{"id":"https://openalex.org/W4407453677","doi":"https://doi.org/10.1109/tim.2025.3541711","title":"Influence Mechanism of the Surface Topography on the Positioning Measurement Accuracy of Micro-Vision Pattern Targets","display_name":"Influence Mechanism of the Surface Topography on the Positioning Measurement Accuracy of Micro-Vision Pattern Targets","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4407453677","doi":"https://doi.org/10.1109/tim.2025.3541711"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3541711","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3541711","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010539180","display_name":"Zijian Zhu","orcid":"https://orcid.org/0000-0001-6809-4478"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zijian Zhu","raw_affiliation_strings":["School of Robotics and Advanced Manufacturing, Harbin Institute of Technology (Shenzhen), Shenzhen, China","School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"raw_orcid":"https://orcid.org/0000-0001-6809-4478","affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacturing, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046393276","display_name":"Chenyang Zhao","orcid":"https://orcid.org/0000-0002-9096-4094"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chenyang Zhao","raw_affiliation_strings":["School of Robotics and Advanced Manufacturing, Harbin Institute of Technology (Shenzhen), Shenzhen, China","School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"raw_orcid":"https://orcid.org/0000-0002-9096-4094","affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacturing, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100397741","display_name":"Yang Yang","orcid":"https://orcid.org/0000-0003-1434-1351"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yang Yang","raw_affiliation_strings":["School of Robotics and Advanced Manufacturing, Harbin Institute of Technology (Shenzhen), Shenzhen, China","School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"raw_orcid":"https://orcid.org/0000-0003-1434-1351","affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacturing, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5040589905","display_name":"Yueping Xi","orcid":null},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yueping Xi","raw_affiliation_strings":["School of Robotics and Advanced Manufacturing, Harbin Institute of Technology (Shenzhen), Shenzhen, China","School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen, China"],"raw_orcid":"https://orcid.org/0009-0006-5576-1175","affiliations":[{"raw_affiliation_string":"School of Robotics and Advanced Manufacturing, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"School of Mechanical Engineering and Automation, Harbin Institute of Technology (Shenzhen), Shenzhen, China","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I204983213"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.02135065,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"12"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mechanism","display_name":"Mechanism (biology)","score":0.641769528388977},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.5840976238250732},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4781138300895691},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.4768437147140503},{"id":"https://openalex.org/keywords/machine-vision","display_name":"Machine vision","score":0.4239104986190796},{"id":"https://openalex.org/keywords/surface","display_name":"Surface (topology)","score":0.41198667883872986},{"id":"https://openalex.org/keywords/remote-sensing","display_name":"Remote sensing","score":0.36837953329086304},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.21809425950050354},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.18888133764266968},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.10524362325668335}],"concepts":[{"id":"https://openalex.org/C89611455","wikidata":"https://www.wikidata.org/wiki/Q6804646","display_name":"Mechanism (biology)","level":2,"score":0.641769528388977},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.5840976238250732},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4781138300895691},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.4768437147140503},{"id":"https://openalex.org/C5339829","wikidata":"https://www.wikidata.org/wiki/Q1425977","display_name":"Machine vision","level":2,"score":0.4239104986190796},{"id":"https://openalex.org/C2776799497","wikidata":"https://www.wikidata.org/wiki/Q484298","display_name":"Surface (topology)","level":2,"score":0.41198667883872986},{"id":"https://openalex.org/C62649853","wikidata":"https://www.wikidata.org/wiki/Q199687","display_name":"Remote sensing","level":1,"score":0.36837953329086304},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.21809425950050354},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.18888133764266968},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.10524362325668335},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3541711","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3541711","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6100000143051147,"display_name":"Climate action","id":"https://metadata.un.org/sdg/13"}],"awards":[{"id":"https://openalex.org/G1555035566","display_name":null,"funder_award_id":"52475552","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G282572494","display_name":null,"funder_award_id":"JSGGZD20220822095401003","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W2002913391","https://openalex.org/W2007191505","https://openalex.org/W2765463956","https://openalex.org/W2884333256","https://openalex.org/W2914857582","https://openalex.org/W2945408230","https://openalex.org/W2996247566","https://openalex.org/W3005155321","https://openalex.org/W3005336675","https://openalex.org/W3084128133","https://openalex.org/W3203533336","https://openalex.org/W4214530565","https://openalex.org/W4224276958","https://openalex.org/W4313639390","https://openalex.org/W4317206897","https://openalex.org/W4319872094","https://openalex.org/W4366606327","https://openalex.org/W4385252717","https://openalex.org/W4387743859","https://openalex.org/W4388294785","https://openalex.org/W4389334356","https://openalex.org/W4389494944","https://openalex.org/W4390489072","https://openalex.org/W4392022895","https://openalex.org/W4403145930"],"related_works":["https://openalex.org/W2382997850","https://openalex.org/W2390968135","https://openalex.org/W2382213751","https://openalex.org/W2351750670","https://openalex.org/W1597848696","https://openalex.org/W2354715126","https://openalex.org/W2388563748","https://openalex.org/W2375179084","https://openalex.org/W2366646518","https://openalex.org/W2370906336"],"abstract_inverted_index":{"In":[0],"micro-vision-based":[1],"positioning,":[2],"designing":[3,30],"special":[4],"patterns":[5],"as":[6],"positioning":[7,14,41,71,82,121,146,157,177],"targets":[8,28],"is":[9,136,148,159],"key":[10],"to":[11,58,150,161],"improving":[12],"the":[13,23,35,60,63,66,70,77,81,85,93,96,100,103,106,110,114,117,129,141,145,151,156,162,167,171],"accuracy":[15,24,83,147,158],"and":[16,29,56,84,113,144],"measurement":[17,72],"range.":[18],"Many":[19],"scholars,":[20],"however,":[21],"improve":[22],"by":[25],"processing":[26,52,78,87,97],"different":[27,31],"algorithms":[32],"while":[33],"ignoring":[34],"influence":[36,64,75,94,104,115],"of":[37,62,65,76,95,105,116,175],"microtopography/nanotopography":[38],"distribution":[39,119],"on":[40,49,69,80,99,109,120],"measurement.":[42,122],"From":[43],"this":[44,46],"perspective,":[45],"article":[47],"focuses":[48],"two":[50],"micro-surface":[51],"methods,":[53],"ultraprecision":[54,133],"machining,":[55,134],"photolithography,":[57,155],"explore":[59],"mechanism":[61],"surface":[67,163],"topography":[68,108],"accuracy.":[73],"The":[74,123],"technology":[79,98],"optimal":[86,138,168],"parameters":[88],"are":[89,126],"obtained":[90],"via":[91],"exploring":[92],"3-D":[101,107],"topography,":[102],"imaging":[111],"grayscale,":[112],"grayscale":[118],"experimental":[124],"results":[125],"consistent":[127],"with":[128],"theoretical":[130],"analysis.":[131],"For":[132,154],"there":[135],"an":[137],"value":[139],"for":[140],"cutting":[142,152],"speed":[143],"proportional":[149,160],"depth.":[153],"reflectivity":[164],"difference.":[165],"Under":[166],"parameter":[169],"configuration,":[170],"standard":[172],"deviation":[173],"(STD)":[174],"repeated":[176],"can":[178],"reach":[179],"1.69":[180],"nm.":[181]},"counts_by_year":[],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}