{"id":"https://openalex.org/W2779756893","doi":"https://doi.org/10.1109/tie.2017.2787592","title":"Optimum Design of a Piezo-Actuated Triaxial Compliant Mechanism for Nanocutting","display_name":"Optimum Design of a Piezo-Actuated Triaxial Compliant Mechanism for Nanocutting","publication_year":2017,"publication_date":"2017-12-27","ids":{"openalex":"https://openalex.org/W2779756893","doi":"https://doi.org/10.1109/tie.2017.2787592","mag":"2779756893"},"language":"en","primary_location":{"id":"doi:10.1109/tie.2017.2787592","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2017.2787592","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://ira.lib.polyu.edu.hk/bitstream/10397/104478/1/To_Optimum_Design_Piezo-actuated.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017594767","display_name":"Zhiwei Zhu","orcid":"https://orcid.org/0000-0001-5363-9797"},"institutions":[{"id":"https://openalex.org/I36399199","display_name":"Nanjing University of Science and Technology","ror":"https://ror.org/00xp9wg62","country_code":"CN","type":"education","lineage":["https://openalex.org/I36399199"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Zhiwei Zhu","raw_affiliation_strings":["School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China"],"affiliations":[{"raw_affiliation_string":"School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China","institution_ids":["https://openalex.org/I36399199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069264939","display_name":"Suet To","orcid":"https://orcid.org/0000-0002-1676-7770"},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Suet To","raw_affiliation_strings":["State Key Laboratory of Ultra-Precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong SAR"],"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Ultra-Precision Machining Technology, Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong SAR","institution_ids":["https://openalex.org/I14243506"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052265815","display_name":"Wu-Le Zhu","orcid":"https://orcid.org/0000-0003-2956-6748"},"institutions":[{"id":"https://openalex.org/I22299242","display_name":"Kyoto University","ror":"https://ror.org/02kpeqv85","country_code":"JP","type":"education","lineage":["https://openalex.org/I22299242"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Wu-Le Zhu","raw_affiliation_strings":["Department of Micro Engineering, Kyoto University, Kyoto, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro Engineering, Kyoto University, Kyoto, Japan","institution_ids":["https://openalex.org/I22299242"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027712402","display_name":"Yangmin Li","orcid":"https://orcid.org/0000-0002-4448-3310"},"institutions":[{"id":"https://openalex.org/I14243506","display_name":"Hong Kong Polytechnic University","ror":"https://ror.org/0030zas98","country_code":"HK","type":"education","lineage":["https://openalex.org/I14243506"]}],"countries":["HK"],"is_corresponding":false,"raw_author_name":"Yangmin Li","raw_affiliation_strings":["Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong SAR"],"affiliations":[{"raw_affiliation_string":"Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong SAR","institution_ids":["https://openalex.org/I14243506"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5075198432","display_name":"Peng Huang","orcid":"https://orcid.org/0000-0002-1133-0713"},"institutions":[{"id":"https://openalex.org/I180726961","display_name":"Shenzhen University","ror":"https://ror.org/01vy4gh70","country_code":"CN","type":"education","lineage":["https://openalex.org/I180726961"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Peng Huang","raw_affiliation_strings":["College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, China"],"affiliations":[{"raw_affiliation_string":"College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, China","institution_ids":["https://openalex.org/I180726961"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5017594767"],"corresponding_institution_ids":["https://openalex.org/I36399199"],"apc_list":null,"apc_paid":null,"fwci":4.8871,"has_fulltext":true,"cited_by_count":98,"citation_normalized_percentile":{"value":0.95529637,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":100},"biblio":{"volume":"65","issue":"8","first_page":"6362","last_page":"6371"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mechanism","display_name":"Mechanism (biology)","score":0.7315787672996521},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.673119068145752},{"id":"https://openalex.org/keywords/compliant-mechanism","display_name":"Compliant mechanism","score":0.643008828163147},{"id":"https://openalex.org/keywords/trajectory","display_name":"Trajectory","score":0.633152425289154},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.5957807898521423},{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.5696731209754944},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4909866154193878},{"id":"https://openalex.org/keywords/mechanism-design","display_name":"Mechanism design","score":0.46503230929374695},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.45548927783966064},{"id":"https://openalex.org/keywords/multi-objective-optimization","display_name":"Multi-objective optimization","score":0.43646207451820374},{"id":"https://openalex.org/keywords/tracking","display_name":"Tracking (education)","score":0.4198175072669983},{"id":"https://openalex.org/keywords/closed-loop","display_name":"Closed loop","score":0.4184103012084961},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.4121151268482208},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.4047675132751465},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.3497576117515564},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.2934161424636841},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.23105564713478088},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13141405582427979},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.11518579721450806},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.09320428967475891},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.08535778522491455}],"concepts":[{"id":"https://openalex.org/C89611455","wikidata":"https://www.wikidata.org/wiki/Q6804646","display_name":"Mechanism (biology)","level":2,"score":0.7315787672996521},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.673119068145752},{"id":"https://openalex.org/C79772673","wikidata":"https://www.wikidata.org/wiki/Q5156643","display_name":"Compliant mechanism","level":3,"score":0.643008828163147},{"id":"https://openalex.org/C13662910","wikidata":"https://www.wikidata.org/wiki/Q193139","display_name":"Trajectory","level":2,"score":0.633152425289154},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.5957807898521423},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.5696731209754944},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4909866154193878},{"id":"https://openalex.org/C153517567","wikidata":"https://www.wikidata.org/wiki/Q26090","display_name":"Mechanism design","level":2,"score":0.46503230929374695},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.45548927783966064},{"id":"https://openalex.org/C68781425","wikidata":"https://www.wikidata.org/wiki/Q2052203","display_name":"Multi-objective optimization","level":2,"score":0.43646207451820374},{"id":"https://openalex.org/C2775936607","wikidata":"https://www.wikidata.org/wiki/Q466845","display_name":"Tracking (education)","level":2,"score":0.4198175072669983},{"id":"https://openalex.org/C3019251811","wikidata":"https://www.wikidata.org/wiki/Q5135346","display_name":"Closed loop","level":2,"score":0.4184103012084961},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4121151268482208},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.4047675132751465},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.3497576117515564},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.2934161424636841},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.23105564713478088},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13141405582427979},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.11518579721450806},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.09320428967475891},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.08535778522491455},{"id":"https://openalex.org/C144237770","wikidata":"https://www.wikidata.org/wiki/Q747534","display_name":"Mathematical economics","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C119857082","wikidata":"https://www.wikidata.org/wiki/Q2539","display_name":"Machine learning","level":1,"score":0.0},{"id":"https://openalex.org/C19417346","wikidata":"https://www.wikidata.org/wiki/Q7922","display_name":"Pedagogy","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/tie.2017.2787592","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2017.2787592","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},{"id":"pmh:oai:ira.lib.polyu.edu.hk:10397/104478","is_oa":true,"landing_page_url":"http://hdl.handle.net/10397/104478","pdf_url":"http://ira.lib.polyu.edu.hk/bitstream/10397/104478/1/To_Optimum_Design_Piezo-actuated.pdf","source":{"id":"https://openalex.org/S4306400205","display_name":"PolyU Institutional Research Archive (Hong Kong Polytechnic University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I14243506","host_organization_name":"Hong Kong Polytechnic University","host_organization_lineage":["https://openalex.org/I14243506"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Journal/Magazine Article"},{"id":"pmh:oai:ira.lib.polyu.edu.hk:10397/77249","is_oa":false,"landing_page_url":"http://hdl.handle.net/10397/77249","pdf_url":null,"source":{"id":"https://openalex.org/S4306400205","display_name":"PolyU Institutional Research Archive (Hong Kong Polytechnic University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I14243506","host_organization_name":"Hong Kong Polytechnic University","host_organization_lineage":["https://openalex.org/I14243506"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Journal/Magazine Article"}],"best_oa_location":{"id":"pmh:oai:ira.lib.polyu.edu.hk:10397/104478","is_oa":true,"landing_page_url":"http://hdl.handle.net/10397/104478","pdf_url":"http://ira.lib.polyu.edu.hk/bitstream/10397/104478/1/To_Optimum_Design_Piezo-actuated.pdf","source":{"id":"https://openalex.org/S4306400205","display_name":"PolyU Institutional Research Archive (Hong Kong Polytechnic University)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I14243506","host_organization_name":"Hong Kong Polytechnic University","host_organization_lineage":["https://openalex.org/I14243506"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Journal/Magazine Article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1449277147","display_name":null,"funder_award_id":"BK201708","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G174525613","display_name":null,"funder_award_id":"BK20170836","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G2006458575","display_name":null,"funder_award_id":"1701130","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2087396116","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2376276132","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320335787","funder_display_name":"Fundamental Research Funds for the Central Universities"},{"id":"https://openalex.org/G276099327","display_name":null,"funder_award_id":"201708","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G3317480652","display_name":null,"funder_award_id":"Science","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G385937226","display_name":null,"funder_award_id":"11301","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3910829908","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G391238517","display_name":null,"funder_award_id":", and","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G406749913","display_name":null,"funder_award_id":"30917011301","funder_id":"https://openalex.org/F4320335787","funder_display_name":"Fundamental Research Funds for the Central Universities"},{"id":"https://openalex.org/G4238415289","display_name":null,"funder_award_id":"51675455","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4385040264","display_name":null,"funder_award_id":"2017083","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5635922342","display_name":null,"funder_award_id":"51705254","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5641397543","display_name":null,"funder_award_id":"201708","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5994120800","display_name":null,"funder_award_id":"Natural","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7157292255","display_name":null,"funder_award_id":"309171A8804","funder_id":"https://openalex.org/F4320335787","funder_display_name":"Fundamental Research Funds for the Central Universities"},{"id":"https://openalex.org/G770456615","display_name":null,"funder_award_id":"Funds","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G8546704473","display_name":null,"funder_award_id":"201708","funder_id":"https://openalex.org/F4320335787","funder_display_name":"Fundamental Research Funds for the Central Universities"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321605","display_name":"Government of Jiangsu Province","ror":"https://ror.org/004svx814"},{"id":"https://openalex.org/F4320322769","display_name":"Natural Science Foundation of Jiangsu Province","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335787","display_name":"Fundamental Research Funds for the Central Universities","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2779756893.pdf","grobid_xml":"https://content.openalex.org/works/W2779756893.grobid-xml"},"referenced_works_count":38,"referenced_works":["https://openalex.org/W1970217210","https://openalex.org/W1973906896","https://openalex.org/W1985182523","https://openalex.org/W1998763064","https://openalex.org/W1999917921","https://openalex.org/W2001023739","https://openalex.org/W2010656735","https://openalex.org/W2017378436","https://openalex.org/W2020399391","https://openalex.org/W2026753114","https://openalex.org/W2032445151","https://openalex.org/W2037493156","https://openalex.org/W2064889460","https://openalex.org/W2070957930","https://openalex.org/W2075503601","https://openalex.org/W2075540265","https://openalex.org/W2081677543","https://openalex.org/W2082680657","https://openalex.org/W2083222636","https://openalex.org/W2084050155","https://openalex.org/W2093498273","https://openalex.org/W2094798913","https://openalex.org/W2098429162","https://openalex.org/W2108354427","https://openalex.org/W2137144825","https://openalex.org/W2156194072","https://openalex.org/W2182010021","https://openalex.org/W2291073468","https://openalex.org/W2296231858","https://openalex.org/W2339744199","https://openalex.org/W2538205964","https://openalex.org/W2554910961","https://openalex.org/W2595900193","https://openalex.org/W2605721331","https://openalex.org/W2620585944","https://openalex.org/W2742533714","https://openalex.org/W4205377459","https://openalex.org/W6696559360"],"related_works":["https://openalex.org/W4323768008","https://openalex.org/W1941703695","https://openalex.org/W3131574667","https://openalex.org/W4246904535","https://openalex.org/W4360995134","https://openalex.org/W4248382324","https://openalex.org/W3023605104","https://openalex.org/W2039473718","https://openalex.org/W2387529410","https://openalex.org/W2383578611"],"abstract_inverted_index":{"A":[0],"novel":[1],"piezo-actuated":[2],"compliant":[3],"mechanism":[4,42,89],"is":[5,28,104],"developed":[6,48,88,111],"to":[7,96],"obtain":[8],"triaxial":[9,112],"translational":[10],"motions":[11],"with":[12,68],"decoupled":[13],"features":[14],"for":[15,30,115],"nanocutting.":[16],"Analytical":[17],"modeling":[18],"of":[19,33,46,54,109],"the":[20,34,40,44,47,52,55,62,87,93,107,110],"working":[21],"performance":[22],"followed":[23],"by":[24],"Pareto-based":[25],"multiobjective":[26],"optimization":[27],"conducted":[29],"determining":[31],"dimensions":[32],"mechanism.":[35],"Finite":[36],"element":[37],"analysis":[38],"on":[39,61],"designed":[41],"verifies":[43],"accuracy":[45],"model,":[49],"accordingly":[50],"demonstrating":[51,106],"effectiveness":[53,108],"optimal":[56],"design":[57],"process.":[58],"Open-loop":[59],"test":[60,84],"prototype":[63],"shows":[64],"that":[65,86],"proper":[66],"strokes":[67],"low":[69],"coupling":[70],"and":[71],"high":[72],"natural":[73],"frequencies":[74],"are":[75],"obtained":[76],"as":[77],"estimated.":[78],"Low":[79],"tracking":[80],"error":[81],"in":[82],"closed-loop":[83,101],"suggests":[85],"can":[90],"precisely":[91],"follow":[92],"desired":[94],"trajectory":[95],"form":[97],"complicated":[98],"nanostructures.":[99],"Finally,":[100],"based":[102],"nanosculpturing":[103],"conducted,":[105],"motion":[113],"system":[114],"nanocutting":[116],"well.":[117]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":8},{"year":2024,"cited_by_count":12},{"year":2023,"cited_by_count":22},{"year":2022,"cited_by_count":18},{"year":2021,"cited_by_count":12},{"year":2020,"cited_by_count":9},{"year":2019,"cited_by_count":14},{"year":2018,"cited_by_count":1}],"updated_date":"2026-03-28T08:17:26.163206","created_date":"2025-10-10T00:00:00"}