{"id":"https://openalex.org/W2159188914","doi":"https://doi.org/10.1109/tim.2011.2179829","title":"Capacitance Measurements of Two-Dimensional and Three-Dimensional IC Interconnect Structures by Quasi-Static $C$\u2013$V$ Technique","display_name":"Capacitance Measurements of Two-Dimensional and Three-Dimensional IC Interconnect Structures by Quasi-Static $C$\u2013$V$ Technique","publication_year":2012,"publication_date":"2012-02-03","ids":{"openalex":"https://openalex.org/W2159188914","doi":"https://doi.org/10.1109/tim.2011.2179829","mag":"2159188914"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2011.2179829","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2011.2179829","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5027473851","display_name":"Michele Stucchi","orcid":"https://orcid.org/0000-0002-7848-0492"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Michele Stucchi","raw_affiliation_strings":["Interuniversity MicroElectronics Center, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Interuniversity MicroElectronics Center, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050757937","display_name":"Dimitrios Velenis","orcid":"https://orcid.org/0000-0001-7947-8098"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Dimitrios Velenis","raw_affiliation_strings":["Interuniversity MicroElectronics Center, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Interuniversity MicroElectronics Center, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5055308643","display_name":"Guruprasad Katti","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Guruprasad Katti","raw_affiliation_strings":["Interuniversity MicroElectronics Center, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Interuniversity MicroElectronics Center, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.499,"has_fulltext":false,"cited_by_count":12,"citation_normalized_percentile":{"value":0.84857992,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"61","issue":"7","first_page":"1979","last_page":"1990"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11032","display_name":"VLSI and Analog Circuit Testing","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/1708","display_name":"Hardware and Architecture"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11527","display_name":"3D IC and TSV technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.9375937581062317},{"id":"https://openalex.org/keywords/interconnection","display_name":"Interconnection","score":0.7473750710487366},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.7001374959945679},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.645305871963501},{"id":"https://openalex.org/keywords/electrical-impedance","display_name":"Electrical impedance","score":0.6022866368293762},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5923985838890076},{"id":"https://openalex.org/keywords/differential-capacitance","display_name":"Differential capacitance","score":0.5243121385574341},{"id":"https://openalex.org/keywords/parasitic-capacitance","display_name":"Parasitic capacitance","score":0.4756355285644531},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.4745524525642395},{"id":"https://openalex.org/keywords/measure","display_name":"Measure (data warehouse)","score":0.4281514286994934},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.40899741649627686},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.32776516675949097},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.21675100922584534},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.20578613877296448},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.17276638746261597},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.09767040610313416}],"concepts":[{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.9375937581062317},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.7473750710487366},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.7001374959945679},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.645305871963501},{"id":"https://openalex.org/C17829176","wikidata":"https://www.wikidata.org/wiki/Q179043","display_name":"Electrical impedance","level":2,"score":0.6022866368293762},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5923985838890076},{"id":"https://openalex.org/C150072415","wikidata":"https://www.wikidata.org/wiki/Q5275337","display_name":"Differential capacitance","level":4,"score":0.5243121385574341},{"id":"https://openalex.org/C154318817","wikidata":"https://www.wikidata.org/wiki/Q2157249","display_name":"Parasitic capacitance","level":4,"score":0.4756355285644531},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4745524525642395},{"id":"https://openalex.org/C2780009758","wikidata":"https://www.wikidata.org/wiki/Q6804172","display_name":"Measure (data warehouse)","level":2,"score":0.4281514286994934},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.40899741649627686},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.32776516675949097},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.21675100922584534},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.20578613877296448},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.17276638746261597},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.09767040610313416},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2011.2179829","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2011.2179829","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W1552527487","https://openalex.org/W1646419329","https://openalex.org/W1965904558","https://openalex.org/W1980350634","https://openalex.org/W2025890803","https://openalex.org/W2043443161","https://openalex.org/W2073419072","https://openalex.org/W2104516739","https://openalex.org/W2118195368","https://openalex.org/W2123230983","https://openalex.org/W2123581601","https://openalex.org/W2580799792"],"related_works":["https://openalex.org/W3212531278","https://openalex.org/W2099626417","https://openalex.org/W4206271244","https://openalex.org/W2059163921","https://openalex.org/W2116327859","https://openalex.org/W2370461157","https://openalex.org/W2019736759","https://openalex.org/W3092439256","https://openalex.org/W1858685898","https://openalex.org/W2182423601"],"abstract_inverted_index":{"In":[0],"this":[1],"paper,":[2],"the":[3,26,31,38,46,53,56,70,92,105,109],"quasi-static":[4,27],"-":[5],"(QSCV)":[6],"measurement":[7],"technique":[8],"is":[9,89],"applied":[10],"to":[11,69],"measure":[12],"capacitance":[13,43,58,81,98],"of":[14,25,40,55,73,82,104],"2-D":[15,84],"(planar)":[16],"and":[17,37,61,78,85,91],"3-D":[18,86],"IC":[19],"interconnect":[20,57,87],"test":[21],"structures.":[22],"The":[23,80],"advantages":[24],"approach":[28],"such":[29],"as":[30],"immunity":[32],"from":[33,101],"frequency":[34,110],"dependence":[35],"effects":[36],"capability":[39],"measuring":[41],"small":[42,65],"values":[44,99],"in":[45,59,108],"100-fF":[47],"range":[48],"are":[49,76,95],"particularly":[50],"attractive":[51],"for":[52],"characterization":[54],"planar":[60],"vertical":[62],"architectures":[63],"with":[64,97],"dimensions.":[66],"Issues":[67],"related":[68],"QSCV":[71,93],"measurements":[72,103],"leaky":[74],"capacitors":[75],"analyzed":[77],"quantified.":[79],"different":[83],"structures":[88,107],"measured,":[90],"results":[94],"compared":[96],"extracted":[100],"impedance":[102],"same":[106],"domain.":[111]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}