{"id":"https://openalex.org/W4407461989","doi":"https://doi.org/10.1109/tim.2025.3541663","title":"Package-Tolerant MEMS Thermal Wind Sensors Using SIG Technology","display_name":"Package-Tolerant MEMS Thermal Wind Sensors Using SIG Technology","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4407461989","doi":"https://doi.org/10.1109/tim.2025.3541663"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3541663","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3541663","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5115600067","display_name":"Bo Qi","orcid":"https://orcid.org/0009-0002-2101-1529"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Bo Qi","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0009-0002-2101-1529","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Wenxuan Chen","orcid":"https://orcid.org/0009-0008-0268-7076"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenxuan Chen","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0009-0008-0268-7076","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042225149","display_name":"Zhenxiang Yi","orcid":"https://orcid.org/0000-0002-4619-8855"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenxiang Yi","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0002-4619-8855","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054995764","display_name":"Ming Qin","orcid":"https://orcid.org/0000-0002-8424-6299"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ming Qin","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0002-8424-6299","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038334345","display_name":"Qing\u2010An Huang","orcid":"https://orcid.org/0000-0002-0646-7635"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qing-An Huang","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0002-0646-7635","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"Ministry of Education, Key Laboratory of MEMS, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109844908","display_name":"Lili Gao","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Lili Gao","raw_affiliation_strings":["East China Institute of Photo-Electron ICs, Bengbu, China"],"raw_orcid":"https://orcid.org/0009-0005-8969-7653","affiliations":[{"raw_affiliation_string":"East China Institute of Photo-Electron ICs, Bengbu, China","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5115600067"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":null,"apc_paid":null,"fwci":9.5755,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.96528341,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12449","display_name":"Spacecraft Design and Technology","score":0.8374000191688538,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12449","display_name":"Spacecraft Design and Technology","score":0.8374000191688538,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.786300003528595,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.7699000239372253,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7286540269851685},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.4994943141937256},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.4568640887737274},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4248208999633789},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.4055574834346771},{"id":"https://openalex.org/keywords/automotive-engineering","display_name":"Automotive engineering","score":0.39552515745162964},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3845198154449463},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2778276205062866},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.24678605794906616},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2156899869441986},{"id":"https://openalex.org/keywords/meteorology","display_name":"Meteorology","score":0.1337956190109253}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7286540269851685},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.4994943141937256},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.4568640887737274},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4248208999633789},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4055574834346771},{"id":"https://openalex.org/C171146098","wikidata":"https://www.wikidata.org/wiki/Q124192","display_name":"Automotive engineering","level":1,"score":0.39552515745162964},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3845198154449463},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2778276205062866},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24678605794906616},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2156899869441986},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.1337956190109253}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3541663","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3541663","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8799999952316284,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G3459056715","display_name":null,"funder_award_id":"61971124","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3884629101","display_name":null,"funder_award_id":"62371127","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":21,"referenced_works":["https://openalex.org/W1970337270","https://openalex.org/W1979176388","https://openalex.org/W1986065084","https://openalex.org/W1996263349","https://openalex.org/W1998092057","https://openalex.org/W2016136718","https://openalex.org/W2043331129","https://openalex.org/W2062181728","https://openalex.org/W2104020833","https://openalex.org/W2325195960","https://openalex.org/W2622337640","https://openalex.org/W2910840067","https://openalex.org/W2921917561","https://openalex.org/W2976319787","https://openalex.org/W3000704434","https://openalex.org/W3006941250","https://openalex.org/W3007509093","https://openalex.org/W3139214646","https://openalex.org/W4383108868","https://openalex.org/W4390755597","https://openalex.org/W4391827333"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W2319192085","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W2045074154","https://openalex.org/W2346208161","https://openalex.org/W2002592603"],"abstract_inverted_index":{"To":[0],"minimize":[1],"the":[2,20,24,31,48,51,67,77,95,103,108,112,115,136,148,153,175,184,192],"effect":[3],"by":[4,23],"asymmetry":[5],"of":[6,50,54,79,111,135,150,191],"package,":[7,94],"a":[8],"novel":[9],"chip-level":[10],"thermal":[11,35,45,52,96],"management":[12],"method":[13,70],"is":[14,28],"proposed":[15],"in":[16,81,147,155],"this":[17,125],"article,":[18],"whereby":[19],"heat":[21,42,60,105],"generated":[22],"central":[25],"heating":[26],"resistor":[27],"confined":[29],"within":[30],"chip":[32],"itself.":[33],"A":[34],"resistance":[36],"model":[37],"was":[38,63,74,99,167],"established":[39],"to":[40,121,181],"analyze":[41],"conduction":[43],"and":[44,56,89,158,164,170,188,201],"convection,":[46],"studying":[47],"influence":[49],"characteristics":[53],"substrate":[55,78,117],"packaging":[57,141,151,166],"materials":[58],"on":[59,76,107,132],"distribution,":[61],"which":[62],"further":[64],"validated":[65],"through":[66],"finite":[68],"element":[69],"(FEM).":[71],"The":[72,143],"sensor":[73,194],"fabricated":[75],"silicon":[80,116],"glass":[82,109],"(SIG),":[83],"allowing":[84],"for":[85],"front-side":[86],"wind":[87,127,156,176,186,189],"sensing":[88],"backside":[90],"wire":[91],"bonding.":[92],"After":[93],"imaging":[97],"experiment":[98],"performed,":[100],"showing":[101],"that":[102,146],"produced":[104],"concentrated":[106],"film":[110],"chip,":[113],"while":[114],"portion":[118],"remained":[119],"close":[120],"ambient":[122],"temperature.":[123],"On":[124],"basis,":[126],"tunnel":[128],"experiments":[129],"were":[130,196],"conducted":[131],"four":[133,193],"groups":[134,195],"same":[137],"sensors":[138],"with":[139],"different":[140],"offsets.":[142],"results":[144],"reveal":[145],"presence":[149],"deviation,":[152],"difference":[154],"speed":[157,177,187],"direction":[159],"error":[160],"(DE)":[161],"between":[162],"offset":[163],"nonoffset":[165],"about":[168],"1.18%":[169],"2.2\u00b0,":[171],"respectively.":[172,203],"Moreover,":[173],"when":[174],"varied":[178],"from":[179],"0":[180],"28.1":[182],"m/s,":[183],"maximum":[185],"DEs":[190],"no":[197],"more":[198],"than":[199],"2.81%":[200],"\u00b13.2\u00b0,":[202]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2025-12-23T23:11:35.936235","created_date":"2025-10-10T00:00:00"}