{"id":"https://openalex.org/W4296339283","doi":"https://doi.org/10.1109/tim.2022.3207807","title":"Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing","display_name":"Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing","publication_year":2022,"publication_date":"2022-01-01","ids":{"openalex":"https://openalex.org/W4296339283","doi":"https://doi.org/10.1109/tim.2022.3207807"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2022.3207807","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2022.3207807","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5059993079","display_name":"Chih\u2010Hung Jen","orcid":"https://orcid.org/0000-0002-2079-1175"},"institutions":[{"id":"https://openalex.org/I50519452","display_name":"Lunghwa University of Science and Technology","ror":"https://ror.org/001y2wd07","country_code":"TW","type":"education","lineage":["https://openalex.org/I50519452"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Chih-Hung Jen","raw_affiliation_strings":["Department of Information Management, Lunghwa University of Science and Technology, Taoyuan City, Taiwan"],"raw_orcid":"https://orcid.org/0000-0002-2079-1175","affiliations":[{"raw_affiliation_string":"Department of Information Management, Lunghwa University of Science and Technology, Taoyuan City, Taiwan","institution_ids":["https://openalex.org/I50519452"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064302424","display_name":"Shu\u2010Kai S. Fan","orcid":"https://orcid.org/0000-0003-3068-504X"},"institutions":[{"id":"https://openalex.org/I118292597","display_name":"National Taipei University of Technology","ror":"https://ror.org/00cn92c09","country_code":"TW","type":"education","lineage":["https://openalex.org/I118292597"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Shu-Kai S. Fan","raw_affiliation_strings":["Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0003-3068-504X","affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I118292597"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5049424328","display_name":"Yu-Yu Lin","orcid":"https://orcid.org/0000-0002-6864-9119"},"institutions":[{"id":"https://openalex.org/I118292597","display_name":"National Taipei University of Technology","ror":"https://ror.org/00cn92c09","country_code":"TW","type":"education","lineage":["https://openalex.org/I118292597"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yu-Yu Lin","raw_affiliation_strings":["Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan"],"raw_orcid":"https://orcid.org/0000-0002-6864-9119","affiliations":[{"raw_affiliation_string":"Department of Industrial Engineering and Management, National Taipei University of Technology, Taipei, Taiwan","institution_ids":["https://openalex.org/I118292597"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5059993079"],"corresponding_institution_ids":["https://openalex.org/I50519452"],"apc_list":null,"apc_paid":null,"fwci":0.9488,"has_fulltext":false,"cited_by_count":7,"citation_normalized_percentile":{"value":0.78930972,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":97},"biblio":{"volume":"71","issue":null,"first_page":"1","last_page":"12"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12111","display_name":"Industrial Vision Systems and Defect Detection","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11666","display_name":"Color Science and Applications","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10640","display_name":"Spectroscopy and Chemometric Analyses","score":0.9847000241279602,"subfield":{"id":"https://openalex.org/subfields/1602","display_name":"Analytical Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.5856444239616394},{"id":"https://openalex.org/keywords/filter","display_name":"Filter (signal processing)","score":0.44658946990966797},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.44377532601356506},{"id":"https://openalex.org/keywords/scheduling","display_name":"Scheduling (production processes)","score":0.43533459305763245},{"id":"https://openalex.org/keywords/liquid-crystal-display","display_name":"Liquid-crystal display","score":0.4241468906402588},{"id":"https://openalex.org/keywords/real-time-computing","display_name":"Real-time computing","score":0.35618528723716736},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.34937775135040283},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.10257810354232788}],"concepts":[{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.5856444239616394},{"id":"https://openalex.org/C106131492","wikidata":"https://www.wikidata.org/wiki/Q3072260","display_name":"Filter (signal processing)","level":2,"score":0.44658946990966797},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.44377532601356506},{"id":"https://openalex.org/C206729178","wikidata":"https://www.wikidata.org/wiki/Q2271896","display_name":"Scheduling (production processes)","level":2,"score":0.43533459305763245},{"id":"https://openalex.org/C128019096","wikidata":"https://www.wikidata.org/wiki/Q83341","display_name":"Liquid-crystal display","level":2,"score":0.4241468906402588},{"id":"https://openalex.org/C79403827","wikidata":"https://www.wikidata.org/wiki/Q3988","display_name":"Real-time computing","level":1,"score":0.35618528723716736},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.34937775135040283},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.10257810354232788},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C21547014","wikidata":"https://www.wikidata.org/wiki/Q1423657","display_name":"Operations management","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2022.3207807","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2022.3207807","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.4300000071525574,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[{"id":"https://openalex.org/G6616000426","display_name":null,"funder_award_id":"MOST 110-2221-E-027-112-MY3","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"},{"id":"https://openalex.org/G7376531182","display_name":null,"funder_award_id":"MOST 108-2221-E-027-028-MY3","funder_id":"https://openalex.org/F4320322795","funder_display_name":"Ministry of Science and Technology, Taiwan"}],"funders":[{"id":"https://openalex.org/F4320322795","display_name":"Ministry of Science and Technology, Taiwan","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W1964357740","https://openalex.org/W1972844536","https://openalex.org/W1995308761","https://openalex.org/W1995662356","https://openalex.org/W2034489756","https://openalex.org/W2060508069","https://openalex.org/W2063757041","https://openalex.org/W2072124697","https://openalex.org/W2113242816","https://openalex.org/W2132828732","https://openalex.org/W2162059449","https://openalex.org/W2226450201","https://openalex.org/W2295598076","https://openalex.org/W2739715168","https://openalex.org/W2777729492","https://openalex.org/W2808993481","https://openalex.org/W2894026361","https://openalex.org/W2965625921","https://openalex.org/W2991620669","https://openalex.org/W2999952205","https://openalex.org/W3093086118","https://openalex.org/W3093446992","https://openalex.org/W3160759841","https://openalex.org/W3167334002","https://openalex.org/W3176729219","https://openalex.org/W3213747853","https://openalex.org/W4205137397","https://openalex.org/W4212883601","https://openalex.org/W6742215222","https://openalex.org/W6794517375"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W1998546186","https://openalex.org/W2061967405","https://openalex.org/W2392646414","https://openalex.org/W2174860717","https://openalex.org/W2590542424","https://openalex.org/W2110528520","https://openalex.org/W2734799811","https://openalex.org/W2021243286","https://openalex.org/W2061437518"],"abstract_inverted_index":{"With":[0,32],"the":[1,10,19,42,58,66,70,80,90,104,128,156,162,174,188,208,216,219,223],"innovations":[2],"in":[3,9,79,98],"commercial-electronics":[4],"products":[5,201],"and":[6,38,152],"fierce":[7],"competition":[8],"global":[11],"panel":[12,15],"industry,":[13],"most":[14,157],"manufacturers":[16],"have":[17],"adopted":[18],"small":[20,33,121,204],"batch":[21,34,122,205],"production":[22,230],"mode":[23],"to":[24,56,103,113,154,169,191,214,226],"deal":[25],"with":[26],"a":[27,115,178],"wide":[28],"range":[29],"of":[30,60,75,83,202,218],"customization.":[31],"sizes,":[35],"productive":[36],"yield":[37],"troubleshooting":[39],"are":[40,145],"considered":[41],"top":[43],"priority,":[44],"so":[45,160],"monitoring":[46],"capability":[47],"conducted":[48],"via":[49],"virtual":[50],"metrology":[51,171],"(VM)":[52],"is":[53,86,185,211],"essentially":[54],"necessary":[55],"satisfy":[57],"requirement":[59],"process":[61],"quality.":[62],"In":[63,88],"this":[64],"paper,":[65],"real-world":[67],"dataset":[68],"involving":[69],"photoresist":[71],"(PR)":[72],"spacer":[73,92],"heights":[74,93],"color":[76],"filter":[77],"(CF)":[78],"array":[81],"sector":[82],"TFT-LCD":[84,129],"manufacturing":[85],"investigated.":[87],"practice,":[89],"PR":[91],"can":[94,134,165,198],"only":[95],"be":[96,135,227],"measured":[97],"an":[99,193],"infrequent":[100],"manner":[101],"due":[102],"scheduling":[105],"restriction.":[106],"Without":[107],"taking":[108],"additional":[109],"sample":[110],"measurements,":[111],"how":[112],"design":[114],"high-accuracy":[116],"VM":[117,163,189,195,209],"model":[118,184,210,224],"based":[119],"on":[120,173],"sizes":[123],"warrants":[124],"urgent":[125],"research":[126],"for":[127],"industry.":[130],"The":[131],"proposed":[132],"framework":[133],"divided":[136],"into":[137,187],"two":[138,141],"parts.":[139],"First,":[140],"novel":[142],"distance-measuring":[143],"methods":[144],"proposed,":[146],"Direct":[147],"(fully-connected)":[148],"Neural":[149],"Network":[150],"(DNN)":[151],"K-means,":[153],"allocate":[155],"affiliated":[158],"positions":[159,168],"that":[161,197],"system":[164,190],"utilize":[166],"these":[167],"execute":[170],"prediction":[172],"same":[175],"product.":[176],"Next,":[177],"modified":[179],"random":[180],"forests":[181],"(RFs)":[182],"regression":[183],"integrated":[186],"create":[192],"ensemble":[194],"predictor":[196],"handle":[199],"multiple":[200],"different":[203],"sizes.":[206],"Lastly,":[207],"repeatedly":[212],"evaluated,":[213],"check":[215],"performance":[217],"re-training":[220],"procedure":[221],"when":[222],"needs":[225],"renewed":[228],"between":[229],"maintenance":[231],"periods.":[232]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":2}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}