{"id":"https://openalex.org/W4375928906","doi":"https://doi.org/10.1109/tim.2023.3272378","title":"A Dual-Axis Optoelectronic Inclinometer Based on Wavefront Interference Fringes","display_name":"A Dual-Axis Optoelectronic Inclinometer Based on Wavefront Interference Fringes","publication_year":2023,"publication_date":"2023-01-01","ids":{"openalex":"https://openalex.org/W4375928906","doi":"https://doi.org/10.1109/tim.2023.3272378"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2023.3272378","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2023.3272378","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5061422815","display_name":"Pengcheng Hu","orcid":"https://orcid.org/0000-0002-2471-7036"},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]},{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I890469752","display_name":"Ministry of Industry and Information Technology","ror":"https://ror.org/0385nmy68","country_code":"CN","type":"government","lineage":["https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Pengcheng Hu","raw_affiliation_strings":["Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, China","School of Instrument Science and Engineering, Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, China","Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin, China"],"raw_orcid":"https://orcid.org/0000-0002-2471-7036","affiliations":[{"raw_affiliation_string":"Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I100188998","https://openalex.org/I204983213"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I890469752"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089526697","display_name":"Xionglei Lin","orcid":"https://orcid.org/0000-0003-4056-6415"},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]},{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I890469752","display_name":"Ministry of Industry and Information Technology","ror":"https://ror.org/0385nmy68","country_code":"CN","type":"government","lineage":["https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xionglei Lin","raw_affiliation_strings":["Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, China","Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin, China","School of Instrument Science and Engineering, Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, China"],"raw_orcid":"https://orcid.org/0000-0003-4056-6415","affiliations":[{"raw_affiliation_string":"Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I100188998","https://openalex.org/I204983213"]},{"raw_affiliation_string":"Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I890469752"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000430771","display_name":"Yifan Zhang","orcid":"https://orcid.org/0000-0001-7278-5220"},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]},{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I890469752","display_name":"Ministry of Industry and Information Technology","ror":"https://ror.org/0385nmy68","country_code":"CN","type":"government","lineage":["https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yifan Zhang","raw_affiliation_strings":["Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, China","School of Instrument Science and Engineering, Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, China","Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin, China"],"raw_orcid":"https://orcid.org/0000-0001-7278-5220","affiliations":[{"raw_affiliation_string":"Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I100188998","https://openalex.org/I204983213"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I890469752"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053078055","display_name":"Liang Yu","orcid":"https://orcid.org/0000-0001-6151-4732"},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]},{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I890469752","display_name":"Ministry of Industry and Information Technology","ror":"https://ror.org/0385nmy68","country_code":"CN","type":"government","lineage":["https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liang Yu","raw_affiliation_strings":["Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, China","Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin, China","School of Instrument Science and Engineering, Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, China"],"raw_orcid":"https://orcid.org/0000-0001-6151-4732","affiliations":[{"raw_affiliation_string":"Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I100188998","https://openalex.org/I204983213"]},{"raw_affiliation_string":"Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I890469752"]},{"raw_affiliation_string":"School of Instrument Science and Engineering, Ultra-Precision Optoelectronic Instrument Engineering Center, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.4765,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.52381916,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"72","issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.7184605598449707},{"id":"https://openalex.org/keywords/inclinometer","display_name":"Inclinometer","score":0.6941202878952026},{"id":"https://openalex.org/keywords/wavefront","display_name":"Wavefront","score":0.5669159889221191},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.5216115713119507},{"id":"https://openalex.org/keywords/interference","display_name":"Interference (communication)","score":0.5021123886108398},{"id":"https://openalex.org/keywords/astronomical-interferometer","display_name":"Astronomical interferometer","score":0.4811869263648987},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.47355642914772034},{"id":"https://openalex.org/keywords/servo","display_name":"Servo","score":0.42061957716941833},{"id":"https://openalex.org/keywords/adaptive-optics","display_name":"Adaptive optics","score":0.4165641665458679},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3970184624195099},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.35309988260269165},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.18430495262145996},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.16105425357818604},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1388193964958191}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.7184605598449707},{"id":"https://openalex.org/C158105764","wikidata":"https://www.wikidata.org/wiki/Q827664","display_name":"Inclinometer","level":2,"score":0.6941202878952026},{"id":"https://openalex.org/C165699331","wikidata":"https://www.wikidata.org/wiki/Q461533","display_name":"Wavefront","level":2,"score":0.5669159889221191},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.5216115713119507},{"id":"https://openalex.org/C32022120","wikidata":"https://www.wikidata.org/wiki/Q797225","display_name":"Interference (communication)","level":3,"score":0.5021123886108398},{"id":"https://openalex.org/C23576306","wikidata":"https://www.wikidata.org/wiki/Q17004698","display_name":"Astronomical interferometer","level":3,"score":0.4811869263648987},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.47355642914772034},{"id":"https://openalex.org/C107354338","wikidata":"https://www.wikidata.org/wiki/Q1937153","display_name":"Servo","level":2,"score":0.42061957716941833},{"id":"https://openalex.org/C132771110","wikidata":"https://www.wikidata.org/wiki/Q506922","display_name":"Adaptive optics","level":2,"score":0.4165641665458679},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3970184624195099},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.35309988260269165},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.18430495262145996},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.16105425357818604},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1388193964958191},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C205649164","wikidata":"https://www.wikidata.org/wiki/Q1071","display_name":"Geography","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C58640448","wikidata":"https://www.wikidata.org/wiki/Q42515","display_name":"Cartography","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2023.3272378","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2023.3272378","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6499999761581421,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G2745411565","display_name":null,"funder_award_id":"52061135114","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4086168521","display_name":null,"funder_award_id":"52105548","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6623113290","display_name":null,"funder_award_id":"2020YFC2200201","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":36,"referenced_works":["https://openalex.org/W2009529702","https://openalex.org/W2032520695","https://openalex.org/W2044305733","https://openalex.org/W2053099004","https://openalex.org/W2064751719","https://openalex.org/W2067064049","https://openalex.org/W2067951898","https://openalex.org/W2130568651","https://openalex.org/W2158584109","https://openalex.org/W2159019118","https://openalex.org/W2305641733","https://openalex.org/W2428261532","https://openalex.org/W2461259607","https://openalex.org/W2507956071","https://openalex.org/W2562533422","https://openalex.org/W2624253651","https://openalex.org/W2726628778","https://openalex.org/W2754921183","https://openalex.org/W2765241072","https://openalex.org/W2772317219","https://openalex.org/W2793112769","https://openalex.org/W2895372596","https://openalex.org/W2898886181","https://openalex.org/W2901089452","https://openalex.org/W2905484366","https://openalex.org/W2905821196","https://openalex.org/W2908784814","https://openalex.org/W2920725397","https://openalex.org/W2971025694","https://openalex.org/W2986525233","https://openalex.org/W3007201217","https://openalex.org/W3033048191","https://openalex.org/W3082604406","https://openalex.org/W3168545210","https://openalex.org/W4285115140","https://openalex.org/W4289792438"],"related_works":["https://openalex.org/W2049040703","https://openalex.org/W1994127078","https://openalex.org/W2996224838","https://openalex.org/W3017180796","https://openalex.org/W2069955960","https://openalex.org/W2048446592","https://openalex.org/W2548072930","https://openalex.org/W2006461495","https://openalex.org/W2154607131","https://openalex.org/W2055108729"],"abstract_inverted_index":{"With":[0],"the":[1,57,66,74,88,98,103,112,122,125,133,161,165],"rapid":[2],"development":[3],"of":[4,69,124,140,146,164],"ultraprecision":[5],"instruments,":[6],"inclinometers":[7],"play":[8],"an":[9],"essential":[10],"role":[11],"in":[12],"machining":[13],"and":[14,45,73,86,97,111,143,154],"calibration.":[15],"The":[16],"current":[17],"mainstream":[18],"methods":[19],"based":[20],"on":[21],"capacitance,":[22],"inductance,":[23],"or":[24],"optoelectronic":[25,53],"autocollimators":[26],"can":[27,60],"achieve":[28],"a":[29,50,136,144,158],"high":[30,152],"resolution":[31,145],"but":[32],"they":[33],"are":[34,42],"not":[35,92],"directly":[36,107],"traceable.":[37],"In":[38,47],"addition,":[39],"their":[40],"systems":[41],"relatively":[43],"complex":[44],"large.":[46],"this":[48],"study,":[49],"novel":[51],"dual-axis":[52],"inclinometer":[54,90],"is":[55,77,91,106],"proposed,":[56],"tilt":[58],"angle":[59],"be":[61],"precisely":[62],"measured":[63],"by":[64],"calculating":[65],"spatial":[67],"frequency":[68],"wavefront":[70],"interference":[71],"fringes,":[72],"liquid":[75],"surface":[76],"applied":[78],"as":[79],"its":[80],"reference.":[81],"Compared":[82,156],"with":[83,151,157],"other":[84],"interferometers":[85],"autocollimators,":[87],"proposed":[89,126],"sensitive":[93],"to":[94,109,120],"mechanical":[95],"errors":[96],"air":[99],"refractive":[100],"index.":[101],"Therefore,":[102],"measurement":[104],"result":[105],"traceable":[108],"gravity":[110],"laser":[113],"wavelength.":[114],"A":[115],"compact":[116],"prototype":[117,134,166],"was":[118,167],"fabricated":[119],"verify":[121],"effectiveness":[123],"method.":[127],"Our":[128],"experimental":[129],"results":[130],"show":[131],"that":[132],"achieves":[135],"low":[137],"longterm":[138],"drift":[139],"0.02":[141],"arcsec/h":[142],"greater":[147],"than":[148,169],"0.1":[149],"arcsec,":[150],"sensitivity":[153],"stability.":[155],"commercial":[159],"autocollimator,":[160],"linear":[162],"error":[163],"less":[168],"0.16%.":[170]},"counts_by_year":[{"year":2025,"cited_by_count":4},{"year":2023,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}