{"id":"https://openalex.org/W3022627448","doi":"https://doi.org/10.1109/tim.2020.2991601","title":"Precision Adjustment of Probe Tilt Angle with RF Signal Detection Technique","display_name":"Precision Adjustment of Probe Tilt Angle with RF Signal Detection Technique","publication_year":2020,"publication_date":"2020-01-01","ids":{"openalex":"https://openalex.org/W3022627448","doi":"https://doi.org/10.1109/tim.2020.2991601","mag":"3022627448"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2020.2991601","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2020.2991601","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5071002281","display_name":"Ryo Sakamaki","orcid":"https://orcid.org/0000-0003-4111-1674"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ryo Sakamaki","raw_affiliation_strings":["National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031714807","display_name":"Masahiro Horibe","orcid":"https://orcid.org/0000-0002-1193-607X"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahiro Horibe","raw_affiliation_strings":["National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I73613424"],"apc_list":null,"apc_paid":null,"fwci":1.561,"has_fulltext":false,"cited_by_count":22,"citation_normalized_percentile":{"value":0.82945323,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"1"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11607","display_name":"Microwave and Dielectric Measurement Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11851","display_name":"Electromagnetic Compatibility and Measurements","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12466","display_name":"Near-Field Optical Microscopy","score":0.9966999888420105,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/repeatability","display_name":"Repeatability","score":0.910514771938324},{"id":"https://openalex.org/keywords/tilt","display_name":"Tilt (camera)","score":0.8119969367980957},{"id":"https://openalex.org/keywords/radio-frequency","display_name":"Radio frequency","score":0.696906566619873},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.5619351863861084},{"id":"https://openalex.org/keywords/accuracy-and-precision","display_name":"Accuracy and precision","score":0.5036930441856384},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.49510684609413147},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.45759209990501404},{"id":"https://openalex.org/keywords/frequency-band","display_name":"Frequency band","score":0.45656782388687134},{"id":"https://openalex.org/keywords/measurement-uncertainty","display_name":"Measurement uncertainty","score":0.43275269865989685},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.42661550641059875},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4112817347049713},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.25175940990448},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21214228868484497},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.19246524572372437},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.1674816608428955},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.15577828884124756},{"id":"https://openalex.org/keywords/antenna","display_name":"Antenna (radio)","score":0.1126907467842102},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.08724358677864075}],"concepts":[{"id":"https://openalex.org/C154020017","wikidata":"https://www.wikidata.org/wiki/Q520171","display_name":"Repeatability","level":2,"score":0.910514771938324},{"id":"https://openalex.org/C2779844322","wikidata":"https://www.wikidata.org/wiki/Q2919140","display_name":"Tilt (camera)","level":2,"score":0.8119969367980957},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.696906566619873},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.5619351863861084},{"id":"https://openalex.org/C202799725","wikidata":"https://www.wikidata.org/wiki/Q272035","display_name":"Accuracy and precision","level":2,"score":0.5036930441856384},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.49510684609413147},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.45759209990501404},{"id":"https://openalex.org/C2778116611","wikidata":"https://www.wikidata.org/wiki/Q25110567","display_name":"Frequency band","level":3,"score":0.45656782388687134},{"id":"https://openalex.org/C137209882","wikidata":"https://www.wikidata.org/wiki/Q1403517","display_name":"Measurement uncertainty","level":2,"score":0.43275269865989685},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.42661550641059875},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4112817347049713},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.25175940990448},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21214228868484497},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.19246524572372437},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.1674816608428955},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.15577828884124756},{"id":"https://openalex.org/C21822782","wikidata":"https://www.wikidata.org/wiki/Q131214","display_name":"Antenna (radio)","level":2,"score":0.1126907467842102},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.08724358677864075},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2020.2991601","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2020.2991601","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7300000190734863}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":33,"referenced_works":["https://openalex.org/W1490536667","https://openalex.org/W1972886494","https://openalex.org/W2025438736","https://openalex.org/W2085928596","https://openalex.org/W2087160457","https://openalex.org/W2087741029","https://openalex.org/W2095843437","https://openalex.org/W2095944122","https://openalex.org/W2149275272","https://openalex.org/W2162479423","https://openalex.org/W2168854778","https://openalex.org/W2245738718","https://openalex.org/W2321875928","https://openalex.org/W2467263275","https://openalex.org/W2549355245","https://openalex.org/W2782878556","https://openalex.org/W2783401035","https://openalex.org/W2784080662","https://openalex.org/W2791450272","https://openalex.org/W2806688494","https://openalex.org/W2887319451","https://openalex.org/W2889074721","https://openalex.org/W2899092956","https://openalex.org/W2899453865","https://openalex.org/W2914800983","https://openalex.org/W2929612105","https://openalex.org/W2930063151","https://openalex.org/W2943341812","https://openalex.org/W2964681121","https://openalex.org/W2969077220","https://openalex.org/W3123763058","https://openalex.org/W6672067432","https://openalex.org/W6672534745"],"related_works":["https://openalex.org/W2028444187","https://openalex.org/W1983772386","https://openalex.org/W4320035299","https://openalex.org/W3132513516","https://openalex.org/W2754788186","https://openalex.org/W2407741852","https://openalex.org/W1792214511","https://openalex.org/W2377183979","https://openalex.org/W2059577476","https://openalex.org/W2659947853"],"abstract_inverted_index":{"This":[0],"article":[1],"proposes":[2],"a":[3,15],"breakthrough":[4],"technique":[5,22,33,49,71,84],"for":[6],"the":[7,11,24,28,37,52,55,65,69,77,87,91,95],"precision":[8],"adjustment":[9,32,83],"of":[10,14,68,76,90],"tilt":[12],"angle":[13,57],"radio":[16],"frequency":[17,38],"(RF)":[18],"probe.":[19],"The":[20,31,47,81],"proposed":[21,48,70,82],"utilizes":[23],"resonance":[25],"generated":[26],"at":[27],"probe":[29],"tips.":[30],"is":[34,72],"demonstrated":[35],"in":[36,54,58,94],"range":[39],"between":[40],"190":[41],"and":[42],"340":[43],"GHz":[44],"(300-GHz":[45],"band).":[46],"significantly":[50],"reduces":[51],"variation":[53],"probe-tilt":[56],"comparison":[59],"with":[60],"conventional":[61,78],"manual":[62,79],"inspection.":[63],"Furthermore,":[64],"measurement":[66,88,93],"repeatability":[67,89],"better":[73],"than":[74],"that":[75],"technique.":[80],"greatly":[85],"improves":[86],"on-wafer":[92],"300-GHz":[96],"band.":[97]},"counts_by_year":[{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":3}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2025-10-10T00:00:00"}