{"id":"https://openalex.org/W4292348083","doi":"https://doi.org/10.1109/tim.2022.3196443","title":"A Signal Processing Method for Homodyne Laser Interferometer Based on Model Parameter Self-Calibration With Redundant Information","display_name":"A Signal Processing Method for Homodyne Laser Interferometer Based on Model Parameter Self-Calibration With Redundant Information","publication_year":2022,"publication_date":"2022-01-01","ids":{"openalex":"https://openalex.org/W4292348083","doi":"https://doi.org/10.1109/tim.2022.3196443"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2022.3196443","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2022.3196443","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5090811986","display_name":"Tingrui Wen","orcid":"https://orcid.org/0000-0002-4695-3064"},"institutions":[{"id":"https://openalex.org/I4391768272","display_name":"State Key Laboratory of Tribology","ror":"https://ror.org/03h33sq24","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391768272","https://openalex.org/I99065089"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tingrui Wen","raw_affiliation_strings":["Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-4695-3064","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4391768272"]},{"raw_affiliation_string":"Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056545586","display_name":"Jinchun Hu","orcid":"https://orcid.org/0000-0003-2733-6738"},"institutions":[{"id":"https://openalex.org/I4391768272","display_name":"State Key Laboratory of Tribology","ror":"https://ror.org/03h33sq24","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391768272","https://openalex.org/I99065089"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinchun Hu","raw_affiliation_strings":["Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0003-2733-6738","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4391768272"]},{"raw_affiliation_string":"Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112890006","display_name":"Yu Zhu","orcid":"https://orcid.org/0000-0002-6186-6874"},"institutions":[{"id":"https://openalex.org/I4391768272","display_name":"State Key Laboratory of Tribology","ror":"https://ror.org/03h33sq24","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391768272","https://openalex.org/I99065089"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Zhu","raw_affiliation_strings":["Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-6186-6874","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4391768272"]},{"raw_affiliation_string":"Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089275191","display_name":"Guojie Hua","orcid":"https://orcid.org/0000-0002-1631-8692"},"institutions":[{"id":"https://openalex.org/I4391768272","display_name":"State Key Laboratory of Tribology","ror":"https://ror.org/03h33sq24","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391768272","https://openalex.org/I99065089"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guojie Hua","raw_affiliation_strings":["Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-1631-8692","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4391768272"]},{"raw_affiliation_string":"Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025719931","display_name":"Dengfeng Xu","orcid":"https://orcid.org/0000-0002-1887-6460"},"institutions":[{"id":"https://openalex.org/I4391768272","display_name":"State Key Laboratory of Tribology","ror":"https://ror.org/03h33sq24","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391768272","https://openalex.org/I99065089"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dengfeng Xu","raw_affiliation_strings":["Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-1887-6460","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4391768272"]},{"raw_affiliation_string":"Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100656178","display_name":"Ming Zhang","orcid":"https://orcid.org/0000-0002-3820-5074"},"institutions":[{"id":"https://openalex.org/I4391768272","display_name":"State Key Laboratory of Tribology","ror":"https://ror.org/03h33sq24","country_code":null,"type":"facility","lineage":["https://openalex.org/I4391768272","https://openalex.org/I99065089"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ming Zhang","raw_affiliation_strings":["Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-3820-5074","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, and the Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipment and Control, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4391768272"]},{"raw_affiliation_string":"Department of Mechanical Engineering, State Key Laboratory of Tribology, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2986,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.49726664,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"71","issue":null,"first_page":"1","last_page":"11"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9977999925613403,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/direct-conversion-receiver","display_name":"Direct-conversion receiver","score":0.6675025224685669},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.6618897914886475},{"id":"https://openalex.org/keywords/astronomical-interferometer","display_name":"Astronomical interferometer","score":0.5685980319976807},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.5534840822219849},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.48219385743141174},{"id":"https://openalex.org/keywords/interference","display_name":"Interference (communication)","score":0.45303452014923096},{"id":"https://openalex.org/keywords/signal-processing","display_name":"Signal processing","score":0.4330381155014038},{"id":"https://openalex.org/keywords/homodyne-detection","display_name":"Homodyne detection","score":0.366089403629303},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.2705509662628174},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.20324662327766418},{"id":"https://openalex.org/keywords/digital-signal-processing","display_name":"Digital signal processing","score":0.15861305594444275},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12878963351249695},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.12295767664909363}],"concepts":[{"id":"https://openalex.org/C26351279","wikidata":"https://www.wikidata.org/wiki/Q1227627","display_name":"Direct-conversion receiver","level":3,"score":0.6675025224685669},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.6618897914886475},{"id":"https://openalex.org/C23576306","wikidata":"https://www.wikidata.org/wiki/Q17004698","display_name":"Astronomical interferometer","level":3,"score":0.5685980319976807},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5534840822219849},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.48219385743141174},{"id":"https://openalex.org/C32022120","wikidata":"https://www.wikidata.org/wiki/Q797225","display_name":"Interference (communication)","level":3,"score":0.45303452014923096},{"id":"https://openalex.org/C104267543","wikidata":"https://www.wikidata.org/wiki/Q208163","display_name":"Signal processing","level":3,"score":0.4330381155014038},{"id":"https://openalex.org/C2778184138","wikidata":"https://www.wikidata.org/wiki/Q1626181","display_name":"Homodyne detection","level":2,"score":0.366089403629303},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2705509662628174},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.20324662327766418},{"id":"https://openalex.org/C84462506","wikidata":"https://www.wikidata.org/wiki/Q173142","display_name":"Digital signal processing","level":2,"score":0.15861305594444275},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12878963351249695},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.12295767664909363},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2022.3196443","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2022.3196443","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6000000238418579,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G4125463439","display_name":null,"funder_award_id":"51175296","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6446891896","display_name":null,"funder_award_id":"SKLT2018C07","funder_id":"https://openalex.org/F4320327034","funder_display_name":"State Key Laboratory of Tribology"},{"id":"https://openalex.org/G7344038656","display_name":null,"funder_award_id":"51677104","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320327034","display_name":"State Key Laboratory of Tribology","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":27,"referenced_works":["https://openalex.org/W1803290365","https://openalex.org/W1977004163","https://openalex.org/W1985038612","https://openalex.org/W1995953256","https://openalex.org/W1996163854","https://openalex.org/W1998599605","https://openalex.org/W2000886280","https://openalex.org/W2002062411","https://openalex.org/W2013928079","https://openalex.org/W2029012601","https://openalex.org/W2038869889","https://openalex.org/W2054698059","https://openalex.org/W2056814936","https://openalex.org/W2069439625","https://openalex.org/W2072588726","https://openalex.org/W2078219923","https://openalex.org/W2082311467","https://openalex.org/W2093664162","https://openalex.org/W2125934315","https://openalex.org/W2139350042","https://openalex.org/W2161567298","https://openalex.org/W2244526966","https://openalex.org/W2276287855","https://openalex.org/W2301412135","https://openalex.org/W2509538948","https://openalex.org/W3137807409","https://openalex.org/W4234010574"],"related_works":["https://openalex.org/W2009198496","https://openalex.org/W2059104802","https://openalex.org/W2917662903","https://openalex.org/W2070433035","https://openalex.org/W1980761659","https://openalex.org/W2029474704","https://openalex.org/W2603814279","https://openalex.org/W3161362704","https://openalex.org/W4285547070","https://openalex.org/W2021645386"],"abstract_inverted_index":{"In":[0,55,111,205],"lithography":[1],"wafer":[2],"stage":[3],"systems,":[4],"laser":[5,24],"interferometers":[6,94],"are":[7,116,139,179],"one":[8],"of":[9,51,70,103,108,176,187,198,212,223],"the":[10,22,52,71,79,87,99,119,124,137,143,150,163,167,173,183,188,195,199,206,208,213,219],"most":[11],"important":[12],"precision":[13],"measuring":[14],"instruments.":[15],"The":[16,157],"homodyne":[17],"interferometer":[18],"is":[19,28,40,63,83,127,146,170,191,202,215],"based":[20],"on":[21,118],"single-frequency":[23],"interference":[25,53,120],"effect":[26],"and":[27,48,82,123,194],"able":[29],"to":[30,129],"provide":[31],"displacement":[32,200,214],"resolution":[33],"smaller":[34],"than":[35,78,86,181],"sub-nanometer.":[36],"However,":[37],"its":[38],"accuracy":[39,77,104,145],"affected":[41],"by":[42,148,161],"AC":[43],"amplitude":[44],"variation,":[45],"DC":[46],"offset,":[47],"quadrature-phase":[49],"error":[50,151,190,201,210],"signal.":[54],"this":[56,112],"paper,":[57],"a":[58],"high-precision":[59],"signal":[60,89,220],"processing":[61,90],"method":[62,91],"proposed,":[64],"which":[65],"can":[66,97],"make":[67],"full":[68],"use":[69],"redundant":[72,134],"multiphase":[73,93],"information,":[74],"obtain":[75],"higher":[76],"quadrature":[80],"interferometer,":[81],"more":[84],"practical":[85],"existing":[88],"in":[92,153],"because":[95],"it":[96],"approach":[98],"theoretical":[100],"upper":[101],"limit":[102],"for":[105],"any":[106],"number":[107],"detection":[109],"signals.":[110],"method,":[113],"multiple":[114],"detectors":[115],"installed":[117],"optical":[121],"path,":[122],"Gauss-Newton":[125],"algorithm":[126],"used":[128],"solve":[130],"nonlinear":[131],"equations":[132],"containing":[133],"information.":[135],"All":[136],"parameters":[138,178],"calibrated":[140,177],"simultaneously,":[141],"so":[142],"calculation":[144,155],"improved":[147],"avoiding":[149],"transfer":[152],"different":[154],"processes.":[156],"simulation":[158],"shows":[159],"that":[160],"using":[162],"above":[164],"methods,":[165],"when":[166],"noise":[168,221],"level":[169,222],"66":[171],"dB,":[172],"relative":[174],"errors":[175],"less":[180],"0.03%,":[182],"standard":[184],"deviation":[185],"(STD)":[186],"phase":[189],"5.13&#x00D7;10<sup>-4</sup>":[192],"rad,":[193],"equivalent":[196],"STD":[197],"15.9":[203],"pm.":[204],"experiment,":[207],"root-mean-square":[209],"(RMSE)":[211],"0.846":[216],"nm":[217],"under":[218],"37.4":[224],"dB.":[225]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}