{"id":"https://openalex.org/W1662965174","doi":"https://doi.org/10.1109/tii.2015.2470223","title":"A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage With Accelerated Iterative Parameter Tuning","display_name":"A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage With Accelerated Iterative Parameter Tuning","publication_year":2015,"publication_date":"2015-08-20","ids":{"openalex":"https://openalex.org/W1662965174","doi":"https://doi.org/10.1109/tii.2015.2470223","mag":"1662965174"},"language":"en","primary_location":{"id":"doi:10.1109/tii.2015.2470223","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tii.2015.2470223","pdf_url":null,"source":{"id":"https://openalex.org/S184777250","display_name":"IEEE Transactions on Industrial Informatics","issn_l":"1551-3203","issn":["1551-3203","1941-0050"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Informatics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100778176","display_name":"Min Li","orcid":"https://orcid.org/0000-0001-7264-5754"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Min Li","raw_affiliation_strings":["Beijing Key Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing, China","State Key Laboratory of Tribology, Department of Mechanical Engineering Tsinghua University  Beijing China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Laboratory of Tribology, Department of Mechanical Engineering Tsinghua University  Beijing China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112890006","display_name":"Yu Zhu","orcid":"https://orcid.org/0009-0006-6480-8924"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu Zhu","raw_affiliation_strings":["Beijing Key Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing, China","State Key Laboratory of Tribology, Department of Mechanical Engineering Tsinghua University  Beijing China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Laboratory of Tribology, Department of Mechanical Engineering Tsinghua University  Beijing China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056082865","display_name":"Kaiming Yang","orcid":"https://orcid.org/0009-0000-7734-0095"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kaiming Yang","raw_affiliation_strings":["Beijing Key Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing, China","State Key Laboratory of Tribology, Department of Mechanical Engineering Tsinghua University  Beijing China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Laboratory of Tribology, Department of Mechanical Engineering Tsinghua University  Beijing China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5079033650","display_name":"Chuxiong Hu","orcid":"https://orcid.org/0000-0002-3504-3065"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chuxiong Hu","raw_affiliation_strings":["Beijing Key Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing, China","State Key Laboratory of Tribology, Department of Mechanical Engineering Tsinghua University  Beijing China"],"affiliations":[{"raw_affiliation_string":"Beijing Key Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Laboratory of Tribology, Department of Mechanical Engineering Tsinghua University  Beijing China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5100778176"],"corresponding_institution_ids":["https://openalex.org/I99065089"],"apc_list":null,"apc_paid":null,"fwci":5.0491,"has_fulltext":false,"cited_by_count":55,"citation_normalized_percentile":{"value":0.95214412,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"11","issue":"5","first_page":"1179","last_page":"1189"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9952999949455261,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6718491315841675},{"id":"https://openalex.org/keywords/iterative-learning-control","display_name":"Iterative learning control","score":0.5644504427909851},{"id":"https://openalex.org/keywords/variable","display_name":"Variable (mathematics)","score":0.5148860216140747},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.504388689994812},{"id":"https://openalex.org/keywords/tracking-error","display_name":"Tracking error","score":0.4714559018611908},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.4576408565044403},{"id":"https://openalex.org/keywords/pid-controller","display_name":"PID controller","score":0.4216892719268799},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.27559369802474976},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.27248072624206543},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.23670506477355957},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.12248054146766663},{"id":"https://openalex.org/keywords/temperature-control","display_name":"Temperature control","score":0.08834397792816162},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.08027288317680359}],"concepts":[{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6718491315841675},{"id":"https://openalex.org/C117619785","wikidata":"https://www.wikidata.org/wiki/Q6094414","display_name":"Iterative learning control","level":3,"score":0.5644504427909851},{"id":"https://openalex.org/C182365436","wikidata":"https://www.wikidata.org/wiki/Q50701","display_name":"Variable (mathematics)","level":2,"score":0.5148860216140747},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.504388689994812},{"id":"https://openalex.org/C183356978","wikidata":"https://www.wikidata.org/wiki/Q1779213","display_name":"Tracking error","level":3,"score":0.4714559018611908},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.4576408565044403},{"id":"https://openalex.org/C47116090","wikidata":"https://www.wikidata.org/wiki/Q716829","display_name":"PID controller","level":3,"score":0.4216892719268799},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.27559369802474976},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.27248072624206543},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.23670506477355957},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.12248054146766663},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.08834397792816162},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.08027288317680359},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tii.2015.2470223","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tii.2015.2470223","pdf_url":null,"source":{"id":"https://openalex.org/S184777250","display_name":"IEEE Transactions on Industrial Informatics","issn_l":"1551-3203","issn":["1551-3203","1941-0050"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Informatics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.5299999713897705,"id":"https://metadata.un.org/sdg/9"}],"awards":[{"id":"https://openalex.org/G4845432052","display_name":null,"funder_award_id":"51105226","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":45,"referenced_works":["https://openalex.org/W98628536","https://openalex.org/W791128552","https://openalex.org/W1964956827","https://openalex.org/W1966529348","https://openalex.org/W1974984002","https://openalex.org/W1998551442","https://openalex.org/W2003631999","https://openalex.org/W2004802757","https://openalex.org/W2007667002","https://openalex.org/W2008796702","https://openalex.org/W2008823750","https://openalex.org/W2048374642","https://openalex.org/W2052101440","https://openalex.org/W2052403672","https://openalex.org/W2053058008","https://openalex.org/W2055315624","https://openalex.org/W2067030256","https://openalex.org/W2068179892","https://openalex.org/W2068229591","https://openalex.org/W2097786609","https://openalex.org/W2100183878","https://openalex.org/W2104051255","https://openalex.org/W2111615339","https://openalex.org/W2113341352","https://openalex.org/W2116883285","https://openalex.org/W2122915307","https://openalex.org/W2126605514","https://openalex.org/W2132825545","https://openalex.org/W2143588981","https://openalex.org/W2146810409","https://openalex.org/W2147226826","https://openalex.org/W2148287796","https://openalex.org/W2153208144","https://openalex.org/W2160887311","https://openalex.org/W2161227715","https://openalex.org/W2171860547","https://openalex.org/W2336145540","https://openalex.org/W2563502320","https://openalex.org/W3210839039","https://openalex.org/W4250589301","https://openalex.org/W6603950301","https://openalex.org/W6663688282","https://openalex.org/W6677644295","https://openalex.org/W6703336072","https://openalex.org/W6731370233"],"related_works":["https://openalex.org/W2379960361","https://openalex.org/W2133373519","https://openalex.org/W2104608934","https://openalex.org/W2107729799","https://openalex.org/W2465904370","https://openalex.org/W1498036222","https://openalex.org/W4210894462","https://openalex.org/W1972930307","https://openalex.org/W2365680665","https://openalex.org/W3148930212"],"abstract_inverted_index":{"Wafer":[0],"stage":[1,168],"is":[2,39,112,126,150,162,211],"an":[3,42,165],"important":[4],"mechatronic":[5],"unit":[6],"of":[7,20,63,84,96,108,134],"industrial":[8,216],"lithography":[9],"tool":[10],"for":[11,41,214],"manufacturing":[12],"integrated":[13],"circuits.":[14],"To":[15],"overcome":[16],"the":[17,26,61,67,76,93,109,115,119,130,135,142,157,178,192],"inherent":[18],"limitations":[19],"fix-gain":[21,51],"feedback":[22],"control":[23,32,160,209],"and":[24,55,81,103,118,182,189,196,202],"improve":[25,141],"servo":[27],"performance,":[28],"a":[29,50,145],"performance-oriented":[30],"variable-gain":[31,47,57,69,137,159,208],"strategy":[33,161,179,210],"with":[34],"accelerated":[35,147],"iterative":[36,122,148],"parameter":[37,123,132],"tuning":[38,124],"proposed":[40,136,158,207],"ultra-precision":[43,166],"wafer":[44,97,167],"stage.":[45],"The":[46,206],"controller":[48,54],"comprises":[49],"proportional-integral-derivative":[52],"(PID)":[53],"add-on":[56,68],"elements,":[58],"which":[59],"are":[60,71,198],"focus":[62],"this":[64],"paper.":[65],"Specifically,":[66],"elements":[70],"significantly":[72],"designed":[73],"based":[74,152],"on":[75,153,164,186],"main":[77],"tracking":[78,110],"error":[79,82],"sources":[80],"frequency":[83],"different":[85],"reference":[86],"trajectory":[87],"phases.":[88],"A":[89],"weighted":[90],"two-norm":[91],"regarding":[92],"performance":[94],"indexes":[95],"stages,":[98],"i.e.,":[99],"moving":[100,104],"average":[101],"(MA)":[102],"standard":[105],"deviation":[106],"(MSD)":[107],"error,":[111],"synthesized":[113],"as":[114],"objective":[116],"function,":[117],"data-driven":[120],"Levenberg\u2013Marquardt-based":[121],"scheme":[125],"employed":[127],"to":[128,140],"find":[129],"optimal":[131],"values":[133],"controller.":[138],"Furthermore,":[139],"convergence":[143],"rate,":[144],"multiparameter":[146],"method":[149],"developed":[151,169],"Aitken\u2019s":[154],"method.":[155],"Finally,":[156],"implemented":[163],"in":[170],"our":[171],"laboratory.":[172],"Comparative":[173],"experimental":[174],"results":[175],"demonstrate":[176],"that":[177],"performs":[180],"best":[181],"achieves":[183],"excellent":[184],"improvement":[185],"both":[187],"MA":[188,195],"MSD.":[190],"During":[191],"scanning":[193],"phase,":[194],"MSD":[197],"less":[199],"than":[200],"1.02":[201],"2.35":[203],"nm,":[204],"respectively.":[205],"also":[212],"suitable":[213],"other":[215],"applications.":[217]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":9},{"year":2023,"cited_by_count":5},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":11},{"year":2018,"cited_by_count":9},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":3}],"updated_date":"2026-02-27T16:54:17.756197","created_date":"2025-10-10T00:00:00"}