire 25044 BESANCON CEDEX - France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FEMTO ST Institute, UMR CNRS 6174 Universit\u00e9 de Franche Comt\u00e9 Ecole Nationale Sup\u00e9rieure De M\u00e9canique et des Microtechniques, Automatic Control and Micro Mechatronic Systems Department, Universit\u00e9 de Technologie de Belfort Montbeliard, Besancon, France","institution_ids":["https://openalex.org/I53262699","https://openalex.org/I2802759292","https://openalex.org/I1294671590"]},{"raw_affiliation_string":"FEMTO-ST - Franche-Comt\u00e9 \u00c9lectronique M\u00e9canique, Thermique et Optique - Sciences et Technologies (UMR 6174) (32 avenue de l'Observatoire 25044 BESANCON CEDEX - France)","institution_ids":["https://openalex.org/I2802759292"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":3.6104,"has_fulltext":false,"cited_by_count":27,"citation_normalized_percentile":{"value":0.9339718,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"26","issue":"6","first_page":"1077","last_page":"1085"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microactuator","display_name":"Microactuator","score":0.9562267065048218},{"id":"https://openalex.org/keywords/unimorph","display_name":"Unimorph","score":0.8708078265190125},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6923117637634277},{"id":"https://openalex.org/keywords/bimorph","display_name":"Bimorph","score":0.6116277575492859},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5584654808044434},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.5494737029075623},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.5422310829162598},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.49060502648353577},{"id":"https://openalex.org/keywords/hysteresis","display_name":"Hysteresis","score":0.41324150562286377},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4097362160682678},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3913373351097107},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3869781494140625},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3022235631942749},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.11778879165649414},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.10141199827194214},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.0794278085231781}],"concepts":[{"id":"https://openalex.org/C58373989","wikidata":"https://www.wikidata.org/wiki/Q6839208","display_name":"Microactuator","level":3,"score":0.9562267065048218},{"id":"https://openalex.org/C2779055265","wikidata":"https://www.wikidata.org/wiki/Q7885234","display_name":"Unimorph","level":3,"score":0.8708078265190125},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6923117637634277},{"id":"https://openalex.org/C2778393539","wikidata":"https://www.wikidata.org/wiki/Q4913759","display_name":"Bimorph","level":3,"score":0.6116277575492859},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5584654808044434},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.5494737029075623},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.5422310829162598},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.49060502648353577},{"id":"https://openalex.org/C123299182","wikidata":"https://www.wikidata.org/wiki/Q190837","display_name":"Hysteresis","level":2,"score":0.41324150562286377},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4097362160682678},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3913373351097107},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3869781494140625},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3022235631942749},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.11778879165649414},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.10141199827194214},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0794278085231781},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tro.2010.2082032","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tro.2010.2082032","pdf_url":null,"source":{"id":"https://openalex.org/S144620930","display_name":"IEEE Transactions on Robotics","issn_l":"1552-3098","issn":["1552-3098","1546-1904","1941-0468"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Robotics","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-00546639v1","is_oa":false,"landing_page_url":"https://hal.science/hal-00546639","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Transactions on Robotics, 2010, 26 (6), pp.1077-1085. ⟨10.1109/TRO.2010.2082032⟩","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.7099999785423279,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":31,"referenced_works":["https://openalex.org/W595325313","https://openalex.org/W1523343181","https://openalex.org/W1970877688","https://openalex.org/W1986810687","https://openalex.org/W1988328306","https://openalex.org/W2027523277","https://openalex.org/W2048298714","https://openalex.org/W2063644727","https://openalex.org/W2063741163","https://openalex.org/W2072506359","https://openalex.org/W2098014231","https://openalex.org/W2101042391","https://openalex.org/W2103920070","https://openalex.org/W2104875694","https://openalex.org/W2110189618","https://openalex.org/W2136700747","https://openalex.org/W2141945233","https://openalex.org/W2142481473","https://openalex.org/W2142498250","https://openalex.org/W2150455513","https://openalex.org/W2156501557","https://openalex.org/W2158413959","https://openalex.org/W2159744384","https://openalex.org/W2243358416","https://openalex.org/W2460821334","https://openalex.org/W2543945203","https://openalex.org/W3184518629","https://openalex.org/W3212117065","https://openalex.org/W4293233726","https://openalex.org/W6729034816","https://openalex.org/W6843122951"],"related_works":["https://openalex.org/W2441799451","https://openalex.org/W2077127004","https://openalex.org/W1986000232","https://openalex.org/W1993995488","https://openalex.org/W3034624278","https://openalex.org/W2079013838","https://openalex.org/W2171620025","https://openalex.org/W2884519406","https://openalex.org/W2920431403","https://openalex.org/W2111714088"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,22,31,43,50,72,96,137],"new":[4],"hybrid":[5,94],"microactuator":[6,40],"based":[7],"on":[8],"the":[9,27,36,67,77,83,90,93,105,111,117,121,130,133,143],"combination":[10],"of":[11,92,132,139],"piezoelectric":[12,37,45,68,134],"and":[13,30,80],"thermal":[14,28,51,84,112,118],"effects.":[15],"The":[16,39],"proposed":[17],"actuator":[18],"can":[19],"perform":[20],"both":[21],"high-stroke":[23],"coarse":[24],"positioning":[25,34],"through":[26,35],"actuation":[29],"high-resolution":[32],"fine":[33],"actuation.":[38],"structure":[41],"is":[42,54,63,98,114,126],"unimorph":[44],"cantilever,":[46],"which":[47],"also":[48],"constitutes":[49],"bimorph":[52],"that":[53],"very":[55],"sensitive":[56],"to":[57,65,75,81,88,128],"temperature":[58,78],"variation.":[59],"While":[60],"electrical":[61],"voltage":[62],"used":[64,127],"control":[66,82],"actuation,":[69],"we":[70],"use":[71],"Peltier":[73],"module":[74],"provide":[76],"variation":[79],"functioning.":[85],"In":[86],"order":[87],"understand":[89],"behavior":[91],"actuator,":[95],"model":[97,109,129],"developed.":[99],"For":[100],"better":[101],"precision,":[102],"but":[103],"at":[104],"same":[106],"time":[107],"for":[108],"simplicity,":[110],"part":[113],"modeled":[115],"with":[116],"network,":[119],"whereas":[120],"Prandtl-Ishlinskii":[122],"(PI)":[123],"hysteresis":[124],"approach":[125],"nonlinearity":[131],"part.":[135],"Finally,":[136],"series":[138],"experimental":[140],"results":[141],"validate":[142],"developed":[144],"model.":[145]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":6},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}