{"id":"https://openalex.org/W4410341179","doi":"https://doi.org/10.1109/tim.2025.3568996","title":"Design and Driving Control of Cross-Scale Micro-Nano Coordinate Measuring Machine","display_name":"Design and Driving Control of Cross-Scale Micro-Nano Coordinate Measuring Machine","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4410341179","doi":"https://doi.org/10.1109/tim.2025.3568996"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3568996","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3568996","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5042515795","display_name":"Zuyang Zhang","orcid":"https://orcid.org/0009-0002-4143-1707"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zuyang Zhang","raw_affiliation_strings":["School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047493121","display_name":"Qiangxian Huang","orcid":"https://orcid.org/0000-0003-0965-5110"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiangxian Huang","raw_affiliation_strings":["School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China"],"raw_orcid":"https://orcid.org/0000-0003-0965-5110","affiliations":[{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Huijie Liu","orcid":"https://orcid.org/0009-0008-7482-843X"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huijie Liu","raw_affiliation_strings":["School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China"],"raw_orcid":"https://orcid.org/0009-0008-7482-843X","affiliations":[{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100687742","display_name":"Hongli Li","orcid":"https://orcid.org/0000-0002-7612-4080"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hongli Li","raw_affiliation_strings":["School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China"],"raw_orcid":"https://orcid.org/0000-0002-7612-4080","affiliations":[{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053231831","display_name":"Rongjun Cheng","orcid":"https://orcid.org/0000-0001-9492-7998"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rongjun Cheng","raw_affiliation_strings":["School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China"],"raw_orcid":"https://orcid.org/0000-0001-9492-7998","affiliations":[{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086502740","display_name":"Liansheng Zhang","orcid":"https://orcid.org/0000-0002-6536-0571"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liansheng Zhang","raw_affiliation_strings":["School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China"],"raw_orcid":"https://orcid.org/0000-0002-6536-0571","affiliations":[{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100750027","display_name":"Ruijun Li","orcid":"https://orcid.org/0000-0002-3743-6567"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ruijun Li","raw_affiliation_strings":["School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China"],"raw_orcid":"https://orcid.org/0000-0002-3743-6567","affiliations":[{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering and Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, No. 193, Tunxi Road, Hefei, China","institution_ids":["https://openalex.org/I16365422"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5545,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.80664808,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":97},"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"11"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9929999709129333,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9929999709129333,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9726999998092651,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.972599983215332,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scale","display_name":"Scale (ratio)","score":0.4834786057472229},{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.42114004492759705},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4020470380783081},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.34881865978240967},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3455891013145447},{"id":"https://openalex.org/keywords/automotive-engineering","display_name":"Automotive engineering","score":0.3405250310897827},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17466828227043152}],"concepts":[{"id":"https://openalex.org/C2778755073","wikidata":"https://www.wikidata.org/wiki/Q10858537","display_name":"Scale (ratio)","level":2,"score":0.4834786057472229},{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.42114004492759705},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4020470380783081},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.34881865978240967},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3455891013145447},{"id":"https://openalex.org/C171146098","wikidata":"https://www.wikidata.org/wiki/Q124192","display_name":"Automotive engineering","level":1,"score":0.3405250310897827},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17466828227043152},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3568996","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3568996","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G2167714867","display_name":null,"funder_award_id":"JZ2024HGTB0196","funder_id":"https://openalex.org/F4320335787","funder_display_name":"Fundamental Research Funds for the Central Universities"},{"id":"https://openalex.org/G3933401175","display_name":null,"funder_award_id":"51875163","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4759826327","display_name":null,"funder_award_id":"52305575","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8434824076","display_name":null,"funder_award_id":"2019YFB2004901","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null},{"id":"https://openalex.org/F4320335787","display_name":"Fundamental Research Funds for the Central Universities","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":34,"referenced_works":["https://openalex.org/W605325243","https://openalex.org/W1584025367","https://openalex.org/W1991499667","https://openalex.org/W1994525562","https://openalex.org/W2007563150","https://openalex.org/W2032918888","https://openalex.org/W2033405243","https://openalex.org/W2036032799","https://openalex.org/W2052134197","https://openalex.org/W2077311992","https://openalex.org/W2091271591","https://openalex.org/W2119011760","https://openalex.org/W2121583446","https://openalex.org/W2126942696","https://openalex.org/W2139408969","https://openalex.org/W2139754905","https://openalex.org/W2163294195","https://openalex.org/W2168942540","https://openalex.org/W2201848907","https://openalex.org/W2519135584","https://openalex.org/W2886215671","https://openalex.org/W2889275690","https://openalex.org/W2943373057","https://openalex.org/W2950523906","https://openalex.org/W2999709229","https://openalex.org/W3014680520","https://openalex.org/W3036043051","https://openalex.org/W3042810519","https://openalex.org/W4214690124","https://openalex.org/W4296112062","https://openalex.org/W4385633528","https://openalex.org/W4385653204","https://openalex.org/W4399437365","https://openalex.org/W4401590947"],"related_works":["https://openalex.org/W4392633724","https://openalex.org/W4392541026","https://openalex.org/W4403260262","https://openalex.org/W2004288825","https://openalex.org/W4401380321","https://openalex.org/W4404414779","https://openalex.org/W2523793464","https://openalex.org/W4404819013","https://openalex.org/W2631168066","https://openalex.org/W2358190750"],"abstract_inverted_index":{"In":[0,199],"the":[1,7,15,26,54,58,77,91,99,104,107,133,197,202,205,207,231,234,244,252,278,300],"field":[2],"of":[3,10,65,98,106,132,139,196,201,204,233,251,273],"advanced":[4],"manufacturing,":[5],"with":[6,53,170,182],"rapid":[8,130],"development":[9],"micromachining":[11],"and":[12,31,57,69,81,94,119,129,177,192,213,230,293],"microelectromechanical":[13],"systems,":[14],"demand":[16],"for":[17,167,298],"3D":[18,115,245,286],"high-precision":[19,32,128],"measurement":[20,50,72,219,283,303],"is":[21,42,52,95,153,254,260],"increasingly":[22],"urgent.":[23],"To":[24],"address":[25],"contradiction":[27],"between":[28],"large-stroke":[29,116],"motion":[30,100,108,111,137],"measurement,":[33],"a":[34,114,120,136,171,183],"new":[35],"cross-scale":[36],"micro-nano":[37,302],"coordinate":[38],"measuring":[39,48],"machine":[40],"(CSMN-CMM)":[41],"developed":[43,149,279],"in":[44,83,243,285],"this":[45],"paper.":[46],"The":[47,61,85,110,148,247],"machine\u2019s":[49],"method":[51],"probe":[55,235],"fixed":[56],"worktable(workpiece)":[59],"moving.":[60],"metrology":[62,87],"system":[63,88,112],"consists":[64],"three-axis":[66],"laser":[67],"interferometers":[68],"an":[70],"angle":[71],"system,":[73,101],"which":[74,102,125,259],"can":[75,126,159],"measure":[76],"worktable\u2019s":[78],"spatial":[79,193],"coordinates":[80],"posture":[82,194],"real-time.":[84],"entire":[86],"adheres":[89],"to":[90,217],"Abbe":[92],"principle":[93],"also":[96],"independent":[97],"avoids":[103],"influence":[105],"system.":[109],"comprises":[113],"macro-motion":[117],"stage":[118,152],"six-degree-of-freedom":[121],"(6-DOF)":[122],"micro-motion":[123,151],"stage,":[124],"achieve":[127,160,223],"driving":[131,191],"worktable":[134],"within":[135],"range":[138],"100":[140,143,146],"mm":[141,144],"\u00d7":[142,145,266],"mm.":[147],"6-DOF":[150],"driven":[154],"through":[155],"piezoelectric":[156],"ceramics.":[157],"It":[158,188],"more":[161],"than":[162,174,186,227,237,262],"20":[163,238],"\u03bcm":[164],"linear":[165],"displacement":[166,181],"each":[168],"axis":[169],"resolution":[172,184],"better":[173,185,226,236,261],"0.56":[175],"nm":[176,229,239],"over":[178],"27\u2033":[179],"angular":[180],"0.09\u2033.":[187],"ensures":[189],"precise":[190],"adjustment":[195],"worktable.":[198],"terms":[200],"control":[203],"CSMN-CMM,":[206],"paper":[208],"proposes":[209],"macro-micro":[210],"collaborative":[211],"positioning":[212,224],"secondary":[214],"triggering":[215],"strategies":[216,222],"enhance":[218],"performances.":[220],"These":[221],"accuracy":[225],"6.4":[228],"repeatability":[232],"(<italic":[240],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[241,268],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">k</i>=1)":[242],"direction.":[246],"maximum":[248],"permissible":[249],"error":[250],"CSMN-CMM":[253,280],"evaluated":[255],"following":[256],"ISO":[257],"10360-2,":[258],"\u00b1(250":[263],"+":[264],"3.6":[265],"10<sup":[267],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-6</sup>L)":[269],"nm.":[270],"A":[271],"series":[272],"experimental":[274],"results":[275],"shows":[276],"that":[277],"has":[281],"outstanding":[282],"performance":[284],"space.":[287],"Furthermore,":[288],"its":[289],"innovative":[290],"structural":[291],"design":[292],"key":[294],"technologies":[295],"are":[296],"important":[297],"enhancing":[299],"current":[301],"technology.":[304]},"counts_by_year":[{"year":2025,"cited_by_count":3}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}