{"id":"https://openalex.org/W4402570449","doi":"https://doi.org/10.1109/tim.2024.3461789","title":"Omnidirectional 3-D AFM Integrated With a Rotary Stage for High-Precision Sidewall Structure","display_name":"Omnidirectional 3-D AFM Integrated With a Rotary Stage for High-Precision Sidewall Structure","publication_year":2024,"publication_date":"2024-01-01","ids":{"openalex":"https://openalex.org/W4402570449","doi":"https://doi.org/10.1109/tim.2024.3461789"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2024.3461789","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2024.3461789","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036381684","display_name":"Huang-Chih Chen","orcid":"https://orcid.org/0000-0002-0838-1069"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Huang-Chih Chen","raw_affiliation_strings":["Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0002-0838-1069","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075927029","display_name":"Sheng\u2010An Lee","orcid":"https://orcid.org/0009-0001-7426-7045"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Sheng-An Lee","raw_affiliation_strings":["Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0009-0001-7426-7045","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102311502","display_name":"K.C. Huang","orcid":"https://orcid.org/0009-0008-1872-9939"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Kuan-Wei Huang","raw_affiliation_strings":["Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0009-0008-1872-9939","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007314118","display_name":"SE Peng","orcid":"https://orcid.org/0009-0002-4884-4600"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Sheng-Wei Peng","raw_affiliation_strings":["Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0009-0002-4884-4600","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101925654","display_name":"Li\u2010Chen Fu","orcid":"https://orcid.org/0000-0002-6947-7646"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Li-Chen Fu","raw_affiliation_strings":["Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0002-6947-7646","affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I16733864"],"apc_list":null,"apc_paid":null,"fwci":0.3032,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.52540774,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"73","issue":null,"first_page":"1","last_page":"13"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9955000281333923,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9904000163078308,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.6043891310691833},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5515928268432617},{"id":"https://openalex.org/keywords/omnidirectional-antenna","display_name":"Omnidirectional antenna","score":0.5163227915763855},{"id":"https://openalex.org/keywords/stage","display_name":"Stage (stratigraphy)","score":0.43407636880874634},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.34622758626937866},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3385980725288391},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3078145980834961},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.29100584983825684},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.21984857320785522},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21454882621765137},{"id":"https://openalex.org/keywords/geology","display_name":"Geology","score":0.1321505606174469}],"concepts":[{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.6043891310691833},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5515928268432617},{"id":"https://openalex.org/C24027999","wikidata":"https://www.wikidata.org/wiki/Q2176348","display_name":"Omnidirectional antenna","level":3,"score":0.5163227915763855},{"id":"https://openalex.org/C146357865","wikidata":"https://www.wikidata.org/wiki/Q1123245","display_name":"Stage (stratigraphy)","level":2,"score":0.43407636880874634},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.34622758626937866},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3385980725288391},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3078145980834961},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.29100584983825684},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.21984857320785522},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21454882621765137},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.1321505606174469},{"id":"https://openalex.org/C21822782","wikidata":"https://www.wikidata.org/wiki/Q131214","display_name":"Antenna (radio)","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2024.3461789","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2024.3461789","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.49000000953674316,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G2832659463","display_name":null,"funder_award_id":"NSTC 113-2221-E-002-127-MY3","funder_id":"https://openalex.org/F4320336725","funder_display_name":"Center for Artificial Intelligence and Advanced Robotics, National Taiwan University"},{"id":"https://openalex.org/G3774703849","display_name":null,"funder_award_id":"NSTC 110-2221-E-002-166-MY3","funder_id":"https://openalex.org/F4320336725","funder_display_name":"Center for Artificial Intelligence and Advanced Robotics, National Taiwan University"},{"id":"https://openalex.org/G4412455231","display_name":null,"funder_award_id":"MOST 113-2221-E-002-127-MY3","funder_id":"https://openalex.org/F4320336725","funder_display_name":"Center for Artificial Intelligence and Advanced Robotics, National Taiwan University"},{"id":"https://openalex.org/G646012190","display_name":null,"funder_award_id":"MOST 112-2634-F-002-003","funder_id":"https://openalex.org/F4320336725","funder_display_name":"Center for Artificial Intelligence and Advanced Robotics, National Taiwan University"},{"id":"https://openalex.org/G6641095505","display_name":null,"funder_award_id":"MOST 110-2221-E-002-166-MY3","funder_id":"https://openalex.org/F4320336725","funder_display_name":"Center for Artificial Intelligence and Advanced Robotics, National Taiwan University"},{"id":"https://openalex.org/G8978307813","display_name":null,"funder_award_id":"NSTC 112-2634-F-002-003","funder_id":"https://openalex.org/F4320336725","funder_display_name":"Center for Artificial Intelligence and Advanced Robotics, National Taiwan University"}],"funders":[{"id":"https://openalex.org/F4320322795","display_name":"Ministry of Science and Technology, Taiwan","ror":"https://ror.org/02kv4zf79"},{"id":"https://openalex.org/F4320336725","display_name":"Center for Artificial Intelligence and Advanced Robotics, National Taiwan University","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":25,"referenced_works":["https://openalex.org/W2049981393","https://openalex.org/W2088382221","https://openalex.org/W2145023731","https://openalex.org/W2290457235","https://openalex.org/W2409324799","https://openalex.org/W2416963117","https://openalex.org/W2516913148","https://openalex.org/W2624516211","https://openalex.org/W2624654876","https://openalex.org/W2763586588","https://openalex.org/W2773995979","https://openalex.org/W2884584069","https://openalex.org/W2889898945","https://openalex.org/W2921132220","https://openalex.org/W2931287830","https://openalex.org/W3022828391","https://openalex.org/W3094527452","https://openalex.org/W3127855451","https://openalex.org/W3148981780","https://openalex.org/W3150248096","https://openalex.org/W3185655855","https://openalex.org/W3209175951","https://openalex.org/W4285300603","https://openalex.org/W4286515283","https://openalex.org/W6630752255"],"related_works":["https://openalex.org/W4211095314","https://openalex.org/W2329386257","https://openalex.org/W2503350049","https://openalex.org/W4214562868","https://openalex.org/W1991249326","https://openalex.org/W4379536980","https://openalex.org/W2126905924","https://openalex.org/W2123271278","https://openalex.org/W1972819412","https://openalex.org/W3156635735"],"abstract_inverted_index":{"Atomic":[0],"force":[1],"microscopy":[2],"(AFM)":[3],"is":[4,79,90,111,154,165,181,257],"widely":[5],"used":[6],"to":[7,64,81,127,156,183,210,227,260,278,304,319,332],"examine":[8],"the":[9,21,41,59,62,83,86,94,102,108,115,119,122,128,136,145,157,163,167,172,196,212,219,253,263,268,272,284,287,306,312,315,320,334,338,342,346],"3-D":[10,25,46,264,290],"structure":[11],"in":[12,348],"a":[13,44,51,98,177,204],"few":[14],"nanometer":[15],"resolutions":[16],"for":[17,27,107],"numerous":[18],"fields.":[19],"However,":[20],"scan":[22,129,147,159,180,230,269,317],"performance":[23],"of":[24,85,101,121,187,198,215,232,267,286,311,314,337,345],"profiles":[26],"sidewall":[28,104,139,146,164,308],"structures":[29],"may":[30],"be":[31,133],"significantly":[32],"influenced":[33],"by":[34],"inherent":[35],"AFM":[36,47,117,179,238,274,316],"probe":[37,95,110,322],"shape.":[38],"To":[39,282,324],"address":[40],"above":[42],"issue,":[43],"novel":[45],"system":[48,131],"integrated":[49],"with":[50,61,93,125,190,276,294],"rotary":[52,87,220],"sample":[53,60,123,205,216,244,280],"stage":[54,221],"has":[55,148],"been":[56],"introduced,":[57],"providing":[58],"freedom":[63],"rotate":[65],"and":[66,161,200,222,299],"enabling":[67],"omnidirectional":[68,289],"scanning.":[69],"First,":[70],"based":[71,194,251],"on":[72,166,195,252],"optical":[73],"imaging,":[74],"an":[75,247],"optimized":[76],"calibration":[77],"method":[78,256],"proposed":[80,137,288,339],"determine":[82,211],"center":[84],"stage,":[88],"which":[89],"then":[91],"aligned":[92],"tip.":[96],"Next,":[97,246],"geometrical":[99],"assessment":[100],"admissible":[103],"orientations":[105,120],"(ASOs)":[106],"Akiyama":[109],"also":[112,258],"presented.":[113],"After":[114],"initial":[116],"scan,":[118],"sidewalls":[124,189,234],"respect":[126,277],"coordinate":[130],"can":[132],"derived":[134],"using":[135],"local":[138],"orientation":[140,153],"analysis":[141],"(LSOA).":[142],"Generally":[143],"speaking,":[144],"better":[149],"quality":[150,186,231,336],"if":[151,162],"its":[152],"transverse":[155],"tip\u2019s":[158],"direction":[160],"\u201crising\u201d":[168],"edge":[169],"(rather":[170],"than":[171],"\u201cfalling\u201d":[173],"edge),":[174],"rendering":[175],"that":[176,236],"single":[178],"unlikely":[182],"secure":[184],"good":[185],"all":[188,233],"versatile":[191],"orientations.":[192],"Therefore,":[193],"results":[197],"ASO":[199],"LSOA,":[201],"we":[202],"propose":[203],"rotation":[206,225],"planning":[207],"algorithm":[208],"(SRPA)":[209],"minimal":[213],"number":[214],"rotations":[217],"via":[218],"their":[223],"corresponding":[224],"angles":[226],"seek":[228],"high":[229,343],"provided":[235],"multiple":[237,273],"scans":[239,275],"proceed":[240],"subsequently":[241],"after":[242],"each":[243],"rotation.":[245],"effective":[248],"fusion":[249],"protocol":[250],"iterative-closest-point":[254],"(ICP)":[255],"presented":[259],"accurately":[261],"merge":[262],"point":[265],"clouds":[266],"topography":[270],"from":[271],"different":[279],"rotations.":[281],"verify":[283],"effectiveness":[285],"AFM,":[291],"extensive":[292],"experiments":[293],"both":[295],"square":[296],"island":[297],"samples":[298,301],"cylinder":[300],"are":[302,330],"conducted":[303],"demonstrate":[305],"high-precision":[307],"scanning,":[309],"regardless":[310],"limitation":[313],"due":[318],"adverse":[321],"geometry.":[323],"this":[325,349],"end,":[326],"various":[327],"quantitative":[328],"metrics":[329],"employed":[331],"evaluate":[333],"scanning":[335],"work,":[340],"showing":[341],"promise":[344],"research":[347],"article.":[350]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2025-12-23T23:11:35.936235","created_date":"2025-10-10T00:00:00"}