{"id":"https://openalex.org/W4286540943","doi":"https://doi.org/10.1109/tim.2022.3191649","title":"An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement","display_name":"An Optical Interferometry Based MEMS Accelerometer Applicable to Seismic-Grade Measurement","publication_year":2022,"publication_date":"2022-01-01","ids":{"openalex":"https://openalex.org/W4286540943","doi":"https://doi.org/10.1109/tim.2022.3191649"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2022.3191649","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2022.3191649","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015859397","display_name":"Cheng Li","orcid":"https://orcid.org/0000-0002-9252-2097"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Cheng Li","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037245137","display_name":"Bo Yang","orcid":"https://orcid.org/0000-0003-2855-3662"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Yang","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081152096","display_name":"Xiang Zheng","orcid":"https://orcid.org/0000-0003-3837-0755"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiang Zheng","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101828099","display_name":"Zhenyu Sun","orcid":"https://orcid.org/0000-0002-1177-1797"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenyu Sun","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017261150","display_name":"Luqiang Zhou","orcid":"https://orcid.org/0000-0003-4097-7337"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Luqiang Zhou","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080977361","display_name":"Xin Huang","orcid":"https://orcid.org/0000-0001-9223-037X"},"institutions":[{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xin Huang","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053584762","display_name":"Xin Guo","orcid":"https://orcid.org/0000-0002-2284-7339"},"institutions":[{"id":"https://openalex.org/I200845125","display_name":"Nanjing University of Information Science and Technology","ror":"https://ror.org/02y0rxk19","country_code":"CN","type":"education","lineage":["https://openalex.org/I200845125"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xin Guo","raw_affiliation_strings":["School of Automation, Nanjing University of Information Science and Technology, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"School of Automation, Nanjing University of Information Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I200845125"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5015859397"],"corresponding_institution_ids":["https://openalex.org/I76569877"],"apc_list":null,"apc_paid":null,"fwci":2.634,"has_fulltext":false,"cited_by_count":18,"citation_normalized_percentile":{"value":0.89032533,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"71","issue":null,"first_page":"1","last_page":"10"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8773394823074341},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6977244019508362},{"id":"https://openalex.org/keywords/seismometer","display_name":"Seismometer","score":0.6630406379699707},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.6184478998184204},{"id":"https://openalex.org/keywords/interferometry","display_name":"Interferometry","score":0.6047210693359375},{"id":"https://openalex.org/keywords/gravimeter","display_name":"Gravimeter","score":0.5523647665977478},{"id":"https://openalex.org/keywords/gravitational-acceleration","display_name":"Gravitational acceleration","score":0.4957514703273773},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.49489110708236694},{"id":"https://openalex.org/keywords/miniaturization","display_name":"Miniaturization","score":0.4931771159172058},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.4261644184589386},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.42487984895706177},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.42299965023994446},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3539625406265259},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3516099750995636},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2958533763885498},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2806564271450043},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2775062918663025},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2646433115005493},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2194196879863739},{"id":"https://openalex.org/keywords/gravitation","display_name":"Gravitation","score":0.10892754793167114}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8773394823074341},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6977244019508362},{"id":"https://openalex.org/C119217923","wikidata":"https://www.wikidata.org/wiki/Q160567","display_name":"Seismometer","level":2,"score":0.6630406379699707},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.6184478998184204},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.6047210693359375},{"id":"https://openalex.org/C139974479","wikidata":"https://www.wikidata.org/wiki/Q499964","display_name":"Gravimeter","level":3,"score":0.5523647665977478},{"id":"https://openalex.org/C71976986","wikidata":"https://www.wikidata.org/wiki/Q30006","display_name":"Gravitational acceleration","level":3,"score":0.4957514703273773},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.49489110708236694},{"id":"https://openalex.org/C57528182","wikidata":"https://www.wikidata.org/wiki/Q1271842","display_name":"Miniaturization","level":2,"score":0.4931771159172058},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.4261644184589386},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42487984895706177},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.42299965023994446},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3539625406265259},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3516099750995636},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2958533763885498},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2806564271450043},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2775062918663025},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2646433115005493},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2194196879863739},{"id":"https://openalex.org/C124017977","wikidata":"https://www.wikidata.org/wiki/Q11412","display_name":"Gravitation","level":2,"score":0.10892754793167114},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C147176958","wikidata":"https://www.wikidata.org/wiki/Q77590","display_name":"Civil engineering","level":1,"score":0.0},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2022.3191649","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2022.3191649","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G785421367","display_name":null,"funder_award_id":"3207032101D","funder_id":"https://openalex.org/F4320335787","funder_display_name":"Fundamental Research Funds for the Central Universities"},{"id":"https://openalex.org/G8355552601","display_name":null,"funder_award_id":"61874025","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335787","display_name":"Fundamental Research Funds for the Central Universities","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":42,"referenced_works":["https://openalex.org/W1463985332","https://openalex.org/W1981752087","https://openalex.org/W1987780641","https://openalex.org/W2008382296","https://openalex.org/W2061245700","https://openalex.org/W2084800155","https://openalex.org/W2086524195","https://openalex.org/W2093935439","https://openalex.org/W2109426336","https://openalex.org/W2160600618","https://openalex.org/W2166988549","https://openalex.org/W2313060766","https://openalex.org/W2315483489","https://openalex.org/W2334862408","https://openalex.org/W2552999262","https://openalex.org/W2559850636","https://openalex.org/W2606118357","https://openalex.org/W2611513333","https://openalex.org/W2745242452","https://openalex.org/W2745468470","https://openalex.org/W2798614901","https://openalex.org/W2799345637","https://openalex.org/W2907801789","https://openalex.org/W2961994168","https://openalex.org/W2969266846","https://openalex.org/W2978417957","https://openalex.org/W2980746192","https://openalex.org/W2983912852","https://openalex.org/W2995781073","https://openalex.org/W3012363975","https://openalex.org/W3025502994","https://openalex.org/W3037380629","https://openalex.org/W3044883101","https://openalex.org/W3104061742","https://openalex.org/W3112166552","https://openalex.org/W3121512465","https://openalex.org/W3125796379","https://openalex.org/W3126327532","https://openalex.org/W3136451220","https://openalex.org/W3180255641","https://openalex.org/W4200433982","https://openalex.org/W4210695040"],"related_works":["https://openalex.org/W2135716929","https://openalex.org/W2066621229","https://openalex.org/W4388602319","https://openalex.org/W2531043267","https://openalex.org/W4224263581","https://openalex.org/W1675907690","https://openalex.org/W2004924281","https://openalex.org/W2046700258","https://openalex.org/W2362536565","https://openalex.org/W2085943289"],"abstract_inverted_index":{"Traditional":[0],"seismometers":[1],"and":[2,8,33,80,150],"gravimeters":[3],"normally":[4],"have":[5],"large":[6],"volumes":[7],"entail":[9],"high":[10],"manufacturing":[11],"costs.":[12],"Aiming":[13],"at":[14,159],"the":[15,43,89,95,106,118,130,135,164,171,179],"miniaturization":[16],"of":[17,58,77,85,94,111,126,137,154,168],"such":[18],"geophysical":[19],"instruments,":[20],"a":[21,49,73,82,101,123,151,175],"portable":[22],"Micro-electro-mechanical":[23],"Systems":[24],"(MEMS)":[25],"accelerometer":[26,39],"applicable":[27],"to":[28,147],"seismic-grade":[29,180],"measurements":[30],"is":[31,40,62,98,157],"fabricated":[32,96,119],"characterized":[34],"in":[35,100,178],"this":[36,70,138],"work.":[37],"This":[38],"operating":[41],"on":[42],"deformable":[44],"grating-based":[45],"MEMS":[46,51],"interferometer,":[47],"where":[48],"new":[50],"out-of-plane":[52],"sensing":[53],"chip":[54],"employing":[55],"double":[56],"layers":[57],"10":[59],"&#x03BC;m-thickness":[60],"spring":[61],"first":[63],"proposed.":[64],"The":[65,92,113],"simulation":[66],"results":[67,115],"show":[68],"that":[69,117,134],"geometry":[71],"has":[72,121,140],"low":[74,83],"natural":[75],"frequency":[76],"52.23":[78],"Hz":[79,146],"undergoes":[81],"stress":[84],"26.94":[86],"Mpa":[87],"under":[88],"gravitational":[90],"acceleration.":[91],"test":[93],"prototype":[97,120],"implemented":[99],"quiet":[102],"environment":[103],"for":[104],"tracking":[105],"inherent":[107],"micro":[108],"seismic":[109],"peaks":[110],"Earth.":[112],"evaluation":[114],"demonstrate":[116],"achieved":[122],"voltage":[124],"sensitivity":[125],"510.6":[127],"V/g.":[128],"Furthermore,":[129],"noise":[131],"estimation":[132],"indicates":[133],"self-noise":[136],"sensor":[139],"reached":[141],"20":[142,148],"ng/&#x221A;<i>Hz</i>":[143],"from":[144],"0.3":[145],"Hz,":[149],"bias":[152],"stability":[153],"235.4":[155],"ng":[156],"obtainable":[158],"room":[160],"temperature.":[161],"Combined":[162],"with":[163],"compact":[165],"package":[166],"size":[167],"40.5":[169],"cm<sup>3</sup>,":[170],"proposed":[172],"device":[173],"exhibits":[174],"promising":[176],"prospect":[177],"applications.":[181]},"counts_by_year":[{"year":2025,"cited_by_count":12},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":4}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}