{"id":"https://openalex.org/W2921132220","doi":"https://doi.org/10.1109/tie.2019.2902792","title":"High-Speed AFM Imaging of Nanopositioning Stages Using H$_{\\infty }$ and Iterative Learning Control","display_name":"High-Speed AFM Imaging of Nanopositioning Stages Using H$_{\\infty }$ and Iterative Learning Control","publication_year":2019,"publication_date":"2019-03-18","ids":{"openalex":"https://openalex.org/W2921132220","doi":"https://doi.org/10.1109/tie.2019.2902792","mag":"2921132220"},"language":"en","primary_location":{"id":"doi:10.1109/tie.2019.2902792","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2019.2902792","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100692141","display_name":"Hui Xie","orcid":"https://orcid.org/0000-0003-4299-2776"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4391767639","display_name":"State Key Laboratory of Robotics and Systems","ror":"https://ror.org/015m77g16","country_code":null,"type":"facility","lineage":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Hui Xie","raw_affiliation_strings":["State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103799608","display_name":"Yongbing Wen","orcid":null},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4391767639","display_name":"State Key Laboratory of Robotics and Systems","ror":"https://ror.org/015m77g16","country_code":null,"type":"facility","lineage":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yongbing Wen","raw_affiliation_strings":["State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081485634","display_name":"Xingjian Shen","orcid":"https://orcid.org/0000-0002-9676-4835"},"institutions":[{"id":"https://openalex.org/I4391767639","display_name":"State Key Laboratory of Robotics and Systems","ror":"https://ror.org/015m77g16","country_code":null,"type":"facility","lineage":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]},{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xingjian Shen","raw_affiliation_strings":["State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040439624","display_name":"Hao Zhang","orcid":"https://orcid.org/0000-0003-1896-9859"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4391767639","display_name":"State Key Laboratory of Robotics and Systems","ror":"https://ror.org/015m77g16","country_code":null,"type":"facility","lineage":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hao Zhang","raw_affiliation_strings":["State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103061771","display_name":"Lining Sun","orcid":"https://orcid.org/0000-0002-9354-735X"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]},{"id":"https://openalex.org/I4391767639","display_name":"State Key Laboratory of Robotics and Systems","ror":"https://ror.org/015m77g16","country_code":null,"type":"facility","lineage":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lining Sun","raw_affiliation_strings":["State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, Harbin, China","institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4391767639"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100692141"],"corresponding_institution_ids":["https://openalex.org/I204983213","https://openalex.org/I4391767639"],"apc_list":null,"apc_paid":null,"fwci":4.6766,"has_fulltext":false,"cited_by_count":55,"citation_normalized_percentile":{"value":0.95700121,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"67","issue":"3","first_page":"2430","last_page":"2439"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9930999875068665,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/scanner","display_name":"Scanner","score":0.7271860837936401},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.7213296890258789},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5260712504386902},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.439777672290802},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.2816845774650574}],"concepts":[{"id":"https://openalex.org/C2779751349","wikidata":"https://www.wikidata.org/wiki/Q1474480","display_name":"Scanner","level":2,"score":0.7271860837936401},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.7213296890258789},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5260712504386902},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.439777672290802},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.2816845774650574},{"id":"https://openalex.org/C31258907","wikidata":"https://www.wikidata.org/wiki/Q1301371","display_name":"Computer network","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tie.2019.2902792","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2019.2902792","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.5699999928474426,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G118562357","display_name":null,"funder_award_id":"2018IRS02","funder_id":"https://openalex.org/F4320335791","funder_display_name":"Beijing Advanced Innovation Center for Intelligent Robots and Systems, Beijing Institute of Technology"},{"id":"https://openalex.org/G3503110843","display_name":null,"funder_award_id":"61573121","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335791","display_name":"Beijing Advanced Innovation Center for Intelligent Robots and Systems, Beijing Institute of Technology","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":40,"referenced_works":["https://openalex.org/W1964956827","https://openalex.org/W1969445738","https://openalex.org/W1970144251","https://openalex.org/W1979552135","https://openalex.org/W1987015208","https://openalex.org/W1987659326","https://openalex.org/W1994450559","https://openalex.org/W1998541708","https://openalex.org/W2004661619","https://openalex.org/W2018209753","https://openalex.org/W2018711636","https://openalex.org/W2022546681","https://openalex.org/W2036784091","https://openalex.org/W2037802181","https://openalex.org/W2042028590","https://openalex.org/W2056428066","https://openalex.org/W2068401877","https://openalex.org/W2082697678","https://openalex.org/W2089239572","https://openalex.org/W2101544107","https://openalex.org/W2110171257","https://openalex.org/W2113693626","https://openalex.org/W2115906925","https://openalex.org/W2118600801","https://openalex.org/W2131588967","https://openalex.org/W2136170256","https://openalex.org/W2138000267","https://openalex.org/W2144651557","https://openalex.org/W2150678217","https://openalex.org/W2160165626","https://openalex.org/W2161784592","https://openalex.org/W2168717647","https://openalex.org/W2172241235","https://openalex.org/W2289351772","https://openalex.org/W2335578274","https://openalex.org/W2410268274","https://openalex.org/W2593250971","https://openalex.org/W2792502737","https://openalex.org/W3150248096","https://openalex.org/W6646966155"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W4232857084","https://openalex.org/W4245233074","https://openalex.org/W2167384162","https://openalex.org/W4402492658","https://openalex.org/W1517555227","https://openalex.org/W762151464","https://openalex.org/W2001485867"],"abstract_inverted_index":{"This":[0,74],"paper":[1],"presents":[2],"a":[3,7,23,43,50,66,77,101,107,151,177],"method":[4,60,75],"that":[5,186],"combines":[6],"robust":[8],"controller":[9,19],"(H":[10],"<sub":[11,154],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[12,155],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">\u221e</sub>":[13,156],")":[14],"and":[15,94,144,164,171],"an":[16,133],"iterative":[17],"learning":[18],"(ILC)":[20],"to":[21,49,71,112,137,159],"control":[22,173],"low":[24],"mechanical":[25,89],"bandwidth":[26],"nanopositioning":[27,118],"stage":[28,119],"for":[29,120],"high-speed":[30,121],"atomic":[31],"force":[32],"microscopy":[33],"imaging.":[34],"In":[35,99,149],"conventional":[36,196],"scanning":[37,79,197],"configurations,":[38],"the":[39,54,58,82,88,92,96,114,117,124,130,139,146,161,166],"imaging":[40,97,131],"speed":[41,68],"of":[42,69,91,116,123,142],"low-resonance":[44],"frequency":[45],"scanner":[46],"is":[47,135,157],"limited":[48],"few":[51],"Hz.":[52,73],"However,":[53],"images":[55],"obtained":[56],"using":[57],"proposed":[59],"have":[61],"no":[62],"obvious":[63],"anamorphosis":[64],"with":[65,106,176,195],"scan":[67],"up":[70],"80":[72],"uses":[76],"sinusoidal":[78],"mode":[80],"in":[81],"fast-scan":[83],"axis,":[84],"which":[85],"effectively":[86],"reduces":[87],"vibration":[90],"XY-scanner":[93],"improves":[95],"bandwidth.":[98],"addition,":[100,150],"compact":[102],"high-bandwidth":[103],"Z-scanner":[104],"configured":[105],"symmetrical":[108],"dual-actuator":[109],"was":[110],"developed":[111],"replace":[113],"Z-axis":[115],"tracking":[122,147],"sample":[125],"topography.":[126],"To":[127],"further":[128],"improve":[129],"performance,":[132],"ILC":[134],"designed":[136,158],"suppress":[138],"nonlinear":[140],"behavior":[141],"piezoelectric":[143],"reduce":[145,160],"error.":[148],"model-based":[152],"H":[153],"measurement":[162],"error":[163],"enhance":[165],"image":[167],"quality.":[168],"All":[169],"algorithms":[170],"real-time":[172],"are":[174],"implemented":[175],"field-programmable":[178],"gate":[179],"array":[180],"platform.":[181],"The":[182],"experimental":[183],"results":[184],"demonstrated":[185],"these":[187],"configurations":[188],"exhibit":[189],"significant":[190],"performance":[191],"improvements":[192],"by":[193],"comparison":[194],"modes.":[198]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":12},{"year":2023,"cited_by_count":7},{"year":2022,"cited_by_count":9},{"year":2021,"cited_by_count":11},{"year":2020,"cited_by_count":9},{"year":2019,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}