{"id":"https://openalex.org/W2804171511","doi":"https://doi.org/10.1109/tim.2018.2831388","title":"A Novel Film Thermal Converter Based on an Electrothermally Excited/Piezoresistively Detected Microbridge Resonator","display_name":"A Novel Film Thermal Converter Based on an Electrothermally Excited/Piezoresistively Detected Microbridge Resonator","publication_year":2018,"publication_date":"2018-05-18","ids":{"openalex":"https://openalex.org/W2804171511","doi":"https://doi.org/10.1109/tim.2018.2831388","mag":"2804171511"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2018.2831388","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2018.2831388","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5010321881","display_name":"Jianqiang Han","orcid":"https://orcid.org/0000-0003-4708-6764"},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Jianqiang Han","raw_affiliation_strings":["College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0003-4708-6764","affiliations":[{"raw_affiliation_string":"College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047097297","display_name":"Rongyu Huang","orcid":"https://orcid.org/0000-0002-1812-1957"},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rongyu Huang","raw_affiliation_strings":["College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100364237","display_name":"Peng Zhang","orcid":"https://orcid.org/0000-0003-2762-2179"},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Peng Zhang","raw_affiliation_strings":["College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006109379","display_name":"Bing Cheng","orcid":"https://orcid.org/0000-0002-5724-5725"},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bing Cheng","raw_affiliation_strings":["College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5032478861","display_name":"Lizhen Dong","orcid":"https://orcid.org/0000-0001-7378-3163"},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lizhen Dong","raw_affiliation_strings":["College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China"],"raw_orcid":"https://orcid.org/0000-0001-7378-3163","affiliations":[{"raw_affiliation_string":"College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100628471","display_name":"Dong Han","orcid":"https://orcid.org/0000-0002-4620-6499"},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dong Han","raw_affiliation_strings":["College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"College of Mechanical and Electrical Engineering, China Jiliang University, Hangzhou, China","institution_ids":["https://openalex.org/I55538621"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5010321881"],"corresponding_institution_ids":["https://openalex.org/I55538621"],"apc_list":null,"apc_paid":null,"fwci":0.5236,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.67243738,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"67","issue":"12","first_page":"2854","last_page":"2862"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9944999814033508,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.4127039909362793},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3925553560256958},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.34409940242767334},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.34344154596328735},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2865465581417084},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.18643417954444885},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.08763176202774048}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.4127039909362793},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3925553560256958},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.34409940242767334},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.34344154596328735},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2865465581417084},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.18643417954444885},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.08763176202774048}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2018.2831388","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2018.2831388","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.9200000166893005}],"awards":[{"id":"https://openalex.org/G1998272419","display_name":null,"funder_award_id":"51377025","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4459636664","display_name":null,"funder_award_id":"LY14F040004","funder_id":"https://openalex.org/F4320338464","funder_display_name":"Natural Science Foundation of Zhejiang Province"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320338464","display_name":"Natural Science Foundation of Zhejiang Province","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W1544061988","https://openalex.org/W1964455438","https://openalex.org/W1973160670","https://openalex.org/W1986646049","https://openalex.org/W2005877932","https://openalex.org/W2025551186","https://openalex.org/W2042794004","https://openalex.org/W2044049067","https://openalex.org/W2048798043","https://openalex.org/W2053581124","https://openalex.org/W2056038410","https://openalex.org/W2067861719","https://openalex.org/W2076755257","https://openalex.org/W2096455860","https://openalex.org/W2112977816","https://openalex.org/W2113460552","https://openalex.org/W2117298187","https://openalex.org/W2118321132","https://openalex.org/W2122848417","https://openalex.org/W2131425449","https://openalex.org/W2138308377","https://openalex.org/W2145967769","https://openalex.org/W2146106053","https://openalex.org/W2152384510","https://openalex.org/W2167046346","https://openalex.org/W2170732350","https://openalex.org/W2484462930","https://openalex.org/W2604646860","https://openalex.org/W2605066785","https://openalex.org/W2625574831"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2935759653","https://openalex.org/W3105167352","https://openalex.org/W54078636","https://openalex.org/W2954470139","https://openalex.org/W1501425562","https://openalex.org/W2902782467","https://openalex.org/W3084825885","https://openalex.org/W2298861036","https://openalex.org/W3148032049"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,64,72,78,84,90,94,97,104,125,159,181,201],"design,":[4],"fabrication,":[5],"and":[6,42,96],"preliminary":[7],"results":[8],"of":[9,15,74,103,122,124,142,158],"a":[10,43,140,206],"resonant":[11,105,160,202],"thermal":[12,75,107,161,203,208],"converter":[13,108,162,204],"consisting":[14],"an":[16],"electrothermally":[17],"excited/piezoresistively":[18],"detected":[19],"SiO":[20],"<sub":[21,25,29,45,49,53,127,131,135],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[22,26,30,34,38,46,50,54,128,132,136,148,165,190],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[23],"/Si":[24,32],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">3</sub>":[27],"N":[28,36],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">4</sub>":[31],"<italic":[33,37],"xmlns:xlink=\"http://www.w3.org/1999/xlink\"><sub>x</sub></i>":[35],"xmlns:xlink=\"http://www.w3.org/1999/xlink\"><sub>y</sub></i>":[39],"microbridge":[40],"resonator":[41],"Ni":[44,126],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">24.9</sub>":[47,129],"Cr":[48,130],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">72.5</sub>":[51,133],"Si":[52,134],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2.6</sub>":[55,137],"heating":[56],"resistor":[57],"placed":[58],"on":[59],"another":[60],"beam":[61],"parallel":[62],"to":[63,89],"microbridge.":[65],"The":[66,100,119,156,175],"noncontact":[67],"temperature":[68,79,98,120],"sensing":[69],"technique":[70],"reduces":[71],"diversion":[73],"energy":[76],"from":[77],"sensors,":[80],"as":[81,83,112],"well":[82],"ac\u2013dc":[85],"transfer":[86,177],"differences":[87],"due":[88],"capacitive":[91],"coupling":[92],"between":[93],"heater":[95],"sensor.":[99],"semidigital":[101],"output":[102],"thin-film":[106],"eliminates":[109],"problems":[110],"such":[111],"intensity":[113],"fluctuations":[114],"associated":[115],"with":[116,139],"analog":[117],"signals.":[118],"coefficient":[121],"resistance":[123],"film":[138],"thickness":[141],"89":[143],"nm":[144],"is":[145,163,188,205],"only":[146],"<inline-formula":[147,164,189],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">":[149,166,191],"<tex-math":[150,167,192],"notation=\"LaTeX\">$-0.86":[151],"\\times":[152,194],"10^{-6}$":[153,195],"</tex-math></inline-formula>":[154,172,196],"/K.":[155],"responsivity":[157],"notation=\"LaTeX\">$9.21~\\text":[168],"{kHz}\\cdot":[169],"\\text":[170],"{W}^{-1}$":[171],"in":[173],"air.":[174],"thermoelectric":[176],"difference":[178],"measured":[179],"by":[180],"fast-reversed":[182],"dc":[183],"method":[184],"at":[185],"1":[186],"kHz":[187],"notation=\"LaTeX\">$2.8":[193],".":[197],"It":[198],"indicates":[199],"that":[200],"promising":[207],"converter.":[209]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2}],"updated_date":"2026-05-05T08:41:31.759640","created_date":"2025-10-10T00:00:00"}