{"id":"https://openalex.org/W2467670049","doi":"https://doi.org/10.1109/tim.2016.2556898","title":"Visual Servoing-Based Depth-Estimation Technique for Manipulation Inside SEM","display_name":"Visual Servoing-Based Depth-Estimation Technique for Manipulation Inside SEM","publication_year":2016,"publication_date":"2016-06-20","ids":{"openalex":"https://openalex.org/W2467670049","doi":"https://doi.org/10.1109/tim.2016.2556898","mag":"2467670049"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2016.2556898","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2016.2556898","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://research.birmingham.ac.uk/en/publications/6594d055-4aef-4cb7-afce-b244eae7e467","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011562571","display_name":"Naresh Marturi","orcid":"https://orcid.org/0000-0002-0159-167X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Naresh Marturi","raw_affiliation_strings":["Department of Automatic Control and MicroMechatronic Systems, Franche-Comt\u00e9 Electronics, Mechanical, Thermal and Optical\u2013Science and Technology Institute, Besan\u00e7on, France"],"raw_orcid":"https://orcid.org/0000-0002-0159-167X","affiliations":[{"raw_affiliation_string":"Department of Automatic Control and MicroMechatronic Systems, Franche-Comt\u00e9 Electronics, Mechanical, Thermal and Optical\u2013Science and Technology Institute, Besan\u00e7on, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011782479","display_name":"Brahim Tamadazte","orcid":"https://orcid.org/0000-0002-4668-3092"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Brahim Tamadazte","raw_affiliation_strings":["Department of Automatic Control and MicroMechatronic Systems, Franche-Comt\u00e9 Electronics, Mechanical, Thermal and Optical\u2013Science and Technology Institute, Besan\u00e7on, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Automatic Control and MicroMechatronic Systems, Franche-Comt\u00e9 Electronics, Mechanical, Thermal and Optical\u2013Science and Technology Institute, Besan\u00e7on, France","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058495477","display_name":"Sounkalo Demb\u00e9l\u00e9","orcid":"https://orcid.org/0000-0001-9982-0663"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Sounkalo Dembele","raw_affiliation_strings":["Department of Automatic Control and MicroMechatronic Systems, Franche-Comt\u00e9 Electronics, Mechanical, Thermal and Optical\u2013Science and Technology Institute, Besan\u00e7on, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Automatic Control and MicroMechatronic Systems, Franche-Comt\u00e9 Electronics, Mechanical, Thermal and Optical\u2013Science and Technology Institute, Besan\u00e7on, France","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5110670394","display_name":"Nadine Piat","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Nadine Piat","raw_affiliation_strings":["Department of Automatic Control and MicroMechatronic Systems, Franche-Comt\u00e9 Electronics, Mechanical, Thermal and Optical\u2013Science and Technology Institute, Besan\u00e7on, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Automatic Control and MicroMechatronic Systems, Franche-Comt\u00e9 Electronics, Mechanical, Thermal and Optical\u2013Science and Technology Institute, Besan\u00e7on, France","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.8811,"has_fulltext":false,"cited_by_count":21,"citation_normalized_percentile":{"value":0.921607,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"65","issue":"8","first_page":"1847","last_page":"1855"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9934999942779541,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11897","display_name":"Digital Holography and Microscopy","score":0.9807000160217285,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/autofocus","display_name":"Autofocus","score":0.9076297879219055},{"id":"https://openalex.org/keywords/visual-servoing","display_name":"Visual servoing","score":0.7931674718856812},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.7242456078529358},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.7123839855194092},{"id":"https://openalex.org/keywords/focus","display_name":"Focus (optics)","score":0.6807246208190918},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5981045365333557},{"id":"https://openalex.org/keywords/stereoscopy","display_name":"Stereoscopy","score":0.5470973253250122},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5094910264015198},{"id":"https://openalex.org/keywords/aperture","display_name":"Aperture (computer memory)","score":0.42166298627853394},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2851654589176178},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.27656880021095276},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.15929999947547913},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.10118237137794495}],"concepts":[{"id":"https://openalex.org/C103764139","wikidata":"https://www.wikidata.org/wiki/Q210008","display_name":"Autofocus","level":3,"score":0.9076297879219055},{"id":"https://openalex.org/C10912380","wikidata":"https://www.wikidata.org/wiki/Q527952","display_name":"Visual servoing","level":3,"score":0.7931674718856812},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.7242456078529358},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.7123839855194092},{"id":"https://openalex.org/C192209626","wikidata":"https://www.wikidata.org/wiki/Q190909","display_name":"Focus (optics)","level":2,"score":0.6807246208190918},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5981045365333557},{"id":"https://openalex.org/C126057942","wikidata":"https://www.wikidata.org/wiki/Q35158","display_name":"Stereoscopy","level":2,"score":0.5470973253250122},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5094910264015198},{"id":"https://openalex.org/C78336883","wikidata":"https://www.wikidata.org/wiki/Q4779385","display_name":"Aperture (computer memory)","level":2,"score":0.42166298627853394},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2851654589176178},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.27656880021095276},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.15929999947547913},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.10118237137794495},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tim.2016.2556898","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2016.2556898","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},{"id":"pmh:oai:pure.atira.dk:publications/6594d055-4aef-4cb7-afce-b244eae7e467","is_oa":true,"landing_page_url":"https://research.birmingham.ac.uk/en/publications/6594d055-4aef-4cb7-afce-b244eae7e467","pdf_url":null,"source":{"id":"https://openalex.org/S4306402634","display_name":"University of Birmingham Research Portal (University of Birmingham)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I79619799","host_organization_name":"University of Birmingham","host_organization_lineage":["https://openalex.org/I79619799"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Marturi , N , Tamadazte , B , Demb\u00e9l\u00e9 , S & Piat , N 2016 , ' Visual Servoing-Based Depth-Estimation Technique for Manipulation Inside SEM ' , IEEE Transactions on Instrumentation and Measurement , vol. 65 , no. 8 , 7494610 , pp. 1847-1855 . https://doi.org/10.1109/TIM.2016.2556898","raw_type":"article"}],"best_oa_location":{"id":"pmh:oai:pure.atira.dk:publications/6594d055-4aef-4cb7-afce-b244eae7e467","is_oa":true,"landing_page_url":"https://research.birmingham.ac.uk/en/publications/6594d055-4aef-4cb7-afce-b244eae7e467","pdf_url":null,"source":{"id":"https://openalex.org/S4306402634","display_name":"University of Birmingham Research Portal (University of Birmingham)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I79619799","host_organization_name":"University of Birmingham","host_organization_lineage":["https://openalex.org/I79619799"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Marturi , N , Tamadazte , B , Demb\u00e9l\u00e9 , S & Piat , N 2016 , ' Visual Servoing-Based Depth-Estimation Technique for Manipulation Inside SEM ' , IEEE Transactions on Instrumentation and Measurement , vol. 65 , no. 8 , 7494610 , pp. 1847-1855 . https://doi.org/10.1109/TIM.2016.2556898","raw_type":"article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G3224048856","display_name":null,"funder_award_id":"ANR-11-NANO-006","funder_id":"https://openalex.org/F4320320883","funder_display_name":"Agence Nationale de la Recherche"},{"id":"https://openalex.org/G3397185701","display_name":"In-SEM Multi-physics characterization and robotics manipulation","funder_award_id":"ANR-11-NANO-0006","funder_id":"https://openalex.org/F4320320883","funder_display_name":"Agence Nationale de la Recherche"},{"id":"https://openalex.org/G5925658909","display_name":null,"funder_award_id":"ANR-11-LABEX-01-01","funder_id":"https://openalex.org/F4320322364","funder_display_name":"Labex"}],"funders":[{"id":"https://openalex.org/F4320320883","display_name":"Agence Nationale de la Recherche","ror":"https://ror.org/00rbzpz17"},{"id":"https://openalex.org/F4320322364","display_name":"Labex","ror":"https://ror.org/01cvsyf94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W61897071","https://openalex.org/W307270773","https://openalex.org/W1740520511","https://openalex.org/W2006054498","https://openalex.org/W2018076868","https://openalex.org/W2031008561","https://openalex.org/W2045198615","https://openalex.org/W2064812684","https://openalex.org/W2071333967","https://openalex.org/W2075031870","https://openalex.org/W2092663246","https://openalex.org/W2096331920","https://openalex.org/W2121174176","https://openalex.org/W2122986958","https://openalex.org/W2125761132","https://openalex.org/W2129356946","https://openalex.org/W2138736802","https://openalex.org/W2164215675","https://openalex.org/W2167922832","https://openalex.org/W2545709023","https://openalex.org/W6602529065","https://openalex.org/W6673406891"],"related_works":["https://openalex.org/W2059320410","https://openalex.org/W2067469524","https://openalex.org/W2007850256","https://openalex.org/W2144087142","https://openalex.org/W2293735384","https://openalex.org/W2349849942","https://openalex.org/W2075738584","https://openalex.org/W3094590434","https://openalex.org/W2155822583","https://openalex.org/W2367442185"],"abstract_inverted_index":{"Depth":[0],"estimation":[1,81,136],"for":[2],"micronanomanipulation":[3],"inside":[4,140],"a":[5,12,53,145],"scanning":[6],"electron":[7],"microscope":[8],"(SEM)":[9],"is":[10,117],"always":[11],"major":[13,87],"concern.":[14],"So":[15],"far,":[16],"in":[17,60,93],"the":[18,40,58,65,70,73,90,98,102,106,115,141,153,159],"literature,":[19],"various":[20,121],"methods":[21],"have":[22],"been":[23],"proposed":[24],"based":[25],"on":[26,47],"stereoscopic":[27],"imaging.":[28],"Most":[29],"of":[30,72,89,114,144,158],"them":[31],"require":[32],"external":[33],"hardware":[34],"unit":[35],"or":[36],"manual":[37],"interaction":[38],"during":[39],"process.":[41],"In":[42],"this":[43],"paper,":[44],"solely":[45],"relying":[46],"image":[48,108],"sharpness":[49],"information,":[50,109],"we":[51,75],"present":[52],"new":[54],"technique":[55],"to":[56,96],"estimate":[57],"depth":[59,80,103,127,131],"real":[61],"time.":[62],"To":[63],"improve":[64],"accuracy":[66],"as":[67,69,82],"well":[68],"rapidity":[71],"method,":[74],"consider":[76],"both":[77],"autofocus":[78,125],"and":[79,101,133,156],"visual":[83],"servoing":[84],"paradigms.":[85],"The":[86,112,149],"flexibility":[88],"method":[91,116],"lies":[92],"its":[94],"ability":[95],"compute":[97],"focus":[99],"position":[100],"using":[104],"only":[105],"acquired":[107],"i.e.,":[110],"sharpness.":[111],"feasibility":[113],"shown":[118],"by":[119],"performing":[120],"ground":[122],"truth":[123],"experiments:":[124],"achievements,":[126],"estimation,":[128],"focus-based":[129],"nanomanipulator":[130],"control,":[132],"sample":[134],"topographic":[135],"at":[137],"different":[138],"scenarios":[139],"vacuum":[142],"chamber":[143],"tungsten":[146],"gun":[147],"SEM.":[148],"obtained":[150],"results":[151],"demonstrate":[152],"accuracy,":[154],"rapidity,":[155],"efficiency":[157],"developed":[160],"method.":[161]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":1}],"updated_date":"2026-03-27T05:58:40.876381","created_date":"2025-10-10T00:00:00"}