{"id":"https://openalex.org/W3007261925","doi":"https://doi.org/10.1109/tcst.2020.2974140","title":"Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage","display_name":"Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage","publication_year":2020,"publication_date":"2020-02-25","ids":{"openalex":"https://openalex.org/W3007261925","doi":"https://doi.org/10.1109/tcst.2020.2974140","mag":"3007261925"},"language":"en","primary_location":{"id":"doi:10.1109/tcst.2020.2974140","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2020.2974140","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},"type":"article","indexed_in":["arxiv","crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://pure.tue.nl/ws/files/182742273/Identifying_Position_Dependent_Mechanical_Systems_A_Modal_Approach_Applied_to_a_Flexible_Wafer_Stage.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Robbert Voorhoeve","orcid":"https://orcid.org/0000-0002-2093-835X"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Robbert Voorhoeve","raw_affiliation_strings":["Control Systems Technology Group, Eindhoven University of Technology, Eindhoven, MB, The Netherlands"],"raw_orcid":"https://orcid.org/0000-0002-2093-835X","affiliations":[{"raw_affiliation_string":"Control Systems Technology Group, Eindhoven University of Technology, Eindhoven, MB, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Robin de Rozario","orcid":"https://orcid.org/0000-0002-3668-2168"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Robin de Rozario","raw_affiliation_strings":["Control Systems Technology Group, Eindhoven University of Technology, Eindhoven, MB, The Netherlands"],"raw_orcid":"https://orcid.org/0000-0002-3668-2168","affiliations":[{"raw_affiliation_string":"Control Systems Technology Group, Eindhoven University of Technology, Eindhoven, MB, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Wouter Aangenent","orcid":null},"institutions":[{"id":"https://openalex.org/I927257375","display_name":"ASML (Netherlands)","ror":"https://ror.org/01vxknj13","country_code":"NL","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I927257375"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Wouter Aangenent","raw_affiliation_strings":["ASML Research Mechatronics, Veldhoven, DR, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ASML Research Mechatronics, Veldhoven, DR, The Netherlands","institution_ids":["https://openalex.org/I927257375"]}]},{"author_position":"last","author":{"id":null,"display_name":"Tom Oomen","orcid":"https://orcid.org/0000-0001-7721-4566"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Tom Oomen","raw_affiliation_strings":["Control Systems Technology Group, Eindhoven University of Technology, Eindhoven, MB, The Netherlands"],"raw_orcid":"https://orcid.org/0000-0001-7721-4566","affiliations":[{"raw_affiliation_string":"Control Systems Technology Group, Eindhoven University of Technology, Eindhoven, MB, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.4772,"has_fulltext":true,"cited_by_count":37,"citation_normalized_percentile":{"value":0.88884178,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"29","issue":"1","first_page":"194","last_page":"206"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11236","display_name":"Control Systems and Identification","score":0.4593999981880188,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11236","display_name":"Control Systems and Identification","score":0.4593999981880188,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10534","display_name":"Structural Health Monitoring Techniques","score":0.20520000159740448,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11206","display_name":"Model Reduction and Neural Networks","score":0.026900000870227814,"subfield":{"id":"https://openalex.org/subfields/3109","display_name":"Statistical and Nonlinear Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/modal","display_name":"Modal","score":0.7069000005722046},{"id":"https://openalex.org/keywords/identification","display_name":"Identification (biology)","score":0.6629999876022339},{"id":"https://openalex.org/keywords/interpolation","display_name":"Interpolation (computer graphics)","score":0.54339998960495},{"id":"https://openalex.org/keywords/system-identification","display_name":"System identification","score":0.5145999789237976},{"id":"https://openalex.org/keywords/motion-control","display_name":"Motion control","score":0.5102999806404114},{"id":"https://openalex.org/keywords/exploit","display_name":"Exploit","score":0.49129998683929443},{"id":"https://openalex.org/keywords/motion-system","display_name":"Motion system","score":0.4311999976634979},{"id":"https://openalex.org/keywords/motion","display_name":"Motion (physics)","score":0.4115999937057495}],"concepts":[{"id":"https://openalex.org/C71139939","wikidata":"https://www.wikidata.org/wiki/Q910194","display_name":"Modal","level":2,"score":0.7069000005722046},{"id":"https://openalex.org/C116834253","wikidata":"https://www.wikidata.org/wiki/Q2039217","display_name":"Identification (biology)","level":2,"score":0.6629999876022339},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5687999725341797},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.5637000203132629},{"id":"https://openalex.org/C137800194","wikidata":"https://www.wikidata.org/wiki/Q11713455","display_name":"Interpolation (computer graphics)","level":3,"score":0.54339998960495},{"id":"https://openalex.org/C119247159","wikidata":"https://www.wikidata.org/wiki/Q1366192","display_name":"System identification","level":3,"score":0.5145999789237976},{"id":"https://openalex.org/C145565327","wikidata":"https://www.wikidata.org/wiki/Q852514","display_name":"Motion control","level":3,"score":0.5102999806404114},{"id":"https://openalex.org/C165696696","wikidata":"https://www.wikidata.org/wiki/Q11287","display_name":"Exploit","level":2,"score":0.49129998683929443},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4609000086784363},{"id":"https://openalex.org/C100673868","wikidata":"https://www.wikidata.org/wiki/Q6917799","display_name":"Motion system","level":3,"score":0.4311999976634979},{"id":"https://openalex.org/C104114177","wikidata":"https://www.wikidata.org/wiki/Q79782","display_name":"Motion (physics)","level":2,"score":0.4115999937057495},{"id":"https://openalex.org/C104286136","wikidata":"https://www.wikidata.org/wiki/Q1416137","display_name":"Modal analysis","level":3,"score":0.40610000491142273},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.38420000672340393},{"id":"https://openalex.org/C171912257","wikidata":"https://www.wikidata.org/wiki/Q11019","display_name":"Mechanical system","level":2,"score":0.3700000047683716},{"id":"https://openalex.org/C77405623","wikidata":"https://www.wikidata.org/wiki/Q598451","display_name":"System dynamics","level":2,"score":0.351500004529953},{"id":"https://openalex.org/C77618280","wikidata":"https://www.wikidata.org/wiki/Q1155772","display_name":"Scheme (mathematics)","level":2,"score":0.3138999938964844},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.31130000948905945},{"id":"https://openalex.org/C107645828","wikidata":"https://www.wikidata.org/wiki/Q12070446","display_name":"System model","level":2,"score":0.28760001063346863},{"id":"https://openalex.org/C200239387","wikidata":"https://www.wikidata.org/wiki/Q17143727","display_name":"Modal testing","level":4,"score":0.26750001311302185},{"id":"https://openalex.org/C67186912","wikidata":"https://www.wikidata.org/wiki/Q367664","display_name":"Data modeling","level":2,"score":0.2515999972820282}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1109/tcst.2020.2974140","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2020.2974140","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},{"id":"pmh:oai:pure.tue.nl:openaire/f23ab55e-6cd5-4e1d-9c08-0a4b4106d950","is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/f23ab55e-6cd5-4e1d-9c08-0a4b4106d950","pdf_url":"https://pure.tue.nl/ws/files/182742273/Identifying_Position_Dependent_Mechanical_Systems_A_Modal_Approach_Applied_to_a_Flexible_Wafer_Stage.pdf","source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Voorhoeve, R, de Rozario, R, Aangenent, W & Oomen, T 2021, 'Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage', IEEE Transactions on Control Systems Technology, vol. 29, no. 1, 9011610, pp. 194-206. https://doi.org/10.1109/TCST.2020.2974140","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:arXiv.org:1807.06942","is_oa":true,"landing_page_url":"https://arxiv.org/abs/1807.06942","pdf_url":"https://arxiv.org/pdf/1807.06942","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"pmh:tue:oai:pure.tue.nl:publications/f23ab55e-6cd5-4e1d-9c08-0a4b4106d950","is_oa":true,"landing_page_url":"https://research.tue.nl/nl/publications/f23ab55e-6cd5-4e1d-9c08-0a4b4106d950","pdf_url":null,"source":{"id":"https://openalex.org/S4306401843","display_name":"Data Archiving and Networked Services (DANS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1322597698","host_organization_name":"Royal Netherlands Academy of Arts and Sciences","host_organization_lineage":["https://openalex.org/I1322597698"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"IEEE Transactions on Control Systems Technology, 29(1):9011610, 194 - 206. Institute of Electrical and Electronics Engineers","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"pmh:oai:pure.tue.nl:openaire/f23ab55e-6cd5-4e1d-9c08-0a4b4106d950","is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/f23ab55e-6cd5-4e1d-9c08-0a4b4106d950","pdf_url":"https://pure.tue.nl/ws/files/182742273/Identifying_Position_Dependent_Mechanical_Systems_A_Modal_Approach_Applied_to_a_Flexible_Wafer_Stage.pdf","source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Voorhoeve, R, de Rozario, R, Aangenent, W & Oomen, T 2021, 'Identifying Position-Dependent Mechanical Systems: A Modal Approach Applied to a Flexible Wafer Stage', IEEE Transactions on Control Systems Technology, vol. 29, no. 1, 9011610, pp. 194-206. https://doi.org/10.1109/TCST.2020.2974140","raw_type":"info:eu-repo/semantics/article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G5966765034","display_name":null,"funder_award_id":"15698","funder_id":"https://openalex.org/F4320321800","funder_display_name":"Nederlandse Organisatie voor Wetenschappelijk Onderzoek"}],"funders":[{"id":"https://openalex.org/F4320321651","display_name":"Technische Universiteit Eindhoven","ror":"https://ror.org/02c2kyt77"},{"id":"https://openalex.org/F4320321800","display_name":"Nederlandse Organisatie voor Wetenschappelijk Onderzoek","ror":"https://ror.org/04jsz6e67"},{"id":"https://openalex.org/F4320323783","display_name":"ASML","ror":"https://ror.org/01vxknj13"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W3007261925.pdf","grobid_xml":"https://content.openalex.org/works/W3007261925.grobid-xml"},"referenced_works_count":49,"referenced_works":["https://openalex.org/W60608340","https://openalex.org/W608268716","https://openalex.org/W1541512967","https://openalex.org/W1596634559","https://openalex.org/W1934533555","https://openalex.org/W1964949272","https://openalex.org/W1982710570","https://openalex.org/W1982886044","https://openalex.org/W2001575886","https://openalex.org/W2006090386","https://openalex.org/W2019999777","https://openalex.org/W2027300760","https://openalex.org/W2028285690","https://openalex.org/W2035077256","https://openalex.org/W2038730444","https://openalex.org/W2044428131","https://openalex.org/W2048750073","https://openalex.org/W2058084172","https://openalex.org/W2059626897","https://openalex.org/W2078411489","https://openalex.org/W2082483338","https://openalex.org/W2083340965","https://openalex.org/W2096863392","https://openalex.org/W2110582616","https://openalex.org/W2111993375","https://openalex.org/W2116982747","https://openalex.org/W2132673028","https://openalex.org/W2133626294","https://openalex.org/W2139634936","https://openalex.org/W2145922707","https://openalex.org/W2146476157","https://openalex.org/W2158567645","https://openalex.org/W2170013174","https://openalex.org/W2171827148","https://openalex.org/W2172960773","https://openalex.org/W2180296759","https://openalex.org/W2410271073","https://openalex.org/W2485120914","https://openalex.org/W2554727369","https://openalex.org/W2735615945","https://openalex.org/W2736811255","https://openalex.org/W2743727611","https://openalex.org/W2791892332","https://openalex.org/W4213183490","https://openalex.org/W4237558136","https://openalex.org/W4252099851","https://openalex.org/W4293874909","https://openalex.org/W4298876635","https://openalex.org/W6750580522"],"related_works":[],"abstract_inverted_index":{"Increasingly":[0],"stringent":[1],"performance":[2,116],"requirements":[3],"for":[4,38,91,102,113],"motion":[5,114],"control":[6,115],"necessitate":[7],"the":[8,15,26,39,42,84,92,96,99,103],"use":[9],"of":[10,14,25,41,45,98,105],"increasingly":[11],"detailed":[12],"models":[13,24],"system":[16,86],"behavior.":[17,87],"Motion":[18],"systems":[19,47,109],"inherently":[20],"move,":[21],"therefore,":[22],"spatiotemporal":[23,43],"flexible":[27],"dynamics":[28],"that":[29],"are":[30],"essential.":[31],"In":[32],"this":[33],"article,":[34],"a":[35,53,63,77],"two-step":[36],"approach":[37,61,81,101],"identification":[40,74,104],"behavior":[44],"mechanical":[46,108],"is":[48],"developed":[49,70],"and":[50,67,110],"applied":[51],"to":[52,82],"lightweight":[54],"prototype":[55],"industrial":[56],"wafer":[57],"stage.":[58],"The":[59,88],"proposed":[60,100],"exploits":[62],"modal":[64],"modeling":[65],"framework":[66],"combines":[68],"recently":[69],"powerful":[71],"linear-time-invariant":[72],"(LTI)":[73],"tools":[75],"with":[76],"spline-based":[78],"mode-shape":[79],"interpolation":[80],"estimate":[83],"spatial":[85],"experimental":[89],"results":[90],"wafer-stage":[93],"application":[94],"confirm":[95],"suitability":[97],"complex":[106],"position-dependent":[107],"its":[111],"potential":[112],"improvements.":[117]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":10},{"year":2024,"cited_by_count":7},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":9},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":1}],"updated_date":"2026-07-03T08:13:44.112507","created_date":"2020-03-06T00:00:00"}