{"id":"https://openalex.org/W4408520772","doi":"https://doi.org/10.1109/tim.2025.3551441","title":"Piezoelectric Microcantilevered Plate Resonators Utilizing Flexural-Based 2-D Modes for Individually Sensing Density and Viscosity in Liquids","display_name":"Piezoelectric Microcantilevered Plate Resonators Utilizing Flexural-Based 2-D Modes for Individually Sensing Density and Viscosity in Liquids","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4408520772","doi":"https://doi.org/10.1109/tim.2025.3551441"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3551441","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3551441","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056076113","display_name":"Linya Huang","orcid":"https://orcid.org/0000-0002-2427-5135"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Linya Huang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101445445","display_name":"Gang Niu","orcid":"https://orcid.org/0000-0002-8813-8885"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Gang Niu","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060819626","display_name":"Lu Wang","orcid":"https://orcid.org/0000-0003-4171-5873"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lu Wang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, the School of Instrument Science and Technology, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, and the State Industry-Education Integration Center for Medical Innovations, Xi'an Jiaotong University, Xi&#x2019;an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, the School of Instrument Science and Technology, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, and the State Industry-Education Integration Center for Medical Innovations, Xi'an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076617776","display_name":"He\u2010Ping Wu","orcid":"https://orcid.org/0000-0002-8587-4035"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Heping Wu","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011664868","display_name":"Renjie Tan","orcid":"https://orcid.org/0000-0002-8019-2131"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Renjie Tan","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, the School of Instrument Science and Technology, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, and the State Industry-Education Integration Center for Medical Innovations, Xi'an Jiaotong University, Xi&#x2019;an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, the School of Instrument Science and Technology, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, and the State Industry-Education Integration Center for Medical Innovations, Xi'an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113262958","display_name":"Ren Xin","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xin Ren","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031165365","display_name":"Wei Ren","orcid":"https://orcid.org/0000-0001-9749-0699"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Ren","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, and the Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072118178","display_name":"Libo Zhao","orcid":"https://orcid.org/0000-0001-6101-8173"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Libo Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, the School of Instrument Science and Technology, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, and the State Industry-Education Integration Center for Medical Innovations, Xi'an Jiaotong University, Xi&#x2019;an, China","International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, the School of Instrument Science and Technology, Xi'an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, and the State Industry-Education Integration Center for Medical Innovations, Xi'an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5056076113"],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":null,"apc_paid":null,"fwci":1.3683,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.78371316,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":97,"max":99},"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"10"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.9886999726295471,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.7794051170349121},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7288384437561035},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7270147800445557},{"id":"https://openalex.org/keywords/viscosity","display_name":"Viscosity","score":0.6954463124275208},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.6556360125541687},{"id":"https://openalex.org/keywords/flexural-strength","display_name":"Flexural strength","score":0.6410629749298096},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5903586149215698},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.3810596466064453},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.30064713954925537},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17613717913627625}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7794051170349121},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7288384437561035},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7270147800445557},{"id":"https://openalex.org/C127172972","wikidata":"https://www.wikidata.org/wiki/Q128709","display_name":"Viscosity","level":2,"score":0.6954463124275208},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.6556360125541687},{"id":"https://openalex.org/C178405089","wikidata":"https://www.wikidata.org/wiki/Q857201","display_name":"Flexural strength","level":2,"score":0.6410629749298096},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5903586149215698},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3810596466064453},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.30064713954925537},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17613717913627625}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3551441","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3551441","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.5199999809265137}],"awards":[{"id":"https://openalex.org/G2108795426","display_name":null,"funder_award_id":"2024YFB4611800","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G8671733778","display_name":null,"funder_award_id":"52305131","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":37,"referenced_works":["https://openalex.org/W1974553368","https://openalex.org/W2014131326","https://openalex.org/W2015032711","https://openalex.org/W2030150077","https://openalex.org/W2062040673","https://openalex.org/W2074433209","https://openalex.org/W2142681107","https://openalex.org/W2285605407","https://openalex.org/W2328004186","https://openalex.org/W2412453414","https://openalex.org/W2530031888","https://openalex.org/W2584547223","https://openalex.org/W2612858585","https://openalex.org/W2762302621","https://openalex.org/W2769579972","https://openalex.org/W2790120457","https://openalex.org/W2896773124","https://openalex.org/W2897424120","https://openalex.org/W2903418616","https://openalex.org/W2919563208","https://openalex.org/W2939366901","https://openalex.org/W2971809179","https://openalex.org/W3008189076","https://openalex.org/W3008566508","https://openalex.org/W3137770068","https://openalex.org/W3201142926","https://openalex.org/W3203142789","https://openalex.org/W3212516588","https://openalex.org/W4214871908","https://openalex.org/W4229783971","https://openalex.org/W4285234766","https://openalex.org/W4313577389","https://openalex.org/W4318447351","https://openalex.org/W4319342218","https://openalex.org/W4360618370","https://openalex.org/W4392455208","https://openalex.org/W4393241003"],"related_works":["https://openalex.org/W2107125189","https://openalex.org/W2760996480","https://openalex.org/W2303727101","https://openalex.org/W2368223165","https://openalex.org/W2357307510","https://openalex.org/W2286084298","https://openalex.org/W1966104931","https://openalex.org/W2104720263","https://openalex.org/W2889334434","https://openalex.org/W2076349672"],"abstract_inverted_index":{"This":[0],"article":[1],"investigates":[2],"a":[3,133],"piezoelectric":[4,63,119],"microcantilevered":[5],"wide-plate":[6],"resonator":[7,21,120],"for":[8,54,130,146,186,208],"liquid":[9,30,85,188,216],"sensing.":[10],"The":[11,32,87,117,193],"higher":[12],"order":[13],"flexural":[14,43],"mode":[15,44],"featuring":[16],"2-D":[17,202],"vibration":[18],"of":[19,96,114,128,135,201],"the":[20,55,62,91,108,115,150,187,198],"is":[22,68],"exploited":[23],"to":[24,76,156],"enable":[25],"precise":[26],"measurements":[27],"under":[28],"viscous":[29],"conditions.":[31],"analytical":[33],"model":[34],"based":[35],"on":[36],"fluid-structure":[37],"interaction":[38],"successfully":[39],"explains":[40],"this":[41],"nonconventional":[42],"and":[45,79,93,111,144,172,190,212],"resonance":[46],"characteristics,":[47,124],"which":[48],"provides":[49],"an":[50],"optimization":[51],"design":[52,75,214],"method":[53],"resonator.":[56,116],"For":[57],"on-chip":[58],"fully":[59],"electrical":[60],"interfaces,":[61],"aluminum":[64],"nitride":[65],"(AlN)":[66],"film":[67],"employed":[69],"in":[70,84,126,215],"combination":[71],"with":[72,107,132],"tailored":[73],"electrode":[74],"allow":[77],"self-actuation":[78],"self-sensing":[80],"capabilities":[81],"when":[82],"submerged":[83],"media.":[86],"experiments":[88],"demonstrated":[89],"that":[90],"density":[92,131,189],"dynamic":[94],"viscosity":[95],"various":[97],"liquids":[98],"can":[99],"be":[100,157],"individually":[101],"determined":[102],"from":[103],"their":[104],"high-linear":[105],"relationships":[106],"resonant":[109],"frequency":[110],"quality":[112],"factor":[113],"proposed":[118],"exhibited":[121],"excellent":[122],"sensing":[123],"resulting":[125],"accuracies":[127],"0.48%":[129],"sensitivity":[134],"27.94":[136],"kHz/(g<inline-formula":[137],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[138,159,166,174,180],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">":[139,160,167,175,181],"<tex-math":[140,161,168,176,182],"notation=\"LaTeX\">$\\cdot":[141,169,183],"$":[142,170,178,184],"</tex-math></inline-formula>cm\u22123)":[143],"3.37%":[145],"viscosity.":[147],"In":[148],"addition,":[149],"minimum":[151],"detectable":[152],"changes":[153],"were":[154],"evaluated":[155],"<inline-formula":[158,173],"notation=\"LaTeX\">$1.79\\times":[162],"10^{-4}$":[163],"</tex-math></inline-formula>":[164],"g<inline-formula":[165],"</tex-math></inline-formula>cm\u22123":[171],"notation=\"LaTeX\">$9.29~\\mu":[177],"</tex-math></inline-formula>Pa<inline-formula":[179],"</tex-math></inline-formula>s":[185],"viscosity,":[191],"respectively.":[192],"results":[194],"presented":[195],"here":[196],"show":[197],"outstanding":[199],"potential":[200],"vibrational":[203],"modes":[204],"using":[205],"microplate":[206],"resonators":[207],"achieving":[209],"high":[210],"accuracy":[211],"compact":[213],"monitoring":[217],"applications.":[218]},"counts_by_year":[{"year":2026,"cited_by_count":1}],"updated_date":"2026-03-12T08:34:05.389933","created_date":"2025-03-18T00:00:00"}