{"id":"https://openalex.org/W2112693984","doi":"https://doi.org/10.1109/tim.2009.2018700","title":"A Micropower Front End for Three-Axis Capacitive Microaccelerometers","display_name":"A Micropower Front End for Three-Axis Capacitive Microaccelerometers","publication_year":2009,"publication_date":"2009-06-25","ids":{"openalex":"https://openalex.org/W2112693984","doi":"https://doi.org/10.1109/tim.2009.2018700","mag":"2112693984"},"language":"en","primary_location":{"id":"doi:10.1109/tim.2009.2018700","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2009.2018700","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077321882","display_name":"Mika K\u00e4m\u00e4r\u00e4inen","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Kamarainen","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044322491","display_name":"Mikko Saukoski","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Saukoski","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028053652","display_name":"Matti Paavola","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. Paavola","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005342211","display_name":"J.A.M. Jarvinen","orcid":null},"institutions":[{"id":"https://openalex.org/I74760111","display_name":"Texas Instruments (United States)","ror":"https://ror.org/03vsmv677","country_code":"US","type":"company","lineage":["https://openalex.org/I74760111"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J.A.M. Jarvinen","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","Power Management DC-DC Converter Group, Texas Instruments, Inc., USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]},{"raw_affiliation_string":"Power Management DC-DC Converter Group, Texas Instruments, Inc., USA","institution_ids":["https://openalex.org/I74760111"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052855358","display_name":"Mika Laiho","orcid":"https://orcid.org/0000-0002-3794-0800"},"institutions":[{"id":"https://openalex.org/I155660961","display_name":"University of Turku","ror":"https://ror.org/05vghhr25","country_code":"FI","type":"education","lineage":["https://openalex.org/I155660961"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"M. Laiho","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","University of Turku, Turku, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]},{"raw_affiliation_string":"University of Turku, Turku, Finland","institution_ids":["https://openalex.org/I155660961"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5066316803","display_name":"K. Halonen","orcid":"https://orcid.org/0000-0002-4385-9689"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"K.A.I. Halonen","raw_affiliation_strings":["Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Circuit Design Laboratory, Helsinki University of Technology, Espoo, Finland","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.322,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.82317188,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"58","issue":"10","first_page":"3642","last_page":"3652"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/micropower","display_name":"Micropower","score":0.9607048034667969},{"id":"https://openalex.org/keywords/front-and-back-ends","display_name":"Front and back ends","score":0.8269029855728149},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.70597904920578},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.6347237825393677},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.573012113571167},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.5163437128067017},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.45434945821762085},{"id":"https://openalex.org/keywords/front","display_name":"Front (military)","score":0.4493390619754791},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.43602699041366577},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.33033278584480286},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.32379865646362305},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.27739155292510986},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.16629159450531006},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.16327860951423645},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.10791385173797607},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.0762476921081543},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.07561549544334412}],"concepts":[{"id":"https://openalex.org/C2851963","wikidata":"https://www.wikidata.org/wiki/Q6839950","display_name":"Micropower","level":3,"score":0.9607048034667969},{"id":"https://openalex.org/C53016008","wikidata":"https://www.wikidata.org/wiki/Q620167","display_name":"Front and back ends","level":2,"score":0.8269029855728149},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.70597904920578},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.6347237825393677},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.573012113571167},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.5163437128067017},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.45434945821762085},{"id":"https://openalex.org/C2777551076","wikidata":"https://www.wikidata.org/wiki/Q842332","display_name":"Front (military)","level":2,"score":0.4493390619754791},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.43602699041366577},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.33033278584480286},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.32379865646362305},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.27739155292510986},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.16629159450531006},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.16327860951423645},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.10791385173797607},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0762476921081543},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.07561549544334412},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tim.2009.2018700","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tim.2009.2018700","pdf_url":null,"source":{"id":"https://openalex.org/S10892749","display_name":"IEEE Transactions on Instrumentation and Measurement","issn_l":"0018-9456","issn":["0018-9456","1557-9662"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Instrumentation and Measurement","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.800000011920929,"display_name":"Affordable and clean energy"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W7662183","https://openalex.org/W1516309048","https://openalex.org/W1523036710","https://openalex.org/W1578247589","https://openalex.org/W1986018212","https://openalex.org/W1991534425","https://openalex.org/W2011374223","https://openalex.org/W2015861460","https://openalex.org/W2020307756","https://openalex.org/W2054395343","https://openalex.org/W2081427901","https://openalex.org/W2096953285","https://openalex.org/W2103198996","https://openalex.org/W2105142523","https://openalex.org/W2115801530","https://openalex.org/W2119479723","https://openalex.org/W2119985792","https://openalex.org/W2124050425","https://openalex.org/W2131862714","https://openalex.org/W2151185725","https://openalex.org/W2157590007","https://openalex.org/W2483745592"],"related_works":["https://openalex.org/W1598530105","https://openalex.org/W2388877201","https://openalex.org/W1965759868","https://openalex.org/W2479369666","https://openalex.org/W1611602454","https://openalex.org/W2493269863","https://openalex.org/W2520280025","https://openalex.org/W2291633415","https://openalex.org/W2112693984","https://openalex.org/W2011374223"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"the":[3,25,29,57,67,70,74,97,112],"measurement":[4],"results":[5],"of":[6,28,56,69,90],"a":[7,47,83],"micropower":[8],"switched-capacitor":[9],"front":[10,21,42,58,71],"end":[11,22,43,59,72],"that":[12,66],"was":[13,44],"designed":[14,20],"for":[15],"three-axis":[16],"capacitive":[17],"microaccelerometers.":[18],"The":[19,41,53,63],"can":[23,33],"reduce":[24],"distorting":[26],"effects":[27],"electrostatic":[30],"forces":[31],"and":[32,38,93,100],"be":[34],"used":[35],"in":[36,76,96,111],"single-ended":[37],"differential":[39,113],"modes.":[40,78],"realized":[45],"with":[46],"0.13-mum":[48],"bipolar":[49],"complimentary":[50],"metal-oxide-semiconductor":[51],"process.":[52],"silicon":[54],"area":[55],"is":[60,106],"0.30":[61],"mm2.":[62],"measurements":[64],"show":[65],"functionality":[68],"follows":[73],"theory":[75],"both":[77],"Consuming":[79],"20":[80],"muA":[81],"from":[82],"1.8-V":[84],"supply,":[85],"it":[86],"achieves":[87],"noise":[88],"densities":[89],"424,":[91],"607,":[92],"590":[94],"mug/radic(Hz)":[95],"x-,":[98],"y-,":[99],"z-directions,":[101],"respectively,":[102],"when":[103],"each":[104],"mass":[105],"sampled":[107],"at":[108],"1":[109],"kHz":[110],"mode.":[114]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-07-29T09:40:50.615796","created_date":"2025-10-10T00:00:00"}