{"id":"https://openalex.org/W3116783427","doi":"https://doi.org/10.1109/tim.2020.3047486","title":"Long-Term Stability Test on On-Wafer Measurement System in Frequency Ranges up to 325 GHz","display_name":"Long-Term Stability Test on On-Wafer Measurement System in Frequency Ranges up to 325 GHz","publication_year":2020,"publication_date":"2020-12-28","ids":{"openalex":"https://openalex.org/W3116783427","doi":"https://doi.org/10.1109/tim.2020.3047486","mag":"3116783427"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2020.3047486","is_oa":true,"landing_page_url":"https://doi.org/10.1109/tim.2020.3047486","pdf_url":"https://ieeexplore.ieee.org/ielx7/19/9259274/09309266.pdf","source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://ieeexplore.ieee.org/ielx7/19/9259274/09309266.pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5071002281","display_name":"Ryo Sakamaki","orcid":"https://orcid.org/0000-0003-4111-1674"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Ryo Sakamaki","raw_affiliation_strings":["National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan"],"affiliations":[{"raw_affiliation_string":"National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan","institution_ids":["https://openalex.org/I73613424"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031714807","display_name":"Masahiro Horibe","orcid":"https://orcid.org/0000-0002-1193-607X"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahiro Horibe","raw_affiliation_strings":["National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan"],"affiliations":[{"raw_affiliation_string":"National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan","institution_ids":["https://openalex.org/I73613424"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5071002281"],"corresponding_institution_ids":["https://openalex.org/I73613424"],"apc_list":null,"apc_paid":null,"fwci":0.8319,"has_fulltext":true,"cited_by_count":13,"citation_normalized_percentile":{"value":0.73752305,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"70","issue":null,"first_page":"1","last_page":"9"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11851","display_name":"Electromagnetic Compatibility and Measurements","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.7598958015441895},{"id":"https://openalex.org/keywords/reproducibility","display_name":"Reproducibility","score":0.660641610622406},{"id":"https://openalex.org/keywords/standard-deviation","display_name":"Standard deviation","score":0.6498451232910156},{"id":"https://openalex.org/keywords/frequency-standard","display_name":"Frequency standard","score":0.6313450336456299},{"id":"https://openalex.org/keywords/measurement-uncertainty","display_name":"Measurement uncertainty","score":0.6215882301330566},{"id":"https://openalex.org/keywords/stability","display_name":"Stability (learning theory)","score":0.6019601225852966},{"id":"https://openalex.org/keywords/radio-frequency","display_name":"Radio frequency","score":0.5877975225448608},{"id":"https://openalex.org/keywords/tilt","display_name":"Tilt (camera)","score":0.5543828010559082},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.5345873832702637},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5107786655426025},{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.49664169549942017},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.49454399943351746},{"id":"https://openalex.org/keywords/phase","display_name":"Phase (matter)","score":0.468555748462677},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4662092626094818},{"id":"https://openalex.org/keywords/device-under-test","display_name":"Device under test","score":0.46492505073547363},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.4573296010494232},{"id":"https://openalex.org/keywords/system-of-measurement","display_name":"System of measurement","score":0.45347362756729126},{"id":"https://openalex.org/keywords/allan-variance","display_name":"Allan variance","score":0.4477444291114807},{"id":"https://openalex.org/keywords/term","display_name":"Term (time)","score":0.4455587565898895},{"id":"https://openalex.org/keywords/reflection-coefficient","display_name":"Reflection coefficient","score":0.4259006679058075},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3665222227573395},{"id":"https://openalex.org/keywords/scattering-parameters","display_name":"Scattering parameters","score":0.36303848028182983},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.23115140199661255},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.2141643762588501},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2045685052871704},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.17238903045654297},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.16918593645095825},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.10968789458274841}],"concepts":[{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.7598958015441895},{"id":"https://openalex.org/C9893847","wikidata":"https://www.wikidata.org/wiki/Q1425625","display_name":"Reproducibility","level":2,"score":0.660641610622406},{"id":"https://openalex.org/C22679943","wikidata":"https://www.wikidata.org/wiki/Q159375","display_name":"Standard deviation","level":2,"score":0.6498451232910156},{"id":"https://openalex.org/C131221115","wikidata":"https://www.wikidata.org/wiki/Q362396","display_name":"Frequency standard","level":2,"score":0.6313450336456299},{"id":"https://openalex.org/C137209882","wikidata":"https://www.wikidata.org/wiki/Q1403517","display_name":"Measurement uncertainty","level":2,"score":0.6215882301330566},{"id":"https://openalex.org/C112972136","wikidata":"https://www.wikidata.org/wiki/Q7595718","display_name":"Stability (learning theory)","level":2,"score":0.6019601225852966},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.5877975225448608},{"id":"https://openalex.org/C2779844322","wikidata":"https://www.wikidata.org/wiki/Q2919140","display_name":"Tilt (camera)","level":2,"score":0.5543828010559082},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5345873832702637},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5107786655426025},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.49664169549942017},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.49454399943351746},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.468555748462677},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4662092626094818},{"id":"https://openalex.org/C76249512","wikidata":"https://www.wikidata.org/wiki/Q1206780","display_name":"Device under test","level":3,"score":0.46492505073547363},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4573296010494232},{"id":"https://openalex.org/C37649242","wikidata":"https://www.wikidata.org/wiki/Q932268","display_name":"System of measurement","level":2,"score":0.45347362756729126},{"id":"https://openalex.org/C5722023","wikidata":"https://www.wikidata.org/wiki/Q1440227","display_name":"Allan variance","level":3,"score":0.4477444291114807},{"id":"https://openalex.org/C61797465","wikidata":"https://www.wikidata.org/wiki/Q1188986","display_name":"Term (time)","level":2,"score":0.4455587565898895},{"id":"https://openalex.org/C41700454","wikidata":"https://www.wikidata.org/wiki/Q1852282","display_name":"Reflection coefficient","level":2,"score":0.4259006679058075},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3665222227573395},{"id":"https://openalex.org/C195266298","wikidata":"https://www.wikidata.org/wiki/Q2165620","display_name":"Scattering parameters","level":2,"score":0.36303848028182983},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.23115140199661255},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.2141643762588501},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2045685052871704},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.17238903045654297},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.16918593645095825},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.10968789458274841},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2020.3047486","is_oa":true,"landing_page_url":"https://doi.org/10.1109/tim.2020.3047486","pdf_url":"https://ieeexplore.ieee.org/ielx7/19/9259274/09309266.pdf","source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1109/tim.2020.3047486","is_oa":true,"landing_page_url":"https://doi.org/10.1109/tim.2020.3047486","pdf_url":"https://ieeexplore.ieee.org/ielx7/19/9259274/09309266.pdf","source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.8199999928474426,"display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G1069223013","display_name":null,"funder_award_id":"JSPS KAKENHI","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G1212805814","display_name":null,"funder_award_id":"JP19K15005","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G1459639060","display_name":"Development of measurement techniques for dielectric properties in the 300 GHz band using the precision probing technique","funder_award_id":"19K15005","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G3459562248","display_name":null,"funder_award_id":"Grant","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G4636223006","display_name":null,"funder_award_id":"JSPS KAK","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G6563397490","display_name":null,"funder_award_id":"15005","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"}],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3116783427.pdf","grobid_xml":"https://content.openalex.org/works/W3116783427.grobid-xml"},"referenced_works_count":38,"referenced_works":["https://openalex.org/W1988855805","https://openalex.org/W1993517893","https://openalex.org/W2008496891","https://openalex.org/W2026412796","https://openalex.org/W2046213390","https://openalex.org/W2053886131","https://openalex.org/W2085928596","https://openalex.org/W2087741029","https://openalex.org/W2095843437","https://openalex.org/W2117834734","https://openalex.org/W2162479423","https://openalex.org/W2168854778","https://openalex.org/W2187003240","https://openalex.org/W2292765618","https://openalex.org/W2462931503","https://openalex.org/W2467263275","https://openalex.org/W2537495340","https://openalex.org/W2538218348","https://openalex.org/W2782878556","https://openalex.org/W2783401035","https://openalex.org/W2784080662","https://openalex.org/W2791450272","https://openalex.org/W2806514844","https://openalex.org/W2887331620","https://openalex.org/W2914800983","https://openalex.org/W2930063151","https://openalex.org/W2943341812","https://openalex.org/W2964681121","https://openalex.org/W2969077220","https://openalex.org/W2980105606","https://openalex.org/W3022627448","https://openalex.org/W3086277139","https://openalex.org/W3123763058","https://openalex.org/W6647553421","https://openalex.org/W6672067432","https://openalex.org/W6776522027","https://openalex.org/W6783419644","https://openalex.org/W6789597812"],"related_works":["https://openalex.org/W2040618812","https://openalex.org/W2584301631","https://openalex.org/W2137193576","https://openalex.org/W2536724274","https://openalex.org/W2527652581","https://openalex.org/W2358346109","https://openalex.org/W2898644647","https://openalex.org/W3116783427","https://openalex.org/W4321523681","https://openalex.org/W2084940561"],"abstract_inverted_index":{"This":[0],"article":[1],"reports":[2],"the":[3,23,32,38,62,71,80,85,98,118,139,144,148,151,155],"investigation":[4],"results":[5],"of":[6,61,87,97,117,150],"long-term":[7,75,82,161],"stability":[8,76,83],"tests":[9],"on":[10],"on-wafer":[11],"measurement":[12,68,140],"systems":[13],"in":[14,31,108,112,131],"frequency":[15,27],"ranges":[16],"up":[17],"to":[18,84,105,125,137,143],"325":[19],"GHz":[20],"conducted":[21],"by":[22,44],"NMIJ-AIST.":[24],"The":[25,59,94,114,133],"radio":[26],"(RF)":[28],"probe":[29,88],"coordinates":[30],"X-,":[33],"Y-,":[34],"and":[35,37,50,78,91,110,128,154],"Z-directions,":[36],"tilt":[39],"angle":[40],"is":[41,64],"automatically":[42],"adjusted":[43],"performing":[45],"RF":[46],"signal":[47],"detection.":[48],"Calibrations":[49],"verification":[51],"processes":[52],"were":[53,158],"repeated":[54],"for":[55,70],"over":[56],"a":[57,74],"year.":[58],"novelty":[60],"study":[63],"that":[65],"it":[66],"optimizes":[67],"procedures":[69,135],"test,":[72,77],"demonstrates":[73],"compares":[79],"evaluated":[81],"effects":[86,149],"model,":[89],"absorber,":[90],"calibration":[92,156],"method.":[93],"standard":[95,115],"deviation":[96,116],"measured":[99,119],"reflection":[100],"coefficient":[101,121],"ranged":[102,122],"between":[103],"-32":[104],"-70":[106],"dB":[107,127],"magnitude,":[109],"0\u00b0-10\u00b0":[111],"phase.":[113,132],"transmission":[120],"from":[123,129],"-43":[124],"-80":[126],"0.2\u00b0-2.7\u00b0":[130],"refined":[134],"contributed":[136],"improve":[138],"reproducibility":[141],"compared":[142],"previous":[145],"report.":[146],"Furthermore,":[147],"chuck":[152],"material":[153],"method":[157],"larger":[159],"than":[160],"stability.":[162]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":3}],"updated_date":"2026-04-10T15:06:20.359241","created_date":"2025-10-10T00:00:00"}