{"id":"https://openalex.org/W2075450889","doi":"https://doi.org/10.1109/tim.2015.2389352","title":"Surface Layer Analysis of Si Sphere by XRF and XPS","display_name":"Surface Layer Analysis of Si Sphere by XRF and XPS","publication_year":2015,"publication_date":"2015-02-02","ids":{"openalex":"https://openalex.org/W2075450889","doi":"https://doi.org/10.1109/tim.2015.2389352","mag":"2075450889"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2015.2389352","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2015.2389352","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100431557","display_name":"Lulu Zhang","orcid":"https://orcid.org/0000-0002-7753-7426"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Lulu Zhang","raw_affiliation_strings":["National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan",", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]},{"raw_affiliation_string":", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5001533148","display_name":"Yasushi Azuma","orcid":"https://orcid.org/0000-0001-8099-7063"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yasushi Azuma","raw_affiliation_strings":["National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan",", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]},{"raw_affiliation_string":", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050368012","display_name":"Akira Kurokawa","orcid":"https://orcid.org/0000-0003-2953-0593"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akira Kurokawa","raw_affiliation_strings":["National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan",", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]},{"raw_affiliation_string":", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007242339","display_name":"Naoki Kuramoto","orcid":"https://orcid.org/0000-0002-4375-5214"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Naoki Kuramoto","raw_affiliation_strings":["National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan",", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]},{"raw_affiliation_string":", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101954354","display_name":"Kenichi Fujii","orcid":"https://orcid.org/0000-0002-5578-0038"},"institutions":[{"id":"https://openalex.org/I73613424","display_name":"National Institute of Advanced Industrial Science and Technology","ror":"https://ror.org/01703db54","country_code":"JP","type":"government","lineage":["https://openalex.org/I73613424"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kenichi Fujii","raw_affiliation_strings":["National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan",", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]},{"raw_affiliation_string":", National Metrology Institute of Japan and the National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan","institution_ids":["https://openalex.org/I73613424"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.6273,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.82527207,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"64","issue":"6","first_page":"1509","last_page":"1513"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11733","display_name":"X-ray Spectroscopy and Fluorescence Analysis","score":0.9983000159263611,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/avogadro-constant","display_name":"Avogadro constant","score":0.9648168683052063},{"id":"https://openalex.org/keywords/x-ray-photoelectron-spectroscopy","display_name":"X-ray photoelectron spectroscopy","score":0.821946382522583},{"id":"https://openalex.org/keywords/surface-layer","display_name":"Surface layer","score":0.5928077101707458},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.556513249874115},{"id":"https://openalex.org/keywords/surface","display_name":"Surface (topology)","score":0.5484514832496643},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.5460016131401062},{"id":"https://openalex.org/keywords/x-ray-fluorescence","display_name":"X-ray fluorescence","score":0.5059599280357361},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5047401189804077},{"id":"https://openalex.org/keywords/analytical-chemistry","display_name":"Analytical Chemistry (journal)","score":0.4981098175048828},{"id":"https://openalex.org/keywords/fluorescence","display_name":"Fluorescence","score":0.405313104391098},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.24054628610610962},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21902641654014587},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.21145465970039368},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.18609508872032166},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.15108489990234375},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.1126377284526825},{"id":"https://openalex.org/keywords/nuclear-magnetic-resonance","display_name":"Nuclear magnetic resonance","score":0.10907155275344849},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.08968868851661682},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.06864383816719055}],"concepts":[{"id":"https://openalex.org/C140848746","wikidata":"https://www.wikidata.org/wiki/Q6203","display_name":"Avogadro constant","level":2,"score":0.9648168683052063},{"id":"https://openalex.org/C175708663","wikidata":"https://www.wikidata.org/wiki/Q899559","display_name":"X-ray photoelectron spectroscopy","level":2,"score":0.821946382522583},{"id":"https://openalex.org/C197751951","wikidata":"https://www.wikidata.org/wiki/Q1046363","display_name":"Surface layer","level":3,"score":0.5928077101707458},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.556513249874115},{"id":"https://openalex.org/C2776799497","wikidata":"https://www.wikidata.org/wiki/Q484298","display_name":"Surface (topology)","level":2,"score":0.5484514832496643},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.5460016131401062},{"id":"https://openalex.org/C162170617","wikidata":"https://www.wikidata.org/wiki/Q898974","display_name":"X-ray fluorescence","level":3,"score":0.5059599280357361},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5047401189804077},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4981098175048828},{"id":"https://openalex.org/C91881484","wikidata":"https://www.wikidata.org/wiki/Q191807","display_name":"Fluorescence","level":2,"score":0.405313104391098},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.24054628610610962},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21902641654014587},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.21145465970039368},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.18609508872032166},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.15108489990234375},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.1126377284526825},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.10907155275344849},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.08968868851661682},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.06864383816719055},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2015.2389352","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2015.2389352","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":16,"referenced_works":["https://openalex.org/W1996258274","https://openalex.org/W2032971505","https://openalex.org/W2049738552","https://openalex.org/W2051724344","https://openalex.org/W2052461464","https://openalex.org/W2056058632","https://openalex.org/W2063860936","https://openalex.org/W2064897644","https://openalex.org/W2070316099","https://openalex.org/W2075238370","https://openalex.org/W2081859805","https://openalex.org/W2111937898","https://openalex.org/W2123037222","https://openalex.org/W2144006315","https://openalex.org/W2176325089","https://openalex.org/W2325273010"],"related_works":["https://openalex.org/W2619361765","https://openalex.org/W2797562556","https://openalex.org/W2102421844","https://openalex.org/W1501238934","https://openalex.org/W2325273010","https://openalex.org/W2322769499","https://openalex.org/W2087885962","https://openalex.org/W2075450889","https://openalex.org/W2991441703","https://openalex.org/W2052189530"],"abstract_inverted_index":{"To":[0],"reduce":[1],"the":[2,5,9,13,15,19,24,28,38,45,69,72,77,82,87],"uncertainty":[3],"of":[4,12,18,27,71,81,89],"Avogadro":[6,29],"constant":[7,30],"for":[8,23],"new":[10],"definition":[11],"kilogram,":[14],"surface":[16,39,88],"analysis":[17],"Si":[20,52,92],"sphere":[21,53],"produced":[22],"accurate":[25],"determination":[26],"is":[31],"indispensable.":[32],"In":[33],"this":[34],"paper,":[35],"we":[36],"conducted":[37],"quantitative":[40],"analyses":[41],"to":[42,67],"find":[43],"out":[44,66],"metallic":[46],"contaminations":[47],"on":[48,86],"a":[49,90],"1-kg":[50],"natural":[51],"by":[54],"X-ray":[55,59],"fluorescence":[56],"analysis.":[57],"The":[58],"photoelectron":[60],"spectroscopy":[61],"investigations":[62],"were":[63],"also":[64],"carried":[65],"estimate":[68],"thickness":[70],"oxide":[73],"layer":[74,85],"and":[75],"clarify":[76],"chemical":[78],"binding":[79],"state":[80],"carbonaceous":[83],"contamination":[84],"dummy":[91],"sphere.":[93]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":6}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}
