{"id":"https://openalex.org/W4401879590","doi":"https://doi.org/10.1109/tim.2024.3450062","title":"Research on Online Segmented Circle Fitting Algorithm Applied in Wafer Pre-Aligner","display_name":"Research on Online Segmented Circle Fitting Algorithm Applied in Wafer Pre-Aligner","publication_year":2024,"publication_date":"2024-01-01","ids":{"openalex":"https://openalex.org/W4401879590","doi":"https://doi.org/10.1109/tim.2024.3450062"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2024.3450062","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2024.3450062","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5022172689","display_name":"Ruoyu Wang","orcid":"https://orcid.org/0000-0001-6350-9478"},"institutions":[{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ruoyu Wang","raw_affiliation_strings":["Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China"],"raw_orcid":"https://orcid.org/0000-0001-6350-9478","affiliations":[{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I75867142"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031115774","display_name":"G. Cha","orcid":"https://orcid.org/0009-0009-0296-1984"},"institutions":[{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guozhi Cha","raw_affiliation_strings":["Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China"],"raw_orcid":"https://orcid.org/0009-0009-0296-1984","affiliations":[{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I75867142"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075123944","display_name":"Z. g. Chen","orcid":"https://orcid.org/0009-0008-4419-1757"},"institutions":[{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zengyan Chen","raw_affiliation_strings":["Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China"],"raw_orcid":"https://orcid.org/0009-0008-4419-1757","affiliations":[{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I75867142"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111356441","display_name":"Peng Zheng","orcid":"https://orcid.org/0009-0007-3827-126X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Peng Zheng","raw_affiliation_strings":["Xiamen Institute of Measurement and Testing, Xiamen, China"],"raw_orcid":"https://orcid.org/0009-0007-3827-126X","affiliations":[{"raw_affiliation_string":"Xiamen Institute of Measurement and Testing, Xiamen, China","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5034580590","display_name":"T. Liu","orcid":"https://orcid.org/0009-0003-2392-2761"},"institutions":[{"id":"https://openalex.org/I75867142","display_name":"Xiamen University of Technology","ror":"https://ror.org/01285e189","country_code":"CN","type":"education","lineage":["https://openalex.org/I75867142"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tundong Liu","raw_affiliation_strings":["Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China"],"raw_orcid":"https://orcid.org/0009-0003-2392-2761","affiliations":[{"raw_affiliation_string":"Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen, China","institution_ids":["https://openalex.org/I75867142"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4087,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.59578546,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":97},"biblio":{"volume":"73","issue":null,"first_page":"1","last_page":"10"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12549","display_name":"Image and Object Detection Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12549","display_name":"Image and Object Detection Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5531983971595764},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.5457893013954163},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5056893825531006},{"id":"https://openalex.org/keywords/algorithm-design","display_name":"Algorithm design","score":0.4189441502094269},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.22347155213356018},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2088521122932434}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5531983971595764},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.5457893013954163},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5056893825531006},{"id":"https://openalex.org/C106516650","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm design","level":2,"score":0.4189441502094269},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.22347155213356018},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2088521122932434}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2024.3450062","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2024.3450062","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W2595311085","https://openalex.org/W2734812422","https://openalex.org/W2794153789","https://openalex.org/W2800058830","https://openalex.org/W2912929284","https://openalex.org/W2979860990","https://openalex.org/W3013695998","https://openalex.org/W3047291564","https://openalex.org/W3090740169","https://openalex.org/W3119009672","https://openalex.org/W3216238950","https://openalex.org/W4205757955","https://openalex.org/W4214857782","https://openalex.org/W4226283974","https://openalex.org/W4254214577","https://openalex.org/W4297832424","https://openalex.org/W4308446395","https://openalex.org/W4313350200","https://openalex.org/W4367315544"],"related_works":["https://openalex.org/W2393888177","https://openalex.org/W2544423928","https://openalex.org/W2115794623","https://openalex.org/W2360264381","https://openalex.org/W2067173559","https://openalex.org/W2148738811","https://openalex.org/W1613730747","https://openalex.org/W2541389358","https://openalex.org/W4318948887","https://openalex.org/W1994204274"],"abstract_inverted_index":{"The":[0],"circle":[1],"fitting":[2,23,47,53,68,116,124,146],"algorithm":[3,62,77,136],"for":[4,92],"wafer":[5,12,16],"pre-aligners":[6],"plays":[7],"a":[8,51,57,88,114],"pivotal":[9],"role":[10],"in":[11,29],"transmission":[13],"technology.":[14],"Traditional":[15],"pre-aligner":[17],"adopts":[18],"the":[19,65,81],"method":[20,48,105,134],"of":[21,67,96],"one-time":[22,123],"after":[24],"collecting":[25],"complete":[26],"data,":[27],"resulting":[28],"low":[30],"accuracy,":[31],"high":[32],"computational":[33,73],"burden,":[34],"and":[35,75,112,135,148],"poor":[36],"robustness.":[37],"In":[38],"this":[39],"study,":[40],"we":[41,79],"propose":[42],"an":[43],"innovative":[44],"online":[45,94],"segmented":[46,69,90],"based":[49],"on":[50],"linear":[52],"model,":[54],"which":[55],"uses":[56],"recursive":[58],"weighted":[59],"least-squares":[60],"(RWLS)":[61],"to":[63,121],"enhance":[64],"accuracy":[66,147],"data.":[70,99],"To":[71],"address":[72],"complexities":[74],"improve":[76],"robustness,":[78],"introduce":[80],"progressive":[82],"sample":[83],"consensus":[84],"(PROSAC)":[85],"algorithm,":[86],"employing":[87],"uniform":[89],"strategy":[91],"rapid":[93],"selection":[95],"high-quality":[97],"sampled":[98],"Simulation":[100],"experiments":[101],"reveal":[102],"that":[103,131],"our":[104,132],"reduces":[106],"total":[107],"alignment":[108,140],"time":[109,141],"by":[110,118],"55.5%":[111],"decreases":[113],"mean":[115],"error":[117],"78.8%":[119],"compared":[120],"traditional":[122],"methods.":[125],"Furthermore,":[126],"actual":[127],"experimental":[128],"results":[129],"validate":[130],"proposed":[133],"not":[137],"only":[138],"reduce":[139],"but":[142],"also":[143],"exhibit":[144],"superior":[145],"interference":[149],"resistance.":[150]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}
