{"id":"https://openalex.org/W4407937734","doi":"https://doi.org/10.1109/tim.2025.3545532","title":"A 4H\u2013SiC Vibration Sensor With the Working Temperature up to 600 <sup>\u2218</sup>C","display_name":"A 4H\u2013SiC Vibration Sensor With the Working Temperature up to 600 <sup>\u2218</sup>C","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4407937734","doi":"https://doi.org/10.1109/tim.2025.3545532"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3545532","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3545532","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5114500390","display_name":"Yu Yang","orcid":"https://orcid.org/0000-0001-5365-4890"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Yang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"raw_orcid":"https://orcid.org/0000-0001-5365-4890","affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5083126155","display_name":"You Zhao","orcid":"https://orcid.org/0000-0002-8305-5984"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"You Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"raw_orcid":"https://orcid.org/0000-0002-8305-5984","affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003404584","display_name":"Lukang Wang","orcid":"https://orcid.org/0000-0002-5363-0140"},"institutions":[{"id":"https://openalex.org/I4210121771","display_name":"First Affiliated Hospital of Xi'an Jiaotong University","ror":"https://ror.org/02tbvhh96","country_code":"CN","type":"healthcare","lineage":["https://openalex.org/I4210121771"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lukang Wang","raw_affiliation_strings":["Department of Hepatobiliary Surgery, The First Affiliated Hospital, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","Department of Hepatobiliary Surgery, The First Affiliated Hospital of Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"raw_orcid":"https://orcid.org/0000-0002-5363-0140","affiliations":[{"raw_affiliation_string":"Department of Hepatobiliary Surgery, The First Affiliated Hospital, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I4210121771"]},{"raw_affiliation_string":"Department of Hepatobiliary Surgery, The First Affiliated Hospital of Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I4210121771"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015441541","display_name":"Yabing Wang","orcid":"https://orcid.org/0009-0008-1807-9008"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yabing Wang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"raw_orcid":"https://orcid.org/0009-0008-1807-9008","affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101785682","display_name":"Yulong Zhao","orcid":"https://orcid.org/0000-0003-2922-1037"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulong Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China"],"raw_orcid":"https://orcid.org/0000-0003-2922-1037","affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi&#x2019;an Jiaotong University, Xi&#x2019;an, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.9303,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.703115,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":98},"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"10"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9024999737739563,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9024999737739563,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6148808002471924},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.5654951333999634},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.4995710849761963},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.46598973870277405},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3876360058784485},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3707919120788574},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3473239243030548},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2532455325126648},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23557692766189575}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6148808002471924},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.5654951333999634},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.4995710849761963},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.46598973870277405},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3876360058784485},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3707919120788574},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3473239243030548},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2532455325126648},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23557692766189575},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3545532","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3545532","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G2764252283","display_name":null,"funder_award_id":"2020ZDLGY14-10","funder_id":"https://openalex.org/F4320336350","funder_display_name":"Key Research and Development Projects of Shaanxi Province"},{"id":"https://openalex.org/G6466691262","display_name":null,"funder_award_id":"62401451","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G845026418","display_name":null,"funder_award_id":"GZB20230584","funder_id":"https://openalex.org/F4320326174","funder_display_name":"Shaanxi Province Postdoctoral Science Foundation"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320326174","display_name":"Shaanxi Province Postdoctoral Science Foundation","ror":null},{"id":"https://openalex.org/F4320336350","display_name":"Key Research and Development Projects of Shaanxi Province","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":32,"referenced_works":["https://openalex.org/W148985919","https://openalex.org/W1523012365","https://openalex.org/W1965946322","https://openalex.org/W2023044806","https://openalex.org/W2049900425","https://openalex.org/W2178269323","https://openalex.org/W2611345126","https://openalex.org/W2618934574","https://openalex.org/W2799670659","https://openalex.org/W2883303806","https://openalex.org/W2911081702","https://openalex.org/W2969373349","https://openalex.org/W2977647608","https://openalex.org/W3020898305","https://openalex.org/W3047432544","https://openalex.org/W3114386948","https://openalex.org/W3158455036","https://openalex.org/W3204894239","https://openalex.org/W4200500363","https://openalex.org/W4205380812","https://openalex.org/W4210879907","https://openalex.org/W4210956101","https://openalex.org/W4225165909","https://openalex.org/W4226268149","https://openalex.org/W4283810083","https://openalex.org/W4285309947","https://openalex.org/W4294904589","https://openalex.org/W4312465164","https://openalex.org/W4361857375","https://openalex.org/W4362661411","https://openalex.org/W4381198895","https://openalex.org/W4392719457"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2995569247","https://openalex.org/W2361261209","https://openalex.org/W4389241047","https://openalex.org/W2997776052","https://openalex.org/W2331107224","https://openalex.org/W2628527627","https://openalex.org/W2357911031","https://openalex.org/W3119229018","https://openalex.org/W2990310615"],"abstract_inverted_index":{"High-temperature":[0],"vibration":[1,26,160,169],"sensors":[2,16],"are":[3],"critical":[4],"in":[5],"extreme":[6],"environments":[7],"such":[8],"as":[9],"aerospace,":[10],"automotive,":[11],"power":[12],"generation,":[13],"where":[14],"common":[15],"fail":[17],"due":[18],"to":[19,88,132,148],"excessive":[20],"heat.":[21],"This":[22],"study":[23],"introduces":[24],"a":[25,94,164],"sensor":[27,45,68,81,139,161],"that":[28,157],"can":[29,162],"withstand":[30],"high":[31,144],"temperatures":[32],"up":[33,147],"to$600~^{\\circ":[34,75],"}$C":[35,74,87,92,129],"based":[36],"on":[37],"the":[38,80,114,122,141,158],"piezoresistive":[39],"effect":[40],"of":[41,79,97,143],"N-type":[42],"4H-SiC.":[43],"The":[44,67,77,102,137],"chip":[46],"was":[47,70],"designed":[48,138,159],"by":[49,57],"theoretical":[50],"modeling":[51],"and":[52,55,63,121,151],"multiphysics":[53],"simulation,":[54],"fabricated":[56],"combining":[58],"micro-electronmechanical":[59],"systems":[60],"(MEMSs)":[61],"technology":[62],"femtosecond":[64],"laser":[65],"etching.":[66],"performance":[69],"extensively":[71],"verified":[72],"from$25~^{\\circ":[73],"}$C.":[76,101,136],"sensitivity":[78,104],"decreases":[82,105],"from":[83],"0.153":[84],"mV/g":[85,90],"at$25~^{\\circ":[86,128],"0.105":[89],"at$600~^{\\circ":[91,100,135],"with":[93,108],"temperature":[95],"coefficient":[96],"\u22120.054%":[98],"FS/\u00b0C":[99],"sensor\u2019s":[103,115],"essentially":[106],"linearly":[107],"increasing":[109],"temperature.":[110],"Dynamic":[111],"tests":[112],"showed":[113,140],"usable":[116],"frequency":[117,124],"is":[118,125],"0\u2013590":[119],"Hz":[120,127,134],"resonant":[123],"1179.85":[126],"while":[130],"decreasing":[131],"1156.76":[133],"reliability":[142],"impact":[145],"resistance":[146],"225%":[149],"overload":[150],"random":[152],"vibration.":[153],"These":[154],"findings":[155],"suggest":[156],"be":[163],"promising":[165],"alternative":[166],"for":[167],"high-temperature":[168],"monitoring.":[170]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":1}],"updated_date":"2026-07-29T09:40:50.615796","created_date":"2025-02-26T00:00:00"}