{"id":"https://openalex.org/W4385269052","doi":"https://doi.org/10.1109/tie.2023.3294597","title":"A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range","display_name":"A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range","publication_year":2023,"publication_date":"2023-07-26","ids":{"openalex":"https://openalex.org/W4385269052","doi":"https://doi.org/10.1109/tie.2023.3294597"},"language":"en","primary_location":{"id":"doi:10.1109/tie.2023.3294597","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2023.3294597","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Ziqiang Qu","orcid":"https://orcid.org/0000-0002-8417-3229"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Ziqiang Qu","raw_affiliation_strings":["PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China","Optics Valley Laboratory, Hubei, China"],"raw_orcid":"https://orcid.org/0000-0002-8417-3229","affiliations":[{"raw_affiliation_string":"PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"Optics Valley Laboratory, Hubei, China","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038374014","display_name":"H. Daniel Ou\u2010Yang","orcid":"https://orcid.org/0000-0003-1662-1832"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hao Ouyang","raw_affiliation_strings":["PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":"https://orcid.org/0000-0003-1662-1832","affiliations":[{"raw_affiliation_string":"PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101835519","display_name":"Wen Xiong","orcid":"https://orcid.org/0009-0006-9836-9317"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wen Xiong","raw_affiliation_strings":["PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":"https://orcid.org/0009-0006-9836-9317","affiliations":[{"raw_affiliation_string":"PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034546565","display_name":"Qiangwei Xu","orcid":"https://orcid.org/0000-0002-3303-5539"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiangwei Xu","raw_affiliation_strings":["PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":"https://orcid.org/0000-0002-3303-5539","affiliations":[{"raw_affiliation_string":"PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080175144","display_name":"Yuan Wang","orcid":"https://orcid.org/0000-0003-3814-4520"},"institutions":[{"id":"https://openalex.org/I204512498","display_name":"University of Macau","ror":"https://ror.org/01r4q9n85","country_code":"MO","type":"education","lineage":["https://openalex.org/I204512498"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN","MO"],"is_corresponding":false,"raw_author_name":"Yuan Wang","raw_affiliation_strings":["Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Taipa, Macau, China"],"raw_orcid":"https://orcid.org/0000-0003-3814-4520","affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Taipa, Macau, China","institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I204512498"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100725636","display_name":"Huafeng Liu","orcid":"https://orcid.org/0000-0003-0757-2362"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huafeng Liu","raw_affiliation_strings":["PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":"https://orcid.org/0000-0003-0757-2362","affiliations":[{"raw_affiliation_string":"PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement and Hubei Key Laboratory of Gravitation and Quantum Physics, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I47720641"],"apc_list":null,"apc_paid":null,"fwci":2.2934,"has_fulltext":false,"cited_by_count":18,"citation_normalized_percentile":{"value":0.88598755,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"71","issue":"6","first_page":"6418","last_page":"6426"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.9079443216323853},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.6318179368972778},{"id":"https://openalex.org/keywords/dynamic-range","display_name":"Dynamic range","score":0.6274486184120178},{"id":"https://openalex.org/keywords/acceleration","display_name":"Acceleration","score":0.5852090120315552},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.47433891892433167},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.4076525568962097},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.373283326625824},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.36969810724258423},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.35652193427085876},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3238115906715393},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3189322352409363},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.15110376477241516}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9079443216323853},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.6318179368972778},{"id":"https://openalex.org/C87133666","wikidata":"https://www.wikidata.org/wiki/Q1161699","display_name":"Dynamic range","level":2,"score":0.6274486184120178},{"id":"https://openalex.org/C117896860","wikidata":"https://www.wikidata.org/wiki/Q11376","display_name":"Acceleration","level":2,"score":0.5852090120315552},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.47433891892433167},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4076525568962097},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.373283326625824},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.36969810724258423},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.35652193427085876},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3238115906715393},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3189322352409363},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.15110376477241516},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tie.2023.3294597","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2023.3294597","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.41999998688697815}],"awards":[{"id":"https://openalex.org/G3698457562","display_name":null,"funder_award_id":"42274228","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":29,"referenced_works":["https://openalex.org/W1993178593","https://openalex.org/W2010631282","https://openalex.org/W2037355697","https://openalex.org/W2055937584","https://openalex.org/W2060231137","https://openalex.org/W2060423583","https://openalex.org/W2088843519","https://openalex.org/W2092096638","https://openalex.org/W2284608842","https://openalex.org/W2324017714","https://openalex.org/W2770558922","https://openalex.org/W2900595881","https://openalex.org/W2901185910","https://openalex.org/W2914713473","https://openalex.org/W2960505902","https://openalex.org/W2978417957","https://openalex.org/W3037380629","https://openalex.org/W3048321616","https://openalex.org/W3184234048","https://openalex.org/W3191691240","https://openalex.org/W3213184175","https://openalex.org/W4200433982","https://openalex.org/W4206085244","https://openalex.org/W4210695040","https://openalex.org/W4225414634","https://openalex.org/W4282929143","https://openalex.org/W4284971191","https://openalex.org/W4286540943","https://openalex.org/W4295021428"],"related_works":["https://openalex.org/W2765080098","https://openalex.org/W2385749422","https://openalex.org/W2355290145","https://openalex.org/W2353465659","https://openalex.org/W2009888974","https://openalex.org/W2355539379","https://openalex.org/W4384517610","https://openalex.org/W4288389100","https://openalex.org/W1902800522","https://openalex.org/W2339469482"],"abstract_inverted_index":{"This":[0],"article":[1],"presents":[2],"a":[3,20,30,46,51,70,95,104,138,163],"nano-g":[4],"microopto-electromechanical":[5],"system":[6],"(MOEMS)":[7],"accelerometer":[8,93],"that":[9],"uses":[10],"the":[11,60,81,84,91,112,116,121,130,147,150],"principle":[12],"of":[13,72,83,90,107,120,134,141,149,166],"Fabry\u2013P\u00e9rot":[14],"(F-P)":[15],"interference":[16],"in":[17,94],"conjunction":[18],"with":[19,45,103,129],"micromechanical":[21],"structure":[22],"for":[23],"transducing":[24],"input":[25],"acceleration.":[26],"The":[27,87,144],"device":[28,122],"comprises":[29],"movable":[31],"silicon":[32,37],"proof":[33],"mass":[34],"suspended":[35],"by":[36,64,69],"flexural":[38],"beams":[39],"and":[40,137,158,173],"an":[41],"F-P":[42],"cavity":[43],"integrated":[44],"cleaved":[47],"optical":[48],"fiber.":[49],"Furthermore,":[50],"closed-loop":[52,96],"force":[53,67,114],"balance":[54],"mechanism":[55],"is":[56,98,123],"exploited":[57],"to":[58,79,125],"enhance":[59],"accelerometer's":[61],"measurement":[62],"range":[63,106,118,165],"utilizing":[65],"magnetic":[66],"provided":[68],"pair":[71],"permanent":[73],"magnets.":[74],"Comprehensive":[75],"characterizations":[76],"are":[77],"conducted":[78],"evaluate":[80],"performance":[82],"proposed":[85],"device.":[86],"scale":[88],"factor":[89],"MOEMS":[92,151],"configuration":[97],"determined":[99],"as":[100,169],"9.2":[101],"V/g":[102],"working":[105,139,159],"\u00b11":[108],"g.":[109],"Benefiting":[110],"from":[111],"electromagnetic":[113],"balance,":[115],"dynamic":[117],"(DR)":[119],"up":[124],"157":[126],"dB@30":[127],"Hz,":[128],"lowest":[131],"noise":[132],"floor":[133],"10":[135],"ng/\u221aHz":[136],"bandwidth":[140],"500":[142],"Hz.":[143],"results":[145],"validate":[146],"functionality":[148],"accelerometer,":[152],"particularly":[153],"highlighting":[154],"its":[155],"favorable":[156],"DR":[157],"bandwidth,":[160],"thus":[161],"enabling":[162],"broad":[164],"applications,":[167],"such":[168],"seismic,":[170],"gravity":[171],"exploration,":[172],"navigation.":[174]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":8},{"year":2023,"cited_by_count":1}],"updated_date":"2026-04-28T14:05:53.105641","created_date":"2025-10-10T00:00:00"}