{"id":"https://openalex.org/W4410115284","doi":"https://doi.org/10.1109/tim.2025.3565339","title":"An Investigation of the Planar 3-DOF Nanoscale Positioning Measurement Method Based on Cross-Encoded Pattern","display_name":"An Investigation of the Planar 3-DOF Nanoscale Positioning Measurement Method Based on Cross-Encoded Pattern","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4410115284","doi":"https://doi.org/10.1109/tim.2025.3565339"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3565339","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3565339","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112588575","display_name":"Weien Yu","orcid":"https://orcid.org/0009-0003-2852-9977"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4210104064","display_name":"Shenzhen Academy of Robotics","ror":"https://ror.org/01h027j09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210104064"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Weien Yu","raw_affiliation_strings":["School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4210104064"]},{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010539180","display_name":"Zijian Zhu","orcid":"https://orcid.org/0000-0001-6809-4478"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4210104064","display_name":"Shenzhen Academy of Robotics","ror":"https://ror.org/01h027j09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210104064"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zijian Zhu","raw_affiliation_strings":["School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4210104064"]},{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046393276","display_name":"Chenyang Zhao","orcid":"https://orcid.org/0000-0002-9096-4094"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4210104064","display_name":"Shenzhen Academy of Robotics","ror":"https://ror.org/01h027j09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210104064"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chenyang Zhao","raw_affiliation_strings":["School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4210104064"]},{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040589905","display_name":"Yueping Xi","orcid":null},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4210104064","display_name":"Shenzhen Academy of Robotics","ror":"https://ror.org/01h027j09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210104064"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yueping Xi","raw_affiliation_strings":["School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4210104064"]},{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100397741","display_name":"Yang Yang","orcid":"https://orcid.org/0000-0003-1434-1351"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4210104064","display_name":"Shenzhen Academy of Robotics","ror":"https://ror.org/01h027j09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210104064"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yang Yang","raw_affiliation_strings":["School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4210104064"]},{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5007302581","display_name":"Qiaozhi Lei","orcid":null},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4210104064","display_name":"Shenzhen Academy of Robotics","ror":"https://ror.org/01h027j09","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4210104064"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiaozhi Lei","raw_affiliation_strings":["School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology at Shenzhen, Shenzhen, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4210104064"]},{"raw_affiliation_string":"School of Robotics and Advanced Manufacture, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5112588575"],"corresponding_institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4210104064"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.08920705,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"14"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9718999862670898,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9692000150680542,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.6276708841323853},{"id":"https://openalex.org/keywords/nanoscopic-scale","display_name":"Nanoscopic scale","score":0.46087509393692017},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.40511637926101685},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3876326084136963},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.16236084699630737},{"id":"https://openalex.org/keywords/computer-graphics","display_name":"Computer graphics (images)","score":0.12434732913970947}],"concepts":[{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.6276708841323853},{"id":"https://openalex.org/C45206210","wikidata":"https://www.wikidata.org/wiki/Q2415817","display_name":"Nanoscopic scale","level":2,"score":0.46087509393692017},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.40511637926101685},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3876326084136963},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.16236084699630737},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.12434732913970947}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3565339","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3565339","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1555035566","display_name":null,"funder_award_id":"52475552","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5108669786","display_name":null,"funder_award_id":"JCYJ20241202123900002","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":42,"referenced_works":["https://openalex.org/W605325243","https://openalex.org/W1552860831","https://openalex.org/W2002913391","https://openalex.org/W2011070003","https://openalex.org/W2045725879","https://openalex.org/W2049437769","https://openalex.org/W2059521238","https://openalex.org/W2096626327","https://openalex.org/W2102517905","https://openalex.org/W2102845579","https://openalex.org/W2267603885","https://openalex.org/W2643894468","https://openalex.org/W2765548941","https://openalex.org/W2782510306","https://openalex.org/W2901449746","https://openalex.org/W2911967554","https://openalex.org/W2944321146","https://openalex.org/W2966491189","https://openalex.org/W2999675216","https://openalex.org/W3007499788","https://openalex.org/W3120191354","https://openalex.org/W3168753705","https://openalex.org/W3206364857","https://openalex.org/W3214287952","https://openalex.org/W4213450148","https://openalex.org/W4220857311","https://openalex.org/W4223507758","https://openalex.org/W4224276958","https://openalex.org/W4321195916","https://openalex.org/W4366472736","https://openalex.org/W4366524202","https://openalex.org/W4385609232","https://openalex.org/W4388774883","https://openalex.org/W4390616399","https://openalex.org/W4391188600","https://openalex.org/W4392387627","https://openalex.org/W4396671557","https://openalex.org/W4400066956","https://openalex.org/W4402202636","https://openalex.org/W4402875837","https://openalex.org/W4404480706","https://openalex.org/W4405908125"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W4404995717","https://openalex.org/W2016187641","https://openalex.org/W4404725684","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W4409278740","https://openalex.org/W2898370298"],"abstract_inverted_index":{"Precision":[0],"positioning":[1,95],"measurement":[2,21,38,58,81,96,159,184],"technology":[3,108],"based":[4,23,98],"on":[5,24,57,99,134],"micro-vision":[6],"has":[7],"important":[8],"applications":[9],"in":[10],"high-end":[11],"manufacturing":[12],"fields":[13],"such":[14],"as":[15],"semiconductors":[16],"and":[17,34,68,117,175,182,198],"machine":[18],"tools.":[19],"Currently,":[20],"methods":[22,42],"pseudo-periodic":[25,65],"patterns":[26,33,116],"can":[27],"break":[28],"the":[29,46,61,69,80,111,115,119,123,126,130,140,150,158,165,183,195],"limitations":[30],"of":[31,48,64,114,122,132,139,172,179],"periodic":[32],"achieve":[35],"a":[36,91,169,189],"larger":[37],"range.":[39,82,160],"However,":[40],"existing":[41],"have":[43],"not":[44],"considered":[45],"impact":[47,131],"defocus":[49,133],"caused":[50],"by":[51],"large-range":[52],"displacement":[53,192],"or":[54],"assembly":[55],"misalignment":[56],"accuracy.":[59],"Additionally,":[60],"physical":[62],"period":[63],"encoding":[66,118],"units":[67],"bit":[70],"number":[71],"are":[72],"interdependent,":[73],"which":[74,148],"requires":[75],"careful":[76],"trade-offs":[77],"when":[78],"expanding":[79],"To":[83],"address":[84],"these":[85],"issues,":[86],"this":[87],"paper":[88],"innovatively":[89],"proposes":[90],"plane":[92],"3-DOF":[93],"nanoscale":[94,201],"method":[97,128,167],"Adaptive":[100],"Cross-Encoded":[101],"Pattern":[102],"(ACEP).":[103],"By":[104],"utilizing":[105],"high-precision":[106],"etching":[107],"to":[109,153,156],"ensure":[110],"center":[112],"information":[113,121],"size":[120,152],"pattern":[124,142,151],"units,":[125],"proposed":[127,166],"mitigates":[129],"measurement.":[135],"A":[136],"key":[137],"advantage":[138],"cross-encoded":[141],"design":[143],"is":[144],"its":[145],"range":[146],"scalability,":[147],"allows":[149],"be":[154],"adjusted":[155],"extend":[157],"Experimental":[161],"results":[162],"show":[163],"that":[164],"achieves":[168],"linear":[170],"resolution":[171,178],"20":[173,180],"nm":[174],"an":[176],"angular":[177],"seconds,":[181],"accuracy":[185],"remains":[186],"stable":[187],"over":[188],"9":[190],"mm":[191],"range,":[193],"demonstrating":[194],"method\u2019s":[196],"effectiveness":[197],"stability":[199],"at":[200],"precision.":[202]},"counts_by_year":[],"updated_date":"2026-04-09T08:11:56.329763","created_date":"2025-10-10T00:00:00"}