{"id":"https://openalex.org/W2805382414","doi":"https://doi.org/10.1109/tie.2018.2838102","title":"High-Precision XY Stage Motion Control of Industrial Microscope","display_name":"High-Precision XY Stage Motion Control of Industrial Microscope","publication_year":2018,"publication_date":"2018-06-01","ids":{"openalex":"https://openalex.org/W2805382414","doi":"https://doi.org/10.1109/tie.2018.2838102","mag":"2805382414"},"language":"en","primary_location":{"id":"doi:10.1109/tie.2018.2838102","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2018.2838102","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":null,"any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006806786","display_name":"Li Hong Idris Lim","orcid":"https://orcid.org/0000-0002-0865-3829"},"institutions":[{"id":"https://openalex.org/I7882870","display_name":"University of Glasgow","ror":"https://ror.org/00vtgdb53","country_code":"GB","type":"education","lineage":["https://openalex.org/I7882870"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Li Hong Idris Lim","raw_affiliation_strings":["Department of Electronic Systems, University of Glasgow, Glasgow, U.K"],"raw_orcid":"https://orcid.org/0000-0002-0865-3829","affiliations":[{"raw_affiliation_string":"Department of Electronic Systems, University of Glasgow, Glasgow, U.K","institution_ids":["https://openalex.org/I7882870"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100321859","display_name":"Dazhi Yang","orcid":"https://orcid.org/0000-0003-2162-6873"},"institutions":[{"id":"https://openalex.org/I4210091207","display_name":"Singapore Institute of Manufacturing Technology","ror":"https://ror.org/00f44np30","country_code":"SG","type":"facility","lineage":["https://openalex.org/I115228651","https://openalex.org/I4210091207","https://openalex.org/I91275662"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Dazhi Yang","raw_affiliation_strings":["Singapore Institute of Manufacturing Technology, Singapore"],"raw_orcid":"https://orcid.org/0000-0003-2162-6873","affiliations":[{"raw_affiliation_string":"Singapore Institute of Manufacturing Technology, Singapore","institution_ids":["https://openalex.org/I4210091207"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.8733,"has_fulltext":false,"cited_by_count":20,"citation_normalized_percentile":{"value":0.86256035,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"66","issue":"3","first_page":"1984","last_page":"1992"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9969000220298767,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/stepper","display_name":"Stepper","score":0.89104163646698},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6553928852081299},{"id":"https://openalex.org/keywords/microscope","display_name":"Microscope","score":0.6136643886566162},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.6124769449234009},{"id":"https://openalex.org/keywords/micrometer","display_name":"Micrometer","score":0.6063638925552368},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.4693993628025055},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4616132974624634},{"id":"https://openalex.org/keywords/limit","display_name":"Limit (mathematics)","score":0.4562477171421051},{"id":"https://openalex.org/keywords/sliding-mode-control","display_name":"Sliding mode control","score":0.4497978389263153},{"id":"https://openalex.org/keywords/stage","display_name":"Stage (stratigraphy)","score":0.44751688838005066},{"id":"https://openalex.org/keywords/dc-motor","display_name":"DC motor","score":0.4143872857093811},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.3862372636795044},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.3772025406360626},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.36421120166778564},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.25930842757225037},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2265283763408661},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.21657472848892212},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.20904377102851868},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15610453486442566},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.13582056760787964},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.1034899652004242},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.08282113075256348}],"concepts":[{"id":"https://openalex.org/C187504802","wikidata":"https://www.wikidata.org/wiki/Q1751548","display_name":"Stepper","level":2,"score":0.89104163646698},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6553928852081299},{"id":"https://openalex.org/C67649825","wikidata":"https://www.wikidata.org/wiki/Q196538","display_name":"Microscope","level":2,"score":0.6136643886566162},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.6124769449234009},{"id":"https://openalex.org/C171635847","wikidata":"https://www.wikidata.org/wiki/Q406983","display_name":"Micrometer","level":2,"score":0.6063638925552368},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.4693993628025055},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4616132974624634},{"id":"https://openalex.org/C151201525","wikidata":"https://www.wikidata.org/wiki/Q177239","display_name":"Limit (mathematics)","level":2,"score":0.4562477171421051},{"id":"https://openalex.org/C36662352","wikidata":"https://www.wikidata.org/wiki/Q6008560","display_name":"Sliding mode control","level":3,"score":0.4497978389263153},{"id":"https://openalex.org/C146357865","wikidata":"https://www.wikidata.org/wiki/Q1123245","display_name":"Stage (stratigraphy)","level":2,"score":0.44751688838005066},{"id":"https://openalex.org/C76684090","wikidata":"https://www.wikidata.org/wiki/Q3842034","display_name":"DC motor","level":2,"score":0.4143872857093811},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.3862372636795044},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3772025406360626},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.36421120166778564},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.25930842757225037},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2265283763408661},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.21657472848892212},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.20904377102851868},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15610453486442566},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.13582056760787964},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.1034899652004242},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.08282113075256348},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tie.2018.2838102","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2018.2838102","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},{"id":"pmh:oai:eprints.gla.ac.uk:161979","is_oa":true,"landing_page_url":null,"pdf_url":null,"source":{"id":"https://openalex.org/S4210235606","display_name":"ENLIGHTEN (Jurnal Bimbingan dan Konseling Islam)","issn_l":"2622-8912","issn":["2622-8912","2622-8920"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"","raw_type":"Articles"}],"best_oa_location":{"id":"pmh:oai:eprints.gla.ac.uk:161979","is_oa":true,"landing_page_url":null,"pdf_url":null,"source":{"id":"https://openalex.org/S4210235606","display_name":"ENLIGHTEN (Jurnal Bimbingan dan Konseling Islam)","issn_l":"2622-8912","issn":["2622-8912","2622-8920"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"","raw_type":"Articles"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W1497811841","https://openalex.org/W1516289514","https://openalex.org/W1516297478","https://openalex.org/W1602498161","https://openalex.org/W1847685314","https://openalex.org/W1978646917","https://openalex.org/W1989101546","https://openalex.org/W2003082577","https://openalex.org/W2042164007","https://openalex.org/W2068793240","https://openalex.org/W2096369755","https://openalex.org/W2102911553","https://openalex.org/W2107017836","https://openalex.org/W2123175689","https://openalex.org/W2123574153","https://openalex.org/W2146097309","https://openalex.org/W2163211723","https://openalex.org/W2202374706","https://openalex.org/W2281044522","https://openalex.org/W2536761836","https://openalex.org/W2609457522","https://openalex.org/W2735320436","https://openalex.org/W2769523610","https://openalex.org/W2775183753","https://openalex.org/W4307591411","https://openalex.org/W6644918451"],"related_works":["https://openalex.org/W2001700241","https://openalex.org/W2323287381","https://openalex.org/W2009989436","https://openalex.org/W2330727187","https://openalex.org/W1991355044","https://openalex.org/W2377346893","https://openalex.org/W2583527568","https://openalex.org/W2007137405","https://openalex.org/W1970461224","https://openalex.org/W2326452125"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"an":[3],"economic":[4],"way":[5],"to":[6,47,107,116],"implement":[7],"a":[8],"high-precision":[9],"(micrometer":[10],"level)":[11],"XY":[12],"stage":[13,34,51,76],"motion":[14,82],"control":[15,72],"for":[16],"the":[17,25,33,39,42,50,54,62,69,75,80,91,97,109,117,125],"industrial":[18,120],"microscope":[19],"using":[20,29,96,122],"dc":[21],"motors.":[22],"Other":[23],"than":[24],"prevailing":[26],"design":[27,44],"of":[28],"stepper":[30,123],"motors":[31],"where":[32],"is":[35,64,94,104],"always":[36],"locked":[37],"under":[38],"motorized":[40],"mode,":[41],"proposed":[43,106,126],"allows":[45],"users":[46],"manually":[48],"move":[49],"by":[52,68],"introducing":[53],"friction":[55,63,99],"engagement":[56],"in":[57],"between.":[58],"The":[59],"nonlinearity":[60],"from":[61],"then":[65,105],"fully":[66],"compensated":[67],"sliding":[70],"mode":[71],"so":[73],"that":[74],"can":[77],"strictly":[78],"follow":[79],"predefined":[81],"profile.":[83],"Possible":[84],"chattering":[85],"suppression":[86],"methods":[87],"are":[88],"discussed":[89],"and":[90],"accuracy":[92],"loss":[93],"analyzed":[95],"LuGre":[98],"model.":[100],"A":[101],"fine-tuning":[102],"algorithm":[103],"limit":[108],"position":[110],"error":[111],"within":[112],"\u00b12":[113],"\u03bcm.":[114],"Compared":[115],"other":[118],"micrometer-level":[119],"microscopes":[121],"motors,":[124],"solution":[127],"achieves":[128],"comparable":[129],"performance":[130],"with":[131],"much":[132],"lower":[133],"costs.":[134]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":6},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":8},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}