{"id":"https://openalex.org/W2060072331","doi":"https://doi.org/10.1109/tie.2011.2178210","title":"Development of a Vector Display System Based on a Surface-Micromachined Micromirror","display_name":"Development of a Vector Display System Based on a Surface-Micromachined Micromirror","publication_year":2011,"publication_date":"2011-12-23","ids":{"openalex":"https://openalex.org/W2060072331","doi":"https://doi.org/10.1109/tie.2011.2178210","mag":"2060072331"},"language":"en","primary_location":{"id":"doi:10.1109/tie.2011.2178210","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2011.2178210","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109365964","display_name":"James Chong","orcid":null},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"James Chong","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023751104","display_name":"Siyuan He","orcid":"https://orcid.org/0000-0002-6954-1206"},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]},{"id":"https://openalex.org/I530967","display_name":"Toronto Metropolitan University","ror":"https://ror.org/05g13zd79","country_code":"CA","type":"education","lineage":["https://openalex.org/I530967"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Siyuan He","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, Ryerson University, Toronto, ON, Canada","Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, Ryerson University, Toronto, ON, Canada","institution_ids":["https://openalex.org/I530967"]},{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada","institution_ids":["https://openalex.org/I185261750"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109990714","display_name":"Ridha Ben Mrad","orcid":null},"institutions":[{"id":"https://openalex.org/I185261750","display_name":"University of Toronto","ror":"https://ror.org/03dbr7087","country_code":"CA","type":"education","lineage":["https://openalex.org/I185261750"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Ridha Ben Mrad","raw_affiliation_strings":["Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada","institution_ids":["https://openalex.org/I185261750"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.0812,"has_fulltext":false,"cited_by_count":46,"citation_normalized_percentile":{"value":0.79932405,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"59","issue":"12","first_page":"4863","last_page":"4870"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.6776567697525024},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6754268407821655},{"id":"https://openalex.org/keywords/settling-time","display_name":"Settling time","score":0.5397809743881226},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.531304121017456},{"id":"https://openalex.org/keywords/digital-micromirror-device","display_name":"Digital micromirror device","score":0.5280673503875732},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.49196359515190125},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.4738127291202545},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.46654319763183594},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3327350318431854},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.28298890590667725},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2779541015625},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.24502399563789368},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.19106870889663696},{"id":"https://openalex.org/keywords/step-response","display_name":"Step response","score":0.09510785341262817}],"concepts":[{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.6776567697525024},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6754268407821655},{"id":"https://openalex.org/C14781684","wikidata":"https://www.wikidata.org/wiki/Q3983320","display_name":"Settling time","level":3,"score":0.5397809743881226},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.531304121017456},{"id":"https://openalex.org/C18645525","wikidata":"https://www.wikidata.org/wiki/Q1369469","display_name":"Digital micromirror device","level":2,"score":0.5280673503875732},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.49196359515190125},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.4738127291202545},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.46654319763183594},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3327350318431854},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28298890590667725},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2779541015625},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24502399563789368},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.19106870889663696},{"id":"https://openalex.org/C160030872","wikidata":"https://www.wikidata.org/wiki/Q2142864","display_name":"Step response","level":2,"score":0.09510785341262817},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/tie.2011.2178210","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tie.2011.2178210","pdf_url":null,"source":{"id":"https://openalex.org/S58031724","display_name":"IEEE Transactions on Industrial Electronics","issn_l":"0278-0046","issn":["0278-0046","1557-9948"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Industrial Electronics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.8199999928474426,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":30,"referenced_works":["https://openalex.org/W1500661076","https://openalex.org/W1504462756","https://openalex.org/W1963698588","https://openalex.org/W1980193701","https://openalex.org/W1980428299","https://openalex.org/W1988944380","https://openalex.org/W1994951957","https://openalex.org/W1999188299","https://openalex.org/W2001378797","https://openalex.org/W2032042122","https://openalex.org/W2045414264","https://openalex.org/W2047767955","https://openalex.org/W2083817793","https://openalex.org/W2096600473","https://openalex.org/W2099790748","https://openalex.org/W2125782940","https://openalex.org/W2128582651","https://openalex.org/W2129000627","https://openalex.org/W2129549043","https://openalex.org/W2129819992","https://openalex.org/W2133388740","https://openalex.org/W2145177736","https://openalex.org/W2149419424","https://openalex.org/W2150772697","https://openalex.org/W2166072064","https://openalex.org/W3118247275","https://openalex.org/W3119910707","https://openalex.org/W6657969557","https://openalex.org/W6681449879","https://openalex.org/W6788720550"],"related_works":["https://openalex.org/W2112108729","https://openalex.org/W2182867048","https://openalex.org/W2390418769","https://openalex.org/W2000490447","https://openalex.org/W2594868127","https://openalex.org/W1978795321","https://openalex.org/W2539761444","https://openalex.org/W1964924361","https://openalex.org/W2388903507","https://openalex.org/W4200227924"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,14,19,27,76,116,166,172],"small-size":[4],"low-power":[5],"portable":[6,156,204],"vector":[7,157],"display":[8,11,158],"system.":[9],"The":[10,36,55,71,102,123,155],"system":[12,159],"uses":[13],"micromirror":[15,37,56,72,90],"which":[16,63],"consists":[17],"of":[18,59,82,97,120,126,137,144],"simple":[20],"two-thin-film":[21],"structure":[22],"and":[23,79,132,139,149,171,174,194],"is":[24,57,64,73,80,111,160,175],"fabricated":[25],"using":[26,188],"surface-micromachining":[28],"process,":[29],"i.e.,":[30],"Polysilicon":[31],"Multi":[32],"User":[33],"MEMS":[34],"Processes.":[35],"exhibits":[38],"rotational":[39],"motion":[40,48],"around":[41],"two":[42],"axes":[43],"as":[44,46],"well":[45],"translational":[47],"through":[49,162],"four":[50],"repulsive-force":[51],"electrostatic":[52,69],"actuating":[53,128],"units.":[54],"free":[58],"the":[60,89,127,164,169,202],"\u201cpull-in\u201d":[61],"effect":[62],"associated":[65],"with":[66,135],"conventional":[67],"micro":[68],"actuators.":[70],"operated":[74],"in":[75,99,181],"nonresonant":[77],"mode":[78],"capable":[81],"static":[83],"positioning.":[84],"Measured":[85],"data":[86],"show":[87],"that":[88],"can":[91],"achieve":[92],"an":[93],"optical":[94],"scanning":[95],"angle":[96],"\u00b12.5\u00b0":[98],"each":[100,108],"axis.":[101],"measured":[103],"bandwidth":[104],"(-3":[105],"dB)":[106],"for":[107,141],"driving":[109],"unit":[110,129],"2000":[112],"Hz":[113],"operating":[114],"at":[115],"sinusoidal":[117],"input":[118],"voltage":[119],"0-200":[121],"V.":[122],"settling":[124],"times":[125],"are":[130],"2.75":[131],"3.32":[133],"ms":[134],"overshoots":[136],"5%":[138],"48%":[140],"step":[142],"inputs":[143],"200":[145,152],"to":[146,151,177,200],"0":[147,150],"V":[148],"V,":[153],"respectively.":[154],"developed":[161,199],"integrating":[163],"micromirror,":[165],"laser":[167],"source,":[168],"optics,":[170],"microcontroller":[173],"shown":[176],"be":[178],"very":[179],"effective":[180],"displaying":[182],"complex":[183],"geometries.":[184],"Open-loop":[185],"control":[186,197,201],"methods":[187],"lookup":[189],"table":[190],"searching,":[191],"spot":[192],"dwelling,":[193],"scan":[195],"speed":[196],"were":[198],"integrated":[203],"device.":[205]},"counts_by_year":[{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":8},{"year":2021,"cited_by_count":9},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":6},{"year":2015,"cited_by_count":4},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}