{"id":"https://openalex.org/W4388407836","doi":"https://doi.org/10.1109/tim.2023.3330220","title":"Novel Temperature Drift Compensation for MEMS Thermal Wind Sensors by Heating Power Calibration Circuits","display_name":"Novel Temperature Drift Compensation for MEMS Thermal Wind Sensors by Heating Power Calibration Circuits","publication_year":2023,"publication_date":"2023-11-06","ids":{"openalex":"https://openalex.org/W4388407836","doi":"https://doi.org/10.1109/tim.2023.3330220"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2023.3330220","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2023.3330220","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5115600067","display_name":"Bo Qi","orcid":"https://orcid.org/0009-0002-2101-1529"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Bo Qi","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0009-0002-2101-1529","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042225149","display_name":"Zhenxiang Yi","orcid":"https://orcid.org/0000-0002-4619-8855"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenxiang Yi","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0002-4619-8855","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054995764","display_name":"Ming Qin","orcid":"https://orcid.org/0000-0002-8424-6299"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ming Qin","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0002-8424-6299","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5038334345","display_name":"Qing\u2010An Huang","orcid":"https://orcid.org/0000-0002-0646-7635"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qing-An Huang","raw_affiliation_strings":["Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0002-0646-7635","affiliations":[{"raw_affiliation_string":"Key Laboratory of MEMS, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5115600067"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":null,"apc_paid":null,"fwci":0.8584,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.70337298,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"73","issue":null,"first_page":"1","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9979000091552734,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.7821048498153687},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.748650312423706},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7231605648994446},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.6489021182060242},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.627985954284668},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.5249959230422974},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.49825072288513184},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.468813419342041},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.42352044582366943},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3744767904281616},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.33801034092903137},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20051166415214539},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.19234326481819153},{"id":"https://openalex.org/keywords/meteorology","display_name":"Meteorology","score":0.10959228873252869}],"concepts":[{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.7821048498153687},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.748650312423706},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7231605648994446},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.6489021182060242},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.627985954284668},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.5249959230422974},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.49825072288513184},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.468813419342041},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.42352044582366943},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3744767904281616},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.33801034092903137},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20051166415214539},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19234326481819153},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.10959228873252869},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2023.3330220","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2023.3330220","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.9200000166893005}],"awards":[{"id":"https://openalex.org/G3459056715","display_name":null,"funder_award_id":"61971124","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7643065995","display_name":null,"funder_award_id":"2020CXGC010203","funder_id":"https://openalex.org/F4320333596","funder_display_name":"Key Technology Research and Development Program of Shandong"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320333596","display_name":"Key Technology Research and Development Program of Shandong","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1975631503","https://openalex.org/W1983009518","https://openalex.org/W1987317785","https://openalex.org/W1996263349","https://openalex.org/W2034296498","https://openalex.org/W2040608787","https://openalex.org/W2068522195","https://openalex.org/W2072026079","https://openalex.org/W2093190868","https://openalex.org/W2146712786","https://openalex.org/W2148014891","https://openalex.org/W2162164654","https://openalex.org/W2171849451","https://openalex.org/W2172955187","https://openalex.org/W2180169839","https://openalex.org/W2945204735","https://openalex.org/W2963356286","https://openalex.org/W3139214646","https://openalex.org/W3174914938"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W2319192085","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W2045074154","https://openalex.org/W2346208161","https://openalex.org/W4304814793","https://openalex.org/W2937314749"],"abstract_inverted_index":{"In":[0],"this":[1],"article,":[2],"a":[3,60],"new":[4,61],"temperature":[5,23,32,41,56,66,84,109,128],"drift":[6,67],"compensation":[7],"method":[8],"using":[9],"variable":[10],"circuit":[11],"parameters":[12],"is":[13,50],"proposed":[14],"for":[15,140],"micro-electromechanical":[16],"systems":[17],"(MEMSs)":[18],"thermal":[19],"wind":[20,105,123],"sensors.":[21],"Different":[22],"coefficients":[24],"of":[25],"resistance":[26,63,74],"between":[27],"heating":[28,88],"resistor":[29,49],"and":[30,86,137,155,172],"ambient":[31,55],"resistor,":[33,37,58],"together":[34],"with":[35,54,107],"mismatched":[36],"give":[38],"rise":[39],"to":[40,92,114,134,159],"drift,":[42],"which":[43],"has":[44],"been":[45,101,166],"analyzed.":[46],"An":[47],"adjustable":[48],"introduced":[51],"in":[52,82,103,126],"parallel":[53],"sensing":[57],"achieving":[59],"equivalent":[62],"Rs\u2019.":[64],"The":[65,78,117,146],"can":[68],"be":[69],"eliminated":[70],"by":[71,168],"recording":[72],"the":[73,83,93,97,104,108,121,141,160,163],"at":[75],"different":[76],"temperatures.":[77],"sensors":[79,143],"were":[80,90,132],"tested":[81],"chamber":[85],"their":[87],"power":[89],"compared":[91],"calculations.":[94],"Above":[95],"all,":[96],"speed":[98,124],"experiments":[99],"have":[100,165],"performed":[102],"tunnel":[106],"varying":[110],"from":[111],"0":[112],"\u00b0C":[113],"40":[115],"\u00b0C.":[116],"results":[118],"indicated":[119],"that":[120],"maximum":[122,147],"errors":[125,149,164],"constant":[127],"difference":[129],"(CTD)":[130],"mode":[131],"close":[133],"1.027,":[135],"0.611,":[136],"0.530":[138],"m/s":[139],"three":[142],"after":[144],"compensation.":[145],"related":[148],"are":[150],"less":[151],"than":[152],"2.70%,":[153],"2.17%,":[154],"2.24%,":[156],"respectively.":[157,174],"Compared":[158],"uncompensated":[161],"devices,":[162],"reduced":[167],"about":[169],"91.28%,":[170],"89.67%":[171],"83.23%,":[173]},"counts_by_year":[{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}