{"id":"https://openalex.org/W4403295412","doi":"https://doi.org/10.1109/tie.2024.3463013","title":"A Hybrid Add-on Damping Strategy for Self-Stabilization Nanopositioning System With High-Static-Low-Dynamic Stiffness Property","display_name":"A Hybrid Add-on Damping Strategy for Self-Stabilization Nanopositioning System With High-Static-Low-Dynamic Stiffness Property","publication_year":2024,"publication_date":"2024-10-10","ids":{"openalex":"https://openalex.org/W4403295412","doi":"https://doi.org/10.1109/tie.2024.3463013"},"language":"en","primary_location":{"id":"doi:10.1109/tie.2024.3463013","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2024.3463013","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://ieeexplore.ieee.org/document/10713421","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5085861720","display_name":"Chengsi Huang","orcid":"https://orcid.org/0000-0003-3958-0703"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chengsi Huang","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":"https://orcid.org/0000-0003-3958-0703","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058523629","display_name":"Zhihang Lin","orcid":"https://orcid.org/0000-0001-5363-3299"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhihang Lin","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":"https://orcid.org/0000-0001-5363-3299","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009718960","display_name":"Hui Tang","orcid":"https://orcid.org/0000-0003-2155-5235"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hui Tang","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":"https://orcid.org/0000-0003-2155-5235","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111360487","display_name":"Shiyu Shu","orcid":null},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shiyu Shu","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":"https://orcid.org/0009-0001-9122-2092","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100329418","display_name":"Qiang Liu","orcid":"https://orcid.org/0000-0003-3561-6318"},"institutions":[{"id":"https://openalex.org/I139024713","display_name":"Guangdong University of Technology","ror":"https://ror.org/04azbjn80","country_code":"CN","type":"education","lineage":["https://openalex.org/I139024713"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiang Liu","raw_affiliation_strings":["State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China"],"raw_orcid":"https://orcid.org/0000-0003-3561-6318","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China","institution_ids":["https://openalex.org/I139024713"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I139024713"],"apc_list":null,"apc_paid":null,"fwci":0.8841,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.73381602,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":97},"biblio":{"volume":"72","issue":"5","first_page":"5041","last_page":"5050"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9962999820709229,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10379","display_name":"Cellular Mechanics and Interactions","score":0.991599977016449,"subfield":{"id":"https://openalex.org/subfields/1307","display_name":"Cell Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.6131008267402649},{"id":"https://openalex.org/keywords/property","display_name":"Property (philosophy)","score":0.5756308436393738},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5328541398048401},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.46693864464759827},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.33305907249450684},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.147566556930542},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.11039459705352783}],"concepts":[{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.6131008267402649},{"id":"https://openalex.org/C189950617","wikidata":"https://www.wikidata.org/wiki/Q937228","display_name":"Property (philosophy)","level":2,"score":0.5756308436393738},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5328541398048401},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.46693864464759827},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.33305907249450684},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.147566556930542},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.11039459705352783},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C111472728","wikidata":"https://www.wikidata.org/wiki/Q9471","display_name":"Epistemology","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tie.2024.3463013","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2024.3463013","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},{"id":"pmh:oai:zenodo.org:15513681","is_oa":true,"landing_page_url":"https://ieeexplore.ieee.org/document/10713421","pdf_url":null,"source":{"id":"https://openalex.org/S4306400562","display_name":"Zenodo (CERN European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Transactions on Industrial Electronics, 72(5), 5041-5050, (2024-10-01)","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"pmh:oai:zenodo.org:15513681","is_oa":true,"landing_page_url":"https://ieeexplore.ieee.org/document/10713421","pdf_url":null,"source":{"id":"https://openalex.org/S4306400562","display_name":"Zenodo (CERN European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Transactions on Industrial Electronics, 72(5), 5041-5050, (2024-10-01)","raw_type":"info:eu-repo/semantics/article"},"sustainable_development_goals":[{"score":0.75,"display_name":"Climate action","id":"https://metadata.un.org/sdg/13"}],"awards":[{"id":"https://openalex.org/G7576260889","display_name":null,"funder_award_id":"52305597","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1983509608","https://openalex.org/W1985783745","https://openalex.org/W2092258815","https://openalex.org/W2099541542","https://openalex.org/W2130517972","https://openalex.org/W2799499462","https://openalex.org/W2801163697","https://openalex.org/W2808438573","https://openalex.org/W2957375334","https://openalex.org/W2974410101","https://openalex.org/W2991549070","https://openalex.org/W3004074372","https://openalex.org/W3048713343","https://openalex.org/W3080541089","https://openalex.org/W3086663567","https://openalex.org/W3134962921","https://openalex.org/W3200516602","https://openalex.org/W4280546325","https://openalex.org/W4282843274","https://openalex.org/W4312370244","https://openalex.org/W4313170172","https://openalex.org/W4317369900","https://openalex.org/W4366504031","https://openalex.org/W4367663224","https://openalex.org/W4379142477","https://openalex.org/W4386922536"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2748952813","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4390401159","https://openalex.org/W2744391499","https://openalex.org/W2800070131","https://openalex.org/W4230250635"],"abstract_inverted_index":{"The":[0,35,174],"inspection":[1,67],"of":[2,31,37,45,57,98,110,122,160,168],"micro/mini":[3],"light-emitting":[4],"diode":[5],"(LED)":[6],"display":[7],"panels":[8],"using":[9],"industrial-level":[10],"atomic":[11],"force":[12],"microscopes":[13],"(AFM":[14],"scanning":[15],"head)":[16],"demands":[17],"a":[18,78,101,123,158,218,239],"vibration":[19,23,54,87,113,169,185,241],"isolator":[20],"with":[21,77,217],"high-ratio":[22],"reduction":[24,186,242],"and":[25,47,120,171,196],"high-precision":[26],"positioning,":[27],"in":[28,89,152,192,199],"the":[29,43,53,58,66,75,86,90,96,99,108,111,117,133,137,153,184,193,203,224,229,235],"presence":[30],"complex":[32],"environmental":[33],"disturbances.":[34],"motivation":[36],"this":[38],"article":[39],"is":[40,71,104,146,188,207],"to":[41,51,63,106,148,181,237],"combine":[42],"ability":[44],"passive":[46],"active":[48,142],"damping":[49,81,151],"methods":[50],"enhance":[52,150],"isolation":[55,88,114,170],"performance":[56,166],"developed":[59,147],"compliant":[60],"self-stabilization":[61],"system":[62,76,134,236],"further":[64,149],"improve":[65],"performance.":[68],"This":[69],"objective":[70],"achieved":[72,189],"by":[73],"modifying":[74],"hybrid":[79],"add-on":[80],"(HAD)":[82],"strategy":[83,103],"that":[84,178,228],"improves":[85],"resonant":[91,194],"region.":[92],"First,":[93],"based":[94],"on":[95],"analysis":[97],"system,":[100],"HAD":[102,231],"proposed":[105,230],"address":[107],"limitations":[109],"passive-active":[112],"strategy.":[115],"Then,":[116],"design,":[118],"modeling,":[119],"optimization":[121],"flexure-based":[124],"high-static-low-dynamics":[125],"stiffness":[126],"mechanism":[127],"(FHSM)":[128],"are":[129],"demonstrated,":[130],"which":[131],"dampens":[132],"without":[135],"deteriorating":[136],"high-frequency":[138],"transmissibility.":[139],"Besides,":[140,202],"an":[141],"bandwidth-limited":[143],"damper":[144],"(ABD)":[145],"desired":[154],"frequency":[155],"range.":[156],"Finally,":[157],"series":[159],"verification":[161],"tests":[162,167],"were":[163],"conducted,":[164],"including":[165],"closed-loop":[172],"positioning.":[173],"experimental":[175],"results":[176,225],"indicate":[177],"from":[179],"1":[180],"500":[182],"Hz,":[183],"ratio":[187],"as":[190],"91%":[191],"region":[195],"over":[197],"94.5%":[198],"other":[200],"frequencies.":[201],"steady-state":[204],"positioning":[205],"error":[206],"within":[208],"<inline-formula":[209,213],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[210,214],"xmlns:xlink=\"http://www.w3.org/1999/xlink\"><tex-math":[211,215],"notation=\"LaTeX\">$\\boldsymbol{\\pm}$</tex-math></inline-formula>0.1":[212],"notation=\"LaTeX\">$\\boldsymbol{\\mu}$</tex-math></inline-formula>m":[216],"2.5":[219],"kg":[220],"load":[221],"capacity.":[222],"All":[223],"uniformly":[226],"confirm":[227],"has":[232],"successfully":[233],"damped":[234],"achieve":[238],"higher":[240],"ratio.":[243]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2}],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2024-10-11T00:00:00"}