{"id":"https://openalex.org/W2883262640","doi":"https://doi.org/10.1109/tcst.2018.2850338","title":"$Q$ Control of an Active AFM Cantilever With Differential Sensing Configuration","display_name":"$Q$ Control of an Active AFM Cantilever With Differential Sensing Configuration","publication_year":2018,"publication_date":"2018-07-12","ids":{"openalex":"https://openalex.org/W2883262640","doi":"https://doi.org/10.1109/tcst.2018.2850338","mag":"2883262640"},"language":"en","primary_location":{"id":"doi:10.1109/tcst.2018.2850338","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2018.2850338","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://figshare.com/articles/journal_contribution/Q_Control_of_an_Active_AFM_Cantilever_With_Differential_Sensing_Configuration/27511134","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036528996","display_name":"M. Bulut Co\u015fkun","orcid":"https://orcid.org/0000-0001-5349-6319"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Bulut Coskun","raw_affiliation_strings":["Department of Mechanical Engineering, The University of Texas at Dallas, Richardson, TX, USA"],"raw_orcid":"https://orcid.org/0000-0001-5349-6319","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, The University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084758374","display_name":"Hamed Alemansour","orcid":"https://orcid.org/0000-0002-8884-9281"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hamed Alemansour","raw_affiliation_strings":["Department of Mechanical Engineering, The University of Texas at Dallas, Richardson, TX, USA"],"raw_orcid":"https://orcid.org/0000-0002-8884-9281","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, The University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102830676","display_name":"Anthony G. Fowler","orcid":"https://orcid.org/0000-0002-5219-5781"},"institutions":[{"id":"https://openalex.org/I82951845","display_name":"RMIT University","ror":"https://ror.org/04ttjf776","country_code":"AU","type":"education","lineage":["https://openalex.org/I82951845"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Anthony G. Fowler","raw_affiliation_strings":["Manufacturing, Materials and Mechatronics Engineering, RMIT University, Melbourne, VIC, Australia"],"raw_orcid":"https://orcid.org/0000-0002-5219-5781","affiliations":[{"raw_affiliation_string":"Manufacturing, Materials and Mechatronics Engineering, RMIT University, Melbourne, VIC, Australia","institution_ids":["https://openalex.org/I82951845"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041882764","display_name":"Mohammad Maroufi","orcid":"https://orcid.org/0000-0001-7127-5026"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mohammad Maroufi","raw_affiliation_strings":["Department of Mechanical Engineering, The University of Texas at Dallas, Richardson, TX, USA"],"raw_orcid":"https://orcid.org/0000-0001-7127-5026","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, The University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. O. Reza Moheimani","raw_affiliation_strings":["Department of Mechanical Engineering, The University of Texas at Dallas, Richardson, TX, USA"],"raw_orcid":"https://orcid.org/0000-0002-1225-4126","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, The University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2645,"currency":"USD","value_usd":2645},"apc_paid":null,"fwci":2.038,"has_fulltext":false,"cited_by_count":30,"citation_normalized_percentile":{"value":0.87434262,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"27","issue":"5","first_page":"2271","last_page":"2278"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9955999851226807,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.9188281893730164},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6270365715026855},{"id":"https://openalex.org/keywords/stiction","display_name":"Stiction","score":0.5248477458953857},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.5195060968399048},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.484089732170105},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4647618532180786},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.4408693313598633},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.430231511592865},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.4147893488407135},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3682006895542145},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.33392223715782166},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.32779648900032043},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.32012081146240234},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.21130093932151794},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.17388388514518738},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1587962806224823}],"concepts":[{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.9188281893730164},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6270365715026855},{"id":"https://openalex.org/C110339231","wikidata":"https://www.wikidata.org/wiki/Q2143425","display_name":"Stiction","level":3,"score":0.5248477458953857},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.5195060968399048},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.484089732170105},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4647618532180786},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.4408693313598633},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.430231511592865},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.4147893488407135},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3682006895542145},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.33392223715782166},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.32779648900032043},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.32012081146240234},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.21130093932151794},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.17388388514518738},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1587962806224823},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1109/tcst.2018.2850338","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2018.2850338","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},{"id":"pmh:oai:alma61RMIT.INST:11247361510001341","is_oa":false,"landing_page_url":"https://doi.org/10.1109/TCST.2018.2850338","pdf_url":null,"source":{"id":"https://openalex.org/S4306402074","display_name":"RMIT Research Repository (RMIT University Library)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I82951845","host_organization_name":"RMIT University","host_organization_lineage":["https://openalex.org/I82951845"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"text"},{"id":"pmh:oai:figshare.com:article/27511134","is_oa":true,"landing_page_url":"https://figshare.com/articles/journal_contribution/Q_Control_of_an_Active_AFM_Cantilever_With_Differential_Sensing_Configuration/27511134","pdf_url":null,"source":{"id":"https://openalex.org/S4377196282","display_name":"Figshare","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210132348","host_organization_name":"Figshare (United Kingdom)","host_organization_lineage":["https://openalex.org/I4210132348"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"}],"best_oa_location":{"id":"pmh:oai:figshare.com:article/27511134","is_oa":true,"landing_page_url":"https://figshare.com/articles/journal_contribution/Q_Control_of_an_Active_AFM_Cantilever_With_Differential_Sensing_Configuration/27511134","pdf_url":null,"source":{"id":"https://openalex.org/S4377196282","display_name":"Figshare","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210132348","host_organization_name":"Figshare (United Kingdom)","host_organization_lineage":["https://openalex.org/I4210132348"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6600000262260437}],"awards":[],"funders":[{"id":"https://openalex.org/F4320327708","display_name":"University of Texas at Dallas","ror":"https://ror.org/049emcs32"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":34,"referenced_works":["https://openalex.org/W611561342","https://openalex.org/W1964703652","https://openalex.org/W1969488369","https://openalex.org/W1973407535","https://openalex.org/W1975042622","https://openalex.org/W1981135292","https://openalex.org/W1983611036","https://openalex.org/W1993240079","https://openalex.org/W1995571561","https://openalex.org/W1997640761","https://openalex.org/W1999430248","https://openalex.org/W2002268968","https://openalex.org/W2004057688","https://openalex.org/W2006515893","https://openalex.org/W2009514225","https://openalex.org/W2024060504","https://openalex.org/W2047828308","https://openalex.org/W2048122249","https://openalex.org/W2051001465","https://openalex.org/W2075356231","https://openalex.org/W2093603011","https://openalex.org/W2128632045","https://openalex.org/W2131563912","https://openalex.org/W2139246110","https://openalex.org/W2163005618","https://openalex.org/W2164209958","https://openalex.org/W2179439934","https://openalex.org/W2298883424","https://openalex.org/W2340442732","https://openalex.org/W2372745612","https://openalex.org/W2399600445","https://openalex.org/W2411118730","https://openalex.org/W2560041605","https://openalex.org/W2745010214"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2148850047","https://openalex.org/W2039315243","https://openalex.org/W2156664040","https://openalex.org/W1962407214","https://openalex.org/W2381781311","https://openalex.org/W2392226013","https://openalex.org/W158486539","https://openalex.org/W2051566239","https://openalex.org/W4311413628"],"abstract_inverted_index":{"Microcantilevers":[0],"featuring":[1],"separate":[2],"built-in":[3,79],"actuation":[4],"and":[5,11,52,77,106,139],"displacement":[6,80],"sensing":[7,104],"capabilities":[8],"allow":[9],"effective":[10],"simple":[12],"implementation":[13],"of":[14,55,97,129,135],"control":[15,142],"methods,":[16],"opening":[17],"a":[18,34,60,102],"pathway":[19],"to":[20,37,83,123,153],"achieving":[21],"higher":[22,171],"scan":[23],"speeds":[24,173],"in":[25,94,162],"tapping-mode":[26],"atomic":[27,42],"force":[28,43],"microscopy.":[29],"Such":[30],"active":[31,70],"cantilevers":[32],"are":[33,110],"significant":[35],"milestone":[36],"eventually":[38],"obtain":[39],"video-rate":[40],"on-chip":[41,75,87],"microscopes":[44],"(AFMs)":[45],"that":[46],"can":[47],"even":[48],"surpass":[49],"the":[50,107,113,126,130,136,147,156,165],"functionality":[51],"imaging":[53,133,172],"speed":[54],"their":[56],"macroscale":[57],"counterparts":[58],"at":[59],"significantly":[61],"lower":[62],"cost.":[63],"In":[64],"this":[65,95],"brief,":[66],"we":[67],"present":[68,93],"an":[69,74],"AFM":[71],"cantilever":[72],"with":[73,138],"actuator":[76],"two":[78],"sensors,":[81],"designed":[82,122],"be":[84],"integrated":[85],"into":[86],"AFMs.":[88],"The":[89,132],"common":[90,160],"feedthrough":[91],"problem":[92],"type":[96],"architecture":[98],"is":[99,121,143,168],"addressed":[100],"by":[101,145],"differential":[103],"configuration,":[105],"revealed":[108],"dynamics":[109],"used":[111],"for":[112],"system":[114],"identification.":[115],"A":[116,159],"positive":[117],"position":[118],"feedback":[119,157],"controller":[120],"actively":[124],"tailor":[125],"Q":[127,141,149],"factor":[128,150],"cantilever.":[131],"performance":[134],"microcantilever":[137],"without":[140],"compared":[144],"attenuating":[146],"cantilever's":[148],"from":[151],"177":[152],"15":[154],"using":[155],"loop.":[158],"artifact":[161],"high-speed":[163],"scans,":[164],"parachuting":[166],"effect,":[167],"mitigated,":[169],"rendering":[170],"achievable.":[174]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":1}],"updated_date":"2026-09-02T18:50:13.731487","created_date":"2025-10-10T00:00:00"}