{"id":"https://openalex.org/W2909287897","doi":"https://doi.org/10.1109/tie.2019.2891440","title":"Multidisciplinary Design Strategies for Turbomolecular Pumps With Ultrahigh Vacuum Performance","display_name":"Multidisciplinary Design Strategies for Turbomolecular Pumps With Ultrahigh Vacuum Performance","publication_year":2019,"publication_date":"2019-01-14","ids":{"openalex":"https://openalex.org/W2909287897","doi":"https://doi.org/10.1109/tie.2019.2891440","mag":"2909287897"},"language":"en","primary_location":{"id":"doi:10.1109/tie.2019.2891440","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2019.2891440","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5041127829","display_name":"Ziyuan Huang","orcid":"https://orcid.org/0000-0003-0966-6776"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Ziyuan Huang","raw_affiliation_strings":["School of Automation Science and Electrical Engineering, Beihang University, Beijing, China"],"raw_orcid":"https://orcid.org/0000-0003-0966-6776","affiliations":[{"raw_affiliation_string":"School of Automation Science and Electrical Engineering, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017471039","display_name":"Bangcheng Han","orcid":"https://orcid.org/0000-0003-1313-756X"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bangcheng Han","raw_affiliation_strings":["School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5067481326","display_name":"Yun Le","orcid":"https://orcid.org/0000-0002-0371-6069"},"institutions":[{"id":"https://openalex.org/I82880672","display_name":"Beihang University","ror":"https://ror.org/00wk2mp56","country_code":"CN","type":"education","lineage":["https://openalex.org/I82880672"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yun Le","raw_affiliation_strings":["School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing, China","institution_ids":["https://openalex.org/I82880672"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5041127829"],"corresponding_institution_ids":["https://openalex.org/I82880672"],"apc_list":null,"apc_paid":null,"fwci":0.8475,"has_fulltext":false,"cited_by_count":19,"citation_normalized_percentile":{"value":0.73316973,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"66","issue":"12","first_page":"9549","last_page":"9558"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11367","display_name":"Particle accelerators and beam dynamics","score":0.9958999752998352,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12699","display_name":"Electromagnetic Launch and Propulsion Technology","score":0.9957000017166138,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.7338876724243164},{"id":"https://openalex.org/keywords/rotor","display_name":"Rotor (electric)","score":0.6781883239746094},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.6110460758209229},{"id":"https://openalex.org/keywords/multidisciplinary-approach","display_name":"Multidisciplinary approach","score":0.5114259123802185},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5003387928009033},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.44724008440971375},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3488290309906006},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.27841636538505554},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2295089066028595},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.13329389691352844},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.09272384643554688}],"concepts":[{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.7338876724243164},{"id":"https://openalex.org/C17281054","wikidata":"https://www.wikidata.org/wiki/Q193466","display_name":"Rotor (electric)","level":2,"score":0.6781883239746094},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.6110460758209229},{"id":"https://openalex.org/C22467394","wikidata":"https://www.wikidata.org/wiki/Q849359","display_name":"Multidisciplinary approach","level":2,"score":0.5114259123802185},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5003387928009033},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.44724008440971375},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3488290309906006},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.27841636538505554},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2295089066028595},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.13329389691352844},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.09272384643554688},{"id":"https://openalex.org/C36289849","wikidata":"https://www.wikidata.org/wiki/Q34749","display_name":"Social science","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C144024400","wikidata":"https://www.wikidata.org/wiki/Q21201","display_name":"Sociology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tie.2019.2891440","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2019.2891440","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.6499999761581421,"id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G1832348944","display_name":null,"funder_award_id":"51605017","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5104246244","display_name":null,"funder_award_id":"51707005","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5392040465","display_name":null,"funder_award_id":"BX201700022","funder_id":"https://openalex.org/F4320335768","funder_display_name":"National Postdoctoral Program for Innovative Talents"},{"id":"https://openalex.org/G7984131241","display_name":null,"funder_award_id":"2017M620578","funder_id":"https://openalex.org/F4320335768","funder_display_name":"National Postdoctoral Program for Innovative Talents"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335768","display_name":"National Postdoctoral Program for Innovative Talents","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":27,"referenced_works":["https://openalex.org/W654515708","https://openalex.org/W834199254","https://openalex.org/W1751075443","https://openalex.org/W1991471490","https://openalex.org/W2002122084","https://openalex.org/W2020166376","https://openalex.org/W2033487308","https://openalex.org/W2093609136","https://openalex.org/W2094871673","https://openalex.org/W2108625274","https://openalex.org/W2128633147","https://openalex.org/W2144839906","https://openalex.org/W2148618957","https://openalex.org/W2153058253","https://openalex.org/W2296154103","https://openalex.org/W2318019569","https://openalex.org/W2319770146","https://openalex.org/W2508875763","https://openalex.org/W2601765555","https://openalex.org/W2603287839","https://openalex.org/W2741428785","https://openalex.org/W2752452258","https://openalex.org/W4234734101","https://openalex.org/W4236110044","https://openalex.org/W6678657001","https://openalex.org/W6681427349","https://openalex.org/W6735548889"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2084426624","https://openalex.org/W3026055904","https://openalex.org/W2792869497","https://openalex.org/W4312133600","https://openalex.org/W2567205727","https://openalex.org/W2361803029","https://openalex.org/W2548694948","https://openalex.org/W2010566957","https://openalex.org/W2304501688"],"abstract_inverted_index":{"Turbomolecular":[0],"pumps":[1,75],"with":[2,41,164],"ultrahigh":[3],"vacuum":[4,12,67,162],"performances":[5],"are":[6],"a":[7,31,36],"desired":[8],"technology":[9],"among":[10],"modern":[11],"systems,":[13],"which":[14],"requires":[15,76],"the":[16,21,48,63,83,87,95,103,124,130,134,141,145,148,156,160,165,172,191,195],"pump":[17,40,146,157],"to":[18,82,118,139],"synchronously":[19],"possess":[20],"wide":[22],"pumping":[23,166],"speed":[24,167],"and":[25,55,78,106,133,171],"high":[26,66,161],"vacuum.":[27],"This":[28],"paper":[29,189],"describes":[30],"systematic":[32],"design":[33,70,89,184,197],"methodology":[34],"for":[35,72,194],"magnetically":[37],"levitated":[38],"turbomolecular":[39,200],"consideration":[42],"of":[43,65,86,94,102,123,144,168,176,198],"multiphysics":[44],"constraints,":[45],"such":[46,73],"as":[47],"mechanical":[49,107],"strength,":[50],"rotor":[51,97],"dynamics,":[52],"electromagnetic":[53],"losses,":[54],"thermal":[56,135],"characteristic.":[57],"These":[58],"variables":[59,90],"will":[60],"directly":[61],"decide":[62],"acquisition":[64],"performances.":[68],"The":[69,92,151,182],"process":[71,185],"high-performance":[74,199],"multidisciplinary":[77,196],"highly":[79],"iterative":[80],"due":[81],"complex":[84],"interaction":[85],"many":[88],"involved.":[91],"structure":[93],"bladed":[96,125],"is":[98,116,137],"determined":[99],"in":[100,187],"terms":[101],"material":[104],"selection":[105],"verification.":[108],"In":[109],"this":[110,188],"paper,":[111],"an":[112],"effective":[113],"modeling":[114],"method":[115],"presented":[117],"achieve":[119,159],"accurate":[120],"bending":[121],"modes":[122],"rotor.":[126],"An":[127],"assessment":[128],"on":[129],"loss":[131],"level":[132],"limit":[136],"performed":[138],"ensure":[140],"temperature":[142],"rise":[143],"within":[147],"acceptable":[149],"range.":[150],"measured":[152],"results":[153],"show":[154],"that":[155],"can":[158],"performance":[163],"4370":[169],"l/s":[170],"lowest":[173],"working":[174],"pressure":[175],"10":[177],"<sup":[178],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[179],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">-8</sup>":[180],"magnitude.":[181],"proposed":[183],"described":[186],"provides":[190],"general":[192],"guidelines":[193],"pumps.":[201]},"counts_by_year":[{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":7},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}