{"id":"https://openalex.org/W4406311407","doi":"https://doi.org/10.1109/tim.2025.3529069","title":"Design, Fabrication, and Performance Optimization of a High-Temperature Thin-Film Heat Flux Sensor With a Composite Protective Layer","display_name":"Design, Fabrication, and Performance Optimization of a High-Temperature Thin-Film Heat Flux Sensor With a Composite Protective Layer","publication_year":2025,"publication_date":"2025-01-01","ids":{"openalex":"https://openalex.org/W4406311407","doi":"https://doi.org/10.1109/tim.2025.3529069"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2025.3529069","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3529069","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102886793","display_name":"Meimei Lu","orcid":"https://orcid.org/0009-0004-4618-7226"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Meimei Lu","raw_affiliation_strings":["Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China"],"raw_orcid":"https://orcid.org/0009-0004-4618-7226","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069239126","display_name":"Helei Dong","orcid":"https://orcid.org/0000-0003-0449-3968"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Helei Dong","raw_affiliation_strings":["Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China"],"raw_orcid":"https://orcid.org/0000-0003-0449-3968","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064599583","display_name":"Yinrong Zheng","orcid":null},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yinrong Zheng","raw_affiliation_strings":["Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China"],"raw_orcid":"https://orcid.org/0009-0007-9555-9868","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086678410","display_name":"Juan Zhang","orcid":"https://orcid.org/0000-0003-1760-4508"},"institutions":[{"id":"https://openalex.org/I4210115395","display_name":"Taiyuan Institute of Technology","ror":"https://ror.org/02d0fkx94","country_code":"CN","type":"education","lineage":["https://openalex.org/I4210115395"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Juan Zhang","raw_affiliation_strings":["Department of Mechanical Engineering, Taiyuan Institute of Technology, Taiyuan, China"],"raw_orcid":"https://orcid.org/0000-0003-1760-4508","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Taiyuan Institute of Technology, Taiyuan, China","institution_ids":["https://openalex.org/I4210115395"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081523836","display_name":"Xiaofen Li","orcid":"https://orcid.org/0009-0002-3287-6341"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaofen Li","raw_affiliation_strings":["Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China"],"raw_orcid":"https://orcid.org/0009-0002-3287-6341","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5002509281","display_name":"Qiulin Tan","orcid":"https://orcid.org/0000-0001-7877-9278"},"institutions":[{"id":"https://openalex.org/I135714990","display_name":"North University of China","ror":"https://ror.org/047bp1713","country_code":"CN","type":"education","lineage":["https://openalex.org/I135714990"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiulin Tan","raw_affiliation_strings":["Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China"],"raw_orcid":"https://orcid.org/0000-0001-7877-9278","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Devices and Systems and the State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]},{"raw_affiliation_string":"Key Laboratory of Micro/nano Devices and Systems, North University of China, Taiyuan, China","institution_ids":["https://openalex.org/I135714990"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5102886793"],"corresponding_institution_ids":["https://openalex.org/I135714990"],"apc_list":null,"apc_paid":null,"fwci":0.6013,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.62065287,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":95},"biblio":{"volume":"74","issue":null,"first_page":"1","last_page":"8"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9922000169754028,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9922000169754028,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9210000038146973,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.7866728901863098},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7844300270080566},{"id":"https://openalex.org/keywords/composite-number","display_name":"Composite number","score":0.6538304686546326},{"id":"https://openalex.org/keywords/heat-flux","display_name":"Heat flux","score":0.6346947550773621},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.5529412031173706},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.5381243228912354},{"id":"https://openalex.org/keywords/flux","display_name":"Flux (metallurgy)","score":0.4873810410499573},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.4634546935558319},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4029752314090729},{"id":"https://openalex.org/keywords/heat-transfer","display_name":"Heat transfer","score":0.26936671137809753},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.20312342047691345},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.0944192111492157}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7866728901863098},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7844300270080566},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.6538304686546326},{"id":"https://openalex.org/C159188206","wikidata":"https://www.wikidata.org/wiki/Q1478382","display_name":"Heat flux","level":3,"score":0.6346947550773621},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.5529412031173706},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.5381243228912354},{"id":"https://openalex.org/C68709404","wikidata":"https://www.wikidata.org/wiki/Q1134475","display_name":"Flux (metallurgy)","level":2,"score":0.4873810410499573},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4634546935558319},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4029752314090729},{"id":"https://openalex.org/C50517652","wikidata":"https://www.wikidata.org/wiki/Q179635","display_name":"Heat transfer","level":2,"score":0.26936671137809753},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20312342047691345},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0944192111492157},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2025.3529069","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2025.3529069","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7599999904632568}],"awards":[{"id":"https://openalex.org/G5638178349","display_name":null,"funder_award_id":"52175525","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G710594238","display_name":null,"funder_award_id":"2022YFB3203900","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":31,"referenced_works":["https://openalex.org/W654410156","https://openalex.org/W1971618548","https://openalex.org/W2007088540","https://openalex.org/W2155215412","https://openalex.org/W2397389997","https://openalex.org/W2789448519","https://openalex.org/W3008567946","https://openalex.org/W3025781564","https://openalex.org/W3048616635","https://openalex.org/W3101284381","https://openalex.org/W3122820252","https://openalex.org/W3126990743","https://openalex.org/W3133806989","https://openalex.org/W3155261022","https://openalex.org/W3159922163","https://openalex.org/W3182119617","https://openalex.org/W3204894239","https://openalex.org/W4206132645","https://openalex.org/W4280508384","https://openalex.org/W4280604179","https://openalex.org/W4281649639","https://openalex.org/W4293029271","https://openalex.org/W4306318853","https://openalex.org/W4319077723","https://openalex.org/W4319264344","https://openalex.org/W4327662243","https://openalex.org/W4377294051","https://openalex.org/W4378804919","https://openalex.org/W4386332722","https://openalex.org/W4386432266","https://openalex.org/W4386919653"],"related_works":["https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W2606427896","https://openalex.org/W2007805353","https://openalex.org/W2132500134","https://openalex.org/W2387433897","https://openalex.org/W2008392873","https://openalex.org/W2100589902","https://openalex.org/W2034830227","https://openalex.org/W2029923468"],"abstract_inverted_index":{"As":[0],"aerospace":[1],"technology":[2],"continues":[3],"to":[4,24,39,73,81,103],"advance,":[5],"real-time":[6],"monitoring":[7],"of":[8,69,91,108,116,136],"heat":[9,18,52],"flux":[10,19,53],"density":[11],"has":[12],"become":[13],"increasingly":[14],"important.":[15],"However,":[16,133],"most":[17],"sensors":[20],"(HFSs)":[21],"are":[22],"unable":[23],"withstand":[25,104],"high":[26,82],"temperatures":[27],"without":[28],"water":[29],"cooling,":[30],"resulting":[31],"in":[32,139,146],"their":[33],"sensitive":[34,71],"layer":[35,50,64,72,97],"films":[36],"being":[37],"exposed":[38],"severe":[40],"oxidation":[41],"or":[42],"sublimation.":[43],"This":[44],"paper":[45],"proposes":[46],"a":[47,105],"composite":[48],"protective":[49,63,96],"thin-film":[51],"sensor":[54],"(TFHFS)":[55],"based":[56],"on":[57,67],"an":[58],"ITO/In\u2082O\u2083":[59],"thermopile.":[60],"An":[61],"Al\u2082O\u2083-YSZ":[62],"is":[65,98],"deposited":[66],"top":[68],"the":[70,88,92,95,124,134,137,140],"mitigate":[74],"sublimation":[75],"failures":[76],"caused":[77],"by":[78],"prolonged":[79],"exposure":[80],"temperatures.":[83],"Test":[84],"results":[85],"indicate":[86],"that":[87],"temperature":[89,107],"resistance":[90],"TFHFS":[93,126,142],"with":[94,111],"significantly":[99],"enhanced,":[100],"enabling":[101],"it":[102],"maximum":[106],"1200":[109],"\u00b0C,":[110],"response":[112],"and":[113,119,130],"recovery":[114],"times":[115],"1.2":[117],"s":[118],"1.3":[120],"s,":[121],"respectively.":[122],"Furthermore,":[123],"fabricated":[125],"exhibited":[127],"excellent":[128],"repeatability":[129],"high-temperature":[131],"stability.":[132],"reliability":[135],"leads":[138],"designed":[141],"requires":[143],"further":[144],"enhancement":[145],"future":[147],"studies.":[148]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}