{"id":"https://openalex.org/W4409916834","doi":"https://doi.org/10.1109/tim.2025.3565346","title":"Opportunities and Challenges in Using Modulated Electrostatic Softening in FM MEMS Accelerometers","display_name":"Opportunities and Challenges in Using Modulated Electrostatic Softening in FM MEMS Accelerometers","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4409916834","doi":"https://doi.org/10.1109/tim.2025.3565346"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3565346","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3565346","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5071787051","display_name":"Christian Padovani","orcid":"https://orcid.org/0000-0001-5935-1639"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Christian Padovani","raw_affiliation_strings":["Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy","Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy"],"raw_orcid":"https://orcid.org/0000-0001-5935-1639","affiliations":[{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5115752459","display_name":"Luca Pileri","orcid":"https://orcid.org/0009-0000-2555-987X"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Luca Pileri","raw_affiliation_strings":["Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy","Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy"],"raw_orcid":"https://orcid.org/0009-0000-2555-987X","affiliations":[{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002570817","display_name":"Leonardo Gaffuri Pagani","orcid":"https://orcid.org/0000-0001-9914-5717"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Leonardo Gaffuri Pagani","raw_affiliation_strings":["Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy","Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy"],"raw_orcid":"https://orcid.org/0000-0001-9914-5717","affiliations":[{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109209127","display_name":"Philippe Robert","orcid":null},"institutions":[{"id":"https://openalex.org/I2738703131","display_name":"Commissariat \u00e0 l'\u00c9nergie Atomique et aux \u00c9nergies Alternatives","ror":"https://ror.org/00jjx8s55","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131"]},{"id":"https://openalex.org/I4210150049","display_name":"Laboratoire d'\u00c9lectronique des Technologies de l'Information","ror":"https://ror.org/04mf0wv34","country_code":"FR","type":"government","lineage":["https://openalex.org/I2738703131","https://openalex.org/I2738703131","https://openalex.org/I4210117989","https://openalex.org/I4210150049"]},{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["FR","IT"],"is_corresponding":false,"raw_author_name":"Philippe Robert","raw_affiliation_strings":["CEA-Leti, Université Grenoble Alpes, Grenoble, France","Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy"],"raw_orcid":"https://orcid.org/0009-0001-2765-1896","affiliations":[{"raw_affiliation_string":"CEA-Leti, Université Grenoble Alpes, Grenoble, France","institution_ids":["https://openalex.org/I2738703131","https://openalex.org/I4210150049"]},{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072082930","display_name":"Giacomo Langfelder","orcid":"https://orcid.org/0000-0002-2997-834X"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Giacomo Langfelder","raw_affiliation_strings":["Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy","Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy"],"raw_orcid":"https://orcid.org/0000-0002-2997-834X","affiliations":[{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Milan, Italy","institution_ids":["https://openalex.org/I93860229"]},{"raw_affiliation_string":"Dipartimento di Elettronica, Informazione e Bioingegneria, Politecnico di Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.3193,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.49705785,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9905999898910522,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9901999831199646,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8481909036636353},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.725898027420044},{"id":"https://openalex.org/keywords/frequency-modulation","display_name":"Frequency modulation","score":0.5002257823944092},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.45992761850357056},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4500282108783722},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4437209367752075},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3670923709869385},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.35909438133239746},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3350537419319153},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.30834296345710754},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.29172101616859436},{"id":"https://openalex.org/keywords/radio-frequency","display_name":"Radio frequency","score":0.190434068441391}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8481909036636353},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.725898027420044},{"id":"https://openalex.org/C11930861","wikidata":"https://www.wikidata.org/wiki/Q181417","display_name":"Frequency modulation","level":3,"score":0.5002257823944092},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.45992761850357056},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4500282108783722},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4437209367752075},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3670923709869385},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.35909438133239746},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3350537419319153},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.30834296345710754},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.29172101616859436},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.190434068441391},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tim.2025.3565346","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3565346","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},{"id":"pmh:oai:re.public.polimi.it:11311/1308920","is_oa":false,"landing_page_url":"https://hdl.handle.net/11311/1308920","pdf_url":null,"source":{"id":"https://openalex.org/S4306400312","display_name":"Virtual Community of Pathological Anatomy (University of Castilla La Mancha)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I79189158","host_organization_name":"University of Castilla-La Mancha","host_organization_lineage":["https://openalex.org/I79189158"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W2095276977","https://openalex.org/W2579718039","https://openalex.org/W2734608556","https://openalex.org/W2760396274","https://openalex.org/W2841366494","https://openalex.org/W2900806108","https://openalex.org/W2938234592","https://openalex.org/W2951340805","https://openalex.org/W2980746192","https://openalex.org/W2980848758","https://openalex.org/W3024067083","https://openalex.org/W3174248627","https://openalex.org/W4211255104","https://openalex.org/W4281636334","https://openalex.org/W4312050997","https://openalex.org/W4312913939","https://openalex.org/W4366978655","https://openalex.org/W4385627185","https://openalex.org/W4391248586","https://openalex.org/W4392024856","https://openalex.org/W4395030433","https://openalex.org/W4395054255"],"related_works":["https://openalex.org/W2765080098","https://openalex.org/W2385749422","https://openalex.org/W2272290532","https://openalex.org/W2355290145","https://openalex.org/W2353465659","https://openalex.org/W2009888974","https://openalex.org/W2355539379","https://openalex.org/W3161496874","https://openalex.org/W2026330382","https://openalex.org/W2915680872"],"abstract_inverted_index":{"This":[0],"work":[1],"advances":[2],"the":[3,28,44,61,66,83,98,105],"research":[4],"on":[5],"time-switched":[6],"frequency-modulated":[7],"(FM)":[8],"accelerometers":[9],"by":[10,71,82],"presenting":[11],"both":[12],"a":[13,17,75,88],"new":[14,18],"device":[15],"and":[16,94,114],"measurement":[19],"architecture.":[20],"The":[21,51],"sensor":[22],"exploits":[23],"nano-piezoresistive":[24],"gauges":[25],"to":[26,33,74,110],"minimize":[27],"oscillator":[29],"frequency":[30],"noise":[31,72],"down":[32],"sub":[34],"sub-10":[35],"\u03bcg/":[36],"\u221a":[37],"Hz":[38],"equivalent":[39],"acceleration":[40],"density,":[41],"while":[42],"at":[43,122],"same":[45],"time":[46],"holding":[47],"almost":[48,123],"100-g":[49],"full-scale.":[50],"corresponding":[52],"dynamic":[53],"range":[54],"is":[55,69,100],"promising":[56],"for":[57],"several":[58],"applications;":[59],"however,":[60],"paper":[62],"also":[63],"shows":[64],"how":[65],"theoretical":[67],"performance":[68],"affected":[70],"associated":[73],"pair":[76],"of":[77,91],"modulating":[78],"voltage":[79],"waveforms,":[80],"required":[81],"specific":[84],"working":[85],"principle.":[86],"Exploiting":[87],"digital":[89],"generation":[90],"these":[92],"waves":[93],"low-noise":[95],"digital-to-analog":[96],"converters,":[97],"effect":[99],"only":[101],"partially":[102],"mitigated.":[103],"Nevertheless,":[104],"system":[106],"experimentally":[107],"reaches":[108],"up":[109],"65":[111],"g":[112],"full-scale,":[113],"holds":[115],"as":[116,118],"low":[117],"30":[119],"\u03bcg":[120],"stability":[121],"1000":[124],"s":[125],"observation":[126],"interval.":[127]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}