{"id":"https://openalex.org/W2052301936","doi":"https://doi.org/10.1109/tcst.2015.2404898","title":"Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor","display_name":"Generalized Predictive Control of Temperature on an Atomic Layer Deposition Reactor","publication_year":2015,"publication_date":"2015-03-25","ids":{"openalex":"https://openalex.org/W2052301936","doi":"https://doi.org/10.1109/tcst.2015.2404898","mag":"2052301936"},"language":"en","primary_location":{"id":"doi:10.1109/tcst.2015.2404898","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2015.2404898","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101796702","display_name":"Wenjie He","orcid":"https://orcid.org/0000-0001-7280-1681"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wen-Jie He","raw_affiliation_strings":["State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","State Key Laboratory of Digital Manufacturing Equipment and Technology School of Mechanical Science and Engineering Huazhong University of Science and Technology Wuhan China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"State Key Laboratory of Digital Manufacturing Equipment and Technology School of Mechanical Science and Engineering Huazhong University of Science and Technology Wuhan China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100454582","display_name":"Haitao Zhang","orcid":"https://orcid.org/0000-0002-1609-0501"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hai-Tao Zhang","raw_affiliation_strings":["Key Laboratory of Image Processing and Intelligent Control, School of Automation, and the State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Image Processing and Intelligent Control, School of Automation, and the State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100370053","display_name":"Zhiyong Chen","orcid":"https://orcid.org/0000-0002-2033-4249"},"institutions":[{"id":"https://openalex.org/I78757542","display_name":"University of Newcastle Australia","ror":"https://ror.org/00eae9z71","country_code":"AU","type":"education","lineage":["https://openalex.org/I78757542"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Zhiyong Chen","raw_affiliation_strings":["School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia","School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia#N#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia","institution_ids":["https://openalex.org/I78757542"]},{"raw_affiliation_string":"School of Electrical Engineering and Computer Science, University of Newcastle, Callaghan, NSW, Australia#N#","institution_ids":["https://openalex.org/I78757542"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109164649","display_name":"Bo Chu","orcid":null},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bo Chu","raw_affiliation_strings":["State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","State Key Laboratory of Digital Manufacturing Equipment and Technology School of Mechanical Science and Engineering Huazhong University of Science and Technology Wuhan China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"State Key Laboratory of Digital Manufacturing Equipment and Technology School of Mechanical Science and Engineering Huazhong University of Science and Technology Wuhan China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071886590","display_name":"Kun Cao","orcid":"https://orcid.org/0000-0001-5959-4577"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kun Cao","raw_affiliation_strings":["State Key Laboratory of Material Processing and Die and Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Material Processing and Die and Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084795179","display_name":"Bin Shan","orcid":"https://orcid.org/0000-0001-7800-0762"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bin Shan","raw_affiliation_strings":["State Key Laboratory of Material Processing and Die and Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Material Processing and Die and Mould Technology, School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100418999","display_name":"Rong Chen","orcid":"https://orcid.org/0000-0001-7371-1338"},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Rong Chen","raw_affiliation_strings":["State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","State Key Laboratory of Digital Manufacturing Equipment and Technology School of Mechanical Science and Engineering Huazhong University of Science and Technology Wuhan China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China","institution_ids":["https://openalex.org/I47720641"]},{"raw_affiliation_string":"State Key Laboratory of Digital Manufacturing Equipment and Technology School of Mechanical Science and Engineering Huazhong University of Science and Technology Wuhan China","institution_ids":["https://openalex.org/I47720641"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.5448,"has_fulltext":false,"cited_by_count":25,"citation_normalized_percentile":{"value":0.81695077,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"23","issue":"6","first_page":"2408","last_page":"2415"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10192","display_name":"Catalytic Processes in Materials Science","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10192","display_name":"Catalytic Processes in Materials Science","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10791","display_name":"Advanced Control Systems Optimization","score":0.9944999814033508,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/model-predictive-control","display_name":"Model predictive control","score":0.8159415125846863},{"id":"https://openalex.org/keywords/atomic-layer-deposition","display_name":"Atomic layer deposition","score":0.8090574741363525},{"id":"https://openalex.org/keywords/temperature-control","display_name":"Temperature control","score":0.693630039691925},{"id":"https://openalex.org/keywords/settling-time","display_name":"Settling time","score":0.6928473711013794},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6764479279518127},{"id":"https://openalex.org/keywords/settling","display_name":"Settling","score":0.6298746466636658},{"id":"https://openalex.org/keywords/deposition","display_name":"Deposition (geology)","score":0.5774136781692505},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.480996698141098},{"id":"https://openalex.org/keywords/closed-loop","display_name":"Closed loop","score":0.45985159277915955},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.4490342140197754},{"id":"https://openalex.org/keywords/control-system","display_name":"Control system","score":0.44543012976646423},{"id":"https://openalex.org/keywords/process-control","display_name":"Process control","score":0.41702499985694885},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.2457798421382904},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.23592880368232727},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.2231038510799408},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.22237098217010498},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1927100419998169},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.17281070351600647},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.158121258020401},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.10496136546134949},{"id":"https://openalex.org/keywords/step-response","display_name":"Step response","score":0.09587639570236206},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.09127700328826904}],"concepts":[{"id":"https://openalex.org/C172205157","wikidata":"https://www.wikidata.org/wiki/Q1782962","display_name":"Model predictive control","level":3,"score":0.8159415125846863},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.8090574741363525},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.693630039691925},{"id":"https://openalex.org/C14781684","wikidata":"https://www.wikidata.org/wiki/Q3983320","display_name":"Settling time","level":3,"score":0.6928473711013794},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6764479279518127},{"id":"https://openalex.org/C173209714","wikidata":"https://www.wikidata.org/wiki/Q923906","display_name":"Settling","level":2,"score":0.6298746466636658},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.5774136781692505},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.480996698141098},{"id":"https://openalex.org/C3019251811","wikidata":"https://www.wikidata.org/wiki/Q5135346","display_name":"Closed loop","level":2,"score":0.45985159277915955},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4490342140197754},{"id":"https://openalex.org/C17500928","wikidata":"https://www.wikidata.org/wiki/Q959968","display_name":"Control system","level":2,"score":0.44543012976646423},{"id":"https://openalex.org/C155386361","wikidata":"https://www.wikidata.org/wiki/Q1649571","display_name":"Process control","level":3,"score":0.41702499985694885},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.2457798421382904},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.23592880368232727},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.2231038510799408},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22237098217010498},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1927100419998169},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.17281070351600647},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.158121258020401},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.10496136546134949},{"id":"https://openalex.org/C160030872","wikidata":"https://www.wikidata.org/wiki/Q2142864","display_name":"Step response","level":2,"score":0.09587639570236206},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.09127700328826904},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tcst.2015.2404898","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2015.2404898","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},{"id":"pmh:uon:26197","is_oa":false,"landing_page_url":"http://hdl.handle.net/1959.13/1329593","pdf_url":null,"source":{"id":"https://openalex.org/S4377196471","display_name":"NOVA (University of Newcastle Australia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I78757542","host_organization_name":"University of Newcastle Australia","host_organization_lineage":["https://openalex.org/I78757542"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"journal article"}],"best_oa_location":null,"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.6600000262260437}],"awards":[{"id":"https://openalex.org/G1202983110","display_name":null,"funder_award_id":"51328501","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2673076277","display_name":null,"funder_award_id":"61322304","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5258276622","display_name":null,"funder_award_id":"2013CB934800","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G5258526987","display_name":null,"funder_award_id":"51101064","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G660935578","display_name":null,"funder_award_id":"51120155001","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7791675892","display_name":null,"funder_award_id":"20130142110050","funder_id":"https://openalex.org/F4320336024","funder_display_name":"Specialized Research Fund for the Doctoral Program of Higher Education of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320326701","display_name":"Recruitment Program of Global Experts","ror":null},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null},{"id":"https://openalex.org/F4320336024","display_name":"Specialized Research Fund for the Doctoral Program of Higher Education of China","ror":null}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":34,"referenced_works":["https://openalex.org/W1516460738","https://openalex.org/W1563938275","https://openalex.org/W1581951628","https://openalex.org/W1588241099","https://openalex.org/W1972098043","https://openalex.org/W1978956894","https://openalex.org/W1981407883","https://openalex.org/W1986922155","https://openalex.org/W1989757707","https://openalex.org/W1993243846","https://openalex.org/W1995836054","https://openalex.org/W2004138627","https://openalex.org/W2005059982","https://openalex.org/W2012895228","https://openalex.org/W2029019332","https://openalex.org/W2033864474","https://openalex.org/W2034324012","https://openalex.org/W2038497856","https://openalex.org/W2047602796","https://openalex.org/W2057944509","https://openalex.org/W2063736406","https://openalex.org/W2076306638","https://openalex.org/W2107155503","https://openalex.org/W2108642606","https://openalex.org/W2115690687","https://openalex.org/W2117562986","https://openalex.org/W2130028915","https://openalex.org/W2134673975","https://openalex.org/W2158932701","https://openalex.org/W2161789912","https://openalex.org/W2213594914","https://openalex.org/W2532800951","https://openalex.org/W2631667371","https://openalex.org/W6662553217"],"related_works":["https://openalex.org/W1998994326","https://openalex.org/W3010468778","https://openalex.org/W4205716096","https://openalex.org/W2367332455","https://openalex.org/W2206544794","https://openalex.org/W3119874643","https://openalex.org/W3117416324","https://openalex.org/W4287417083","https://openalex.org/W2052301936","https://openalex.org/W2620972888"],"abstract_inverted_index":{"This":[0],"brief":[1],"establishes":[2],"a":[3,8],"closed-loop":[4,23,50],"control":[5,19,24,44],"system":[6,25,52],"for":[7],"radiant":[9],"heating":[10],"atomic":[11],"layer":[12],"deposition":[13],"(ALD)":[14],"reactor":[15],"using":[16],"generalized":[17],"predictive":[18],"(GPC).":[20],"The":[21,71],"GPC-based":[22],"can":[26],"rapidly":[27],"and":[28,45],"precisely":[29],"stabilize":[30],"the":[31,34,41,46,49,54,83],"temperature":[32,73],"in":[33],"presence":[35],"of":[36,86],"external":[37,69],"disturbances.":[38,70],"Compared":[39],"with":[40,66],"conventional":[42],"open-loop":[43],"proportional-integral-differential":[47],"control,":[48],"GPC":[51],"enhances":[53],"processing":[55],"efficiency":[56],"between":[57],"every":[58],"ALD":[59,87],"run":[60],"by":[61,68],"substantially":[62],"reducing":[63],"settling":[64],"time":[65],"impact":[67],"attenuated":[72],"fluctuation":[74],"leads":[75],"to":[76],"more":[77],"uniform":[78],"thin-film":[79],"morphologies":[80],"that":[81],"fulfill":[82],"technical":[84],"requirements":[85],"processes.":[88]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":3},{"year":2015,"cited_by_count":1}],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}