{"id":"https://openalex.org/W4400487643","doi":"https://doi.org/10.1109/tii.2024.3413294","title":"Real-Time Iterative Compensation Control Using Plant-Injection Feedforward Architecture With Application to Ultraprecision Wafer Stages","display_name":"Real-Time Iterative Compensation Control Using Plant-Injection Feedforward Architecture With Application to Ultraprecision Wafer Stages","publication_year":2024,"publication_date":"2024-07-10","ids":{"openalex":"https://openalex.org/W4400487643","doi":"https://doi.org/10.1109/tii.2024.3413294"},"language":"en","primary_location":{"id":"doi:10.1109/tii.2024.3413294","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tii.2024.3413294","pdf_url":null,"source":{"id":"https://openalex.org/S184777250","display_name":"IEEE Transactions on Industrial Informatics","issn_l":"1551-3203","issn":["1551-3203","1941-0050"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Informatics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5033216101","display_name":"Ran Zhou","orcid":"https://orcid.org/0000-0002-0834-2529"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ran Zhou","raw_affiliation_strings":["State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-0834-2529","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079033650","display_name":"Chuxiong Hu","orcid":"https://orcid.org/0000-0002-3504-3065"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chuxiong Hu","raw_affiliation_strings":["State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0002-3504-3065","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082826616","display_name":"Ze Wang","orcid":"https://orcid.org/0000-0001-5121-2677"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ze Wang","raw_affiliation_strings":["State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0001-5121-2677","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103205239","display_name":"Limin Zhu","orcid":"https://orcid.org/0000-0003-3194-6731"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Zhu","raw_affiliation_strings":["State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0003-3194-6731","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Tribology in Advanced Equipment, Department of Mechanical Engineering, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5064077634","display_name":"Masayoshi Tomizuka","orcid":"https://orcid.org/0000-0003-0206-6639"},"institutions":[{"id":"https://openalex.org/I95457486","display_name":"University of California, Berkeley","ror":"https://ror.org/01an7q238","country_code":"US","type":"education","lineage":["https://openalex.org/I95457486"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Masayoshi Tomizuka","raw_affiliation_strings":["Department of Mechanical Engineering, University of California, Berkeley, CA, USA"],"raw_orcid":"https://orcid.org/0000-0003-0206-6639","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, University of California, Berkeley, CA, USA","institution_ids":["https://openalex.org/I95457486"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.7154,"has_fulltext":false,"cited_by_count":10,"citation_normalized_percentile":{"value":0.9028881,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"20","issue":"10","first_page":"11708","last_page":"11719"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":0.9656000137329102,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/feed-forward","display_name":"Feed forward","score":0.7917003035545349},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6986182928085327},{"id":"https://openalex.org/keywords/compensation","display_name":"Compensation (psychology)","score":0.6017935276031494},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.44493475556373596},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4421217739582062},{"id":"https://openalex.org/keywords/iterative-learning-control","display_name":"Iterative learning control","score":0.44045397639274597},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.4267454445362091},{"id":"https://openalex.org/keywords/wafer-scale-integration","display_name":"Wafer-scale integration","score":0.4235129952430725},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3750218152999878},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3491226136684418},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3482285737991333},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.29506444931030273},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2123243510723114},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1920158863067627}],"concepts":[{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.7917003035545349},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6986182928085327},{"id":"https://openalex.org/C2780023022","wikidata":"https://www.wikidata.org/wiki/Q1338171","display_name":"Compensation (psychology)","level":2,"score":0.6017935276031494},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.44493475556373596},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4421217739582062},{"id":"https://openalex.org/C117619785","wikidata":"https://www.wikidata.org/wiki/Q6094414","display_name":"Iterative learning control","level":3,"score":0.44045397639274597},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.4267454445362091},{"id":"https://openalex.org/C2778638305","wikidata":"https://www.wikidata.org/wiki/Q7406100","display_name":"Wafer-scale integration","level":3,"score":0.4235129952430725},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3750218152999878},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3491226136684418},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3482285737991333},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.29506444931030273},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2123243510723114},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1920158863067627},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C11171543","wikidata":"https://www.wikidata.org/wiki/Q41630","display_name":"Psychoanalysis","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tii.2024.3413294","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tii.2024.3413294","pdf_url":null,"source":{"id":"https://openalex.org/S184777250","display_name":"IEEE Transactions on Industrial Informatics","issn_l":"1551-3203","issn":["1551-3203","1941-0050"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Informatics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G8817783929","display_name":null,"funder_award_id":"52205532","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":28,"referenced_works":["https://openalex.org/W1965920800","https://openalex.org/W1974984002","https://openalex.org/W1998303185","https://openalex.org/W2041242313","https://openalex.org/W2417211050","https://openalex.org/W2763456105","https://openalex.org/W2783432922","https://openalex.org/W2980037872","https://openalex.org/W3011361136","https://openalex.org/W3047884765","https://openalex.org/W3083580083","https://openalex.org/W3102439411","https://openalex.org/W3107924053","https://openalex.org/W3128406963","https://openalex.org/W3129423548","https://openalex.org/W3187387966","https://openalex.org/W3214252862","https://openalex.org/W4226427860","https://openalex.org/W4283729384","https://openalex.org/W4292969501","https://openalex.org/W4296914262","https://openalex.org/W4313022686","https://openalex.org/W4315488799","https://openalex.org/W4382119254","https://openalex.org/W4387951974","https://openalex.org/W4389473877","https://openalex.org/W4390970649","https://openalex.org/W6991855248"],"related_works":["https://openalex.org/W2970498257","https://openalex.org/W2140660040","https://openalex.org/W2041316527","https://openalex.org/W2036313051","https://openalex.org/W4400034431","https://openalex.org/W2065601166","https://openalex.org/W2160598879","https://openalex.org/W2082419378","https://openalex.org/W2146366317","https://openalex.org/W993605666"],"abstract_inverted_index":{"This":[0],"article":[1],"presents":[2],"a":[3],"novel":[4],"real-time":[5,54],"iterative":[6,74,108],"compensation":[7],"(RIC)":[8],"method":[9,41],"using":[10],"plant-injection":[11,65],"feedforward":[12,66],"architecture":[13],"for":[14],"motion":[15],"control":[16,71,110],"of":[17,25,63,106],"ultraprecision":[18,93],"wafer":[19,94],"stages,":[20],"addressing":[21],"the":[22,60,102],"severe":[23],"challenge":[24],"achieving":[26],"extreme":[27],"tracking":[28,51,78,86,104],"accuracy":[29,79,105],"along":[30],"with":[31],"strong":[32],"task":[33,114],"flexibility":[34,115],"and":[35,80,116],"disturbance":[36,117],"rejection":[37,118],"ability.":[38,119],"The":[39,56],"RIC":[40,100],"establishes":[42],"an":[43,92],"online":[44,61],"prediction":[45,57],"model":[46],"to":[47],"accurately":[48],"predict":[49],"upcoming":[50],"errors":[52],"during":[53],"motion.":[55],"result":[58],"enables":[59],"generation":[62],"optimal":[64],"signal":[67],"at":[68],"each":[69],"sampling":[70],"instant":[72],"via":[73],"calculation,":[75],"which":[76],"enhances":[77],"dynamical":[81],"regulation":[82],"capability.":[83],"Various":[84],"trajectory":[85],"tasks":[87],"have":[88],"been":[89],"implemented":[90],"on":[91],"stage.":[95],"Experimental":[96],"results":[97],"demonstrate":[98],"that":[99],"matches":[101],"high":[103],"well-acknowledged":[107],"learning":[109],"while":[111],"offering":[112],"superior":[113]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":7},{"year":2024,"cited_by_count":2}],"updated_date":"2025-12-26T23:08:49.675405","created_date":"2025-10-10T00:00:00"}