{"id":"https://openalex.org/W4409102486","doi":"https://doi.org/10.1109/tim.2025.3557115","title":"Enhanced Heterodyne Grating Interferometer for Simultaneously Measuring Tri-Axial Linear Motions","display_name":"Enhanced Heterodyne Grating Interferometer for Simultaneously Measuring Tri-Axial Linear Motions","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4409102486","doi":"https://doi.org/10.1109/tim.2025.3557115"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3557115","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3557115","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5087092408","display_name":"Xingyou Chen","orcid":"https://orcid.org/0000-0002-3986-5090"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xingyou Chen","raw_affiliation_strings":["School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, JS, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, JS, China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075198432","display_name":"Peng Huang","orcid":"https://orcid.org/0000-0002-1133-0713"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Peng Huang","raw_affiliation_strings":["School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, JS, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, JS, China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103205239","display_name":"Limin Zhu","orcid":"https://orcid.org/0000-0003-3194-6731"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Limin Zhu","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China","School of Mechanical Engineering, State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China","institution_ids":["https://openalex.org/I183067930"]},{"raw_affiliation_string":"School of Mechanical Engineering, State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5017594767","display_name":"Zhiwei Zhu","orcid":"https://orcid.org/0000-0001-5363-9797"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhiwei Zhu","raw_affiliation_strings":["School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, JS, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]},{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, JS, China","institution_ids":["https://openalex.org/I36399199"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5087092408"],"corresponding_institution_ids":["https://openalex.org/I36399199"],"apc_list":null,"apc_paid":null,"fwci":2.2352,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.86078178,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":99},"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9970999956130981,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.991100013256073,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.8248869180679321},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.7205977439880371},{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.6891822218894958},{"id":"https://openalex.org/keywords/heterodyne","display_name":"Heterodyne (poetry)","score":0.6112174391746521},{"id":"https://openalex.org/keywords/diffraction-grating","display_name":"Diffraction grating","score":0.5497007966041565},{"id":"https://openalex.org/keywords/astronomical-interferometer","display_name":"Astronomical interferometer","score":0.5033547282218933},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.4855179786682129},{"id":"https://openalex.org/keywords/heterodyne-detection","display_name":"Heterodyne detection","score":0.43359804153442383},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.1705905795097351},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.10806718468666077}],"concepts":[{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.8248869180679321},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7205977439880371},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.6891822218894958},{"id":"https://openalex.org/C2780497637","wikidata":"https://www.wikidata.org/wiki/Q16938394","display_name":"Heterodyne (poetry)","level":2,"score":0.6112174391746521},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.5497007966041565},{"id":"https://openalex.org/C23576306","wikidata":"https://www.wikidata.org/wiki/Q17004698","display_name":"Astronomical interferometer","level":3,"score":0.5033547282218933},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4855179786682129},{"id":"https://openalex.org/C204003914","wikidata":"https://www.wikidata.org/wiki/Q760140","display_name":"Heterodyne detection","level":3,"score":0.43359804153442383},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.1705905795097351},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.10806718468666077}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3557115","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3557115","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6000000238418579,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G5174273425","display_name":null,"funder_award_id":"52275437","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8548649224","display_name":null,"funder_award_id":"2024ZD0709701","funder_id":"https://openalex.org/F4320335960","funder_display_name":"National Major Science and Technology Projects of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335960","display_name":"National Major Science and Technology Projects of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W605325243","https://openalex.org/W1996813926","https://openalex.org/W1997491027","https://openalex.org/W2004608206","https://openalex.org/W2009058820","https://openalex.org/W2039924400","https://openalex.org/W2052506786","https://openalex.org/W2065139347","https://openalex.org/W2095575090","https://openalex.org/W2101507576","https://openalex.org/W2144531427","https://openalex.org/W2488476694","https://openalex.org/W2562533422","https://openalex.org/W2592581518","https://openalex.org/W2774909030","https://openalex.org/W2950721209","https://openalex.org/W2999675216","https://openalex.org/W3135622127","https://openalex.org/W3166844897","https://openalex.org/W4224211461","https://openalex.org/W4312840751","https://openalex.org/W4377235122","https://openalex.org/W4379409047","https://openalex.org/W4387489346","https://openalex.org/W4391133554","https://openalex.org/W4403931400"],"related_works":["https://openalex.org/W2027773797","https://openalex.org/W4321451613","https://openalex.org/W2548610840","https://openalex.org/W2093030608","https://openalex.org/W2047104693","https://openalex.org/W4320929577","https://openalex.org/W1964388845","https://openalex.org/W2068253946","https://openalex.org/W2073524920","https://openalex.org/W2364953721"],"abstract_inverted_index":{"A":[0],"novel":[1],"Heterodyne":[2],"Grating":[3],"Interferometer":[4],"(HTGI)":[5],"with":[6,23,66,106],"a":[7,24,31,128,139],"rotationally":[8],"symmetric":[9],"optical":[10],"configuration":[11],"is":[12],"proposed":[13,155],"to":[14,64,86],"achieve":[15],"the":[16,41,56,69,83,90,119,124,151,154],"simultaneous":[17],"measurement":[18],"of":[19,62,135,145,153],"tri-axial":[20,125],"linear":[21],"motions":[22,97,117],"large":[25,32,93],"<italic":[26,33,94,131,140],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[27,34,43,95,132,141],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">Z</i>-axis":[28,35,96,133,142],"range":[29,134],"and":[30,98,110,138],"rotation":[36,143],"tolerance.":[37],"In":[38,73],"this":[39,74],"design,":[40],"\u00b11-<italic":[42],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">st</i>":[44],"order":[45],"diffracted":[46],"beams":[47,77],"from":[48,68],"one":[49],"incident":[50,71],"beam":[51],"were":[52,147],"purposely":[53],"rotated":[54],"around":[55],"central":[57],"axis":[58],"by":[59,113],"an":[60],"angle":[61],"180\u00b0":[63],"interfere":[65],"them":[67],"other":[70],"beam.":[72],"configuration,":[75],"all":[76,123],"can":[78],"shift":[79],"identical":[80],"distances":[81],"along":[82],"same":[84],"direction":[85],"maintain":[87],"interference,":[88],"when":[89],"grating":[91],"has":[92],"rotations.":[99],"Experimental":[100],"testing":[101],"demonstrates":[102],"high":[103],"linearities":[104],"comparable":[105],"commercial":[107],"capacitive":[108],"sensors,":[109],"sub-nanometric":[111],"resolutions":[112],"identifying":[114],"0.25":[115],"nm":[116],"via":[118],"spectrum":[120],"analysis":[121],"for":[122],"measurements.":[126],"Moreover,":[127],"greatly":[129],"extended":[130],"7.6":[136],"mm":[137],"tolerance":[144],"0.75\u00b0":[146],"achieved,":[148],"well":[149],"demonstrating":[150],"superiority":[152],"design.":[156]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}