{"id":"https://openalex.org/W4383753308","doi":"https://doi.org/10.1109/tim.2023.3289507","title":"Nano-g Optical Accelerometer With a Large Dynamic Range and Low Noise Floor","display_name":"Nano-g Optical Accelerometer With a Large Dynamic Range and Low Noise Floor","publication_year":2023,"publication_date":"2023-01-01","ids":{"openalex":"https://openalex.org/W4383753308","doi":"https://doi.org/10.1109/tim.2023.3289507"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2023.3289507","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2023.3289507","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101828099","display_name":"Zhenyu Sun","orcid":"https://orcid.org/0000-0002-1177-1797"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Zhenyu Sun","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0002-1177-1797","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015859397","display_name":"Cheng Li","orcid":"https://orcid.org/0000-0002-9252-2097"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Cheng Li","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0002-9252-2097","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017261150","display_name":"Luqiang Zhou","orcid":"https://orcid.org/0000-0003-4097-7337"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Luqiang Zhou","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0003-4097-7337","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080977361","display_name":"Xin Huang","orcid":"https://orcid.org/0000-0001-9223-037X"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xin Huang","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0001-9223-037X","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5037245137","display_name":"Bo Yang","orcid":"https://orcid.org/0000-0003-2855-3662"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Yang","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China"],"raw_orcid":"https://orcid.org/0000-0003-2855-3662","affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5101828099"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":null,"apc_paid":null,"fwci":1.022,"has_fulltext":false,"cited_by_count":8,"citation_normalized_percentile":{"value":0.75934214,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"72","issue":null,"first_page":"1","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.9260932207107544},{"id":"https://openalex.org/keywords/dynamic-range","display_name":"Dynamic range","score":0.6958194375038147},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.68965083360672},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.6367217898368835},{"id":"https://openalex.org/keywords/noise-floor","display_name":"Noise floor","score":0.5874111652374268},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5823344588279724},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5195765495300293},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.4851311147212982},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3988332748413086},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3723863959312439},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.33706992864608765},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3343977630138397},{"id":"https://openalex.org/keywords/noise-measurement","display_name":"Noise measurement","score":0.3186350464820862},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2929019629955292},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.24208155274391174},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.19925349950790405},{"id":"https://openalex.org/keywords/noise-reduction","display_name":"Noise reduction","score":0.14861679077148438}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9260932207107544},{"id":"https://openalex.org/C87133666","wikidata":"https://www.wikidata.org/wiki/Q1161699","display_name":"Dynamic range","level":2,"score":0.6958194375038147},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.68965083360672},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.6367217898368835},{"id":"https://openalex.org/C187612029","wikidata":"https://www.wikidata.org/wiki/Q17083130","display_name":"Noise floor","level":4,"score":0.5874111652374268},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5823344588279724},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5195765495300293},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.4851311147212982},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3988332748413086},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3723863959312439},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.33706992864608765},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3343977630138397},{"id":"https://openalex.org/C29265498","wikidata":"https://www.wikidata.org/wiki/Q7047719","display_name":"Noise measurement","level":3,"score":0.3186350464820862},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2929019629955292},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24208155274391174},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.19925349950790405},{"id":"https://openalex.org/C163294075","wikidata":"https://www.wikidata.org/wiki/Q581861","display_name":"Noise reduction","level":2,"score":0.14861679077148438},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2023.3289507","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2023.3289507","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.800000011920929}],"awards":[{"id":"https://openalex.org/G785421367","display_name":null,"funder_award_id":"3207032101D","funder_id":"https://openalex.org/F4320335787","funder_display_name":"Fundamental Research Funds for the Central Universities"},{"id":"https://openalex.org/G8355552601","display_name":null,"funder_award_id":"61874025","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335787","display_name":"Fundamental Research Funds for the Central Universities","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":38,"referenced_works":["https://openalex.org/W2076374936","https://openalex.org/W2082239796","https://openalex.org/W2105663057","https://openalex.org/W2109426336","https://openalex.org/W2143602060","https://openalex.org/W2147684130","https://openalex.org/W2160325238","https://openalex.org/W2164010209","https://openalex.org/W2315483489","https://openalex.org/W2327686217","https://openalex.org/W2559850636","https://openalex.org/W2765409115","https://openalex.org/W2766482467","https://openalex.org/W2799345637","https://openalex.org/W2804294574","https://openalex.org/W2809328549","https://openalex.org/W2838556372","https://openalex.org/W2899116713","https://openalex.org/W2903520811","https://openalex.org/W2961994168","https://openalex.org/W3012363975","https://openalex.org/W3044883101","https://openalex.org/W3100800765","https://openalex.org/W3119843615","https://openalex.org/W3126327532","https://openalex.org/W3136273323","https://openalex.org/W3180255641","https://openalex.org/W3184234048","https://openalex.org/W4200433982","https://openalex.org/W4205373259","https://openalex.org/W4210695040","https://openalex.org/W4220748031","https://openalex.org/W4224864021","https://openalex.org/W4226459784","https://openalex.org/W4286540943","https://openalex.org/W4288059550","https://openalex.org/W4289950774","https://openalex.org/W4296437955"],"related_works":["https://openalex.org/W3161496874","https://openalex.org/W2026330382","https://openalex.org/W2915680872","https://openalex.org/W2287189152","https://openalex.org/W3045176038","https://openalex.org/W2561689744","https://openalex.org/W2106421425","https://openalex.org/W2004074100","https://openalex.org/W2029788994","https://openalex.org/W2131708976"],"abstract_inverted_index":{"Optical":[0],"microelectromechanical":[1],"system":[2,87,101],"(MEMS)":[3],"devices":[4,48],"are":[5,16,49],"often":[6],"used":[7,18],"to":[8,26,91,126,158,177],"measure":[9],"vibrations":[10],"with":[11,67,117,134],"exceedingly":[12],"small":[13],"amplitudes,":[14],"which":[15],"extensively":[17],"in":[19,36,93,171,202],"acceleration":[20,76],"and":[21,33,42,97,153,204],"seismic":[22,203],"sensors.":[23],"However,":[24],"owing":[25],"the":[27,30,34,39,58,75,89,94,98,108,114,124,143,164,172,192,195],"limitations":[28],"of":[29,45,60,113,120,150,163],"sensing":[31,77,115],"principle":[32],"variation":[35],"ambient":[37],"temperature,":[38],"measurement":[40],"accuracy":[41],"dynamic":[43,137,154],"range":[44,155,174],"these":[46],"optical":[47,64],"relatively":[50],"general.":[51],"As":[52],"a":[53,103,135,147],"solution,":[54],"this":[55],"paper":[56],"presents":[57],"design":[59,112],"an":[61,128],"electromagnetic":[62,84],"feedback":[63,85],"MEMS":[65],"accelerometer":[66,72,125],"temperature":[68,99,106],"control.":[69],"Two":[70],"single":[71],"chips":[73],"form":[74],"structure,":[78],"assembled":[79],"via":[80],"manual":[81],"micro-assembly.":[82],"The":[83,110,161,180],"control":[86,100,121],"enables":[88,123],"sensor":[90,165],"operate":[92],"linear":[95],"range,":[96],"maintains":[102],"stable":[104],"operating":[105],"for":[107],"equipment.":[109],"novel":[111],"structure":[116],"two":[118],"sets":[119],"systems":[122],"have":[127],"extremely":[129],"low":[130],"noise":[131],"floor,":[132],"along":[133],"wide":[136],"range.":[138],"Experimental":[139],"results":[140],"confirm":[141],"that":[142],"device":[144,197],"can":[145],"achieve":[146],"voltage":[148],"sensitivity":[149],"2643":[151],"V/g":[152],"values":[156],"up":[157],"3.9":[159],"mg.":[160],"self-noise":[162],"is":[166,183],"less":[167],"than":[168],"3":[169],"ng/\u221aHz":[170],"frequency":[173],"from":[175],"0.8":[176],"7":[178],"Hz.":[179],"bias":[181],"stability":[182],"11.9":[184],"ng":[185],"@":[186],"t":[187],"=":[188],"1.8":[189],"s.":[190],"Considering":[191],"excellent":[193],"performance,":[194],"proposed":[196],"has":[198],"significant":[199],"application":[200],"potential":[201],"gravity":[205],"measurements.":[206]},"counts_by_year":[{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":2}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}