{"id":"https://openalex.org/W2122539128","doi":"https://doi.org/10.1109/tim.2010.2101310","title":"Cascaded \u201cTriple-Bent-Beam\u201d MEMS Sensor for Contactless Temperature Measurements in Nonaccessible Environments","display_name":"Cascaded \u201cTriple-Bent-Beam\u201d MEMS Sensor for Contactless Temperature Measurements in Nonaccessible Environments","publication_year":2011,"publication_date":"2011-01-21","ids":{"openalex":"https://openalex.org/W2122539128","doi":"https://doi.org/10.1109/tim.2010.2101310","mag":"2122539128"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2010.2101310","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2010.2101310","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hal-lirmm.ccsd.cnrs.fr/lirmm-00580551","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056670756","display_name":"Bruno And\u00f2","orcid":"https://orcid.org/0000-0001-5099-6131"},"institutions":[{"id":"https://openalex.org/I39063666","display_name":"University of Catania","ror":"https://ror.org/03a64bh57","country_code":"IT","type":"education","lineage":["https://openalex.org/I39063666"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"Bruno Ando","raw_affiliation_strings":["Dipartimento di Ingegneria Elettrica Elettronica e dei Sistemi, University of Catania, Catania, Italy","Dipt. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania, Italy"],"affiliations":[{"raw_affiliation_string":"Dipartimento di Ingegneria Elettrica Elettronica e dei Sistemi, University of Catania, Catania, Italy","institution_ids":["https://openalex.org/I39063666"]},{"raw_affiliation_string":"Dipt. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania, Italy","institution_ids":["https://openalex.org/I39063666"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028359022","display_name":"Salvatore Baglio","orcid":"https://orcid.org/0000-0002-6068-2846"},"institutions":[{"id":"https://openalex.org/I39063666","display_name":"University of Catania","ror":"https://ror.org/03a64bh57","country_code":"IT","type":"education","lineage":["https://openalex.org/I39063666"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Salvatore Baglio","raw_affiliation_strings":["Dipartimento di Ingegneria Elettrica Elettronica e dei Sistemi, University of Catania, Catania, Italy","Dipt. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania, Italy"],"affiliations":[{"raw_affiliation_string":"Dipartimento di Ingegneria Elettrica Elettronica e dei Sistemi, University of Catania, Catania, Italy","institution_ids":["https://openalex.org/I39063666"]},{"raw_affiliation_string":"Dipt. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania, Italy","institution_ids":["https://openalex.org/I39063666"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014375220","display_name":"N. Savalli","orcid":null},"institutions":[{"id":"https://openalex.org/I39063666","display_name":"University of Catania","ror":"https://ror.org/03a64bh57","country_code":"IT","type":"education","lineage":["https://openalex.org/I39063666"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Nicol\u00f2 Savalli","raw_affiliation_strings":["Dipartimento di Ingegneria Elettrica Elettronica e dei Sistemi, University of Catania, Catania, Italy","Dipt. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania, Italy"],"affiliations":[{"raw_affiliation_string":"Dipartimento di Ingegneria Elettrica Elettronica e dei Sistemi, University of Catania, Catania, Italy","institution_ids":["https://openalex.org/I39063666"]},{"raw_affiliation_string":"Dipt. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania, Italy","institution_ids":["https://openalex.org/I39063666"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018584908","display_name":"Carlo Trigona","orcid":"https://orcid.org/0000-0001-6789-5580"},"institutions":[{"id":"https://openalex.org/I39063666","display_name":"University of Catania","ror":"https://ror.org/03a64bh57","country_code":"IT","type":"education","lineage":["https://openalex.org/I39063666"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Carlo Trigona","raw_affiliation_strings":["Dipartimento di Ingegneria Elettrica Elettronica e dei Sistemi, University of Catania, Catania, Italy","Dipt. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania, Italy"],"affiliations":[{"raw_affiliation_string":"Dipartimento di Ingegneria Elettrica Elettronica e dei Sistemi, University of Catania, Catania, Italy","institution_ids":["https://openalex.org/I39063666"]},{"raw_affiliation_string":"Dipt. di Ing. Elettr. Elettron. e dei Sist., Univ. of Catania, Catania, Italy","institution_ids":["https://openalex.org/I39063666"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5056670756"],"corresponding_institution_ids":["https://openalex.org/I39063666"],"apc_list":null,"apc_paid":null,"fwci":2.6954,"has_fulltext":false,"cited_by_count":33,"citation_normalized_percentile":{"value":0.90821914,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"60","issue":"4","first_page":"1348","last_page":"1357"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bent-molecular-geometry","display_name":"Bent molecular geometry","score":0.7742406129837036},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.732148289680481},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.6060877442359924},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5125234127044678},{"id":"https://openalex.org/keywords/temperature-measurement","display_name":"Temperature measurement","score":0.4934884309768677},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.41548100113868713},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3858810067176819},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.35495805740356445},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3403918147087097},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3166172504425049},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.27161532640457153}],"concepts":[{"id":"https://openalex.org/C138211643","wikidata":"https://www.wikidata.org/wiki/Q675211","display_name":"Bent molecular geometry","level":2,"score":0.7742406129837036},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.732148289680481},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.6060877442359924},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5125234127044678},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.4934884309768677},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.41548100113868713},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3858810067176819},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.35495805740356445},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3403918147087097},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3166172504425049},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.27161532640457153},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tim.2010.2101310","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2010.2101310","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},{"id":"pmh:oai:HAL:lirmm-00580551v1","is_oa":true,"landing_page_url":"https://hal-lirmm.ccsd.cnrs.fr/lirmm-00580551","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement, 2011, 60 (4), pp.1348-1357. &#x27E8;10.1109/TIM.2010.2101310&#x27E9;","raw_type":"Journal articles"}],"best_oa_location":{"id":"pmh:oai:HAL:lirmm-00580551v1","is_oa":true,"landing_page_url":"https://hal-lirmm.ccsd.cnrs.fr/lirmm-00580551","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL (Le Centre pour la Communication Scientifique Directe)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1294671590","host_organization_name":"Centre National de la Recherche Scientifique","host_organization_lineage":["https://openalex.org/I1294671590"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement, 2011, 60 (4), pp.1348-1357. &#x27E8;10.1109/TIM.2010.2101310&#x27E9;","raw_type":"Journal articles"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5199999809265137,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":24,"referenced_works":["https://openalex.org/W138360167","https://openalex.org/W630955716","https://openalex.org/W1534156853","https://openalex.org/W1546458677","https://openalex.org/W2018008910","https://openalex.org/W2079594362","https://openalex.org/W2088280892","https://openalex.org/W2090094968","https://openalex.org/W2097767495","https://openalex.org/W2124606332","https://openalex.org/W2129736477","https://openalex.org/W2140982103","https://openalex.org/W2149391906","https://openalex.org/W2149797214","https://openalex.org/W2152873042","https://openalex.org/W2154644761","https://openalex.org/W2164356070","https://openalex.org/W2170950161","https://openalex.org/W2171074980","https://openalex.org/W2313288771","https://openalex.org/W2357375250","https://openalex.org/W4232015577","https://openalex.org/W6605547353","https://openalex.org/W6706504982"],"related_works":["https://openalex.org/W2335716720","https://openalex.org/W2071445534","https://openalex.org/W2329706164","https://openalex.org/W42610648","https://openalex.org/W4293565717","https://openalex.org/W2949764448","https://openalex.org/W4297068499","https://openalex.org/W95182217","https://openalex.org/W2391219220","https://openalex.org/W2065733534"],"abstract_inverted_index":{"A":[0,18],"microelectromechanical":[1],"systems":[2,44],"(MEMS)":[3],"temperature":[4,111,152],"sensor":[5,49],"based":[6],"on":[7,196,209,218,231],"a":[8,33,123,128,139,161,167,170,173],"cascade":[9],"three-stage":[10],"\u201cbent-beam\u201d":[11],"structure":[12,20,38],"is":[13,35,39,54,61,112,135,156,185],"described":[14],"in":[15,23,28,45,95,164,169,175],"this":[16],"paper.":[17],"suspended":[19],"mechanically":[21],"deforms":[22],"response":[24],"to":[25,47,56,72,92,122,126,138,153],"the":[26,37,73,80,84,109,118,144,147,176,189,197,204,210,219,232,235],"change":[27,168],"ambient":[29],"temperature,":[30],"and":[31,75,199,206,212,227],"then,":[32],"displacement":[34,162],"obtained;":[36],"composed":[40],"of":[41,83,108,179,202,214,234],"three":[42],"cascaded":[43],"order":[46],"enhance":[48],"sensitivity.":[50],"The":[51,87,106,151],"final":[52],"conversion":[53],"made":[55],"an":[57,65,180,215],"electrical":[58],"signal":[59],"that":[60],"obtained":[62],"by":[63,116],"using":[64],"interdigitated":[66],"capacitor":[67,121,171],"having":[68],"one":[69,76],"electrode":[70,77],"fixed":[71,124],"substrate":[74],"embedded":[78],"into":[79,160],"moving":[81],"tip":[82],"MEMS":[85,120],"sensor.":[86],"device":[88,238],"has":[89],"been":[90],"conceived":[91],"operate":[93],"passively":[94],"harsh":[96],"environments":[97],"where":[98,146,222],"high":[99],"temperatures":[100],"could":[101],"harm":[102],"active":[103],"electronic":[104],"devices.":[105],"readout":[107,191],"unknown":[110],"therefore":[113,157],"remotely":[114],"performed":[115],"coupling":[117],"variable":[119],"inductor":[125],"compose":[127],"resonant":[129,177,237],"<i":[130,181],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[131,182],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">LC</i>":[132,183],"circuit,":[133],"which":[134],"magnetically":[136],"coupled":[137],"reader":[140],"circuit":[141,184],"placed":[142],"outside":[143],"environment":[145],"measurement":[148],"takes":[149],"place.":[150],"be":[154],"measured":[155],"first":[158],"converted":[159],"that,":[163],"turn,":[165],"induces":[166],"value;":[172],"variation":[174],"frequency":[178],"finally":[186],"observed":[187],"through":[188],"remote":[190],"circuit.":[192],"This":[193],"paper":[194],"focuses":[195],"analytical":[198],"numerical":[200],"modeling":[201],"both":[203],"temperature-to-displacement":[205],"displacement-to-capacitance":[207],"conversions,":[208],"design":[211,233],"fabrication":[213],"experimental":[216,220],"prototype,":[217],"validation":[221],"results":[223],"are":[224],"extensively":[225],"presented":[226],"commented,":[228],"and,":[229],"finally,":[230],"integrated":[236],"for":[239],"contactless":[240],"measurements.":[241]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":4},{"year":2013,"cited_by_count":4},{"year":2012,"cited_by_count":2}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2016-06-24T00:00:00"}