{"id":"https://openalex.org/W4403918781","doi":"https://doi.org/10.1109/tim.2024.3485441","title":"Liquid Hydrogen Temperature Cryostage for Ice-Assisted Electron-Beam Lithography","display_name":"Liquid Hydrogen Temperature Cryostage for Ice-Assisted Electron-Beam Lithography","publication_year":2024,"publication_date":"2024-01-01","ids":{"openalex":"https://openalex.org/W4403918781","doi":"https://doi.org/10.1109/tim.2024.3485441"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2024.3485441","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2024.3485441","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065001929","display_name":"Rui Zheng","orcid":"https://orcid.org/0000-0001-8414-2337"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rui Zheng","raw_affiliation_strings":["College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, Zhejiang, China"],"raw_orcid":"https://orcid.org/0000-0001-8414-2337","affiliations":[{"raw_affiliation_string":"College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103018108","display_name":"Limin Qi","orcid":"https://orcid.org/0000-0003-4842-0947"},"institutions":[{"id":"https://openalex.org/I3133055985","display_name":"Westlake University","ror":"https://ror.org/05hfa4n20","country_code":"CN","type":"education","lineage":["https://openalex.org/I3133055985"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Limin Qi","raw_affiliation_strings":["Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, Hangzhou, Zhejiang, China","School of Engineering, Zhejiang Key Laboratory of3D Micro/Nano Fabrication and Characterization, Westlake University, Hangzhou, Zhejiang, China"],"raw_orcid":"https://orcid.org/0000-0003-4842-0947","affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I3133055985"]},{"raw_affiliation_string":"School of Engineering, Zhejiang Key Laboratory of3D Micro/Nano Fabrication and Characterization, Westlake University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I3133055985"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102756121","display_name":"Sizhuo Li","orcid":"https://orcid.org/0000-0001-9583-7230"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Sizhuo Li","raw_affiliation_strings":["Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province, Institute of Refrigeration and Cryogenics, Zhejiang University, Hangzhou, Zhejiang, China","Institute of Refrigeration and Cryogenics, Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province, Zhejiang University, Hangzhou, Zhejiang Province, China"],"raw_orcid":"https://orcid.org/0009-0009-2971-8941","affiliations":[{"raw_affiliation_string":"Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province, Institute of Refrigeration and Cryogenics, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]},{"raw_affiliation_string":"Institute of Refrigeration and Cryogenics, Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province, Zhejiang University, Hangzhou, Zhejiang Province, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004668897","display_name":"Zhihua Gan","orcid":"https://orcid.org/0000-0003-4112-6745"},"institutions":[{"id":"https://openalex.org/I76130692","display_name":"Zhejiang University","ror":"https://ror.org/00a2xv884","country_code":"CN","type":"education","lineage":["https://openalex.org/I76130692"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhihua Gan","raw_affiliation_strings":["Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province, Institute of Refrigeration and Cryogenics, Zhejiang University, Hangzhou, Zhejiang, China","Institute of Refrigeration and Cryogenics, Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province, Zhejiang University, Hangzhou, Zhejiang Province, China"],"raw_orcid":"https://orcid.org/0000-0003-4112-6745","affiliations":[{"raw_affiliation_string":"Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province, Institute of Refrigeration and Cryogenics, Zhejiang University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I76130692"]},{"raw_affiliation_string":"Institute of Refrigeration and Cryogenics, Key Laboratory of Refrigeration and Cryogenic Technology of Zhejiang Province, Zhejiang University, Hangzhou, Zhejiang Province, China","institution_ids":["https://openalex.org/I76130692"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043941702","display_name":"Ding Zhao","orcid":"https://orcid.org/0000-0001-9084-1521"},"institutions":[{"id":"https://openalex.org/I3133055985","display_name":"Westlake University","ror":"https://ror.org/05hfa4n20","country_code":"CN","type":"education","lineage":["https://openalex.org/I3133055985"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ding Zhao","raw_affiliation_strings":["Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, Hangzhou, Zhejiang, China","School of Engineering, Zhejiang Key Laboratory of3D Micro/Nano Fabrication and Characterization, Westlake University, Hangzhou, Zhejiang, China"],"raw_orcid":"https://orcid.org/0000-0001-9084-1521","affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I3133055985"]},{"raw_affiliation_string":"School of Engineering, Zhejiang Key Laboratory of3D Micro/Nano Fabrication and Characterization, Westlake University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I3133055985"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5077916544","display_name":"Min Qiu","orcid":"https://orcid.org/0000-0002-4613-5125"},"institutions":[{"id":"https://openalex.org/I3133055985","display_name":"Westlake University","ror":"https://ror.org/05hfa4n20","country_code":"CN","type":"education","lineage":["https://openalex.org/I3133055985"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Min Qiu","raw_affiliation_strings":["Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, Hangzhou, Zhejiang, China","School of Engineering, Zhejiang Key Laboratory of3D Micro/Nano Fabrication and Characterization, Westlake University, Hangzhou, Zhejiang, China"],"raw_orcid":"https://orcid.org/0000-0002-4613-5125","affiliations":[{"raw_affiliation_string":"Zhejiang Key Laboratory of 3D Micro/Nano Fabrication and Characterization, School of Engineering, Westlake University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I3133055985"]},{"raw_affiliation_string":"School of Engineering, Zhejiang Key Laboratory of3D Micro/Nano Fabrication and Characterization, Westlake University, Hangzhou, Zhejiang, China","institution_ids":["https://openalex.org/I3133055985"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":4.3234,"has_fulltext":false,"cited_by_count":48,"citation_normalized_percentile":{"value":0.96194195,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":97,"max":100},"biblio":{"volume":"73","issue":null,"first_page":"1","last_page":"4"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9793999791145325,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.9793999791145325,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9577999711036682,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9498000144958496,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6591030359268188},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.6556730270385742},{"id":"https://openalex.org/keywords/electron-beam-lithography","display_name":"Electron-beam lithography","score":0.6419159173965454},{"id":"https://openalex.org/keywords/hydrogen","display_name":"Hydrogen","score":0.521632730960846},{"id":"https://openalex.org/keywords/cathode-ray","display_name":"Cathode ray","score":0.5106368660926819},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.4720153212547302},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.44913992285728455},{"id":"https://openalex.org/keywords/x-ray-lithography","display_name":"X-ray lithography","score":0.44878673553466797},{"id":"https://openalex.org/keywords/stencil-lithography","display_name":"Stencil lithography","score":0.4134131073951721},{"id":"https://openalex.org/keywords/electron","display_name":"Electron","score":0.3968392312526703},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.36996906995773315},{"id":"https://openalex.org/keywords/resist","display_name":"Resist","score":0.3320152759552002},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.23374375700950623},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2335086464881897},{"id":"https://openalex.org/keywords/nuclear-physics","display_name":"Nuclear physics","score":0.14537346363067627}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6591030359268188},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6556730270385742},{"id":"https://openalex.org/C200274948","wikidata":"https://www.wikidata.org/wiki/Q256845","display_name":"Electron-beam lithography","level":4,"score":0.6419159173965454},{"id":"https://openalex.org/C512968161","wikidata":"https://www.wikidata.org/wiki/Q556","display_name":"Hydrogen","level":2,"score":0.521632730960846},{"id":"https://openalex.org/C95312477","wikidata":"https://www.wikidata.org/wiki/Q207340","display_name":"Cathode ray","level":3,"score":0.5106368660926819},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.4720153212547302},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44913992285728455},{"id":"https://openalex.org/C41794268","wikidata":"https://www.wikidata.org/wiki/Q1408939","display_name":"X-ray lithography","level":4,"score":0.44878673553466797},{"id":"https://openalex.org/C70520399","wikidata":"https://www.wikidata.org/wiki/Q7607503","display_name":"Stencil lithography","level":5,"score":0.4134131073951721},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.3968392312526703},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.36996906995773315},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.3320152759552002},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.23374375700950623},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2335086464881897},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.14537346363067627},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2024.3485441","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2024.3485441","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G2079424475","display_name":null,"funder_award_id":"U21A20494","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6705233977","display_name":null,"funder_award_id":"61927820","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7378281689","display_name":null,"funder_award_id":"52203305","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":20,"referenced_works":["https://openalex.org/W2000258488","https://openalex.org/W2014878368","https://openalex.org/W2083900716","https://openalex.org/W2102841003","https://openalex.org/W2106509730","https://openalex.org/W2106899300","https://openalex.org/W2768548264","https://openalex.org/W2811459867","https://openalex.org/W3005282178","https://openalex.org/W3102220747","https://openalex.org/W3110920252","https://openalex.org/W3124782067","https://openalex.org/W3204015492","https://openalex.org/W3212690680","https://openalex.org/W4200201970","https://openalex.org/W4220970137","https://openalex.org/W4307462428","https://openalex.org/W4321789907","https://openalex.org/W4386467472","https://openalex.org/W4394598500"],"related_works":["https://openalex.org/W2516408400","https://openalex.org/W806091262","https://openalex.org/W2135099569","https://openalex.org/W2027333059","https://openalex.org/W1974232383","https://openalex.org/W4390650236","https://openalex.org/W2248828965","https://openalex.org/W2044100285","https://openalex.org/W2050029673","https://openalex.org/W2381201749"],"abstract_inverted_index":{"Liquid":[0],"nitrogen":[1],"(LN2)":[2],"typically":[3],"acts":[4],"as":[5,31,151,156],"a":[6,36,40,56,116,164,183],"coolant":[7],"in":[8,35,75,161,191,206],"ice-assisted":[9],"electron-beam":[10],"lithography":[11],"(iEBL)":[12],"systems,":[13],"so":[14],"that":[15,43,202],"the":[16,61,109,128,132,138,152,157,188,198],"cryostage":[17],"temperature":[18,71,110,190],"cannot":[19],"be":[20,204],"lower":[21],"than":[22,172],"77":[23],"K.":[24],"To":[25],"condense":[26],"more":[27],"gaseous":[28],"precursors,":[29],"such":[30,182],"carbon":[32],"dioxide":[33],"(CO2)":[34],"high":[37],"vacuum":[38],"environment,":[39],"cooling":[41],"system":[42,119,186,193],"does":[44],"not":[45],"rely":[46],"on":[47,131],"LN2":[48],"is":[49],"necessary.":[50],"In":[51],"this":[52],"article,":[53],"we":[54],"integrate":[55],"Gifford-McMahon":[57],"(GM)":[58],"cryocooler":[59],"into":[60],"iEBL":[62,192],"system,":[63],"which":[64,106],"can":[65,203],"cool":[66],"down":[67],"samples":[68],"from":[69],"room":[70],"to":[72,126,142,194],"21":[73],"K":[74,95],"2.25":[76],"h.":[77],"The":[78],"cold":[79],"head":[80],"and":[81,96,120],"sample":[82],"holder":[83],"reach":[84],"minimum":[85],"temperatures":[86],"of":[87,112,169,200],"<inline-formula":[88,97],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[89,98],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">":[90,99],"<tex-math":[91,100],"notation=\"LaTeX\">$5.37~\\pm":[92],"~0.012$":[93],"</tex-math></inline-formula>":[94,103],"notation=\"LaTeX\">$19.14~\\pm":[101],"~0.009$":[102],"K,":[104],"respectively,":[105],"lies":[107],"within":[108],"zone":[111],"liquid":[113],"hydrogen.":[114],"Furthermore,":[115],"gas-gap":[117],"isolation":[118],"discrete":[121],"rotary":[122],"valve":[123],"are":[124,177],"employed":[125],"minimize":[127],"vibration":[129,139],"effects":[130],"scanning":[133],"electron":[134],"microscope":[135],"(SEM),":[136],"with":[137,163],"being":[140],"limited":[141],"about":[143],"30":[144],"nm.":[145],"Finally,":[146],"CO2":[147],"has":[148],"been":[149],"investigated":[150],"precursor,":[153],"revealing":[154],"itself":[155],"second":[158],"positive":[159],"resist":[160],"iEBL,":[162],"critical":[165],"dose":[166],"one":[167],"order":[168],"magnitude":[170],"less":[171],"water":[173],"ice.":[174],"Gold":[175],"nanostructures":[176],"also":[178],"successfully":[179],"fabricated":[180],"using":[181],"resist.":[184],"Our":[185],"achieves":[187],"lowest":[189],"date,":[195],"substantially":[196],"expanding":[197],"range":[199],"precursors":[201],"used":[205],"iEBL.":[207]},"counts_by_year":[{"year":2026,"cited_by_count":18},{"year":2025,"cited_by_count":26},{"year":2024,"cited_by_count":4}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}