{"id":"https://openalex.org/W4409883081","doi":"https://doi.org/10.1109/tim.2025.3565066","title":"Statistical-Analysis-Based Imaging-Free Method for Efficient and Fast Wafer Defect Detection","display_name":"Statistical-Analysis-Based Imaging-Free Method for Efficient and Fast Wafer Defect Detection","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4409883081","doi":"https://doi.org/10.1109/tim.2025.3565066"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3565066","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3565066","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5073362217","display_name":"Xiang Zhong","orcid":"https://orcid.org/0000-0003-4501-4724"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiang Zhong","raw_affiliation_strings":["Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China"],"raw_orcid":"https://orcid.org/0000-0003-4501-4724","affiliations":[{"raw_affiliation_string":"Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065858684","display_name":"Yu Sun","orcid":"https://orcid.org/0009-0001-1630-0150"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Sun","raw_affiliation_strings":["Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China"],"raw_orcid":"https://orcid.org/0009-0001-1630-0150","affiliations":[{"raw_affiliation_string":"Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Guangcheng Zhou","orcid":"https://orcid.org/0009-0005-6790-2193"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guangcheng Zhou","raw_affiliation_strings":["Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China"],"raw_orcid":"https://orcid.org/0009-0005-6790-2193","affiliations":[{"raw_affiliation_string":"Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Yujia Liu","orcid":"https://orcid.org/0009-0002-6974-2443"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yujia Liu","raw_affiliation_strings":["Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China"],"raw_orcid":"https://orcid.org/0009-0002-6974-2443","affiliations":[{"raw_affiliation_string":"Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Yikai Zhu","orcid":"https://orcid.org/0009-0000-5131-7700"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]},{"id":"https://openalex.org/I204512498","display_name":"University of Macau","ror":"https://ror.org/01r4q9n85","country_code":"MO","type":"education","lineage":["https://openalex.org/I204512498"]}],"countries":["CN","MO"],"is_corresponding":false,"raw_author_name":"Yikai Zhu","raw_affiliation_strings":["Institute of Applied Physics and Material Engineering, University of Macau, Macau, China","School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China"],"raw_orcid":"https://orcid.org/0009-0000-5131-7700","affiliations":[{"raw_affiliation_string":"Institute of Applied Physics and Material Engineering, University of Macau, Macau, China","institution_ids":["https://openalex.org/I204512498"]},{"raw_affiliation_string":"School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000621513","display_name":"Huaxia Deng","orcid":"https://orcid.org/0000-0002-6529-6071"},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huaxia Deng","raw_affiliation_strings":["Department of Modern Mechanics, CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei, China"],"raw_orcid":"https://orcid.org/0000-0002-6529-6071","affiliations":[{"raw_affiliation_string":"Department of Modern Mechanics, CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei, China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034493250","display_name":"Mengchao Ma","orcid":"https://orcid.org/0000-0001-9682-7499"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mengchao Ma","raw_affiliation_strings":["Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China"],"raw_orcid":"https://orcid.org/0000-0001-9682-7499","affiliations":[{"raw_affiliation_string":"Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Dong Chen","orcid":"https://orcid.org/0009-0009-0434-4437"},"institutions":[{"id":"https://openalex.org/I16365422","display_name":"Hefei University of Technology","ror":"https://ror.org/02czkny70","country_code":"CN","type":"education","lineage":["https://openalex.org/I16365422"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dong Chen","raw_affiliation_strings":["Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China"],"raw_orcid":"https://orcid.org/0009-0009-0434-4437","affiliations":[{"raw_affiliation_string":"Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]},{"raw_affiliation_string":"School of Instrument Science and OptoElectronics Engineering, Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei University of Technology, Hefei, Anhui, China","institution_ids":["https://openalex.org/I16365422"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5078908602","display_name":"Xinglong Gong","orcid":"https://orcid.org/0000-0001-6997-9526"},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xinglong Gong","raw_affiliation_strings":["Department of Modern Mechanics, CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei, China"],"raw_orcid":"https://orcid.org/0000-0001-6997-9526","affiliations":[{"raw_affiliation_string":"Department of Modern Mechanics, CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei, China","institution_ids":["https://openalex.org/I126520041"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":9,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.9045,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.74997763,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.9943000078201294,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6153215169906616},{"id":"https://openalex.org/keywords/statistical-analysis","display_name":"Statistical analysis","score":0.5124674439430237},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.46048837900161743},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.38339847326278687},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.31092238426208496},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.17875909805297852},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.15148001909255981},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.13328635692596436}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6153215169906616},{"id":"https://openalex.org/C2986587452","wikidata":"https://www.wikidata.org/wiki/Q938438","display_name":"Statistical analysis","level":2,"score":0.5124674439430237},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.46048837900161743},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.38339847326278687},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.31092238426208496},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.17875909805297852},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.15148001909255981},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.13328635692596436}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3565066","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3565066","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1133995069","display_name":null,"funder_award_id":"52275529","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G1238233939","display_name":"\u5fae\u632f\u52a8\u78c1\u6d41\u53d8\u9694\u632f\u6280\u672f\u529b\u5b66\u673a\u7406\u7814\u7a76","funder_award_id":"11872167","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6633998076","display_name":null,"funder_award_id":"2208085ME138","funder_id":"https://openalex.org/F4320334897","funder_display_name":"Natural Science Foundation of Anhui Province"},{"id":"https://openalex.org/G8663157365","display_name":null,"funder_award_id":"1908085J15","funder_id":"https://openalex.org/F4320334897","funder_display_name":"Natural Science Foundation of Anhui Province"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320334897","display_name":"Natural Science Foundation of Anhui Province","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W1886440916","https://openalex.org/W1982669816","https://openalex.org/W2023887016","https://openalex.org/W2025298711","https://openalex.org/W2186511346","https://openalex.org/W2531409750","https://openalex.org/W2790607928","https://openalex.org/W2905203854","https://openalex.org/W2920311927","https://openalex.org/W2921363509","https://openalex.org/W2947899480","https://openalex.org/W2972179887","https://openalex.org/W2982601582","https://openalex.org/W3005244013","https://openalex.org/W3015660322","https://openalex.org/W3043781331","https://openalex.org/W3092475774","https://openalex.org/W3165012668","https://openalex.org/W4212795644","https://openalex.org/W4225113999","https://openalex.org/W4243150065","https://openalex.org/W4312545832","https://openalex.org/W4367598041","https://openalex.org/W4385151536"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W4404995717","https://openalex.org/W2016187641","https://openalex.org/W4404725684","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W4409278740","https://openalex.org/W2898370298"],"abstract_inverted_index":null,"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}