{"id":"https://openalex.org/W4408092258","doi":"https://doi.org/10.1109/tim.2025.3547094","title":"Simultaneous Surface Profiling of Transparent Optical Flats on Wavelength Tuning Interferometry Using Dual-Window All-Phase Harmonic Demodulation","display_name":"Simultaneous Surface Profiling of Transparent Optical Flats on Wavelength Tuning Interferometry Using Dual-Window All-Phase Harmonic Demodulation","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4408092258","doi":"https://doi.org/10.1109/tim.2025.3547094"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3547094","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3547094","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5068873774","display_name":"Yonghao Zhou","orcid":"https://orcid.org/0000-0002-6027-7779"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yonghao Zhou","raw_affiliation_strings":["School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"raw_orcid":"https://orcid.org/0000-0002-6027-7779","affiliations":[{"raw_affiliation_string":"School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Bin Shen","orcid":"https://orcid.org/0009-0004-6896-492X"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bin Shen","raw_affiliation_strings":["School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"raw_orcid":"https://orcid.org/0009-0004-6896-492X","affiliations":[{"raw_affiliation_string":"School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Xingyu Lin","orcid":"https://orcid.org/0009-0003-2926-7112"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xingyu Lin","raw_affiliation_strings":["School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"raw_orcid":"https://orcid.org/0009-0003-2926-7112","affiliations":[{"raw_affiliation_string":"School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103227664","display_name":"Lin Chang","orcid":"https://orcid.org/0000-0002-5933-6516"},"institutions":[{"id":"https://openalex.org/I3018263800","display_name":"Huzhou University","ror":"https://ror.org/04mvpxy20","country_code":"CN","type":"education","lineage":["https://openalex.org/I3018263800"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lin Chang","raw_affiliation_strings":["School of Engineering, Huzhou University, Huzhou, Zhejiang, China","School of Engineering, Huzhou University, Huzhou, Zhejiang Province, China"],"raw_orcid":"https://orcid.org/0000-0002-5933-6516","affiliations":[{"raw_affiliation_string":"School of Engineering, Huzhou University, Huzhou, Zhejiang, China","institution_ids":["https://openalex.org/I3018263800"]},{"raw_affiliation_string":"School of Engineering, Huzhou University, Huzhou, Zhejiang Province, China","institution_ids":["https://openalex.org/I3018263800"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027709346","display_name":"Jiaoyang Li","orcid":"https://orcid.org/0000-0001-6521-5414"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiaoyang Li","raw_affiliation_strings":["School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"raw_orcid":"https://orcid.org/0000-0001-6521-5414","affiliations":[{"raw_affiliation_string":"School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108049239","display_name":"Yingjie Yu","orcid":"https://orcid.org/0000-0001-9975-8484"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yingjie Yu","raw_affiliation_strings":["School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China"],"raw_orcid":"https://orcid.org/0000-0001-9975-8484","affiliations":[{"raw_affiliation_string":"School of Mechatronic Engineering and Automation, Shanghai University, Shanghai, China","institution_ids":["https://openalex.org/I113940042"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.02467421,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"12"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9987000226974487,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12153","display_name":"Advanced Optical Sensing Technologies","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/demodulation","display_name":"Demodulation","score":0.7589578628540039},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.6928764581680298},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6662868857383728},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5969148874282837},{"id":"https://openalex.org/keywords/wavelength","display_name":"Wavelength","score":0.5760054588317871},{"id":"https://openalex.org/keywords/phase-modulation","display_name":"Phase modulation","score":0.4449543058872223},{"id":"https://openalex.org/keywords/phase","display_name":"Phase (matter)","score":0.4260694980621338},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4236496686935425},{"id":"https://openalex.org/keywords/window","display_name":"Window (computing)","score":0.41052016615867615},{"id":"https://openalex.org/keywords/phase-noise","display_name":"Phase noise","score":0.22504284977912903},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.22236934304237366},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.17377540469169617},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.1479402780532837}],"concepts":[{"id":"https://openalex.org/C195251586","wikidata":"https://www.wikidata.org/wiki/Q1185939","display_name":"Demodulation","level":3,"score":0.7589578628540039},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.6928764581680298},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6662868857383728},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5969148874282837},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.5760054588317871},{"id":"https://openalex.org/C96834759","wikidata":"https://www.wikidata.org/wiki/Q750463","display_name":"Phase modulation","level":3,"score":0.4449543058872223},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.4260694980621338},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4236496686935425},{"id":"https://openalex.org/C2778751112","wikidata":"https://www.wikidata.org/wiki/Q835016","display_name":"Window (computing)","level":2,"score":0.41052016615867615},{"id":"https://openalex.org/C89631360","wikidata":"https://www.wikidata.org/wiki/Q1428766","display_name":"Phase noise","level":2,"score":0.22504284977912903},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22236934304237366},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.17377540469169617},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.1479402780532837},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3547094","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3547094","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5899999737739563,"display_name":"Sustainable cities and communities","id":"https://metadata.un.org/sdg/11"}],"awards":[{"id":"https://openalex.org/G6588305557","display_name":null,"funder_award_id":"52075314","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":35,"referenced_works":["https://openalex.org/W148021875","https://openalex.org/W1967741525","https://openalex.org/W1972225658","https://openalex.org/W1976582796","https://openalex.org/W1978709112","https://openalex.org/W1979517961","https://openalex.org/W2009740676","https://openalex.org/W2013602262","https://openalex.org/W2035046401","https://openalex.org/W2037435980","https://openalex.org/W2102970312","https://openalex.org/W2274864685","https://openalex.org/W2789364189","https://openalex.org/W2901572098","https://openalex.org/W2921957830","https://openalex.org/W2954199118","https://openalex.org/W2967244000","https://openalex.org/W2996670745","https://openalex.org/W3019037925","https://openalex.org/W3079687456","https://openalex.org/W3090421161","https://openalex.org/W3093049579","https://openalex.org/W3110781152","https://openalex.org/W3120395197","https://openalex.org/W3197392062","https://openalex.org/W4205636635","https://openalex.org/W4281620749","https://openalex.org/W4321138172","https://openalex.org/W4384297622","https://openalex.org/W4386351356","https://openalex.org/W4386947746","https://openalex.org/W4387409406","https://openalex.org/W4388211199","https://openalex.org/W4391301077","https://openalex.org/W6922459393"],"related_works":["https://openalex.org/W1996543123","https://openalex.org/W4388516297","https://openalex.org/W2010761432","https://openalex.org/W4389302182","https://openalex.org/W4229074657","https://openalex.org/W2089955640","https://openalex.org/W1978322239","https://openalex.org/W1989622393","https://openalex.org/W2314954004","https://openalex.org/W2393836789"],"abstract_inverted_index":{"The":[0,80,132,160],"fringe":[1],"analysis":[2],"method,":[3],"using":[4],"phase":[5,33,105,113],"modulation":[6],"with":[7,150],"wavelength":[8,59],"tuning,":[9],"is":[10,63,126,214],"widely":[11],"used":[12],"in":[13,20,40,181],"profiling":[14],"the":[15,25,32,38,45,67,77,84,87,91,95,101,108,111,115,119,123,129,135,147,169,172,185,195,198,201,207,210],"surfaces":[16,178],"and":[17,73,143,155,165,176,200],"thickness":[18,74,173],"variation":[19,75],"optical":[21,78,148],"flat":[22],"interferometry.":[23],"However,":[24],"measurement":[26,68],"accuracy":[27,69],"may":[28],"deteriorate":[29],"owing":[30],"to":[31,44,65,193],"demodulation":[34,57],"errors":[35],"resulting":[36],"from":[37],"offsets":[39],"frequency":[41,130],"estimation":[42],"due":[43],"unavoidable":[46],"spectrum":[47,92,120],"leakage.":[48],"To":[49],"address":[50],"this":[51],"challenge,":[52],"a":[53],"dual-window":[54],"all-phase":[55],"harmonic":[56],"on":[58,90],"tuning":[60],"interferometry":[61],"(Dwa-WTI)":[62],"developed":[64,109],"improve":[66],"of":[70,76,86,104,114,122,128,134,152,162,171,197,209],"surface":[71],"profiles":[72,170],"flat.":[79],"Dwa-WTI":[81,136,199],"compensates":[82],"for":[83,168,206],"effect":[85],"sampling":[88],"sequence":[89,125],"by":[93,140],"synthesizing":[94],"new":[96],"interferograms,":[97],"which":[98],"effectively":[99],"suppresses":[100],"undesirable":[102],"error":[103,212],"demodulation.":[106],"With":[107],"Dwa-WTI,":[110],"initial":[112],"wavefront":[116],"distribution":[117],"at":[118],"peak":[121],"synthesized":[124],"independent":[127],"offset.":[131],"reliability":[133],"has":[137],"been":[138],"validated":[139],"numerical":[141],"simulations":[142],"experiments.":[144,183],"In":[145],"experiments,":[146],"flats":[149],"thicknesses":[151],"5,":[153],"10,":[154],"30":[156],"mm":[157],"are":[158,179,191],"measured.":[159],"difference":[161],"peak-to-valley":[163],"(PV)":[164],"root-mean-square":[166,208],"(rms)":[167],"variation,":[174],"front":[175],"rear":[177],"compared":[180,192],"repeated":[182],"Meanwhile,":[184],"measurements":[186],"under":[187],"different":[188],"spatial":[189],"carriers":[190],"assess":[194],"stability":[196],"relative":[202],"standard":[203],"deviation":[204],"(RSD)":[205],"theoretical":[211],"(RMSTE)":[213],"about":[215],"0.085.":[216]},"counts_by_year":[],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}